Claims
- 1. A pendulous accelerometer comprising:
- a housing;
- a frame fixed to said housing, said frame including first and second substantially planar covers and a substantially planar internal frame member, said first cover substantially parallel with and spaced away from said second cover and said internal frame member suspended between said first and second covers;
- a first pedestal portion extending between a first side of said internal frame member and a first side of said first cover;
- a second pedestal portion extending between a second side of said internal frame member and a first side of said second cover;
- a reaction mass rotatably attached external to said internal frame member; and
- means for measuring a displacement of said reaction mass.
- 2. The pendulous accelerometer of claim 1 wherein said reaction mass includes a passage formed therein.
- 3. The pendulous accelerometer of claim 2 wherein said internal frame member is nominally disposed within said passage of said reaction mass and further comprising a flexural suspension member extending between said reaction mass and said internal frame member for rotatably connecting said reaction mass to said internal frame member.
- 4. The pendulous accelerometer of claim 3 wherein said displacement measuring means comprises first and second vibrating beam force sensors extending between said internal frame member and said reaction mass.
- 5. A method of manufacturing a pendulous accelerometer, comprising the steps of:
- forming a frame comprising first and second substantially planar covers and a substantially planar internal frame member, said first cover formed substantially parallel with and spaced away from said second cover and said internal frame member suspended between said first and second covers;
- forming a first pedestal portion extending between a first side of said internal frame member and a first side of said first cover;
- forming a second pedestal portion extending between a second side of said internal frame member and a first side of said second cover;
- fixing said frame to a housing;
- mounting a reaction mass external to said internal frame member and rotatably attached to said internal frame member; and
- mounting a detector between said internal frame member and said reaction mass, said detector measuring a displacement of said reaction mass relative to said internal frame member.
- 6. The method of claim 5 wherein said reaction mass mounting step includes fixing a cover to said housing and fixing an internal frame member to said cover.
- 7. The method of claim 6 wherein said reaction mass and said internal frame member are formed of a single substrate.
Parent Case Info
This application claims priority from U.S. provisional application Ser. No. 60/044,034 filed Apr. 22, 1997, which is incorporated herein by reference.
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