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3729406
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Information
Patent Grant
3729406
References
Source
Patent Number
3,729,406
Date Filed
Not available
Date Issued
Tuesday, April 24, 1973
51 years ago
CPC
C03C17/09 - by deposition from the vapour phase
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
C03C2217/263 - Metals other than noble metals, Cu or Hg
C03C2218/15 - from the vapour phase
Y10T428/12528 - Semiconductor component
US Classifications
204 - Chemistry: electrical and wave energy
257 - Active solid-state devices
428 - Stock material or miscellaneous articles
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