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3631292
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Patent Grant
3631292
References
Source
Patent Number
3,631,292
Date Filed
Not available
Date Issued
Tuesday, December 28, 1971
53 years ago
CPC
H01J31/283 - with a target comprising semiconductor junctions
H01J29/453 - provided with diode arrays
US Classifications
315 - Electric lamp and discharge devices: systems
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