| Number | Date | Country | Kind |
|---|---|---|---|
| 43 15 238.4 | May 1993 | DEX |
| Number | Name | Date | Kind |
|---|---|---|---|
| 4019073 | Vishnevsky et al. | Apr 1977 | |
| 4613782 | Mori et al. | Sep 1986 | |
| 5036245 | Ohnishi et al. | Jul 1991 | |
| 5039899 | Yamaguchi | Aug 1991 | |
| 5216313 | Ohnishi et al. | Jun 1993 |
| Number | Date | Country |
|---|---|---|
| 0187270 | Sep 1985 | JPX |
| 62-58883 | Mar 1987 | JPX |
| Entry |
|---|
| Forschungsberichte Aus Fein-Und Mikrotechhnik, Institut fur Zeitmessechnik, Fein-und Mikrotechnik der Universitat Stuttgart, Hahn-Schickard-Institut fur Feinwerk-und Zeitmesstechnik Stuttgart, pp. 61, 75 (1991). |