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3533857
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Information
Patent Grant
3533857
References
Source
Patent Number
3,533,857
Date Filed
Not available
Date Issued
Tuesday, October 13, 1970
54 years ago
CPC
H01L21/26506 - in group IV semiconductors
H01L21/26513 - of electrically active species
Y10S148/093 - Laser beam treatment in general
Y10S148/165 - Transmutation doping
US Classifications
438 - Semiconductor device manufacturing: process
117 - Single-crystal, oriented-crystal, and epitaxy growth processes
148 - Metal treatment
257 - Active solid-state devices
376 - Induced nuclear reactions: processes, systems, and elements
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