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3756194
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Information
Patent Grant
3756194
References
Source
Patent Number
3,756,194
Date Filed
Not available
Date Issued
Tuesday, September 4, 1973
51 years ago
CPC
C30B19/066 - Injection or centrifugal force system
H01L21/00 - Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Y10S148/107 - Melt
US Classifications
118 - Coating apparatus
117 - Single-crystal, oriented-crystal, and epitaxy growth processes
148 - Metal treatment
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