Angular velocity sensor device

Abstract

An angular velocity sensor device includes a structure having an angular velocity detecting element and a vibration body formed thereon. The structure is mounted on the case and the angular velocity detecting element is isolated from external vibrations without the need for rubber and gel vibration dampening materials. Permanent magnets of the same polarity are mounted opposite one another on the structure and the case. The magnetic repulsion is generated between the structure and the case to cause the structure to be housed within the case in a levitated state.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

In the drawings:

FIG. 1 is a schematic cross-sectional view of an angular velocity sensor device in a first exemplary embodiment;

FIG. 2 is a schematic plan view in a case in the angular velocity sensor device shown in FIG. 1;

FIG. 3 is a schematic cross-sectional view of an angular velocity sensor device in a second embodiment;

FIG. 4 is a schematic cross-sectional view of an angular velocity sensor device in a third embodiment;

FIG. 5 is a schematic cross-sectional view of an angular velocity sensor device in a fourth embodiment;

FIG. 6 is a schematic cross-sectional view of an angular velocity sensor device in a fifth embodiment; and

FIG. 7 is a schematic cross-sectional view of an angular velocity sensor device in a sixth embodiment.

Claims

1. An angular velocity sensor device comprising; a case;a structure housed within the case and including an angular velocity detecting element with a vibration body mounted thereon;means for generating magnetic repulsion between the case and the structure so that the structure is maintained within the case in a levitated state to isolate the structure from external vibrations.

2. An angular velocity sensor device according to claim 1, wherein means for generating magnetic repulsion comprises a pair of permanent magnets of same polarity, the pair of permanent magnets being respectively mounted on the case and the structure opposite one other.

3. An angular velocity sensor device according to claim 1, further comprising an electromagnet mounted on the case at a position opposite the structure to generate a magnetic attraction between the structure to the case.

4. An angular velocity sensor device according to claim 1, further comprising static electricity generating means mounted on the case for generating electrostatic attraction between the structure and the case.

5. An angular velocity sensor device according to claim 1, wherein the magnetic repulsion is generated in both a z-axis direction corresponding to a gravitational direction and an x-axis direction.

6. An angular velocity sensor device according to claim 1, wherein the structure has a package electrically connected to an angular velocity detecting element,a flexible printed wiring board is electrically connected by the package,and the angular velocity detecting element is externally connected though the flexible printed wiring board.

7. An angular velocity sensor device according to claim 1, wherein a non-contact wiring means is provided between the structure and the case, the non-contact wiring means for externally transferring a signal of an angular velocity detecting element by one of light transmission and an electric signal.

8. An angular velocity sensor device according to claim 7, wherein the non-contact wiring means comprises a light emitting element and a light receiving element for receiving light from the light emitting element, the light emitting element being mounted on one of the structure and the case, and the light receiving element being mounted on the other of the structure and the case opposite the light emitting element, wherein the signal of the angular velocity detecting element being externally transferred by transmission of light between the light emitting element and the light receiving element.

9. An angular velocity sensor device according to claim 1, wherein a solar cell for converting light to electricity is mounted on the structure.

10. An angular velocity sensor device according to claim 9, wherein a light emitting part for emitting light to the solar cell is mounted on the case.

11. An angular velocity sensor device according to claim 9, wherein the case is partially formed from a translucent material for supplying outside light to the solar cell.