Number | Name | Date | Kind |
---|---|---|---|
2705765 | Geer | Apr 1955 | |
4726662 | Cromack | Feb 1988 | |
4857799 | Spindt et al. | Aug 1989 | |
4972117 | Adler et al. | Nov 1990 | |
5061050 | Ogura | Oct 1991 | |
5103144 | Dunham | Apr 1992 | |
5192472 | Kurematsu et al. | Mar 1993 | |
5206746 | Ooi et al. | Apr 1993 | |
5210641 | Lewis | May 1993 | |
5225820 | Clerc | Jul 1993 | |
5240748 | Van Eskonk et al. | Aug 1993 | |
5272410 | Fox | Dec 1993 | |
5491376 | Levine et al. | Feb 1996 |
Entry |
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Zaidi, Saleem H. and Brueck, S. R. J.; Multiple Exposure Interferometric Lithography, SPIE 2197; Optical/Laser Microlithography VII, pp. 869-875 (1994). |
Cowan, James J., Holographic Honeycomb Microlens, Optical Engineering, pp. 769-802, Sep./Oct. 1985, vol. 24, No. 5. |