Claims
- 1. An air shower apparatus for removing a particle from an object by blowing an air to the object, comprising:
an outlet for discharging the air from the outlet toward the object so that a flow axis of the air flowing out of the outlet is swung frequently and alternately; and an inner wall extends from an outer periphery of the outlet in a radial direction of the outlet.
- 2. An air shower apparatus according to claim 1, wherein the inner wall extends from the outer periphery of a direction without a recess in a direction oblique to the radial direction of the outlet.
- 3. An air shower apparatus according to claim 1, wherein the inner wall extends flatly from the outer periphery of the outlet in the radial direction of the outlet.
- 4. An air shower apparatus according to claim 1, further comprising another outlet arranged adjacent to the outlet in the radial direction of the outlet to discharge the air from the another outlet toward the object so that another flow axis of the air flowing out of the another outlet is swung frequently and alternately;
wherein the inner wall extends from the outer periphery of the outlet to the outer periphery of the another outlet without a recess in a direction oblique to the radial direction of the outlet.
- 5. An air shower apparatus according to claim 4, wherein the inner wall extends flatly from the outer periphery of the outlet to the outer periphery of the another outlet.
- 6. An air shower apparatus according to claim 1, wherein the inner wall extends flatly from an outer periphery of the outlet in the radial direction of the outlet, and the outlet has an inner surface having an obtuse angle with respect to the inner wall.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2002-350630 |
Dec 2002 |
JP |
|
CROSS REFERENCE TO RELATED APPLICATION
[0001] This is a continuation of U.S. application Ser. No.10/382,834, filed Mar. 7, 2003, the subject matter of which is incorporated by reference herein.
Continuations (1)
|
Number |
Date |
Country |
Parent |
10382834 |
Mar 2003 |
US |
Child |
10873185 |
Jun 2004 |
US |