Number | Date | Country | Kind |
---|---|---|---|
61-54974 | Mar 1986 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4522072 | Sulouff et al. | Jun 1985 | |
4553436 | Hansson | Nov 1985 |
Number | Date | Country |
---|---|---|
60-55655 | Mar 1985 | JPX |
61-97572 | May 1986 | JPX |
1534276 | Nov 1978 | GBX |
Entry |
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L. M. Roylance et al., "A Batch-Fabricated Silicon Accelerometer," IEEE Transactions on Electron Devices, vol. ED-26, No. 12 (Dec. 1979), pp. 1911-1917. |