An Excimer Laser Heated Plasma Soft X-Ray Source for Microlithography

Information

• NSF Award
• 8212856

Owner

• STI Optronics, Inc.

• Award Id

  8212856

• Award Effective Date

  9/1/1983 - 41 years ago

• Award Expiration Date

  8/31/1985 - 39 years ago

• Award Amount

  $ 199,577.00

• Award Instrument

  Continuing grant

• Program Officer

  Cassandra M. Queen

• Min Amd Letter Date

  9/22/1983 - 41 years ago

• Max Amd Letter Date

  11/20/1987 - 36 years ago

• ARRA Amount

• Name

  STI Optronics, Inc.

• City

  Bellevue

• State

  WA

• Country

  United States

• Address

  2755 Northup Way

• Postal Code

  980041495

• Phone Number

  4258270460

• First Name

  Edward

• Last Name

  Crawford

• Start Date

  9/1/1983 12:00:00 AM

• First Name

  George

• Last Name

  Albrecht

• Start Date

  9/1/1983 12:00:00 AM

• Name

  Telecommunications

• Code

  206000

• Name

  Engineering-Electrical

• Code

  55

• Text

  SMALL BUSINESS INNOVATION PROG

• Code

  5370