Number | Date | Country | Kind |
---|---|---|---|
2000-044742 | Feb 2000 | JP |
Number | Name | Date | Kind |
---|---|---|---|
3843183 | Hutson | Oct 1974 | A |
3880297 | Martin | Apr 1975 | A |
3946484 | Aronstein et al. | Mar 1976 | A |
4002254 | Olofsen | Jan 1977 | A |
4009785 | Trayes | Mar 1977 | A |
4029351 | Apgar et al. | Jun 1977 | A |
4257637 | Hassan et al | Mar 1981 | A |
4474397 | Hassan et al. | Oct 1984 | A |
4566726 | Correnti et al. | Jan 1986 | A |
4735449 | Kuma | Apr 1988 | A |
4969676 | LaMagna | Nov 1990 | A |
4995662 | Hawkswell | Feb 1991 | A |
5067762 | Akashi | Nov 1991 | A |
5080549 | Goodwin et al. | Jan 1992 | A |
5106139 | Palmer et al. | Apr 1992 | A |
5118153 | Allison et al. | Jun 1992 | A |
5169196 | Safabakhsh | Dec 1992 | A |
5270889 | Muratomi | Dec 1993 | A |
5280979 | Poli et al. | Jan 1994 | A |
5370709 | Kobayashi | Dec 1994 | A |
5374090 | Goff | Dec 1994 | A |
5511840 | Allison et al. | Apr 1996 | A |
5871814 | Livshits | Feb 1999 | A |
5928537 | Fortune | Jul 1999 | A |
5967578 | Frey | Oct 1999 | A |
6099056 | Siniaguine et al. | Aug 2000 | A |
Number | Date | Country |
---|---|---|
2704981 | May 1978 | DE |
136755 | Jun 1986 | JP |
287638 | Dec 1987 | JP |
5-211226 | Aug 1993 | JP |
9-129587 | May 1997 | JP |
9-269221 | Oct 1997 | JP |
8904547 | May 1989 | WO |
Entry |
---|
Garnache R.R., “Automatic Wafer Loader”, IBM Technical Disclosure Bulletin, vol. 14, No. 8, Jan. 1972, p. 2478. |