A Collimated X-Ray Lithography Source Using a Kumakhov Lens

Information

• NSF Award
• 9303184

Owner

• Adelphi Technology Inc.

• Award Id

  9303184

• Award Effective Date

  2/15/1995 - 29 years ago

• Award Expiration Date

  9/30/1997 - 27 years ago

• Award Amount

  $ 299,983.00

• Award Instrument

  Standard Grant

9303184 Piestrup The primary objective of the proposed work is the construction of a prototype x-ray-lithography source for the production of microintegrated circuits. Using an available 10-kW electron beam the source will deliver a uniform x-ray distribution of 3-5 mW/cm2 over an area of 6 cm2 at a distance of 2 m from the radiator. The transition-radiation source without optics will deliver 48 mW of x-ray power in the 1-4 keV photon energy range. Previously, we have obtained 15.2 mW of total power with a nonuniform power density of 1 mW/Cm2 at a distance of 3m. Uniformity and collection of the x-rays will be accomplished by a novel x-ray capillary (Kumakhov) optic. Phase I measurements and computer simulations show that good x-ray transmission through the lens can be obtained for the 1 to 3 key photon-energy range. An existing high-current accelerator, x-ray beamline and optic aligner are available for this work. A transition-x-ray lithography system promises performance that is superior to laser-plasma sources and is considerably less expensive than synchrotron sources. ***

• Program Officer

  Michael F. Crowley

• Min Amd Letter Date

  2/6/1995 - 29 years ago

• Max Amd Letter Date

  3/13/1997 - 27 years ago

• ARRA Amount

• Name

  Adelphi Technology, Inc

• City

  Redwood City

• State

  CA

• Country

  United States

• Address

  2003 East Bayshore Rd

• Postal Code

  940634121

• Phone Number

  6504742750

• First Name

  Melvin

• Last Name

  Piestrup

• Start Date

  2/6/1995 12:00:00 AM

• Name

  Telecommunications

• Code

  206000

• Name

  Engineering-Electrical

• Code

  55