Claims
- 1. A process for forming an array of electroluminescent cells comprising,
- depositing on a transparent support member a conductive patterned layer of indium-tin oxide suitable for providing a first set of electrodes for the array,
- depositing over the support member and the patterned layer a layer of silicon dioxide sufficiently thin to permit electron tunneling therethrough at operating voltages and sufficiently thin to permit electron tunneling therethrough at operating voltages and sufficiently thick to provide a chemically stable interface between the indium-tin oxide layer and the zinc sulfide layer to be deposited thereover,
- preparing and heating a source of zinc sulfide and a source of an activator material taken from the group consisting of lithium europium tetrafluoride, sodium europium tetrafluoride, beryllium europium tetrafluoride, and magnesium europium tetrafluoride,
- codepositing on the support member by evaporation material from two sources to form a layer of zinc sulfide including a concentration of the activator material sufficient for electroluminescence, the heating and deposition conditions being such that the activator material sublimes and condenses primarily in molecular form in the layer of zinc sulfide,
- forming over the zinc sulfide layer a dielectric layer sufficiently thick for serving as a charge storage medium, and
- forming over said dielectric layer a conductive pattern suitable to provide the second set of electrodes of the array.
- 2. The process of claim 1 in which the activator material is lithium europium tetrafluoride and the silicon dioxide layer is about 50 angstroms thick.
- 3. The process of claim 2 in which the zinc sulfide layer includes a concentration of about 0.5 per cent of lithium europium tetrafluoride molecules.
- 4. The process of claim 1 in which the activator material is lithium europium tetrafluoride.
- 5. The process of claim 1 in which the activator material is sodium europium tetrafluoride.
- 6. The process of claim 1 in which the activator material is beryllium europium tetrafluoride.
- 7. The process of claim 1 in which the activator material is magnesium europium tetrafluoride.
Parent Case Info
This application is a division of application Ser. No. 07/690,587 filed Apr. 24, 1991, now U.S. Pat. No. 5,198,721.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
3113040 |
Winston |
Dec 1963 |
|
Foreign Referenced Citations (2)
Number |
Date |
Country |
53-76186 |
Jul 1978 |
JPX |
59-146191 |
Aug 1984 |
JPX |
Non-Patent Literature Citations (1)
Entry |
Miura et al. "Proceeding at 1988 Fall Meeting of Japan Applied Physical Society", Paper No. 6 p-D-6. |
Divisions (1)
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Number |
Date |
Country |
Parent |
690587 |
Apr 1991 |
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