BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a schematic view showing a plating apparatus having an anode holder according to an embodiment of the present invention;
FIG. 2 is a front view of the anode holder shown in FIG. 1;
FIG. 3 is a vertical cross-sectional view of FIG. 2;
FIG. 4 is a front view showing an anode shaft in the anode holder shown in FIG. 2;
FIG. 5 is an enlarged view showing a connecting portion of the anode shaft shown in FIG. 4;
FIG. 6 is a front view showing an anode in the anode holder shown in FIG. 2;
FIG. 7 is an enlarged cross-sectional view showing a connecting portion of the anode shown in FIG. 6; and
FIG. 8 is a view showing the connecting portion of the anode shown in FIG. 6 together with the anode shaft shown in FIG. 5.
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS
A plating apparatus having an anode holder according to an embodiment of the present invention will be described below with reference to FIGS. 1 through 8. Like or corresponding parts are denoted by like or corresponding reference numerals throughout drawings, and will not be described below repetitively
FIG. 1 is a schematic view showing a plating apparatus 1 having an anode holder according to an embodiment of the present invention. As shown in FIG. 1, the plating apparatus 1 has a plating tank 10 for holding a plating solution Q therein, a substrate holder 12 for holding a substrate W, an anode holder 16 for holding an anode 14, and a plating power source 18. The anode 14 is disposed in the anode holder 16 so as to face the substrate W.
The substrate W and the anode 14 are disposed in a vertical direction and immersed in the plating solution Q held by the plating tank 10. The substrate W and the anode 14 are disposed in parallel to each other so that a surface of the substrate W to be plated faces the anode 14. The substrate W is connected via a lead 20 to a cathode of the plating power source 18, and the anode 14 is connected to a lead 22 to an anode of the plating power source 18.
The plating tank 10 has a plating solution supply inlet 24 provided on a bottom of the plating tank 10 for supplying a plating solution Q to the plating tank 10. A portion of the plating solution Q overflows an overflow weir 26 into an overflow tank 28. The plating solution Q in the overflow tank 28 is discharged from a plating solution discharge port 30, which is provided on a bottom of the overflow tank 28. The plating solution discharged from the plating solution discharge port 30 is circulated by the circulation pump 32. The plating solution discharge port 30 is connected via a plating solution circulation line 34 to the plating solution supply inlet 24. The plating solution circulation line 34 has a thermostat 36, a filter 38, a pressure gauge 40, and a flowmeter 42 provided thereon.
The plating apparatus 1 has an agitation paddle 44 disposed in a vertical direction between the substrate W and the anode 14. The agitation paddle 44 has an upper end attached to a paddle shaft 46. When the paddle shaft 46 is moved, the agitation paddle 44 is moved in parallel to the substrate W to agitate the plating solution Q in the plating tank 10.
When a voltage is applied between the substrate W and the anode 14 by the plating power source 18, metal ions in the plating solution Q receive electrons from a surface of the substrate W because of a potential difference produced between the substrate W and the anode 14. Thus, metal is deposited on the surface of the substrate W to form a metal film on the surface of the substrate W. Further, because of the potential difference produced between the substrate W and the anode 14, electrons are released from the anode 14, ionized, and dissolved in the plating solution Q. The thickness of the anode 14 is reduced as the anode 14 is dissolved in the plating solution Q.
The plating apparatus 1 has a regulation plate 48 disposed between the substrate W and the anode 14. The regulation plate 48 has a hole 48a formed at a central portion thereof. The regulation plate 48 serves to adjust a potential distribution in the plating tank 10.
FIG. 2 is a front view of the anode holder 16 shown in FIG. 1, and FIG. 3 is a vertical cross-sectional view of FIG. 2. As shown in FIGS. 2 and 3, the anode holder 16 has a bar 50 placed on bar stages (not shown) of the plating tank 10, a support member 52 extending downward from the bar 50, two conductive anode shafts 54 connecting between an inner conductive portion 60 of the bar 50 and the anode 14, and an anode mask 56 covering a peripheral portion of the anode 14. The support member 52 supports the anode 14. The anode mask 56 serves to adjust a diameter of an area at which the anode 14 contacts the plating solution Q. In FIG. 2, only one of the anode shafts 54 is illustrated.
Contacts 58 are attached to lower surfaces of both ends of the bar 50. The contacts 58 are brought into contact with contact plates (not shown) provided on upper surface of the bar stages of the plating tank 10. The contact plates are connected to the plating power source 18 (see FIG. 1). For example, the contacts 58 may be formed of a stainless plate plated with gold. The bar 50 has the inner conductive portion 60 made of copper. The conductive portion 60 is electrically connected to the contacts 58. The anode shafts 54 are connected to the conductive portion 60. Thus, a current is supplied from the plating power source 18 through the conductive portion 60 in the bar 50 and the conductive anode shafts 54 to the anode 14.
FIG. 4 is a front view showing one of the anode shafts 54. As shown in FIG. 4, the anode shaft 54 has an upper connecting portion 70 connected to the conductive portion 60 of the bar 50 and a lower connecting portion 72 connected to the anode 14. It is desirable that the anode shaft 54 has a corrosion resistance because it extends through both of the plating solution and an atmosphere. Accordingly, in the present embodiment, the anode shaft 54 includes a conductive core 74 and a tube 76 covering the core 74. The core 74 is made of oxygen-free copper or titanium, and the tube 76 is made of an insulating material. It is desirable that the tube 76 is made of a material having a chemical resistance, such as polyethylene (PE), polypropylene (PP), or polytetrafluoroethylene (PTFE).
FIG. 5 is an enlarged view of the lower connecting portion 72. As shown in FIG. 5, the lower connecting portion 72 includes an external thread portion 80 provided on an end of the lower connecting portion 72, an O-ring 82, and a step portion 84 provided between the O-ring 82 and the external thread portion 80. The step portion 84 has a diameter larger than that of the external thread portion 80 but smaller than that of the O-ring 82.
FIG. 6 is a front view showing the anode 14. For example, the anode 14 is made of copper containing phosphorus of 0.1% or less and formed of a circular disk having a thickness of 5 mm to 50 mm. Such an anode 14 can provide favorable dissolution and favorable supply of ions. As shown in FIG. 6, the anode 14 has two connecting portions 90 provided at upper portions thereof. The aforementioned anode shafts 54 are connected to the connecting portions 90 of the anode 14.
FIG. 7 is an enlarged cross-sectional view of the connecting portion 90 of the anode 14. As shown in FIG. 7, the connecting portion 90 has a first cut surface 92 extending in an axial direction of the anode shaft 54 and a second cut surface 94 extending in a direction perpendicular to the axis of the anode shaft 54. A receiving portion 96 is formed in the second cut surface 94 so as to extend in the axial direction of the anode shaft 54. The receiving portion 96 receives the step portion 84 of the anode shaft 54. An internal thread hole 98 is formed in a bottom of the receiving portion 96 so as to correspond to the external thread portion 80 of the anode shaft 54. The external thread portion 80 of the anode shaft 54 is screwed to the internal thread hole 98 to connect the anode shaft and the anode to each other.
FIG. 8 shows the connecting portion 90 of the anode 14 when the anode shaft 54 is connected to the connecting portion 90 of the anode 14. As shown in FIG. 8, the external thread portion 80 of the anode shaft 54 is screwed to the internal thread hole 98 of the anode 14 so that the step portion 84 of the anode shaft 54 is received in the receiving portion 96 of the anode 14. At that time, an outer circumferential surface of the O-ring 82 of the anode shaft 54 is brought into contact with an inner circumferential surface of the receiving portion 96.
Thus, the external thread portion 80 of the anode shaft 54 and the internal thread hole 98 of the anode 14 are connected to each other in a state such that the connecting portion between the anode shaft 54 and the anode 14 is sealed by the O-ring 82. Accordingly, it is possible to maintain a sufficient electric connection between the internal thread hole 98 of the anode 14 and the external thread portion 80 of the anode shaft 54. Further, it is possible to improve a corrosion resistance of the connecting portion between the anode 14 and the anode shaft 54. Furthermore, the anode 14 and the anode shaft 54 are connected to each other by simply screwing the external thread portion 80 to the internal thread hole 98. Accordingly, a worn anode 14 can readily be removed from the anode holder 16, and a new anode can readily be attached to the anode holder 16.
The anode 14 is removed from the anode holder 16 in the following manner. First, each of set bolts 100, which is used to fix an upper portion of the anode shaft 54 to the conductive portion 60 of the bar 50 and to electrically connect the anode shaft 54 to the conductive portion 60 of the bar 50, is detached from the bar 50. Then, fix bolts 102 are removed from the bar 50 to separate the bar 50 from the support member 52. Each of the anode shafts 54 is rotated and detached from the anode 14. Thereafter, the anode mask 56 is removed from the support member 52, and then the anode 14 is separated from the support member 52.
In the present embodiment, the anode holder 16 has two anode shafts 54, and the anode 14 has two connecting portions 90. However, the numbers of the anode shafts 54 and the connecting portions 90 are not limited to the illustrated example. For example, the anode holder 16 may have only one anode shaft 54, and the anode 14 may have only one connecting portion 90. Alternatively, the anode holder 16 may have three or more anode shafts 54, and the anode 14 may have three or more connecting portions 90.
Although certain preferred embodiments of the present invention have been shown and described in detail, it should be understood that various changes and modifications may be made therein without departing from the scope of the appended claims.