3755011

Information

• Patent Grant
• 3755011

• References
• Source

• Patent Number

  3,755,011

• Date Filed

  Not available

• Date Issued

  Tuesday, August 28, 1973
  51 years ago

• CPC

  • C30B19/066 - Injection or centrifugal force system
  • H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

• US Classifications

  • 117 - Single-crystal, oriented-crystal, and epitaxy growth processes
  • 023 - Chemistry: physical processes
  • 118 - Coating apparatus