3667989

Information

• Patent Grant
• 3667989

• References
• Source

• Patent Number

  3,667,989

• Date Filed

  Not available

• Date Issued

  Tuesday, June 6, 1972
  52 years ago

• CPC

  • C23C14/042 - using masks
  • B05D1/32 - using means for protecting parts of a surface not to be coated
  • Y10S438/943 - Movable

• US Classifications

  • 427 - Coating processes
  • 438 - Semiconductor device manufacturing: process