This application is based upon and claims the benefit of priority from Japanese Patent Application No. 2022-199616, filed on Dec. 14, 2022, the entire contents of which are incorporated herein by reference.
The present disclosure relates to an A/D converter and a sensor apparatus.
Various sensors such as pressure sensors and temperature sensors are known in the related art For example, a pressure sensor including a resistance bridge circuit constituted by piezoresistors is known in the related art.
The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the present disclosure.
Reference will now be made in detail to various embodiments, examples of which are illustrated in the accompanying drawings. In the following detailed description, numerous specific details are set forth in order to provide a thorough understanding of the present disclosure. However, it will be apparent to one of ordinary skill in the art that the present disclosure may be practiced without these specific details. In other instances, well-known methods, procedures, systems, and components have not been described in detail so as not to unnecessarily obscure aspects of the various embodiments.
Hereinafter, exemplary embodiments of the present disclosure will be described with reference to the drawings.
Herein, prior to describing exemplary embodiments according to the present disclosure, a comparative example will be described for comparison. By explaining such a comparative example, problems will become clearer.
The MEMS sensor 1 includes a resistance bridge circuit 11 constituted by MEMS resistors R1, R2, R11, and R12. The MEMS resistors R1 and R2 are connected in series between an application end of a power supply voltage Vcc and an application end of a ground potential. The MEMS resistors R11 and R12 are connected in series between the application end of the power supply voltage Vcc and the application end of the ground potential.
The MEMS sensor 1 is configured by integrating a diaphragm and the resistance bridge circuit 11. For example, the resistance bridge circuit 11 is formed by using a Si substrate as the diaphragm and diffusing impurities into a surface of the Si substrate. The MEMS sensor 1 is a pressure sensor that utilizes a piezoresistance effect. The piezoresistance effect is a phenomenon in which a resistance value changes when a pressure is applied to a resistor.
When a pressure is applied to the diaphragm, resistance values change in the MEMS resistors R1, R2, R11, and R12. Depending on the resistance values of the MEMS resistors R1 and R2, an input voltage VIN is generated at a node N1 to which R1 and R2 are connected.
The use of the resistance bridge circuit is not limited to pressure sensors, but it may also be used, for example, as temperature sensors.
The voltage follower 2 is configured to output an input voltage Vin based on the input voltage VIN.
The A/D converter 30 is provided after the voltage follower 2. The A/D converter 30 is configured as a double integration type A/D converter and includes an integrating circuit 301, a comparator 32, and a logic circuit 33.
The integrating circuit 301 includes an input resistor Ri, an input switch Si, an output resistor Ro, an output switch So, a capacitor C, and an amplifier 31. An output voltage VINT of the amplifier 31 becomes an output voltage of the integrating circuit 301.
One end of the input resistor Ri is connected to an application end of the input voltage Vin. The other end of the input resistor Ri is connected to one end of the input switch Si. The other end of the input switch Si is connected to a first input end of the amplifier 31. One end of the output switch So is connected to the first input end of the amplifier 31. The other end of the output switch So is connected to one end of the output resistor Ro. The other end of the output resistor Ro is connected to an application end of a second reference voltage −Vref2. The capacitor C is connected between the first input end of the amplifier 31 and an output end of the amplifier 31. A second input end of the amplifier 31 is connected to an application end of a first reference voltage Vref1.
A first input end of the comparator 32 is connected to the output end of the amplifier 31. A second input end of the comparator 32 is connected to the application end of the first reference voltage Vref1.
Herein, an operation of the A/D converter 30 will be explained. First, by turning on the input switch Si and turning off the output switch So, an input current Ii flows through the input resistor Ri, and the capacitor C is charged. At this time, in a case where Ti is a charging period and Vint is a voltage of the capacitor C, Equation (1) is established.
Here, VINT(T=Ti) is the output voltage of the amplifier 31 after the charging period Ti has elapsed.
Next, by turning off the input switch Si and turning on the output switch So, an output current Io flows through the output resistor Ro, and the capacitor C is discharged. At this time, in a case where To is a discharging period required to discharge charges stored in the capacitor C during the charging period Ti, Equation (2) is established.
Substituting Equation (1) into Equation (2),
Here, Ii=(Vin−Vref1)/Ri
Io=(Vref1+Vref2)/Ro
Here, in a case where Ri=Ro and Vref1=0 (ground potential), Equation (3) is
For the sake of convenience of explanation, Ri, Ro, and Vref1 are used as the above-described conditions, but the conditions are not limited thereto.
As shown in
From Equation (4), in a case where the charging period Ti is a fixed value, the discharging period To changes according to the input voltage Vin. Therefore, the input voltage VIN may be measured by counting the discharging period To which is a time from a timing when the charging period Ti has elapsed to a timing when the level of the comparator output CPout is switched. The output voltage VINT indicated by a broken line in
More specifically, the logic circuit 33 measures the fixed charging period Ti by counting clocks of a predetermined frequency by 2n. That is, the logic circuit 33 performs an n-bit counting. Then, when switching the switches Si and So to start discharging the integrating circuit 301, the logic circuit 33 resets the count to restart the count and measures the discharging period To as a count value of the clocks. From the above-described equation (4), the input voltage Vin is at the stage of a count value corresponding to To among 2n(Ti) divisions of the second reference voltage Vref2. The count value corresponding to the discharging period To becomes an output (digital output) of the A/D converter 30.
When Ri=Ro and Vref1=0 as described above, the A/D converter 30 may also be configured as shown in
However, in the above-described comparative example, the following problems occur. From the above-described equation (4), when Vin=Vref2, Ti=To. In a timing chart of
The lower limit value Vlim is a lower limit value of the output voltage VINT output from the output stage 311 and is higher than the negative power supply voltage Vn by a saturation voltage generated between the drain and the source of the NMOS transistor NM (see
When the input voltage Vin exceeds the second reference voltage Vref2, as indicated by a solid line in
Here, from the above-described equation (1), the output voltage VINT when the charging period Ti has elapsed is:
Here, R=Ri=Ro.
To widen a measurement range of the input voltage Vin, a value of R=Ri=Ro may be changed according to a maximum measured value of the input voltage Vin so that the input current Ii is constant for a fixed Ti. For example, to keep Ii=1 mA, when the maximum measured value of the input voltage Vin is 100 mV, R is set to 100Ω, and when the maximum measured value of the input voltage Vin is 1 V, R is set to 1 kΩ. Further, when Ti=To (broken line in
Further, when the measurement range of the input voltage Vin is expanded according to the above-described method, a voltage value per step in resolution of the n-bit A/D output may increase, thus lowering a measurement accuracy in the measurement range before the expansion.
Hereinafter, embodiments of the present disclosure implemented to solve the above-described problems will be described.
In the present embodiment, the second comparator 34 is added to the configuration according to the comparative example (
Herein, for the sake of convenience of explanation, it is assumed that Ri=Ro and Vref1=0 (ground potential). In this case, the integrating circuit 301 of the configuration shown in
Next, an operation of the A/D converter 30 according to the present embodiment will be described with reference to a flowchart of
Herein, in
Further, in
When a process shown in
At this time, the logic circuit 33 starts counting clocks of a predetermined frequency. In this case, a count value (full count value) corresponding to the predetermined period T1 is 2n. That is, an n-bit counting is performed.
The logic circuit 33 monitors the comparator output Cpout1 of the first comparator 32 and monitors whether or not the output voltage VINT reaches the third reference voltage (−Vref3) and the comparator output Cpout2 is switched from a high level to a low level before the predetermined period T1 elapses (steps S2 and S3).
In a case where Vin>Vref2, as shown in
The logic circuit 33 monitors the comparator output Cpout1 (step S5). When the output voltage VINT reaches the first reference voltage Vref1 and the comparator output Cpout1 is switched from a low level to a high level (Yes in step S5, timing t82 in
In this way, when Vin>Vref2, Ti<T1 and Ti (that is, CNT1) changes according to Vin. At this time, T2 (that is, CNT2) has a fixed value. Therefore, even when Vin>Vref2, Vin may be measured by CNT2/CNT1. In an ideal state with no variation factors, it is possible to set a value based only on CNT1 among CNT1 (T1) and CNT2 (T2), as the A/D output. For example, 2n/CNT1 may be used as the A/D output. However, since there are actually variation factors, by using CNT2/CNT1 as the A/D output, the variation factors are canceled to improve the accuracy.
On the other hand, when Vin<Vref2, as shown by the output voltage VINT (solid line) in
In this way, when Vin<Vref2, since T2 changes according to Vin with respect to T1, which is a fixed value, Vin may be measured by using the count value CNT2 as the A/D output. That is, in the present embodiment, Vin may be measured even when Vin>Vref2, such that the measurement range is expanded, and the measurement accuracy when Vin<Vref2 is not lowered.
Although exemplary embodiments have been described above, the embodiments may be modified in various ways within the scope of the spirit of the present invention.
As described above, for example, an A/D converter (30) according to an aspect of the present disclosure has a configuration that it includes:
Further, the A/D converter (30) of the first configuration may have a configuration that it further includes: a second comparator (34) configured to compare the output voltage (VINT) and the third reference voltage (−Vref3) and output a comparison result to the switch controller (33) (second configuration).
Further, the A/D converter (30) of the second configuration may have a configuration that the amplifier (31) includes an output stage (311) configured to output the output voltage (VINT),
Further, the A/D converter (30) of any one of the first to third configurations may have a configuration that it further includes: a counter (33) configured to count a charging period count value (CNT1) corresponding to a charging period until the output voltage (VINT) reaches the third reference voltage (−Vref3) after turning on the first switch (Si) and turning off the second switch (So) and count a discharging period count value (CNT2) corresponding to a discharging period until the output voltage reaches the first reference voltage (Vref1) after turning off the first switch and turning on the second switch,
Further, the A/D converter (30) of the fourth configuration may have a configuration that the output value based on the charging period count value is CNT2/CNT1, where CNT1 is the charging period count value and CNT2 is the discharging period count value (fifth configuration).
Further, the A/D converter (30) of any one of the first to fifth configurations may have a configuration that the first resistor (Ri) and the second resistor (Ro) have a same resistance value, and the first reference voltage (Vref1) is a ground potential (sixth configuration).
Further, the A/D converter (30) of the sixth configuration may have a configuration that the first resistor and the second resistor are constituted as a common resistor (R) (seventh configuration).
Further, another aspect of the present disclosure provides a sensor apparatus (50) including: the A/D converter (30) of any one of the first to seventh configurations; and a resistance bridge circuit (11) provided before the A/D converter.
The present disclosure can be used, for example, in various sensor apparatuses.
While certain embodiments have been described, these embodiments have been presented by way of example only, and are not intended to limit the scope of the disclosures. Indeed, the embodiments described herein may be embodied in a variety of other forms. Furthermore, various omissions, substitutions and changes in the form of the embodiments described herein may be made without departing from the spirit of the disclosures. The accompanying claims and their equivalents are intended to cover such forms or modifications as would fall within the scope and spirit of the disclosures.
Number | Date | Country | Kind |
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2022-199616 | Dec 2022 | JP | national |