| Number | Name | Date | Kind |
|---|---|---|---|
| 5097054 | Yamamoto et al. | Mar 1992 | |
| 5175328 | Okawa et al. | Dec 1992 | |
| 5232693 | Legrow | Aug 1993 | |
| 5272243 | Nakashima et al. | Dec 1993 | |
| 5274156 | Legrow | Dec 1993 |
| Number | Date | Country |
|---|---|---|
| 568318 | Nov 1993 | EPX |
| 62-039660 | Feb 1987 | JPX |
| Entry |
|---|
| "Silicon Compounds: Register and Review", 5th Edition, Huls America Inc., (1991) pp. 160, 171. |