Claims
- 1. A device for measuring force in a force flux, comprising a force sensor integrated in an actuator, said actuator having a bottom which is formed transversely with respect to the force flux and on which the force acts centrally, and a supporting ring for transmitting the force, arranged peripherally on an outer edge of the actuator bottom in the direction of force, the actuator bottom capable of being deformed by the force and comprising part of the force sensor, whereby a detectable deformation of the actuator bottom constitutes a measure of the force, the deformation comprising a central deflection of the actuator bottom relative to the edge of said actuator, and the deflection being detectable by a plate capacitor configuration having an electrode positioned on an electrode mount which is pressed, with spring support, onto a base, and wherein the actuator bottom serves as a corresponding electrode.
- 2. A device for measuring force in a force flux, comprising a force sensor integrated in an actuator, said actuator having a bottom which is formed transversely with respect to the force flux and on which the force acts centrally, and a supporting ring for transmitting the force, connected peripherally on an outer edge of the actuator bottom in the direction of force, and an internal peripheral groove formed to reduce a cross section of the connection so that minimized temperature gradients occur in the direction of force in the actuator bottom and so as to result in a reduced mechanical coupling between the actuator bottom and supporting ring so that transmission of force from the actuator bottom to the supporting ring is minimized, the actuator bottom capable of being deformed by the force and comprising part of the force sensor, whereby a detectable deformation of the actuator bottom constitutes a measure of the force.
- 3. The device according to claim 2, wherein the deformation is detectable by means selected from one or more of the following: inductive or optical measuring methods, metallic piezoresistive or semiconductor strain gauges, and strain sensors with silicon surface micromechanics.
Priority Claims (1)
Number |
Date |
Country |
Kind |
199 58 903 |
Dec 1999 |
DE |
|
CROSS-REFERENCE TO RELATED APPLICATIONS
This is a national application for International Application No. PCT/DE00/4266 which was filed on Nov. 30, 2000 and which published in German on Jun. 7, 2001 which in turn claims priority from 199 58 251.3, which was filed on Dec. 3, 1999 of which the following is a of which the following is a specification.
PCT Information
Filing Document |
Filing Date |
Country |
Kind |
PCT/DE00/04319 |
|
WO |
00 |
Publishing Document |
Publishing Date |
Country |
Kind |
WO01/42755 |
6/14/2001 |
WO |
A |
US Referenced Citations (4)
Number |
Name |
Date |
Kind |
3626814 |
Andersson |
Dec 1971 |
A |
5313022 |
Piroozmandi et al. |
May 1994 |
A |
6048723 |
Banes |
Apr 2000 |
A |
6279407 |
Park et al. |
Aug 2001 |
B1 |