Claims
- 1. An alternating current thin film electroluminescent device comprising an AC power source and an emitter layer positioned between a pair of electrode layers, wherein:
at least one of said pair of electrode layers is transparent to visible light of a selected wavelength; said AC power source is connected across said pair of electrode layers; said emitter layer comprises a non-conductive amorphous alloy comprising aluminum nitride and an Er luminescent center; said emitter layer and said pair of electrode layers are arranged such that, upon activation of said AC power source, an electric field is created between said electrode layers across said emitter layer; and said aluminum nitride and said Er luminescent center are provided in proportions selected such that said electric field causes emission of visible light of said selected wavelength from said emitter layer.
- 2. An alternating current thin film electroluminescent device as claimed in claim 1 wherein said electroluminescent device is configured such that said emission of visible light is initiated upon application of at least about 70 VAC across said pair of electrode layers.
- 3. An alternating current thin film electroluminescent device as claimed in claim 1 wherein said electroluminescent device is configured such that said emission of visible light is initiated upon application of about 100 VAC across said pair of electrode layers.
- 4. An alternating current thin film electroluminescent device as claimed in claim 1 wherein said electroluminescent device is configured such that said emission of visible light is initiated upon application of between about 70 VAC and about 130 VAC across said pair of electrode layers.
- 5. An alternating current thin film electroluminescent device as claimed in claim 1 wherein said electroluminescent device is configured such that said emission of visible light is initiated upon generation of an electric field strength of between about 2.4 MV/cm and 3.4 MV/cm across said emitter layer.
- 6. An alternating current thin film electroluminescent device as claimed in claim 1 wherein said Er luminescent center comprises Er3+ ions.
- 7. An alternating current thin film electroluminescent device as claimed in claim 1 wherein said emitter layer defines a characteristic band gap of about 5.6 eV.
- 8. An alternating current thin film electroluminescent device as claimed in claim 1 wherein said emitter layer defines a characteristic band gap between about 5.4 eV and about 6.2 eV.
- 9. An alternating current thin film electroluminescent device as claimed in claim 1 wherein:
said emitter layer defines a characteristic band gap; and said amorphous alloy is characterized localized electronic states that do not extend into said characteristic band gap.
- 10. An alternating current thin film electroluminescent device as claimed in claim 1 wherein:
said emitter layer defines a characteristic band gap; and said amorphous alloy is characterized by a wavelength of electroluminescent emission that is substantially independent of said characteristic band gap of said emitter layer.
- 11. An alternating current thin film electroluminescent device as claimed in claim 1 wherein said emitter layer comprises between about 0.5% and about 1%, by weight, of said Er luminescent center.
- 12. An alternating current thin film electroluminescent device as claimed in claim 1 wherein said emitter layer defines a film thickness of about 200 an.
- 13. An alternating current thin film electroluminescent device as claimed in claim 1 wherein said emitter layer defines a film thickness of between about 50 nm and about 20 im.
- 14. An alternating current thin film electroluminescent device as claimed in claim 1 wherein:
said pair of electrode layers comprise a top electrode layer and a transparent bottom electrode layer; and said transparent bottom electrode layer comprises indium tin oxide.
- 15. An alternating current thin film electroluminescent device as claimed in claim 1 wherein:
said pair of electrode layers comprise a top electrode layer and a transparent bottom electrode layer; and said top electrode layer comprises aluminum.
- 16. An alternating current thin film electroluminescent device as claimed in claim 1 wherein:
said pair of electrode layers comprise a top electrode layer and a transparent bottom electrode layer; and said electroluminescent device further comprises a dielectric insulating layer disposed between said transparent bottom electrode layer and said emitter layer.
- 17. An alternating current thin film electroluminescent device as claimed in claim 16 wherein said dielectric insulating layer comprises aluminum titanium oxide.
- 18. An alternating current thin film electroluminescent device as claimed in claim 1 wherein:
said pair of electrode layers comprise a top electrode layer and a transparent bottom electrode layer; and said transparent bottom electrode layer is disposed between a transparent glass substrate and said emitter layer.
- 19. An alternating current thin film electroluminescent device as claimed in claim 18 wherein said electroluminescent device further comprises a dielectric insulating layer disposed between said transparent bottom electrode layer and said emitter layer.
- 20. A method of fabricating an alternating current thin film electroluminescent device by:
preparing a non-conductive amorphous film comprising aluminum nitride and an Er luminescent center by RF magnetron sputtering an Al target and an Er target in a nitrogenous atmosphere at room temperature under vacuum; activating said amorphous film to form an emitter layer by annealing said amorphous film at or above about 1023 K; positioning said emitter layer between a pair of electrode layers; connecting an AC power source across said pair of electrode layers, wherein said emitter layer and said pair of electrode layers are arranged such that, upon activation of said AC power source, an electric field is created between said electrode layers across said emitter layer and wherein said aluminum nitride and said Er luminescent center are provided in proportions selected such that said electric field causes emission of visible light of said selected wavelength from said emitter layer.
- 21. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 20 wherein said emitter layer is prepared by sputter deposition over a deposition surface of a glass substrate.
- 22. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 20 wherein said emitter layer defines a film thickness of about 200 nm.
- 23. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 22 wherein said deposition surface of said glass substrate is coated with a transparent electrode layer.
- 24. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 23 wherein said transparent electrode layer comprises indium tin oxide.
- 25. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 24 wherein said transparent electrode layer is further coated with a transparent dielectric insulating layer.
- 26. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 25 wherein said dielectric insulating layer comprises aluminum titanium oxide.
- 27. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 20 wherein said nitrogenous atmosphere comprises a substantially pure nitrogen atmosphere.
- 28. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 20 wherein said vacuum is less than about 3×10−5 Torr prior to sputtering and about 6×10−4 Torr during sputtering.
- 29. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 20 wherein said RF magnetron sputter is characterized by a sputtering power of about 200 W.
- 30. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 20 wherein said emitter layer is sputter deposited at an Er concentration of about 1%, by weight.
- 31. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 20 wherein said emitter layer is sputter deposited at an Er concentration of between about 0.5% and about 10%, by weight.
- 32. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 20 wherein said emitter layer is annealed in a nitrogenous atmosphere at about 1023 K for about 10 minutes.
- 33. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 20 wherein said Al target and said Er target comprise separate targets.
- 34. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 20 wherein said Er target comprises a plug formed in said Al target.
- 35. A method of fabricating an amorphous luminescent emitter layer comprising aluminum nitride and a transition metal luminescent center by:
co-sputtering an Al target and a transition metal target over a deposition surface of a semiconductor substrate so as to form an amorphous AlN:TM film on said deposition surface, wherein said RF magnetron sputtering is performed in a nitrogenous atmosphere, at room temperature, under vacuum; and activating said amorphous film by annealing at or above about 1250 K.
- 36. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 35 wherein said semiconductor substrate comprises a p-doped silicon substrate.
- 37. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 36 wherein said p-doped silicon substrate is characterized by a 111 crystallographic orientation.
- 38. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 35 wherein said vacuum is less than about 3×10−5 Torr prior to sputtering and about 6×10−4 Torr during sputtering.
- 39. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 35 wherein said RF magnetron sputter is characterized by a sputtering power of about 200 W.
- 40. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 35wherein said amorphous film is sputter deposited at a rate of about 0.03 nm/s to about 0.04 nm/s.
- 41. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 35 wherein said amorphous film defines a film thickness of between about 200 nm and about 230 nm.
- 42. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 35 wherein said transition metal luminescent center comprises Cu and said amorphous film is sputter deposited at a Cu concentration of between about 0.1 and about 10 atomic percent.
- 43. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 35 wherein said transition metal luminescent center comprises Cu and said amorphous film is sputter deposited at a Cu concentration of about 7.4 atomic percent.
- 44. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 35 wherein said transition metal luminescent center comprises Mn and said amorphous film is sputter deposited at a Mn concentration of between about 0.1 and about 10 atomic percent.
- 45. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 35 wherein said transition metal luminescent center comprises Mn and said amorphous film is sputter deposited at a Mn concentration of about 1.4 atomic percent.
- 46. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 35 wherein said transition metal luminescent center comprises Cr and said amorphous film is sputter deposited at a Cr concentration of between about 0.1 and about 10 atomic percent.
- 47. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 35 wherein said transition metal luminescent center comprises Cr and said amorphous film is sputter deposited at a Cr concentration of about 1.5 to about 3 atomic percent.
- 48. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 35 wherein said amorphous film is annealed at about 1250 to about 1300 K for up to 30 minutes.
- 49. An alternating current thin film electroluminescent device comprising an AC power source and an emitter layer positioned between a pair of electrode layers, wherein:
at least one of said pair of electrode layers is transparent to visible light of a selected wavelength; said AC power source is connected across said pair of electrode layers; said emitter layer comprises an amorphous alloy comprising aluminum nitride and an rare earth luminescent center; said emitter layer and said pair of electrode layers are arranged such that, upon activation of said AC power source, an electric field is created between said electrode layers across said emitter layer; and said aluminum nitride and said rare earth luminescent center are provided in proportions selected such that said electric field causes emission of visible light of said selected wavelength from said emitter layer.
- 50. An alternating current thin film electroluminescent device as claimed in claim 49 wherein said rare earth luminescent center comprises Er.
- 51. An alternating current thin film electroluminescent device as claimed in claim 49 wherein said rare earth luminescent center comprises Tb.
- 52. An alternating current thin film electroluminescent device as claimed in claim 49 wherein said rare earth luminescent center comprises Nd.
- 53. An alternating current thin film electroluminescent device as claimed in claim 49 wherein said rare earth luminescent center comprises Eu.
- 54. An alternating current thin film electroluminescent device as claimed in claim 49 wherein said emitter layer is formed over a substrate characterized by a melting point below 10008 C.
- 55. An alternating current thin film electroluminescent device as claimed in claim 49 wherein said emitter layer is formed over a substrate characterized by a melting point below 2508 C.
- 56. An alternating current thin film electroluminescent device as claimed in claim 49 wherein said emitter layer is formed over a substrate characterized by a melting point below 1008 C.
- 57. A method of fabricating an alternating current thin film electroluminescent device by:
preparing an amorphous film emitter layer comprising aluminum nitride and a rare earth luminescent center by co-sputtering an Al target and a rare earth target in a nitrogenous atmosphere at room temperature under vacuum; positioning said emitter layer between a pair of electrode layers; connecting an AC power source across said pair of electrode layers, wherein said emitter layer and said pair of electrode layers are arranged such that, upon activation of said AC power source, an electric field is created between said electrode layers across said emitter layer and wherein said aluminum nitride and said rare earth luminescent center are provided in proportions selected such that said electric field causes emission of visible light of said selected wavelength from said emitter layer.
- 58. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 57 wherein said emitter layer is prepared by maintaining said emitter layer near room temperature, whereby heated activation of said emitter layer is unnecessary.
- 59. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 57 wherein said emitter layer is co-sputtered over a substrate characterized by a melting point below 10008 C.
- 60. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 57 wherein said emitter layer is co-sputtered over a substrate characterized by a melting point below 2508 C.
- 61. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 57 wherein said emitter layer is co-sputtered over a substrate characterized by a melting point below 1008 C.
- 62. A method of fabricating an alternating current thin film electroluminescent device as claimed in claim 57 wherein said emitter layer is co-sputtered over a plastic substrate .
- 63. A method of fabricating an amorphous luminescent emitter layer comprising aluminum nitride and a rare earth luminescent center by co-sputtering an Al target and a rare earth target over a deposition surface of a substrate so as to form an amorphous AlN:RE film emitter layer on said deposition surface, wherein said co-sputtering is performed in a nitrogenous atmosphere, at room temperature, under vacuum.
- 64. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 63 wherein said emitter layer is prepared by maintaining said emitter layer near room temperature, whereby heated activation of said emitter layer is unnecessary.
- 65. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 63 wherein said substrate is characterized by a melting point below 10008 C.
- 66. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 63 wherein said substrate is characterized by a melting point below 2508 C.
- 67. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 63 wherein said substrate is characterized by a melting point below 1008 C.
- 68. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 63 wherein said substrate comprises a plastic substrate.
- 69. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 63 wherein said rare earth luminescent center comprises Er.
- 70. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 63 wherein said rare earth luminescent center comprises Tb.
- 71. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 63 wherein said rare earth luminescent center comprises Nd.
- 72. A method of fabricating an amorphous luminescent emitter layer as claimed in claim 63 wherein said rare earth luminescent center comprises Eu.
CROSS-REFERENCE TO RELATED APPLICATIONS
[0001] This application claims the benefit of U.S. Provisional Application Ser. No. 60/206,540. This application is also related to U.S. patent application Ser. No. 09/431,339, BAND GAP ENGINEERING OF AMORPHOUS Al—Ga—N ALLOYS, filed Oct. 29, 1999, the disclosure of which is incorporated herein by reference.
STATEMENT REGARDING FEDERALLY SPONSORED RESEARCH OR DEVELOPMENT
[0002] This invention was made with government support under Contract Nos. N00014-99-10975 and N00014-96-1-0782 awarded by the Office of Naval Research. The Government has certain rights in this invention.
Provisional Applications (1)
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Number |
Date |
Country |
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60206540 |
May 2000 |
US |