Active matrix substrate, electro-optic device and electronic apparatus

Abstract

An active matrix substrate comprises a substrate, a first electrode disposed on one surface side of the substrate, an insulating film, a plurality of second electrodes, and a plurality of switching elements. The insulating film is disposed between the first electrode and the plurality of second electrodes, and each of the plurality of second electrodes is electrically connected to one of the plurality of switching elements.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The invention will be described with reference to the accompanying drawings, wherein like numbers reference like elements.

FIG. 1 is a schematic plan view showing the structure of an active matrix substrate of one embodiment.

FIG. 2 is a schematic plan view in which the active matrix substrate is partially enlarged.

FIG. 3 is a sectional view taken in the direction of line III-III of FIG. 2.

FIG. 4 is a sectional view taken in the direction of line IV-IV of FIG. 2.

FIG. 5 is a schematic sectional view showing a structure example of an electrophoretic display.

FIG. 6 is a view for illustrating an example of a drive method of the electrophoretic display.

FIG. 7 is a schematic sectional view showing a structure example of a liquid crystal display.

FIGS. 8A to 8C are perspective views each exemplifying an electronic apparatus with an electro-optic device.

Claims

1. An active matrix substrate, comprising: a substrate;a first electrode disposed on one surface side of the substrate;an insulating film;a plurality of second electrodes; anda plurality of switching elements,the insulating film being disposed between the first electrode and the plurality of second electrodes; andeach of the plurality of second electrodes being electrically connected to one of the plurality of switching elements.

2. The active matrix substrate according to claim 1, the plurality of switching elements being disposed on the insulating film.

3. The active matrix substrate according to claim 1, each of the plurality of switching elements including:a source electrode disposed on the insulating film;a drain electrode disposed on the insulating film;a semiconductor film connected to the source electrode and the drain electrode;a gate insulating film disposed on the semiconductor film; anda gate electrode disposed over the semiconductor film with the gate insulating film sandwiched therebetween.

4. The active matrix substrate according to claim 3, the plurality of second electrodes, the source electrode and the drain electrode being disposed in an identical layer.

5. The active matrix substrate according to claim 1, each of the plurality of switching elements including:a gate electrode disposed on the insulating film;a gate insulating film disposed on the gate electrode;a source electrode disposed on the gate insulating film;a drain electrode disposed on the gate insulating film; anda semiconductor film connected to the source electrode and the drain electrode.

6. The active matrix substrate according to claim 5, the plurality of second electrodes, the source electrode and the drain electrode being disposed in an identical layer.

7. The active matrix substrate according to claim 1, each of the plurality of second electrodes being one pixel electrode.

8. The active matrix substrate according to claim 1, an electrostatic capacitance being provided between the first electrode and the plurality of second electrodes.

9. The active matrix substrate according to claim 3, the plurality of second electrodes, the source electrode and the drain electrode being made of an identical material.

10. An electro-optic device, comprising: the active matrix substrate according to claim 1;a third electrode disposed opposite to the plurality of second electrodes; andan electro-optic medium disposed between the plurality of second electrodes and the third electrode.

11. An electronic apparatus provided with the electro-optic device according to claim 7.