The following is directed to an abrasive article for use with grinding wheels, and particularly abrasive segments for use with segmented grinding wheels.
A variety of abrasive tools have been developed over the past century for various industries for the general function of removing material from a workpiece, including for example, sawing, drilling, polishing, cleaning, carving, and grinding. In the production of electronic devices, the surface of a wafer may be ground to prepare for the deposition of electronic devices thereon. Additionally, the back surface of the wafer may be ground after the formation of electronic devices and prior to dicing. Generally, the article utilized to conduct certain grinding processes are grindstones, which typically include abrasive segments.
The industry continues to demand improved grindstone materials, capable of achieving improved grinding performance.
According to one aspect, an abrasive article comprises a body including abrasive particles contained in a bond material, wherein the body comprises a first portion having a first plane solidity [S1], a second portion having a second plane solidity [S2], and wherein S1 is different than S2.
The present disclosure may be better understood, and its numerous features and advantages made apparent to those skilled in the art by referencing the accompanying drawings.
The use of the same reference symbols in different drawings indicates similar or identical items.
The following description in combination with the figures is provided to assist in understanding the teachings provided herein. The following disclosure will focus on specific implementations and embodiments of the teachings. This focus is provided to assist in describing the teachings and should not be interpreted as a limitation on the scope or applicability of the teachings. However, other teachings can certainly be used in this application.
As used herein, the terms “comprises,” “comprising,” “includes,” “including,” “has,” “having” or any other variation thereof, are intended to cover a non-exclusive inclusion. For example, a method, article, or apparatus that comprises a list of features is not necessarily limited only to those features but may include other features not expressly listed or inherent to such method, article, or apparatus. Further, unless expressly stated to the contrary, “or” refers to an inclusive-or and not to an exclusive-or. For example, a condition A or B is satisfied by any one of the following: A is true (or present) and B is false (or not present), A is false (or not present) and B is true (or present), and both A and B are true (or present).
Also, the use of “a” or “an” is employed to describe elements and components described herein. This is done merely for convenience and to give a general sense of the scope of the invention. This description should be read to include one or at least one and the singular also includes the plural, or vice versa, unless it is clear that it is meant otherwise. For example, when a single item is described herein, more than one item may be used in place of a single item. Similarly, where more than one item is described herein, a single item may be substituted for that more than one item.
Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The materials, methods, and examples are illustrative only and not intended to be limiting. To the extent that certain details regarding specific materials and processing acts are not described, such details may include conventional approaches, which may be found in reference books and other sources within the manufacturing arts.
The following relates to bonded abrasive articles or tools, such as grinding wheels, grinding segments, grinding discs and hones, having certain compositional structures, methods of manufacturing such tools so as to create particular tool structures, and to methods of grinding, polishing or surface finishing using such tools. In particular, the description is directed to abrasive articles, particularly abrasive segments, for use with grinding wheels for finishing of surfaces. The abrasive articles herein incorporate abrasive segments having particular designs, which may facilitate improved grinding performance of the abrasive article and improved post-finishing properties of the workpiece. Notably, the abrasive articles described herein may be particularly suited in finishing of sensitive materials such as wafers used in the electronics industry, which can be made of materials such as silicon carbide, silicon, and sapphire. In certain instances, the process of moving the abrasive article relative to the one or more wafers can include rotating the abrasive article relative to the one or more wafers, which may be held in a stationary position. In other instances, the process of moving the abrasive article relative to the one or more wafers can include rotating the plurality of wafers relative to the abrasive article, which may be held in a stationary position. It will be appreciated that in such processes the relative movement between the abrasive article can include movement of the abrasive article and/or one or more wafers relative to each other.
In still another embodiment, the body may include a particular content of abrasive particles that may facilitate improved manufacturing and/or performance of the abrasive article. For example, the body may include a content of abrasive particles of at least 10 wt % based on the total weight of the body, such as at least 15 wt % or at least 20 wt % or at least 25 wt % or at least 30 wt % or at least 35 wt % or at least 40 wt % or at least 45 wt % or at least 50 wt % or at least 55 wt % or at least 60 wt % or at least 65 wt % or at least 70 wt % or at least 75 wt % or at least 80 wt % or at least 85 wt % or at least 90 wt %. In a particular embodiment, the body may include a content of abrasive particles of not greater than 95 wt % based on the total weight of the body or not greater than 93 wt %, or not greater than 90 wt % or not greater than 85 wt % or not greater than 80 wt % or not greater than 75 wt % or not greater than 70 wt % or not greater than 65 wt % or not greater than 60 wt % or not greater than 55 wt % or not greater than 50 wt %. The content of abrasive particles in the body may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 10 wt % to not greater than 95 wt % such as within a range from at least 30 wt % to not greater than 90 wt %.
In still another embodiment, the abrasive particles can have an average particle size (D50) that may facilitate improved manufacturing and/or performance of the abrasive article. For example, the abrasive particles can have an average particle size (D50) of at least 0.01 microns, such as at least 0.05 microns or at least 0.1 microns or at least 0.2 microns or at least 0.3 microns or at least 0.4 microns. In a particular embodiment, the abrasive can have an average particle size (D50) of not greater than 500 microns such as not greater than 400 microns or not greater than 300 microns or not greater than 200 microns or not greater than 100 microns or not greater than 75 microns or not greater than 50 microns or not greater than 25 microns or not greater than 15 microns or not greater than 10 microns or not greater than 5 microns or not greater than 3 microns or not greater than 1 micron. The average particle size (D50) of the abrasive particles may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.01 microns to not greater than 500 microns such as within a range from at least 1 micron to not greater than 100 microns.
It will be appreciated that the D10, D50, and D90 values of the abrasive particles can be measured using the Malvern Zetasizer “Nano series” running the Zetasizer Software ver. 6.2. To run a sample of abrasive particles for particle size distribution, 40 mL of DI water can be poured into a beaker and 50 ul of the abrasive particle sample (solids loading of 25 wt % in water) can also transferred into the beaker. The beaker can then be placed on a jack stand in a soundproof box used for sonicating. Using the Mxsonix Touch-Screen S-4000 sonicator, the ultrasonic horn can then be placed through a hole at the top of the soundproof box and centered so that the bottom of the horn is approximately 0.25 inches from the bottom of the beaker. The sonicator can then be started for 30 seconds at amplitude 40. The sample can then be removed from the soundproof box and enough sample can be extracted into the sample cuvette until the cuvette is about ¼ full. The cuvette can then be placed into the sample holder of the Zetasizer and the Malvern software for Diamond material with a refractive index of 41-1.80i can be run on the sample. Intensity based D Values for D10, D50, and D90 are then generated by the Zetasizer software.
In a particular embodiment, the bond material used in forming the mixture can include an inorganic material. In a particular embodiment, the inorganic material can include at least one of a polycrystalline material or an amorphous material. In still other embodiments, the bond material can include an amorphous phase. In still another embodiment, the bond material can consist essentially of an amorphous phase. In still another embodiment, the bond material can include at least one of a metal oxide or a non-metal oxide. In a particular embodiment, the bond material may include a metal or metal alloy. In still another embodiment, the bond material can include at least one transition metal element. In still another embodiment, the bond material can include at least one metal selected from the group consisting of copper, tin, silver, tungsten, iron, titanium, nickel, chrome, or any combination thereof.
In still another embodiment, the bond material can include a crystalline material including crystallites having an average crystallite size that may facilitate improved manufacturing and/or performance of the abrasive article. For example, the bond material can include a crystalline material including crystallites having an average crystallite size of not greater than 1 mm or not greater than 500 microns or not greater than 300 microns or not greater than 100 microns or not greater than 10 microns or not greater than 1 micron or not greater than 800 nanometers or not greater than 500 nanometers or not greater than 100 nanometers.
In still another embodiment, the bond material can include a crystalline content that may facilitate improved manufacturing and/or performance of the abrasive article. For example, the bond material can include a crystalline content of at least 0.5 vol % of the total volume of the bond material, such as at least 1 vol %, or at least 2 vol %, or at least 3 vol %, or at least 4 vol %, or at least 5 vol %, or at least 6 vol %, of a total volume of the bond material. In a particular embodiment, the bond material can include a crystalline content of not greater than 99 vol % of the total volume of the bond material, or not greater than 97 vol % or not greater than 90 vol % or not greater than 80 vol % or not greater than 70 vol % or not greater than 60 vol % or not greater than 50 vol % or not greater than 40 vol % or not greater than 30 vol % or not greater 20 vol % or not greater than 10 vol % or not greater than 8 vol % or not greater than 5 vol % or not greater than 3 vol % or not greater than 2 vol % or not greater than 1 vol % of the total volume of the bond material. The crystalline content of the bond material may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.5 vol % to not greater than 99 vol % such as within a range from at least 1 vol % to not greater than 70 vol %.
In still another embodiment, the bond material can include a one or more crystalline materials that may facilitate improved manufacturing and/or performance of the abrasive article. For example, the bond material can include one or more crystalline materials selected from the group of quartz, alpha-quartz, beta-quartz, alpha-tridymite, beta-tridymite, cristobalite, alpha-cristobalite, beta-cristobalite, moganite, coesite, keatite, or a combination thereof.
In still another embodiment, the body may include a particular content of bond material that may facilitate improved manufacturing and/or performance of the abrasive article. For example, the body may include a content of bond material of at least 5 wt % bond material based on the total weight of the body or at least 7 wt %, or at least 10 wt %, or at least 15 wt %, or at least 20 wt %, or at least 25 wt %, or at least 30 wt % bond material based on a total weight of the body. In a particular embodiment, the body may include a content of bond material of not greater than 90 wt % bond material based on the total weight of the body, or not greater than 80 wt %, or not greater than 70 wt %, or not greater than 60 wt %, or not greater than 50 wt %, or not greater than 40 wt %, or not greater than 30 wt %, or not greater than 20 wt %, or not greater than 15 wt %, or not greater than 10 wt %, or not greater than 8 wt % bond material based on a total weight of the body. The content of bond material in the body may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 5 wt % to not greater than 90 wt % such as within a range from at least 20 wt % to not greater than 60 wt %.
In still another embodiment, the body may include a particular content of filler that may facilitate improved manufacturing and/or performance of the abrasive article. For example, the body may include a content of filler of at least 5 wt % filler based on the total weight of the body or at least 7 wt %, or at least 10 wt %, or at least 15 wt %, or at least 20 wt %, or at least 25 wt %, or at least 30 wt %, or at least 35 wt %, or at least 40 wt %, or at least 45 wt %, or at least 50 wt %, or at least 55 wt % filler based on a total weight of the body. In a particular embodiment, the body may include a content of filler of not greater than 90 wt % filler based on the total weight of the body, or not greater than 80 wt %, or not greater than 70 wt %, or not greater than 60 wt %, or not greater than 50 wt %, or not greater than 40 wt %, or not greater than 30 wt %, or not greater than 20 wt %, or not greater than 15 wt %, or not greater than 10 wt %, or not greater than 8 wt % filler based on a total weight of the body. The content of filler in the body may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 5 wt % to not greater than 90 wt % such as within a range from at least 20 wt % to not greater than 60 wt %.
In still another embodiment, the body may include a weight percent ratio [Cb:Ca] of the weight percent of the bond material [Cb] to the weight percent of the abrasive particles [Ca] that may facilitate improved manufacturing and/or performance of the abrasive article. For example, the body may include a weight percent ratio [Cb:Ca] of the weight percent of the bond material [Cb] to the weight percent of the abrasive particles [Ca] of at least 1:15 or at least 1:14 or at least 1:13 or at least 1:12 or at least 1:11 or at least 1:10 or at least 1:9 or least 1:8 or at least 1:7 or at least 1:6 or at least 1:5 or at least 1:4 or at least 1:3 or at least 1:2 or at least 1:1. In a particular embodiment, the body may include a weight percent ratio [Cb:Ca] of the weight percent of the bond material [Cb] to the weight percent of the abrasive particles [Ca] of not greater than 9:1 or not greater than 8:1 or not greater than 7:1 or not greater than 6:1 or not greater than 5:1 or not greater than 4:1 or not greater than 3:1 or not greater than 2:1. The weight percent ratio [Cb:Ca] in the body may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 1:15 to not greater than 9:1 such as within a range from at least 1:12 to not greater than 5:1.
In still another embodiment, the body may include at least one filler wherein the filler is a particulate having an average size (D50f) that is different than an average particle size (D50) of the abrasive particles. For example, the body may include at least one filler wherein the filler is a particulate having an average size (D50f) of at least 0.5 microns or at least 1 micron or at least 1.5 microns or at least 2 microns or at least 2.5 microns or at least 3 microns. In still another embodiment, the body may include at least one filler wherein the filler is a particulate having an average size (D50f) of not greater than 10 microns or not greater than 8 microns or not greater than 5 microns or not greater than 4 microns. The average size (D50f) of the filler may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.5 microns to not greater than 10 microns or at least 1 micron and not greater than 4 microns.
In a particular embodiment, the filler can include inorganic materials, organic materials, and a combination thereof. In particular instances, the filler includes an organic material, such as a synthetic material, including by not limited to a polymer, such as thermoplastics, thermosets, and a combination thereof. Some particularly suitable polymer materials can include elastomers, such as rubber, styrenes, silicones, fluorelastomers, silica spheres (SiO2), and a combination thereof. In still other embodiments, the filler includes a hollow ceramic material, a hollow glass material or a combination thereof. In still another embodiment, the filler includes a glass ceramic material.
After forming the mixture including abrasive particles and bond material, the process can continue at step 103 by forming the mixture into a green body. It will be appreciated that a green body is an unfinished article, for example, an unsintered body in the case of an abrasive article utilizing an inorganic bond material. Various forming methods can be used including molding, casting, pressing (hot pressing or cold pressing), and a combination thereof. In particular instances, the forming process can include the formation of a green body having a general polygonal shape (e.g., rectangular, cylindrical, etc.), which can be referred to as a blank. The blank can have a general shape that is lacking the design features of the final-formed abrasive article. That is, later processing will be undertaken to shape the blank into the desired final-form of the abrasive article.
After forming the mixture into a green body at step 103, the process can continue at step 105 by treating the body to form a body of an abrasive article. The process of treating can include a heating process, which can vary depending upon the selected bond material. For example, in the context of an abrasive article utilizing an organic bond material, the heating process can be conducted at temperatures less than about 600° C., such as less than 500° C., and particularly within a range between 200° C. and about 500° C. Such a process may be utilized to drive off volatiles and set the bond material to form the final abrasive article.
For bond materials utilizing a metal material, the heating process may utilize temperatures of at least about 300° C., such as at least about 400° C., at least about 500° C., or even at least about 600° C. Particular forming processes may utilize a heating temperature within a range between about 300° C. and about 1300° C. depending upon the combination of elements within the metal bond materials. In other instances, the treating temperature can be within a range between about 300° C. and about 900° C. between about 300° C. and about 800° C. between about 400° C. and about 650° C., or even between about 500° C. and about 650° C.
In certain instances, for abrasive articles utilizing a metal bond material, the forming process may combine the shaping and heating processes. For example, a cold-pressing/sintering operation can be conducted on the green material to shape and densify the green article. Cold-pressing/sintering operations may also reduce finishing processes since the final-formed piece can have finished contours.
After treating the green body to form a body of the abrasive article in step 105, the process can continue at step 107 by shaping the body. In particular, the process of shaping can give the body certain design features described in embodiments herein. That is, the treated blank may be shaped such that it has certain shapes and surfaces, including but not limited to, first and second portions, arm portions, turns, and cavities in accordance with the designs of embodiments herein. Suitable shaping processes can include cutting, milling, and the like. One particular process can include a water-jet cutting process, wherein water with abrasives is directed at the blank at high speeds and pressures to facilitate cutting of the blank into a specified shape. In other instances, the shaping process may include an ion-beam milling process or electro-beam milling process or electro-discharge machining.
After conducting the shaping process the body can be used as an abrasive segment suitable for fixation to a substrate material to form a fully-formed abrasive article, such as a grinding wheel. Various methods can be used to facilitate bonding between the abrasive segment and the substrate. For example, the abrasive segment may be affixed to the substrate using an adhesive, using a fastener, or even bonded (e.g., brazed) or welded to the substrate. As will be appreciated, a plurality of abrasive segments may be affixed to a substrate, such as in an ordered array or pattern to facilitate formation of the abrasive article. The abrasive segments may be bonded to the substrate in a manner to form a segmented bonded abrasive tool. In particular, the substrate can have particular regions, such as recesses designed to contain a portion of the abrasive segments and aid fixation or the abrasive segments therein.
In still another embodiment, the body may include a density that may facilitate improved manufacturing and/or performance of the abrasive article. For example, the body may include a density of at least 1.0 g/cm3 or at least 1.1 g/cm3 or at least 1.2 g/cm3 or at least 1.3 g/cm3, or at least 1.35 g/cm3 or at least 1.40 g/cm3 or at least 1.42 g/cm3 or at least 1.46 g/cm3 or at least 1.48 g/cm3. In a particular embodiment, the body may include a density of not greater than 2.5 g/cm3 or not greater than 2.4 g/cm3 or not greater than 2.3 g/cm3 or not greater than 2.2 g/cm3 or not greater than 2.1 g/cm3 or not greater than 2.0 g/cm3 or not greater than 1.9 g/cm3 or not greater than 1.8 g/cm3 or not greater than 1.7 g/cm3, or not greater than 1.60 g/cm3, or not greater than 1.55 g/cm3. The density of the body may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 1.0 g/cm3 to not greater than 2.5 g/cm3 such as within a range from at least 1.5 g/cm3 to not greater than 2.2 g/cm3.
In still another embodiment, the body may include an elastic modulus (EMOD) according to ASTM E1876 that may facilitate improved manufacturing and/or performance of the abrasive article. For example, the body may include an elastic modulus (EMOD) according to ASTM E1876 of at least 9.5 GPa, or at least 10 GPa, or at least 10 GPa, or at least 11 GPa, or at least 12 GPa, or at least 13 GPa, or at least 14 GPa or at least 15 GPa. In a particular embodiment, the body may include an elastic modulus (EMOD) according to ASTM E1876 of not greater than 20 GPa, or not greater than 19 GPa, or not greater than 18 GPa, or not greater than 17 GPa or not greater than 16 GPa, or not greater than 15 GPa. The clastic modulus (EMOD) according to ASTM E1876 of the body may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 9.5 GPa to not greater than 20 GPa such as within a range from at least 11 GPa to not greater than 17 GPa.
As will be appreciated, the abrasive segments of embodiments herein can be bonded abrasive articles, having a volume of material containing abrasive particles dispersed throughout the volume of the body, which are bonded to each other via a matrix of bonding material. Accordingly, the abrasive segments are distinct from single layered cutting devices. Moreover, the abrasive segments can be formed such that the body has a particular volume of porosity contained throughout the volume of the body. The porosity may be closed pores that are generally rounded and dispersed throughout the body, open porosity which is defined by a network of interconnected channels extending throughout the body, or a combination of closed porosity and open porosity.
In still another embodiment, the body may include a particular content of porosity that may facilitate improved manufacturing and/or performance of the abrasive article. For example, the body may include a content of porosity of at least 10 vol % for a total volume of the body, or at least 15 vol % or at least 20 vol % or at least 25 vol % or at least 30 vol % or at least 35 vol % or at least 40 vol % or at least 45 vol % or at least 50 vol % or at least 55 vol % or at least 60 vol %. In a particular embodiment, the body may include a content of porosity of not greater than 90 vol % for a total volume of the body, or not greater than 85 vol % or not greater than 80 vol % or not greater than 75 vol % or not greater than 70 vol % or not greater than 65 vol % or not greater than 60 vol % or not greater than 55 vol % or not greater than 50 vol % or not greater than 45 vol % or not greater than 40 vol %. The content of porosity in the body may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 10 wt % to not greater than 90 wt % such as within a range from at least 20 wt % to not greater than 60 wt %. As used herein, the term “porosity” (unless indicated otherwise) relates to the total porosity obtained from samples measured using a Micromeritics AutoPore V 9600 Version 2.03.00 mercury porosimeter according to ASTM D4404-10.
In an embodiment, the body may include an average pore size (D50) that may facilitate improved manufacturing and/or performance of the abrasive article. As used herein, the D50 value signifies the size value in the pore size distribution, up to and including which, 50% of the total counts of pores defining the distribution are ‘contained’. For example, in a non-limiting example, if the D50 is 0.5 microns, 50% of the pores have a size of 0.5 microns or smaller. It will be appreciated, the D50 value may also be referred to as the median value of a sample. In one embodiment, the average pore size (D50) of the body can be at least 0.1 microns or at least 0.2 microns or at least 0.3 microns or at least 0.4 microns or at least 0.5 microns or at least 0.6 microns or at least 0.7 microns or at least 0.8 microns or at least 0.9 microns or at least 1 micron or at least 3 microns or at least 5 microns or at least 10 microns. In yet another embodiment, the average pore size (D50) may be not greater than 300 microns or not greater than 100 microns or not greater than 90 microns or not greater than 80 microns or not greater than 70 microns or not greater than 60 microns or not greater than 50 microns or not greater than 40 microns or not greater than 30 microns or not greater than 20 microns or not greater than 10 microns. The average pore size (D50) can be a value between any of the minimum and maximum values noted above, including for example, but not limited to at least 0.1 microns and not greater than 10 microns, such as within a range of at least 0.4 microns to not greater than 20 microns or within a range of at least 0.5 microns to not greater than 60 microns.
In an embodiment, the body may include a 10th percentile (D10) value of the pore size that may facilitate improved manufacturing and/or performance of the abrasive article. As used herein, the D10 value signifies the size value in the pore size distribution, up to and including which, 10% of the total counts of pores defining the distribution are ‘contained.’ For example, in a non-limiting example, if the D10 is 0.1 microns, 10% of the pores have a size of 0.1 microns or smaller. In a further embodiment, the 10th percentile (D10) value of the pore size of the body can be at least 0.001 microns or at least 0.005 microns or at least 0.01 microns or at least 0.05 microns or at least 0.1 microns or at least 0.5 microns or at least 1 micron or at least 2 microns or at least 5 microns. In another aspect, the 10th percentile (D10) value of the pore size can be not greater than 200 microns or not greater than 100 microns or not greater than 75 microns or not greater than 50 microns or not greater than 25 microns or not greater than 15 microns or not greater than 10 microns or not greater than 2 microns or not greater than 1 micron or not greater than 0.1 microns. The 10th percentile (D10) value of the pore size can be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.001 microns to not greater than 200 microns or within a range of at least 0.01 microns to not greater than 100 microns or within a range of at least 0.2 microns to not greater than 50 microns.
In an embodiment, the body may include a 90th percentile (D90) value of the pore size that may facilitate improved manufacturing and/or performance of the abrasive article. As used herein, the D90 value signifies the size value in the pore size distribution, up to and including which, 90% of the total counts of pores defining the distribution are ‘contained.’ For example, in a non-limiting example, if the D90 is 1 micron, 90% of the pores have a size of 1 micron or smaller. In yet a further embodiment, the 90th percentile value (D90) of the pore size can be at least 0.5 microns or at least 0.6 microns or at least 0.7 microns or at least 0.9 microns or at least 1 micron or at least 5 microns or at least 10 microns or at least 20 microns or at least 50 microns or at least 75 microns or at least 100 microns. In another aspect, the 90th percentile value (D90) may be not greater than 500 microns or not greater than 400 microns or not greater than 300 microns or not greater than 200 microns or not greater than 100 microns or not greater than 75 microns or not greater than 50 microns or not greater than 25 microns or not greater than 15 microns or not greater than 10 microns. The 90th percentile value (D90) can be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.5 microns to not greater than 500 microns or within a range of at least 1 micron to not greater than 200 microns or within a range of at least 5 microns to not greater than 25 microns.
In another embodiment, the body can have a pore size distribution, wherein the difference between the average pore size (D50) and the 10th percentile value (D10) of the pore size, i.e., D50-D10, may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the body can have a pore size distribution, wherein the difference between the average pore size (D50) and the 10th percentile value (D10) of the pore size, i.e., D50-D10 may be not greater than 100 microns or not greater than 90 microns or not greater than 80 microns or not greater than 50 microns or not greater than 25 microns or not greater than 10 microns. In another aspect, the difference between the average pore size (D50) and the 10th percentile value (D10) of the pore size, i.e., D50-D10, may be at least 0.5 microns or at least 1 micron or at least 3 microns or at least 5 microns or at least 10 microns. The difference between the average pore size (D50) and the 10th percentile value (D10) of the pore size, i.e., D50-D10 can be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.5 microns to not greater than 100 microns or within a range of at least 1 micron and not greater than 90 microns.
In yet another embodiment, the body can have a pore size distribution, wherein the difference between the 90th percentile value (D90) and the 10th percentile value (D10) of the pore size, i.e., D90-D10, may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the body can have a pore size distribution, wherein the difference between the 90th percentile value (D90) and the 10th percentile value (D10) of the pore size, i.e., D90-D10, may be not greater than 300 microns or not greater than 200 microns or not greater than 100 microns or not greater than 75 microns or not greater than 50 microns or not greater than 25 microns or not greater than 10 microns. In another aspect, the difference between the 90th percentile value (D90) and the 10th percentile value (D10) of the pore size, i.e., D90-D10, may be at least 0.01 microns or at least 0.05 microns or at least 0.1 microns or at least 0.5 microns or at least 1 micron or at least 2 microns. The difference between the 90th percentile value (D90) and the average pore size (D50), i.e., D90-D10 can be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.01 microns to not greater than 300 microns, such as within a range of at least 0.5 microns to not greater than 25 microns.
All pore size values described (e.g., D10, D50, D90) herein can be obtained from samples measured using a Micromeritics AutoPore V 9600 Version 2.03.00 mercury porosimeter according to ASTM D4404-10. A standard analysis is done on the sample including recording intrusion data from 1 to 60,000 psia, which is the entire Pressure range of the instrument. Cumulative pore volume as a function of pore diameter can be collected. Cumulative pore volume can be converted to volume percent and plotted versus pore size. The D10, D50 and D90 values can then be determined from the plot.
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In another embodiment, as illustrated in
As illustrated in the non-limiting embodiments of
In still another embodiment, the body may include a length ratio [1PL/2PL] of the length of the first portion to the length of the second portion that may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the length ratio [1PL/2PL] may be at least 0.01 or at least 0.05 or at least 0.10 or at least 0.15 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70 or at least 0.75 or at least 0.80 or at least 0.85 or at least 0.90 or at least 0.95 or at least 1.00 or at least 1.10 or at least 1.20 or at least 1.30 or at least 1.40 or at least 1.50 or at least 1.60 or at least 1.70 or at least 1.80 or at least 1.90 or at least 2.00 or at least 2.30 or at least 2.50 or at least 2.80 or at least 3.00 or at least 3.50 or at least 4.00 or at least 4.50 or at least 5.00 or at least 5.50 or at least 6.00 or at least 6.50 or at least 7.00 or at least 7.50 or at least 8.00 or at least 8.50 or at least 9.00 or at least 9.50 or at least 10. In another aspect, the length ratio [1PL/2PL] may be not greater than 100 or not greater than 90 or not greater than 80 or not greater than 70 or not greater than 60 or not greater than 50 or not greater than 40 or not greater than 30 or not greater than 20 or not greater than 10 or not greater than 8 or not greater than 6 or not greater than 5 or not greater than 4 or not greater than 3 or not greater than 2 or not greater than 1 or not greater than 0.9 or not greater than 0.8 or not greater than 0.7 or not greater than 0.6 or not greater than 0.5 or not greater than 0.4 or not greater than 0.3. The length ratio [1PL/2PL] may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.01 to not greater than 100 such as within a range from at least 0.5 to not greater than 20.
In still another embodiment, the first portion 201 may include a length (LP1) of a particular percentage of a total length of the body (L) that may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the first portion 201 may include a length (LP1) of at least 1% of a total length of the body (L) or at least 5% or at least 10% or at least 15%, or at least 20% or at least 25% or at least 30% or at least 35% or at least 40% or at least 45% or at least 50% or at least 55% or at least 60% or at least 65% or at least 70% or at least 75% or at least 80% or at least 85% or at least 90% or at least 95% or at least 98%. In another aspect, the first portion 201 may include a length (LP1) of not greater than 98% of the total length (L) of the body or not greater than 95% or not greater than 90% or not greater than 85% or not greater than 80% or not greater than 75% or not greater than 70% or not greater than 65% or not greater than 60% or not greater than 55% or not greater than 50% or not greater than 45% or not greater than 40% or not greater than 35% or not greater than 30% or not greater than 25% or not greater than 20% or not greater than 15% or not greater than 10% or not greater than 5%. The percentage may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 1% to not greater than 98% such as within a range from at least 5% to not greater than 50%.
In still another embodiment, the second portion 203 may include a length (LP2) of a particular percentage of a total length of the body (L) that may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the second portion 203 may include a length (LP2) of at least 1% of a total length of the body (L) or at least 5% or at least 10% or at least 15%, or at least 20% or at least 25% or at least 30% or at least 35% or at least 40% or at least 45% or at least 50% or at least 55% or at least 60% or at least 65% or at least 70% or at least 75% or at least 80% or at least 85% or at least 90% or at least 95% or at least 98%. In another aspect, the second portion 203 may include a length (LP2) of not greater than 98% of the total length (L) of the body or not greater than 95% or not greater than 90% or not greater than 85% or not greater than 80% or not greater than 75% or not greater than 70% or not greater than 65% or not greater than 60% or not greater than 55% or not greater than 50% or not greater than 45% or not greater than 40% or not greater than 35% or not greater than 30% or not greater than 25% or not greater than 20% or not greater than 15% or not greater than 10% or not greater than 5%. The percentage may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 1% to not greater than 98% such as within a range from at least 5% to not greater than 50%.
In a particular embodiment, the first portion 201 of the body 200 can include a first plane solidity (S1) and the second portion of the body 203 can include a first plane solidity (S2) that may facilitate improved manufacturing and/or performance of the abrasive article. The first plane solidity (S1) of the first portion 201 and the first plane solidity (S2) of the second portion 203 can be measured in a plane defined by the length and width of the body 200. The solidity of each portion of the body 200 is measured by dividing the actual area of the first portion or second portion of the body 200 as viewed in a plane defined by the length and width by a convex hull area of the first portion or second portion of the body 200, respectively, as viewed in a plane defined by the length and width. Measurement of the actual area and convex hull area of the first portion and second portion of the body can be conducted by taking images of a statistically relevant sample size of bodies. The area measured and defined to be the first portion of the body is the area between the leading edge of the body 205 and the intersecting line 217. The area measured and defined to be the second portion of the body is the area between the trailing edge of the body 207 and the intersecting line 217. The images can be taken by a suitable optical imaging device (e.g., Olympus DSX) at a suitable magnification (e.g., 10-20×). The images are then saved and analyzed using image processing software, such as Image J. A separate image was created for each first portion measured. Each of the images of the first portion and second portion were turned into a black and white only image.
In an embodiment, the body 200 may include a particular roughness that may facilitate improved manufacturing and/or performance of the abrasive article. In an embodiment, the body 200 may have a roughness of not greater than 1, or not greater than 0.99 or not greater than 0.98 or not greater than 0.97 or not greater than 0.96 or not greater than 0.95 or not greater than 0.94 or not greater than 0.93 or not greater than 0.92 or not greater than 0.91 or not greater than 0.90 or not greater than 0.89 or not greater than 0.88 or not greater than 0.87 or not greater than 0.86 or not greater than 0.85 or not greater than 0.84 or not greater than 0.83 or not greater than 0.82 or not greater than 0.81 or not greater than 0.80 or not greater than 0.79 or not greater than 0.78 or not greater than 0.77 or not greater than 0.76 or not greater than 0.75 or not greater than 0.74 or not greater than 0.73 or not greater than 0.72 or not greater than 0.71 or not greater than 0.70 or not greater than 0.69 or not greater than 0.68 or not greater than 0.67 or not greater than 0.66 or not greater than 0.65 or not greater than 0.64 or not greater than 0.63 or not greater than 0.62 or not greater than 0.61 or not greater than 0.60 or not greater than 0.59 or not greater than 0.58 or not greater than 0.57 or not greater than 0.56 or not greater than 0.55 or not greater than 0.54 or not greater than 0.53 or not greater than 0.52 or not greater than 0.51 or not greater than 0.50. In still other embodiments, the body 200 may have a roughness of at least 0.50 or at least 0.51 or at least 0.52 or at least 0.53 or at least 0.54 or at least 0.55 or at least 0.56 or at least 0.57 or at least 0.58 or at least 0.59 or at least 0.60 or at least 0.61 or at least 0.62 or at least 0.63 or at least 0.64 or at least 0.65 or at least 0.66 or at least 0.67 or at least 0.68 or at least 0.69 or at least 0.70 or at least 0.71 or at least 0.72 or at least 0.73 or at least 0.74 or at least 0.75 or at least 0.76 or at least 0.77 or at least 0.78 or at least 0.79 or at least 0.80 or at least 0.81 or at least 0.82 or at least 0.83 or at least 0.84 or at least 0.85 or at least 0.86 or at least 0.87 or at least 0.88 or at least 0.89 or at least 0.90 or at least 0.91 or at least 0.92 or at least 0.93 or at least 0.94 or at least 0.95 or at least 0.96 or at least 0.97 or at least 0.98 or at least 0.99 or at least 1.00. It will be appreciated that the body 200 may have a roughness in a range between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.5 to not greater than 1 or at least 0.8 to not greater than 0.99.
The roughness of the body 200 is measured by dividing the convex perimeter of the body 200 as viewed in a plane defined by the length and width by a perimeter of the body 200, as viewed in a plane defined by the length and width. Measurement of the convex perimeter and perimeter of the body can be conducted by taking images of a statistically relevant sample size of bodies. The images can be taken by a suitable optical imaging device (e.g., Olympus DSX) at a suitable magnification (e.g., 10-20×). The images are then saved and analyzed using image processing software, such as Image J. Each of the images of the body were turned into a black and white only image. Using the black and white images of the body, the image processing software calculates the area in white as the actual area of the body of the particle as viewed in two-dimensions of the length and width or length and thickness and calculates the perimeter. Using the image processing software, a convex hull is drawn around the perimeter of the particle using the shape filter plugin in Image J and a convex perimeter is calculated. The roughness is calculated for the body by dividing the convex perimeter by the perimeter of the body. The average roughness is the average of the roughness values for all of the measured bodies. The roughness standard deviation can also be calculated from all of the roughness values measured from the bodies in the sample.
In an embodiment, the first plane solidity of the first portion (S1) and the first plane solidity of the second portion (S2) can be different. In still another embodiment, the first plane solidity of the first portion (S1) can be less than the first plane solidity of the second portion (S2).
In still another embodiment, the body may include a first plane solidity ratio S1/S2 of the first plane solidity of the first portion (S1) to the first plane solidity of the second portion (S2) that may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the first plane solidity ratio S1/S2 may be at least 0.01 or at least 0.02 or at least 0.05 or at least 0.08 or at least 0.10 or at least 0.12 or at least 0.15 or at least 0.18 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70 or at least 0.75 or at least 0.80 or at least 0.85 or at least 0.90 or at least 0.95. In another aspect, first plane solidity ratio S1/S2 may be not greater than 1 or not greater than 0.99 or not greater than 0.98 or not greater than 0.97 or not greater than 0.96 or not greater than 0.95 or not greater than 0.94 or not greater than 0.93 or not greater than 0.92 or not greater than 0.91 or not greater than 0.90 or not greater than 0.88 or not greater than 0.85 or not greater than 0.83 or not greater than 0.80 or not greater than 0.78 or not greater than 0.75 or not greater than 0.73 or not greater than 0.70 or not greater than 0.68 or not greater than 0.65 or not greater than 0.63 or not greater than 0.60 or not greater than 0.58 or not greater than 0.55 or not greater than 0.53 or not greater than 0.50 or not greater than 0.48 or not greater than 0.45 or not greater than 0.43 or not greater than 0.40. The first plane solidity ratio S1/S2 may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.01 to not greater than 1 such as within a range from at least 0.5 to not greater than 0.7.
In a particular embodiment, the first portion 201 of the body 200 can include a second plane solidity value (2PS1) and the second portion 203 of the body 200 can include a second plane solidity (2PS2) that may facilitate improved manufacturing and/or performance of the abrasive article. The second plane solidity (2PS1) of the first portion 201 and the second plane solidity (2PS2) of the second portion 203 can be measured in a plane defined by the length and thickness of the body 200. The solidity of each portion of the body 200 is measured by dividing the actual area of the first portion or second portion of the body 200 as viewed in a plane defined by the length and thickness by a convex hull area of the first portion or second portion of the body 200, respectively, as viewed in a plane defined by the length and thickness. Measurement of the actual area and convex hull area of the first portion and second portion of the body can be conducted by taking images of a statistically relevant sample size of bodies. The area measured and defined to be the first portion of the body is the area between the leading edge of the body 205 and the intersecting line 217. The area measured and defined to be the second portion of the body is the area between the trailing edge of the body 207 and the intersecting line 217. The second plane solidity value (2PS1) and the second plane solidity (2PS2) can be measured using the same techniques as described with respect to the first plane solidity above.
In an embodiment, the second plane solidity of the first portion (2PS1) and the second plane solidity of the second portion (2PS2) is not substantially different.
In a particular embodiment, the first portion 201 of the body 200 can include a first and second plane first portion solidity ratio [S1/2PS1] that may facilitate improved manufacturing and/or performance of the abrasive article. In an embodiment, the first and second plane first portion solidity ratio [S1/2PS1] may be at least 0.01 or at least 0.02 or at least 0.05 or at least 0.08 or at least 0.10 or at least 0.12 or at least 0.15 or at least 0.18 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70 or at least 0.75 or at least 0.80 or at least 0.85 or at least 0.90 or at least 0.95 or at least 1.00. In still another embodiment, the first and second plane first portion solidity ratio [S1/2PS1] may be not greater than 1 or not greater than 0.99 or not greater than 0.98 or not greater than 0.97 or not greater than 0.96 or not greater than 0.95 or not greater than 0.94 or not greater than 0.93 or not greater than 0.92 or not greater than 0.91 or not greater than 0.90 or not greater than 0.89 or not greater than 0.88 or not greater than 0.87 or not greater than 0.86 or not greater than 0.85 or not greater than 0.84 or not greater than 0.83 or not greater than 0.82 or not greater than 0.81 or not greater than 0.80 or not greater than 0.79 or not greater than 0.78 or not greater than 0.77 or not greater than 0.76 or not greater than 0.75 or not greater than 0.74 or not greater than 0.73 or not greater than 0.72 or not greater than 0.71 or not greater than 0.70 or not greater than 0.69 or not greater than 0.68 or not greater than 0.67 or not greater than 0.66 or not greater than 0.65 or not greater than 0.64 or not greater than 0.63 or not greater than 0.62 or not greater than 0.61 or not greater than 0.60 or not greater than 0.59 or not greater than 0.58 or not greater than 0.57 or not greater than 0.56 or not greater than 0.55 or not greater than 0.54 or not greater than 0.53 or not greater than 0.52 or not greater than 0.51 or not greater than 0.50. The first and second plane first portion solidity ratio [S1/2PS1] may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.01 to not greater than 1 such as within a range from at least 0.5 to not greater than 0.7.
In a particular embodiment, the first portion 201 of the body 200 can include a first and second plane second portion solidity ratio [S2/2PS2] that may facilitate improved manufacturing and/or performance of the abrasive article. In an embodiment, the first and second plane second portion solidity ratio [S2/2PS2] may be at least 0.01 or at least 0.02 or at least 0.05 or at least 0.08 or at least 0.10 or at least 0.12 or at least 0.15 or at least 0.18 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70 or at least 0.75 or at least 0.80 or at least 0.85 or at least 0.90 or at least 0.95 or at least 1.00. In still another embodiment, the first and second plane second portion solidity ratio [S2/2PS2] may be not greater than 1 or not greater than 0.99 or not greater than 0.98 or not greater than 0.97 or not greater than 0.96 or not greater than 0.95 or not greater than 0.94 or not greater than 0.93 or not greater than 0.92 or not greater than 0.91 or not greater than 0.90 or not greater than 0.89 or not greater than 0.88 or not greater than 0.87 or not greater than 0.86 or not greater than 0.85 or not greater than 0.84 or not greater than 0.83 or not greater than 0.82 or not greater than 0.81 or not greater than 0.80 or not greater than 0.79 or not greater than 0.78 or not greater than 0.77 or not greater than 0.76 or not greater than 0.75 or not greater than 0.74 or not greater than 0.73 or not greater than 0.72 or not greater than 0.71 or not greater than 0.70 or not greater than 0.69 or not greater than 0.68 or not greater than 0.67 or not greater than 0.66 or not greater than 0.65 or not greater than 0.64 or not greater than 0.63 or not greater than 0.62 or not greater than 0.61 or not greater than 0.60 or not greater than 0.59 or not greater than 0.58 or not greater than 0.57 or not greater than 0.56 or not greater than 0.55 or not greater than 0.54 or not greater than 0.53 or not greater than 0.52 or not greater than 0.51 or not greater than 0.50. The first and second plane second portion solidity ratio [S2/2PS2] may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.01 to not greater than 1 such as within a range from at least 0.5 to not greater than 0.7.
In still another embodiment, the body may include an average width [Wa], a maximum width [Wmx] and a minimum width [Wmn]. The average width [Wa] is the average of the width values measured along the length of the body between the leading edge 205 and the trailing edge 207. The average width [Wa] can be measured by taking a statistically significant number of width measurements taken perpendicular to the longitudinal axis 209 throughout the length of the body 200 and finding an average width Wa. The maximum width [Wmx] can be measured by measuring the greatest width taken perpendicular to the longitudinal axis 209 through the length of the body in a plane defined by the length and width of the body. The minimum width [Wmn] can be measured by measuring the smallest width taken perpendicular to the longitudinal axis 209 through the length of the body in a plane defined by the length and width of the body.
In an embodiment, the body may include an average width [Wa] that may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the average width [Wa] may be at least 0.07 inches or at least 0.08 inches or at least 0.09 inches or at least 0.1 inches. In another aspect, the average width [Wa] may be not greater than 0.13 inches or not greater than 0.12 inches or not greater than 0.11 inches or not greater than 0.1 inches or not greater than 0.095 inches or not greater than 0.09 inches. The average width [Wa] may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.07 inches to not greater than 0.1 inches such as within a range from at least 0.07 inches to not greater than 0.13 inches.
In an embodiment, the boxy may include a minimum width [Wmn] that may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the minimum width of the body [Wmn] may be at least 0.06 inches or at least 0.07 inches or at least 0.08 inches or at least 0.09 inches. In another aspect, the minimum width of the body [Wmn] may be not greater than 0.1 inches or not greater than 0.095 inches or not greater than 0.09 inches or not greater than 0.085 inches or not greater than 0.08 inches or not greater than 0.75 inches. The minimum width of the body [Wmn] may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.06 inches to not greater than 0.1 inches such as within a range from at least 0.07 inches to not greater than 0.9 inches.
In an embodiment, the body may include a maximum width [Wmx] that may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the maximum width of the body [Wmx] may be at least or at least 0.09 inches or at least 0.095 inches or at least 0.1 inches or at least 0.11 inches or at least 0.12 inches or at least 0.13 inches or at least 0.14 inches. In another aspect, the maximum width of the body [Wmx] may be not greater than 0.16 inches or not greater than 0.15 inches or not greater than 0.14 inches or not greater than 0.13 inches. The maximum width of the body [Wmx] may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.09 inches to not greater than 0.16 inches such as within a range from at least 0.1 inches to not greater than 1.6 inches.
In an embodiment, the body may include a width ratio [Wa/Wmx] of the average width of the body [Wa] and the maximum width of the body [Wmx] that may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the width ratio [Wa/Wmx] may be at least 0.01 or at least 0.05 or at least 0.1 or at least 0.15 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70. In another aspect, the width ratio [Wa/Wmx] may be not greater than 0.99 or not greater than 0.98 or not greater than 0.95 or not greater than 0.93 or not greater than 0.90 or not greater than 0.88 or not greater than 0.85 or not greater than 0.83 or not greater than 0.80 or not greater than 0.78 or not greater than 0.75 or not greater than 0.73 or not greater than 0.70 or not greater than 0.68 or not greater than 0.65 or not greater than 0.63 or not greater than 0.60 or not greater than 0.58 or not greater than 0.55 or not greater than 0.53 or not greater than 0.50 or not greater than 0.48 or not greater than 0.45 or not greater than 0.43 or not greater than 0.40 or not greater than 0.38 or not greater than 0.35 or not greater than 0.33 or not greater than 0.30. The width ratio [Wa/Wmx] may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.01 to not greater than 0.99 such as within a range from at least 0.5 to not greater than 0.8.
In an embodiment, the body may include a width ratio [Wmn/Wa] of a minimum width of the body [Wmn] and the average width of the body [Wa] that may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the width ratio [Wmn/Wa] may be at least 0.01 or at least 0.05 or at least 0.1 or at least 0.15 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70. In another aspect, the width ratio [Wmn/Wa] may be not greater than 0.99 or not greater than 0.98 or not greater than 0.95 or not greater than 0.93 or not greater than 0.90 or not greater than 0.88 or not greater than 0.85 or not greater than 0.83 or not greater than 0.80 or not greater than 0.78 or not greater than 0.75 or not greater than 0.73 or not greater than 0.70 or not greater than 0.68 or not greater than 0.65 or not greater than 0.63 or not greater than 0.60 or not greater than 0.58 or not greater than 0.55 or not greater than 0.53 or not greater than 0.50 or not greater than 0.48 or not greater than 0.45 or not greater than 0.43 or not greater than 0.40 or not greater than 0.38 or not greater than 0.35 or not greater than 0.33 or not greater than 0.30. The width ratio [Wmn/Wa] may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.01 to not greater than 0.99 such as within a range from at least 0.5 to not greater than 0.8.
In still another embodiment, the first portion 201 and the second portion 203 can include an average width [Wa1] and [Wa2], respectively, wherein [Wa1] is not greater than [Wa2]. In still another embodiment, [Wa1] is less than [Wa2]. The average width [Wa1] and [Wa2] can be measured by taking width measurements for each of the first and second portions from a suitable number of bodies and calculating and average value for each of the first and second portions.
In an embodiment, the body may include a width ratio [Wa1/Wa2] of an average width of the first portion [Wa1] and the average width of the second portion [Wa2] that may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the width ratio [Wa1/Wa2] may be at least 0.01 or at least 0.05 or at least 0.1 or at least 0.15 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70 or at least 0.75 or at least 0.80 or at least 0.85 or at least 0.90 or at least 0.95. In another aspect, the width ratio [Wa1/Wa2] may be not greater than 0.99 or not greater than 0.98 or not greater than 0.95 or not greater than 0.93 or not greater than 0.90 or not greater than 0.88 or not greater than 0.85 or not greater than 0.83 or not greater than 0.80 or not greater than 0.78 or not greater than 0.75 or not greater than 0.73 or not greater than 0.70 or not greater than 0.68 or not greater than 0.65 or not greater than 0.63 or not greater than 0.60 or not greater than 0.58 or not greater than 0.55 or not greater than 0.53 or not greater than 0.50 or not greater than 0.48 or not greater than 0.45 or not greater than 0.43 or not greater than 0.40 or not greater than 0.38 or not greater than 0.35 or not greater than 0.33 or not greater than 0.30. The width ratio [Wa1/Wa2] may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.01 to not greater than 0.99 such as within a range from at least 0.5 to not greater than 0.8.
In an embodiment, the first portion 201 may include an average width of the first portion [Wa1] that may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the average width of the first portion [Wa1] may be at least 0.06 inches or at least 0.07 inches or at least 0.08 inches or at least 0.09 inches. In another aspect, the average width of the first portion [Wa1] may be not greater than 0.1 inches or not greater than 0.095 inches or not greater than 0.09 inches or not greater than 0.085 inches or not greater than 0.08 inches or not greater than 0.75 inches. The average width of the first portion [Wa1] may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.06 inches to not greater than 0.1 inches such as within a range from at least 0.07 inches to not greater than 0.9 inches.
In an embodiment, the first portion 201 may include an average width of the second portion [Wa2] that may facilitate improved manufacturing and/or performance of the abrasive article. In a particular embodiment, the average width of the second portion [Wa2] may be at least or at least 0.09 inches or at least 0.095 inches or at least 0.1 inches or at least 0.11 inches or at least 0.12 inches or at least 0.13 inches or at least 0.14 inches. In another aspect, the average width of the second portion [Wa2] may be not greater than 0.16 inches or not greater than 0.15 inches or not greater than 0.14 inches or not greater than 0.13 inches. The average width of the second portion [Wa2] may be a value between any of the minimum and maximum values noted above, including for example, but not limited to within a range of at least 0.09 inches to not greater than 0.16 inches such as within a range from at least 0.1 inches to not greater than 1.6 inches.
In a non-illustrated embodiment, the body 200 can include a third portion distinct from the first portion 201 and second portion 202 having any of the features as described herein with respect to the first and second portions.
In still another embodiment, the body 200 may include a monolithic structure wherein the body includes substantially the same microstructure within the first portion 201 and the second portion 203.
It will be appreciated that the body may have any suitable size and shape as known in the art and can be incorporated into various types of abrasive articles to form a bonded abrasive article. For example, the body can be attached to a substrate, such as a hub of a wheel to facilitate formation of a bonded abrasive grinding wheel.
In accordance with embodiments herein, the substrate 602 can be made of an inorganic material including for example a metal, metal alloy, and a combination thereof. Moreover, as will be appreciated the substrate 602 can have various shapes including cylindrical, cup-shaped, conical, and a combination thereof.
During grinding operations, the abrasive segments 601 can be placed in contact with a workpiece, such as a wafer, wherein the work surfaces of the abrasive segments 601 are substantially flush with a flat surface of the wafer. The abrasive article 600 can be rotated in a grinding direction 610 such that a first portion 611 of abrasive segment 601 is the leading edge and a second portion 612 of abrasive segment 601 is the trailing edge. In an embodiment, a leading edge of an abrasive segment 601 is oriented toward the grinding direction 610. In an embodiment, a trailing edge of an abrasive segment 601 is oriented away from the grinding direction 610. In yet another embodiment, the abrasive segment 601 comprises a trailing edge 611 and a leading edge 612, wherein the leading edge 612 engages the workpiece first as the abrasive article is rotated. In still another embodiment, the trailing edge 611 follows behind the leading edge 612 as the abrasive article is rotated. The substrate 602 can be rotated relative to the workpiece to affect material removal, and particularly a thinning of the wafer. The substrate 602 can be rotated alone, or alternatively, the workpiece can be rotated alone, and even in certain instances, the substrate 602 and the workpiece can both be rotated, such as in opposite directions or the same directions. A fluid may be applied to the workpiece and/or abrasive segments to reduce damage to the workpiece during the process.
Embodiment 1. An abrasive article comprising:
Embodiment 2. An abrasive article configured for finishing comprising:
Embodiment 3. The abrasive article of Embodiment 2, wherein the body comprises:
Embodiment 4. The abrasive article of any one of Embodiments 1 and 3, wherein S1 is less than S2.
Embodiment 5. The abrasive article of Embodiment 4, wherein the first portion includes the leading edge of the body and the second portion comprises the trailing edge of the body.
Embodiment 6. The abrasive article of any one of Embodiments 1, 3, and 5, further comprising a first plane solidity ratio S1/S2 of at least 0.01 or at least 0.02 or at least 0.05 or at least 0.08 or at least 0.10 or at least 0.12 or at least 0.15 or at least 0.18 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70 or at least 0.75 or at least 0.80 or at least 0.85 or at least 0.90 or at least 0.95.
Embodiment 7. The abrasive article of any one of Embodiments 1, 3, 5, and 6, further comprising a first plane solidity ratio S1/S2 of not greater than 1 or not greater than 0.99 or not greater than 0.98 or not greater than 0.97 or not greater than 0.96 or not greater than 0.95 or not greater than 0.94 or not greater than 0.93 or not greater than 0.92 or not greater than 0.91 or not greater than 0.90 or not greater than 0.88 or not greater than 0.85 or not greater than 0.83 or not greater than 0.80 or not greater than 0.78 or not greater than 0.75 or not greater than 0.73 or not greater than 0.70 or not greater than 0.68 or not greater than 0.65 or not greater than 0.63 or not greater than 0.60 or not greater than 0.58 or not greater than 0.55 or not greater than 0.53 or not greater than 0.50 or not greater than 0.48 or not greater than 0.45 or not greater than 0.43 or not greater than 0.40.
Embodiment 8. The abrasive article of any one of Embodiments 1 and 3, wherein the first portion comprises a second plane solidity value [2PS1] as measured in the plane of the length and thickness of the body, and further wherein the second portion has a second plane value [2PS2] as measured in the plane of the length and thickness of the body, and wherein [2PS1] is not substantially different than [2PS2].
Embodiment 9. The abrasive article of Embodiment 8, further comprising a second plane solidity ratio 2PS1/2PS2 of not greater than 10 or not greater than 8 or not greater than 5 or not greater than 3 or not greater than 1 or not greater than 0.90.
Embodiment 10. The abrasive article of Embodiment 9, wherein the second plane solidity ratio 2PS1/2PS2 is at least 0.1 or at least 0.2 or at least 0.3 or at least 0.4 or at least 0.5 or at least 0.6 or at least 0.7 or at least 0.8 or at least 0.9 or at least 0.95 or at least 1.
Embodiment 11. The abrasive article of Embodiment 8, further comprising a first and second plane first portion solidity ratio [S1/2PS1] of at least 0.01 or at least 0.02 or at least 0.05 or at least 0.08 or at least 0.10 or at least 0.12 or at least 0.15 or at least 0.18 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70 or at least 0.75 or at least 0.80 or at least 0.85 or at least 0.90 or at least 0.95 or at least 1.00.
Embodiment 12. The abrasive article of Embodiment 11, wherein the first and second plane first portion solidity ratio [S1/2PS1] is not greater than 1 or not greater than 0.99 or not greater than 0.98 or not greater than 0.97 or not greater than 0.96 or not greater than 0.95 or not greater than 0.94 or not greater than 0.93 or not greater than 0.92 or not greater than 0.91 or not greater than 0.90 or not greater than 0.89 or not greater than 0.88 or not greater than 0.87 or not greater than 0.86 or not greater than 0.85 or not greater than 0.84 or not greater than 0.83 or not greater than 0.82 or not greater than 0.81 or not greater than 0.80 or not greater than 0.79 or not greater than 0.78 or not greater than 0.77 or not greater than 0.76 or not greater than 0.75 or not greater than 0.74 or not greater than 0.73 or not greater than 0.72 or not greater than 0.71 or not greater than 0.70 or not greater than 0.69 or not greater than 0.68 or not greater than 0.67 or not greater than 0.66 or not greater than 0.65 or not greater than 0.64 or not greater than 0.63 or not greater than 0.62 or not greater than 0.61 or not greater than 0.60 or not greater than 0.59 or not greater than 0.58 or not greater than 0.57 or not greater than 0.56 or not greater than 0.55 or not greater than 0.54 or not greater than 0.53 or not greater than 0.52 or not greater than 0.51 or not greater than 0.50.
Embodiment 13. The abrasive article of Embodiment 8, further comprising a first and second plane second portion solidity ratio [PS2/2PS2] of at least 0.01 or at least 0.02 or at least 0.05 or at least 0.08 or at least 0.10 or at least 0.12 or at least 0.15 or at least 0.18 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70 or at least 0.75 or at least 0.80 or at least 0.85 or at least 0.90 or at least 0.95 or at least 1.00.
Embodiment 14. The abrasive article of Embodiment 13, wherein the first and second plane second portion solidity ratio [PS2/2PS2] is not greater than 1 or not greater than 0.99 or not greater than 0.98 or not greater than 0.97 or not greater than 0.96 or not greater than 0.95 or not greater than 0.94 or not greater than 0.93 or not greater than 0.92 or not greater than 0.91 or not greater than 0.90 or not greater than 0.89 or not greater than 0.88 or not greater than 0.87 or not greater than 0.86 or not greater than 0.85 or not greater than 0.84 or not greater than 0.83 or not greater than 0.82 or not greater than 0.81 or not greater than 0.80 or not greater than 0.79 or not greater than 0.78 or not greater than 0.77 or not greater than 0.76 or not greater than 0.75 or not greater than 0.74 or not greater than 0.73 or not greater than 0.72 or not greater than 0.71 or not greater than 0.70 or not greater than 0.69 or not greater than 0.68 or not greater than 0.67 or not greater than 0.66 or not greater than 0.65 or not greater than 0.64 or not greater than 0.63 or not greater than 0.62 or not greater than 0.61 or not greater than 0.60 or not greater than 0.59 or not greater than 0.58 or not greater than 0.57 or not greater than 0.56 or not greater than 0.55 or not greater than 0.54 or not greater than 0.53 or not greater than 0.52 or not greater than 0.51 or not greater than 0.50.
Embodiment 15. The abrasive article of any one of Embodiments 1 and 3, wherein the first portion has a length [1PL] and the second portion has a length [2PL] and wherein 1PL is substantially the same as 2PL.
Embodiment 16. The abrasive article of any one of Embodiments 1 and 3, wherein the first portion has a length [1PL] and the second portion has a length [2PL] and wherein 1PL is different than 2PL.
Embodiment 17. The abrasive article of Embodiment 16, further comprising a length ratio [1PL/2PL] of at least 0.01 or at least 0.05 or at least 0.10 or at least 0.15 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70 or at least 0.75 or at least 0.80 or at least 0.85 or at least 0.90 or at least 0.95 or at least 1.00 or at least 1.10 or at least 1.20 or at least 1.30 or at least 1.40 or at least 1.50 or at least 1.60 or at least 1.70 or at least 1.80 or at least 1.90 or at least 2.00 or at least 2.30 or at least 2.50 or at least 2.80 or at least 3.00 or at least 3.50 or at least 4.00 or at least 4.50 or at least 5.00 or at least 5.50 or at least 6.00 or at least 6.50 or at least 7.00 or at least 7.50 or at least 8.00 or at least 8.50 or at least 9.00 or at least 9.50 or at least 10.
Embodiment 18. The abrasive article of Embodiment 16, further comprising a length ratio [1PL/2PL] of not greater than 100 or not greater than 90 or not greater than 80 or not greater than 70 or not greater than 60 or not greater than 50 or not greater than 40 or not greater than 30 or not greater than 20 or not greater than 10 or not greater than 8 or not greater than 6 or not greater than 5 or not greater than 4 or not greater than 3 or not greater than 2 or not greater than 1 or not greater than 0.9 or not greater than 0.8 or not greater than 0.7 or not greater than 0.6 or not greater than 0.5 or not greater than 0.4 or not greater than 0.3.
Embodiment 19. The abrasive article of any one of Embodiments 1 and 3, wherein the first portion has a length of at least 1% of a total length of the body or at least 5% or at least 10% or at least 15%, or at least 20% or at least 25% or at least 30% or at least 35% or at least 40% or at least 45% or at least 50% or at least 55% or at least 60% or at least 65% or at least 70% or at least 75% or at least 80% or at least 85% or at least 90% or at least 95% or at least 98%.
Embodiment 20. The abrasive article of any one of Embodiments 1, 3, and 19, wherein the first portion has a length of not greater than 98% of the total length of the body or not greater than 95% or not greater than 90% or not greater than 85% or not greater than 80% or not greater than 75% or not greater than 70% or not greater than 65% or not greater than 60% or not greater than 55% or not greater than 50% or not greater than 45% or not greater than 40% or not greater than 35% or not greater than 30% or not greater than 25% or not greater than 20% or not greater than 15% or not greater than 10% or not greater than 5%.
Embodiment 21. The abrasive article of any one of Embodiments 1 and 3, wherein the second portion has a length of at least 1% of a total length of the body or at least 5% or at least 10% or at least 15%, or at least 20% or at least 25% or at least 30% or at least 35% or at least 40% or at least 45% or at least 50% or at least 55% or at least 60% or at least 65% or at least 70% or at least 75% or at least 80% or at least 85% or at least 90% or at least 95% or at least 98%.
Embodiment 22. The abrasive article of any one of Embodiments 1, 3, and 21, wherein the second portion has a length of not greater than 98% of the total length of the body or not greater than 95% or not greater than 90% or not greater than 85% or not greater than 80% or not greater than 75% or not greater than 70% or not greater than 65% or not greater than 60% or not greater than 55% or not greater than 50% or not greater than 45% or not greater than 40% or not greater than 35% or not greater than 30% or not greater than 25% or not greater than 20% or not greater than 15% or not greater than 10% or not greater than 5%.
Embodiment 23. The abrasive article of any one of Embodiments 1 and 2, wherein the body is a monolithic structure.
Embodiment 24. The abrasive article of Embodiment 23, wherein the body comprises substantially the same microstructure within the first portion and the second portion.
Embodiment 25. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises a tapered side wall.
Embodiment 26. The abrasive article of Embodiment 25, wherein the body has an upper surface that is smaller in area than a bottom surface.
Embodiment 27. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises an upper surface having substantially the same area as a bottom surface, wherein the upper surface and bottom surface are separated by a side surface defining a thickness of the body.
Embodiment 28. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises a first side section and a second side section, wherein the first side section is shorter than the second side section and extends in an arcuate path as viewed in the plane of the length and width.
Embodiment 29. The abrasive article of Embodiment 28, wherein the arcuate path of the first side section defines a radius of curvature that is at least 2 times greater than a length of the body or at least 3 times greater or at least 4 times greater or at least 5 times greater or at least 6 times greater or at least 7 times greater or at least 8 times greater or at least 9 times greater or at least 10 times greater.
Embodiment 30. The abrasive article of any one of Embodiments 1, wherein the body comprises a leading edge and a trailing edge and wherein the width of the body between the leading edge and trailing edge changes along the length of the body.
Embodiment 31. The abrasive article of any one of Embodiments 2 and 30, wherein the body comprises an average width [Wa] and the body comprises a maximum width [Wmx], and wherein the body further comprises a width ratio [Wa/Wmx] of not greater than 0.99 or not greater than 0.98 or not greater than 0.95 or not greater than 0.93 or not greater than 0.90 or not greater than 0.88 or not greater than 0.85 or not greater than 0.83 or not greater than 0.80 or not greater than 0.78 or not greater than 0.75 or not greater than 0.73 or not greater than 0.70 or not greater than 0.68 or not greater than 0.65 or not greater than 0.63 or not greater than 0.60 or not greater than 0.58 or not greater than 0.55 or not greater than 0.53 or not greater than 0.50 or not greater than 0.48 or not greater than 0.45 or not greater than 0.43 or not greater than 0.40 or not greater than 0.38 or not greater than 0.35 or not greater than 0.33 or not greater than 0.30.
Embodiment 32. The abrasive article of any one of Embodiments 2, 30, and 31, wherein the body comprises an average width [Wa] and the body comprises a maximum width [Wmx], and wherein the body further comprises a width ratio [Wa/Wmx] of at least 0.01 or at least 0.05 or at least 0.1 or at least 0.15 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70.
Embodiment 33. The abrasive article of any one of Embodiments 2 and 32, wherein the body comprises an average width [Wa] and the body comprises a minimum width [Wmn], and wherein the body further comprises a width ratio [Wmn/Wa] of not greater than 0.99 or not greater than 0.98 or not greater than 0.95 or not greater than 0.93 or not greater than 0.90 or not greater than 0.88 or not greater than 0.85 or not greater than 0.83 or not greater than 0.80 or not greater than 0.78 or not greater than 0.75 or not greater than 0.73 or not greater than 0.70 or not greater than 0.68 or not greater than 0.65 or not greater than 0.63 or not greater than 0.60 or not greater than 0.58 or not greater than 0.55 or not greater than 0.53 or not greater than 0.50 or not greater than 0.48 or not greater than 0.45 or not greater than 0.43 or not greater than 0.40 or not greater than 0.38 or not greater than 0.35 or not greater than 0.33 or not greater than 0.30.
Embodiment 34. The abrasive article of any one of Embodiments 2, 30, and 33, wherein the body comprises an average width [Wa] and the body comprises a minimum width [Wmn], and wherein the body further comprises a width ratio [Wmn/Wa] of at least 0.01 or at least 0.05 or at least 0.1 or at least 0.15 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70.
Embodiment 35. The abrasive article of any one of Embodiments 2 and 30, wherein the body further comprises a first portion including the leading edge and a second portion including the trailing edge, and wherein the first portion has an average width [Wa1] and the second portion has an average width [Wa2] and wherein [Wa1] is not greater than [Wa2].
Embodiment 36. The abrasive article of Embodiment 35, wherein [Wa1] is less than [Wa2].
Embodiment 37. The abrasive article of Embodiment 35, further comprising a width portion ratio [Wa1/Wa2] of not greater than 0.99 or not greater than 0.98 or not greater than 0.95 or not greater than 0.93 or not greater than 0.90 or not greater than 0.88 or not greater than 0.85 or not greater than 0.83 or not greater than 0.80 or not greater than 0.78 or not greater than 0.75 or not greater than 0.73 or not greater than 0.70 or not greater than 0.68 or not greater than 0.65 or not greater than 0.63 or not greater than 0.60 or not greater than 0.58 or not greater than 0.55 or not greater than 0.53 or not greater than 0.50 or not greater than 0.48 or not greater than 0.45 or not greater than 0.43 or not greater than 0.40 or not greater than 0.38 or not greater than 0.35 or not greater than 0.33 or not greater than 0.30.
Embodiment 38. The abrasive article of any one of Embodiments 35 and 37, further comprising a width portion ratio [Wa1/Wa2] of at least 0.01 or at least 0.05 or at least 0.1 or at least 0.15 or at least 0.20 or at least 0.25 or at least 0.30 or at least 0.35 or at least 0.40 or at least 0.45 or at least 0.50 or at least 0.55 or at least 0.60 or at least 0.65 or at least 0.70 or at least 0.75 or at least 0.80 or at least 0.85 or at least 0.90 or at least 0.95.
Embodiment 39. The abrasive article of any one of Embodiments 1 and 3, wherein the body further comprises a third portion distinct from the first portion and distinct from the second portion.
Embodiment 40. The abrasive article of Embodiment 39, wherein the third portion includes any one or more features of any one or more Embodiments herein.
Embodiment 41. The abrasive article of any one of Embodiments 1 and 2, wherein the bond material comprises an inorganic material.
Embodiment 42. The abrasive article of Embodiment 41, wherein the bond material comprises at least one of a polycrystalline material or an amorphous material.
Embodiment 43. The abrasive article of Embodiment 42, wherein the bond material comprises an amorphous phase.
Embodiment 44. The abrasive article of Embodiment 42, wherein the bond material consists essentially of an amorphous phase.
Embodiment 45. The abrasive article of Embodiment 42, wherein the bond material comprises at least one of a metal oxide or a non-metal oxide.
Embodiment 46. The abrasive article of Embodiment 42, wherein the bond material comprises a crystalline material including crystallites comprising an average crystallite size of not greater than 1 mm or not greater than 500 microns or not greater than 300 microns or not greater than 100 microns or not greater than 10 microns or not greater than 1 micron or not greater than 800 nanometers or not greater than 500 nanometers or not greater than 100 nanometers.
Embodiment 47. The abrasive article of Embodiment 42, wherein the bond material comprises a crystalline content of at least 0.5 vol % of the total volume of the bond material, such as at least 1 vol %, or at least 2 vol %, or at least 3 vol %, or at least 4 vol %, or at least 5 vol %, or at least 6 vol %, of a total volume of the bond material.
Embodiment 48. The abrasive article of Embodiment 42, wherein the bond material comprises a crystalline content of not greater than 99 vol % of the total volume of the bond material, or not greater than 97 vol % or not greater than 90 vol % or not greater than 80 vol % or not greater than 70 vol % or not greater than 60 vol % or not greater than 50 vol % or not greater than 40 vol % or not greater than 30 vol % or not greater 20 vol % or not greater than 10 vol % or not greater than 8 vol % or not greater than 5 vol % or not greater than 3 vol % or not greater than 2 vol % or not greater than 1 vol % of the total volume of the bond material.
Embodiment 49. The abrasive article of Embodiment 43, wherein the bond material comprises one or more crystalline materials selected from the group of quartz, alpha-quartz, beta-quartz, alpha-tridymite, beta-tridymite, cristobalite, alpha-cristobalite, beta-cristobalite, moganite, coesite, keatite, or a combination thereof.
Embodiment 50. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises at least 5 wt % bond material based on the total weight of the body or at least 7 wt %, or at least 10 wt %, or at least 15 wt %, or at least 20 wt %, or at least 25 wt %, or at least 30 wt % bond material based on a total weight of the body.
Embodiment 51. The abrasive article of any one of Embodiments 1, 2 and 50, wherein the body comprises not greater than 90 wt % bond material based on the total weight of the body, or not greater than 80 wt %, or not greater than 70 wt %, or not greater than 60 wt %, or not greater than 50 wt %, or not greater than 40 wt %, or not greater than 30 wt %, or not greater than 20 wt %, or not greater than 15 wt %, or not greater than 10 wt %, or not greater than 8 wt % bond material based on a total weight of the body.
Embodiment 52. The abrasive article of any one of Embodiments 1 and 2, wherein the bond material comprises a metal or metal alloy.
Embodiment 53. The abrasive article of Embodiment 52, wherein the bond material comprises at least one transition metal element.
Embodiment 54. The abrasive article of Embodiment 53, wherein the bond material comprises at least one metal selected from the group consisting of copper, tin, silver, tungsten, iron, titanium, nickel, chrome, or any combination thereof.
Embodiment 55. The abrasive article of any one of Embodiments 1 and 2, wherein the abrasive particles comprise at least one of an oxide, a carbide, a nitride, a boride, diamond, or any combination thereof.
Embodiment 56. The abrasive article of any one of Embodiments 1 and 2, wherein the abrasive particles comprise a superabrasive.
Embodiment 57. The abrasive article of any one of Embodiments 1 and 2, wherein the abrasive particles comprise diamond and/or cubic boron nitride.
Embodiment 58. The abrasive article of any one of Embodiments 1 and 2, wherein the abrasive particles consist essentially of diamond.
Embodiment 59. The abrasive article of any one of Embodiments 1 and 2, wherein the average particle size (D50) of the abrasive particles is at least 0.01 microns or at least 0.05 microns or at least 0.1 microns or at least 0.2 microns or at least 0.3 microns or at least 0.4 microns.
Embodiment 60. The abrasive article of any one of Embodiments 1, 2, and 59 wherein the average particle size (D50) of the abrasive particles is not greater than 500 microns or not greater than 400 microns or not greater than 300 microns or not greater than 200 microns or not greater than 100 microns or not greater than 75 microns or not greater than 50 microns or not greater than 25 microns or not greater than 15 microns or not greater than 10 microns or not greater than 5 microns or not greater than 3 microns or not greater than 1 micron.
Embodiment 61. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises a content of abrasive particles of at least 10 wt % based on the total weight of the body, such as at least 15 wt %, or at least 20 wt %, or at least 25 wt % or at least 30 wt % or at least 35 wt % or at least 40 wt % or at least 45 wt % or at least 50 wt % or at least 55 wt % or at least 60 wt % or at least 65 wt % or at least 70 wt % or at least 75 wt % or at least 80 wt % or at least 85 wt % or at least 90 wt %.
Embodiment 62. The abrasive article of any one of Embodiments 1, 2, and 61 wherein the body comprises a content of abrasive particles of not greater than 95 wt % based on the total weight of the body or not greater than 93 wt %, or not greater than 90 wt % or not greater than 85 wt % or not greater than 80 wt % or not greater than 75 wt % or not greater than 70 wt % or not greater than 65 wt % or not greater than 60 wt % or not greater than 55 wt % or not greater than 50 wt %.
Embodiment 63. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises a weight percent ratio [Cb:Ca] of the weight percent of the bond material [Cb] to the weight percent of the abrasive particles [Ca] of at least 1:15 or at least 1:14 or at least 1:13 or at least 1:12 or at least 1:11 or at least 1:10 or at least 1:9 or least 1:8 or at least 1:7 or at least 1:6 or at least 1:5 or at least 1:4 or at least 1:3 or at least 1:2 or at least 1:1.
Embodiment 64. The abrasive article of any one of Embodiments 1, 2, and 63 wherein the body comprises a weight percent ratio [Cb:Ca] of the weight percent of the bond material [Cb] to the weight percent of the abrasive particles [Ca] of not greater than 9:1 or not greater than 8:1 or not greater than 7:1 or not greater than 6:1 or not greater than 5:1 or not greater than 4:1 or not greater than 3:1 or not greater than 2:1.
Embodiment 65. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises a porosity of at least 10 vol % for a total volume of the body, or at least 15 vol % or at least 20 vol % or at least 25 vol % or at least 30 vol % or at least 35 vol % or at least 40 vol % or at least 45 vol % or at least 50 vol % or at least 55 vol % or at least 60 vol %.
Embodiment 66. The abrasive article of any one of Embodiments 1, 2, and 65 wherein the body comprises a porosity of not greater than 90 vol % for a total volume of the body, or not greater than 85 vol % or not greater than 80 vol % or not greater than 75 vol % or not greater than 70 vol % or not greater than 65 vol % or not greater than 60 vol % or not greater than 55 vol % or not greater than 50 vol % or not greater than 45 vol % or not greater than 40 vol %.
Embodiment 67. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises a plurality of pores, the plurality of pores comprising an average pore size (D50) of at least 0.1 microns or at least 0.2 microns or at least 0.3 microns or at least 0.4 microns or at least 0.5 microns or at least 0.6 microns or at least 0.7 microns or at least 0.8 microns or at least 0.9 microns or at least 1 micron or at least 3 microns or at least 5 microns or at least 10 microns.
Embodiment 68. The abrasive article of any one of Embodiments 1, 2, and 67 wherein the body comprises a plurality of pores, the plurality of pores comprising an average pore size (D50) of not greater than 300 microns or not greater than 100 microns or not greater than 90 microns or not greater than 80 microns or not greater than 70 microns or not greater than 60 microns or not greater than 50 microns or not greater than 40 microns or not greater than 30 microns or not greater than 20 microns or not greater than 10 microns.
Embodiment 69. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises a plurality of pores, the plurality of pores comprising a D90 value of at least 0.5 microns or at least 0.6 microns or at least 0.7 microns or at least 0.9 microns or at least 1 micron or at least 5 microns or at least 10 microns or at least 20 microns or at least 50 microns or at least 75 microns or at least 100 microns.
Embodiment 70. The abrasive article of any one of Embodiments 1, 2, and 69 wherein the body comprises a plurality of pores, the plurality of pores comprising a D90 value of not greater than 500 microns or not greater than 400 microns or not greater than 300 microns or not greater than 200 microns or not greater than 100 microns or not greater than 75 microns or not greater than 50 microns or not greater than 25 microns or not greater than 15 microns or not greater than 10 microns.
Embodiment 71. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises a plurality of pores, the plurality of pores comprising a D10 value of at least 0.001 microns or at least 0.005 microns or at least 0.01 microns or at least 0.05 microns or at least 0.1 microns or at least 0.5 microns or at least 1 micron or at least 2 microns or at least 5 microns.
Embodiment 72. The abrasive article of any one of Embodiments 1, 2, and 71, wherein the body comprises a plurality of pores, the plurality of pores comprising a D10 value of not greater than 200 microns or not greater than 100 microns or not greater than 75 microns or not greater than 50 microns or not greater than 25 microns or not greater than 15 microns or not greater than 10 microns or not greater than 2 microns or not greater than 1 microns or not greater than 0.1 microns.
Embodiment 73. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises a plurality of pores, the plurality of pores defining a pore size distribution comprising a 10th percentile value (D10), and further wherein the difference between the 10th percentile (D10) and an average pore size (D50) is not greater than 100 microns or not greater than 90 microns or not greater than 80 microns or not greater than 50 microns or not greater than 25 microns or not greater than 10 microns.
Embodiment 74. The abrasive article of any one of Embodiments 1, 2 and 73, wherein the body comprises a plurality of pores, the plurality of pores defining a pore size distribution comprising a 10th percentile value (D10), and further wherein the difference between the 10th percentile (D10) and an average pore size (D50) is at least 0.5 microns or at least 1 micron or at least 3 microns or at least 5 microns or at least 10 microns.
Embodiment 75. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises a plurality of pores, the plurality of pores define a pore size distribution comprising a 10th percentile value (D10) and a 90th percentile value (D90), and further wherein the difference between the 90th percentile (D90) and the 10th percentile value (D10) is not greater than 300 microns or not greater than 200 microns or not greater than 100 microns or not greater than 75 microns or not greater than 50 microns or not greater than 25 microns or not greater than 10 microns.
Embodiment 76. The abrasive article of any one of Embodiments 1, 2, and 75 wherein the body comprises a plurality of pores, the plurality of pores define a pore size distribution comprising a 10th percentile value (D10) and a 90th percentile value (D90), and further wherein the difference between the 90th percentile (D90) and the 10th percentile value (D10) is at least 0.01 microns or at least 0.05 microns or at least 0.1 microns or at least 0.5 microns or at least 1 micron or at least 2 microns.
Embodiment 77. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises a density of not greater than 2.5 g/cm3 or not greater than 2.4 g/cm3 or not greater than 2.3 g/cm3 or not greater than 2.2 g/cm3 or not greater than 2.1 g/cm3 or not greater than 2.0 g/cm3 or not greater than 1.9 g/cm3 or not greater than 1.8 g/cm3 or not greater than 1.7 g/cm3, or not greater than 1.60 g/cm3, or not greater than 1.55 g/cm3.
Embodiment 78. The abrasive article of any one of Embodiments 1, 2, and 77 wherein the body comprises a density of at least 1.0 g/cm3 or at least 1.1 g/cm3 or at least 1.2 g/cm3 or at least 1.3 g/cm3, or at least 1.35 g/cm3 or at least 1.40 g/cm3 or at least 1.42 g/cm3 or at least 1.46 g/cm3 or at least 1.48 g/cm3.
Embodiment 79. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises an elastic modulus (EMOD) according to ASTM E1876 of at least 9.5 GPa, or at least 10 GPa, or at least 10 GPa, or at least 11 GPa, or at least 12 GPa, or at least 13 GPa, or at least 14 GPa or at least 15 GPa.
Embodiment 80. The abrasive article of any one of Embodiments 1, 2, and 79 wherein the body comprises an elastic modulus (EMOD) according to ASTM E1876 of not greater than 20 GPa, or not greater than 19 GPa, or not greater than 18 GPa, or not greater than 17 GPa or not greater than 16 GPa, or not greater than 15 GPa.
Embodiment 81. The abrasive article of any one of Embodiments 1 and 2, wherein the body comprises at least one filler, wherein the filler is a particulate having an average size (D50f) that is different than an average particle size (D50) of the abrasive particles.
Embodiment 82. A system including a grinding machine, a wafer comprising a material suitable for forming electronic devices thereon, and the abrasive article of any one of Embodiments 1 and 2.
Embodiment 83. The system of Embodiment 82, wherein the abrasive article is configured to be moved relative to a surface of the wafer to remove material from the surface of the wafer.
Embodiment 84. An abrasive system comprising:
Embodiment 85. The abrasive system of Embodiment 84, wherein each of the segments of the plurality of segments include the abrasive article of Embodiment 1.
Embodiment 86. The abrasive system of Embodiment 84, wherein each of the segments of the plurality of segments include the abrasive article of Embodiment 2.
Embodiment 87. The abrasive system of Embodiment 84, wherein at least a portion of the segments include any one or more combination of claimed features herein.
Representative samples of abrasive bodies were created using the following process. A dispersion of 25% diamond particles in water was made having an average particle size (D50) of about 250 nanometers. A mixture was then made including 89 wt % of the diamond particle dispersion, 8.6 wt % of a bond precursor material having an average particle size of 2 microns, 1.5 wt % of an organic binder (polyethylene glycol), and 0.9 wt % of Darvan 821/HLB 14 (an anti-agglomerating agent).
The mixture was mixed with a Cowles style mixing blade and then freeze cast at a temperature of approximately −50° C. for a duration of 62 hours. After freeze casting, the material was granulated and sized using a 15 US standard mesh screen. The material passing through the 15 mesh screen was gathered and sieved again using a 100 US standard mesh screen and mixed in a final step with a Resodyne mixer.
The granulated and sieved powder mixture was then molded. Approximately 56.5 g of the powder mixture was added to a mold with agitation to obtain a tap density of about 0.56 g/cm3.
After filling the mold, the mold was closed, and the powder was cold pressed at room temperature to a pre-calculated volume of 33 cm3. The applied pressure was about 9 tons/inch2 (124 MPa) for about 10 seconds. After the cold-pressing, the green body was removed from the mold and transferred to an oven. The green body was generally in the form of a puck, which would be suitable to yield a plurality of abrasive bodies or abrasive segments. The green body was heated at a heating rate of 1° C./min up to 450° C. in air for a duration of 2 hours and then cooled at room temperature to 25° C., and thereafter heated again at a rate of 1° C./min up to a temperature of 765° C. in nitrogen, and maintained at 765° C. for three hours then cooled at room temperature to 25° C.
The green body was then shaped using a water-jet cutting process. Four samples, samples S1, S2, S3, and CS1, were made according to the above-described process; however, the samples differed in that they were prepared using abrasive segments having different shapes. Samples S1, S2, and S3 had an abrasive segment shapes as illustrated in
As can be seen,
The grinding performance of abrasive articles formed using the segments from samples S3 and CS1 were compared. Abrasive wheels were prepared having the structure of the multi-segment wheel as shown in
Sample Wheel 1 and Comparative Sample Wheel 2, respectively. Sample Wheel 1 is constructed such that the first portion 701 of the abrasive segment is the leading edge and oriented toward the grinding direction and second portion 702 of the abrasive segment is the trailing edge and oriented away from the grinding direction similar to what is shown in
A second grinding test was performed with a second wheel, Sample Wheel 2, which was the same as Sample Wheel 1 except that the wheel was constructed such that the first portion 701 of the abrasive segment is the trailing edge and oriented away from the grinding direction and second portion 702 of the abrasive segment is the leading edge and oriented toward the grinding direction which is the opposite of what is shown in
The embodiments herein are directed to abrasive articles for use with grinding wheels that represent a departure from the state-of-the-art bonded abrasive articles. Notably, the embodiments herein utilize a combination of material components, design structures, and derived ratios present within an abrasive segment that facilitate improved grinding. Particular features of the embodiments that can be combined in various manners include abrasive grain sizes, bond materials, percentages of porosity with the abrasive body, shape of the twisted path, joining angles, edge ratios, cutting distance, volume of cavities, placement of cavities, designs of leading edges, trailing edges, and neutral edges. The foregoing describes a combination of features, which can be combined in various manners to describe and define the bonded abrasive articles of the embodiments. The description is not intended to set forth a hierarchy of features, but different features that can be combined in one or more manners to define the invention.
In the foregoing, reference to specific embodiments and the connections of certain components is illustrative. It will be appreciated that reference to components as being coupled or connected is intended to disclose either direct connection between said components or indirect connection through one or more intervening components as will be appreciated to carry out the methods as discussed herein. As such, the above-disclosed subject matter is to be considered illustrative, and not restrictive, and the appended claims are intended to cover all such modifications, enhancements, and other embodiments, which fall within the true scope of the present invention. Thus, to the maximum extent allowed by law, the scope of the present invention is to be determined by the broadest permissible interpretation of the following claims and their equivalents and shall not be restricted or limited by the foregoing detailed description.
The Abstract of the Disclosure is provided to comply with Patent Law and is submitted with the understanding that it will not be used to interpret or limit the scope or meaning of the claims. In addition, in the foregoing Detailed Description, various features may be grouped together or described in a single embodiment for the purpose of streamlining the disclosure. This disclosure is not to be interpreted as reflecting an intention that the claimed embodiments require more features than are expressly recited in each claim. Rather, as the following claims reflect, inventive subject matter may be directed to less than all features of any of the disclosed embodiments. Thus, the following claims are incorporated into the Detailed Description, with each claim standing on its own as defining separately claimed subject matter.
This application claims priority under 35 U.S.C. § 119(e) to U.S. Provisional Application No. 63/615,912, entitled “ABRASIVE ARTICLE AND METHOD OF USE,” by Taewook HWANG et al., filed Dec. 29, 2023, which is assigned to the current assignee hereof and incorporated herein by reference in its entirety.
Number | Date | Country | |
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63615912 | Dec 2023 | US |