3748169

Information

• Patent Grant
• 3748169

• References
• Source

• Patent Number

  3,748,169

• Date Filed

  Not available

• Date Issued

  Tuesday, July 24, 1973
  51 years ago

• CPC

  • C23C16/22 - characterised by the deposition of inorganic material, other than metallic material
  • Y10S148/073 - Hollow body
  • Y10S148/122 - Polycrystalline
  • Y10S148/135 - Removal of substrate

• US Classifications

  • 427 - Coating processes
  • 118 - Coating apparatus
  • 148 - Metal treatment
  • 264 - Plastic and nonmetallic article shaping or treating: processes
  • 423 - Chemistry of inorganic compounds
  • 438 - Semiconductor device manufacturing: process