Claims
- 1. An aluminum reflecting mirror in which first to fifth layers are laminated on a glass substrate successively from said glass substrate side;wherein said first layer is a protective film formed by depositing SiO, said second layer is an aluminum reflective film formed by depositing Al, said third layer is a transparent protective film formed by depositing MgF2 and comprised of a two-layer structure composed by a lower layer formed by lower-temperature deposition and an upper layer formed by a higher-temperature deposition, wherein said lower-temperature deposition is carried out at a temperature sufficient to prevent said aluminum reflective film from lowering its reflectivity and said higher-temperature deposition is carried out at a temperature to strengthen said third layer, said fourth layer is a transparent protective film formed by depositing CeO2, and said fifth layer is a transparent protective film formed by depositing SiO2.
- 2. An aluminum reflecting mirror according to claim 1, wherein when the wavelength of light in use λ=633 nm, said first layer has an optical film thickness of (¼)λ to (½)λ, said second layer has a mechanical film thickness of 100 to 500 nm, said third layer has an,optical film thickness of (¼)λ, said fourth layer has an optical film thickness of (¼)λ, and said fifth layer has an optical film thickness of (⅛)λ to ({fraction (1/16)})λ.
Priority Claims (1)
Number |
Date |
Country |
Kind |
2000-167485 |
Jun 2000 |
JP |
|
RELATED APPLICATIONS
This application claims the priority of Japanese Patent Application No. 2000-167485 filed on Jun. 5, 2000, which is incorporated herein by reference. This application is a divisional of application Ser. No. 09/858,460, filed on May 17, 2001 (now U.S. Pat. No. 6,558,741 issued May 6, 2003).
US Referenced Citations (6)
Number |
Name |
Date |
Kind |
4482209 |
Grewal et al. |
Nov 1984 |
A |
4919778 |
Dietrich et al. |
Apr 1990 |
A |
5073451 |
Iida et al. |
Dec 1991 |
A |
5085904 |
Deak et al. |
Feb 1992 |
A |
5201926 |
Szczyrbowski et al. |
Apr 1993 |
A |
6262847 |
Tsukamoto |
Jul 2001 |
B1 |
Foreign Referenced Citations (3)
Number |
Date |
Country |
299 774 |
May 1992 |
DD |
5-150105 |
Jun 1993 |
JP |
05-150105 |
Jun 1993 |
JP |
Non-Patent Literature Citations (1)
Entry |
Japanese Patent Office, English Language Translation of Abstract from Patent Abstracts of Japan, with Japanese Unexamined Patent Publication No.: 5-150105, Publication Date: Jun. 18, 1993, Application No.: 3-317870, Application Filing Date: Dec. 2, 1991, pp. 1-3. |