The claimed invention was made by, on behalf of, or in connection with one or more of the following parties to a joint university-corporation research agreement: University of Michigan and Universal Display Corporation. The agreement was in effect on and before the date the claimed invention was made, and the claimed invention was made as a result of activities undertaken within the scope of the agreement.
1. Field of the Disclosure
The disclosure relates generally to antennas and, more particularly, to the fabrication of electrically small antennas on three-dimensionally contoured substrates.
2. Brief Description of Related Technology
With the expansion of the wireless mobile market, interest in electrically small antennas has surged in recent years. See, for example, Best, “The radiation properties of electrically small folded spherical helix antennas,” IEEE Transactions on Antennas and Propagation, vol. 52, no. 4, pp. 953-960 (April 2004), and Erentok et al., “Metamaterial-Inspired Efficient Electrically Small Antennas,” IEEE Transactions on Antennas and Propagation, vol. 56, no. 3, pp. 691-707 (March 2008). In many cases, the size of the antenna limits the minimum achievable size of the wireless device itself.
A common method of making an efficient electrically small antenna is to use a small dipole antenna in combination with a matching circuit. This approach generally leads to very narrow bandwidths and relatively low efficiencies. Other methods include packing resonant, magnetically coupled antenna elements into a small volume, and using space filling curve antennas and fractal curve antennas. Please see, for example, Stuart et al., “Small Spherical Antennas Using Arrays of Electromagnetically Coupled Planar Elements,” IEEE Antennas and Wireless Propagation Letters, vol. 6, no. 1, pp. 7-10 (July 2007), and Best, “On the performance properties of the Koch fractal and other bent wire monopoles,” IEEE Transactions on Antennas and Propagation, vol. 51, no. 6, pp. 1292-1300 (June 2003).
Antennas are considered to be electrically small when their maximum radial dimension (ka) is less than 0.5 radians, where k=2π/λ is the free space wave number, and a is the radius of the minimum sphere which circumscribes the antenna. Maximizing an antenna's bandwidth is equivalent to minimizing its quality factor (Q). It has been shown that the minimum achievable Q factor for electrically small antennas is Qchu=1/(ka)+1/(ka)3. Please see Chu, “Physical limitations of omni-directional antennas,” Journal of Applied Physics, vol. 19, pp. 1163-1175 (December 1948), and McLean, “A re-examination of the fundamental limits on the radiation Q of electrically small antennas,” IEEE Transactions on Antennas and Propagation, vol. 44, no. 5, pp. 672-676 (May 1996). The ratio of an antenna's Q to Qchu is a common figure of merit for characterizing small antennas.
Spherical helix antennas have been shown to closely approach the Chu limit. Spiraled metallic wires in the shape of a hemisphere have been formed by manually bending the metallic wire around a sphere. Unfortunately, the manual nature of that step has made fabrication of these antennas time consuming, inaccurate and expensive.
In accordance with one aspect of the disclosure, a method of fabricating an antenna includes forming a flexible stamp from a first mold, the first mold transferring a pattern to the flexible stamp, shaping an antenna substrate into a three-dimensional contour with a second mold, positioning the flexible stamp in the second mold to deform the flexible stamp into the three-dimensional contour, and cold welding a metallic layer on the flexible stamp to create a set of antenna traces on the antenna substrate in accordance with the pattern.
The method may further include etching unwanted metal disposed between the antenna traces.
The antenna substrate may include glass, glycol-modified polyethylene terephthalate (PETg), or other dielectric material.
The method may also include electroplating the metallic layer to thicken the antenna traces. Electroplating the metallic layer may include pulse plating. The metallic layer on the flexible stamp may include gold. Alternatively or additionally, electroplating the metallic layer includes depositing copper onto the gold.
The first mold may include a wafer. Alternatively or additionally, the second mold includes a vacuum mold.
Cold welding the metallic layer may include applying the metallic layer to a metallic strike layer on the antenna substrate. The method may further include sputtering Silicon dioxide onto a surface of the antenna substrate before deposition of the metallic strike layer. Alternatively, the method further includes sputtering Silicon dioxide and copper onto a surface of the antenna substrate before deposition of the metallic strike layer.
In accordance with another aspect of the disclosure, an antenna includes a dielectric substrate having a three-dimensional contour and a set of antenna traces on the dielectric substrate. Each antenna trace spirals around the three-dimensional contour in a helical pattern. Each antenna trace includes a plated metallic layer.
The dielectric substrate may be shaped as a spherical shell. In some of these cases, the dielectric substrate is shaped as a hemispherical shell or as part of a hemispherical shell.
The dielectric substrate may be configured such that the antenna is an electrically small antenna.
The plated metallic layer may include plated copper. Alternatively or additionally, the plated metallic layer has a thickness greater than 1 μm.
For a more complete understanding of the disclosure, reference should be made to the following detailed description and accompanying drawing figures.
While the disclosed antennas and antenna fabrication processes are susceptible of embodiments in various forms, there are illustrated in the drawing (and will hereafter be described) specific embodiments of the invention, with the understanding that the disclosure is intended to be illustrative, and is not intended to limit the invention to the specific embodiments described and illustrated herein.
The disclosure generally relates to the fabrication of printed antennas onto three-dimensionally (3D) contoured substrates. As described below, the disclosed processes are directed to fabricating electrically small and contoured antennas via direct transfer patterning techniques that print metallic traces onto a 3D-contoured, dielectric substrate.
The disclosed processes are capable of feature sizes as small as approximately 1 μm despite printing onto arbitrarily contoured substrates. The feature size limits may decrease, as the accuracy of the disclosed printing processes is determined only by the photolithographic process used to etch grooved patterns onto silicon wafers. As described below, the disclosed processes may be implemented to accurately fabricate a variety of different metal patterns to generally address the challenges presented by electrically small antennas and contoured antennas.
Several challenges are typically encountered in connection with the design and fabrication of electrically small dipole antennas. At the outset, their radiation resistance is generally low (<<50Ω) and their input reactance is generally large. These characteristics may lead to a poorly matched and inefficient antenna. However, spherical helix antennas exhibit added inductance that allows them to resonate while still maintaining a small electrical size. The inductance of spherical helix antennas is increased by spiraling the wire around a sphere to increase the total wire length without affecting overall size.
One of the antenna shapes that may be fabricated via the disclosed direct transfer patterning processes is the spherical helix. The design and fabrication of electrically small, printed spherical helical antennas using 3D contoured substrates are described below. In one case, an antenna designed to operate at about 1 GHz (e.g., 0.78 GHz) has six helical, gold arms printed onto a hemispherical substrate. In one example of that configuration, the minimum radius sphere that circumscribes the antenna is 1.73 cm, which results in a maximum radial dimension (ka) of 0.28.
In accordance with one aspect of the disclosure, an electrically small spherical helix antenna is disposed over a ground plane. The antenna achieves miniaturization through inductive loading (spiraling of the traces) and its hemispherical shape provides maximum inductance for a given volume. A radiation resistance of close to 50 Ohms can be achieved through the use of multiple arms (traces).
With reference now to the drawing figures,
The exemplary antenna 20 shown in
In one example, the antenna 20 is printed onto the upper portion of a hemisphere instead of an entire hemisphere to simplify fabrication. In one exemplary case, the substrate 22 is a 0.5 mm thick glycol-modified polyethylene terephthalate (PETg) hemispherical shell, which has a measured relative permittivity ∈r of 2.92 at 10 GHz.
In one example, the Si master 28 is made by etching a 30 μm deep pattern into a Si wafer. A Polydimethylsiloxane (PDMS) mixture 30 may be prepared by combining PDMS pre-polymer and a curing agent at an 8:1 weight ratio. The PDMS mixture 30 is then poured into the Si mold 28 and cured at 100 C for 2 hours to form a PDMS 32 stamp. As shown in the sequence steps depicted in
As described below, the PDMS stamp 32 is then drawn by vacuum into a 3D contour mold 36, the same 3D contour mold which is used to shape the antenna substrate. The 3D contour mold 36 may be an aluminum (Al) mold.
The disclosed fabrication methods may use a variety of one or more metals for the strike layer. For example, the strike layer may include gold, copper, silver, or aluminum.
A stamping sequence of steps is shown in
The cold weld bonding described above is not limited to transfers of gold to the hemispherical substrate. Strike layers of one or other metals (e.g., copper) may be positioned in close proximity to the deformed PDMS stamp.
As described below, in some cases, the PETg substrate may also be Au (or otherwise) etched once more to remove unwanted Au (or other metal) that is deposited between the stamped lines 46.
Further details regarding an exemplary sequence to fabricate a printed antenna on a 3D contoured or curved dielectric substrate in accordance with the disclosure are listed below:
1. Prepare the PDMS stamp and PETg substrate for stamping.
a) Use a standard photolithography process to etch an approximately 30 μm deep pattern into a Si (silicon) “master” wafer. The Si master pattern corresponds to the desired metallic pattern of the antenna.
b) Mix polydimethylsiloxane (PDMS) prepolymer and a curing agent at an 8:1 weight ratio. Degass the mixture for 1 hour to remove air bubbles. Fold aluminum foil around the edge of the Si master to form a “boat” that stops the PDMS from flowing off the Si wafer. For a 4″ Si wafer, pour between about 3 g to about 9 g of the PDMS mixture onto the Si master. The PDMS should be about 0.5 mm to about 1.5 mm thick.
c) Bake the Si master at 100 C for 2 hours to cure the PDMS, and then peel the PDMS off the Si master. The PDMS stamp now has a pattern transferred from the master.
d) To deform the antenna substrate, bring a flat piece of glycol-modified polyethylene terephthalate (PETg) into an Al mold by heating it to 140 C (above its softening temperature), and apply a vacuum through holes predrilled into the Al mold.
e) Deposit a 1 nm Cr adhesion layer and 7 nm Au “strike” layer onto the curved PETg substrate through vacuum thermal or electron beam evaporation. In an alternative embodiment, deposit 30 nm SiO2 and 3 nm Cu adhesion layers instead of the Cr adhesion layer.
f) Deposit 15 nm of Au onto the PDMS stamp through vacuum thermal or electron beam evaporation.
2. Bring the PDMS stamp into the same vacuum that was used to deform the PETg substrate, and place the PETg substrate close to the PDMS stamp.
3. Release the vacuum and apply 20 PSI of pressure onto the back of the PDMS stamp. A cold welded metallic bond forms between the Au on the PDMS stamp and the Au strike layer on the PETg substrate. In essence, the Au traces from the PDMS are stamped onto the substrate.
4. Reapply the vacuum to separate the PETg substrate from the PDMS stamp, leaving a 15 nm Au pattern on top of the strike layer of the PETg substrate.
5. Remove the strike layer on the PETg that is not covered by the 15 nm Au pattern through sputtering using a 30 sccm, 20 Torr, 80 W Ar plasma etch for 6 minutes. In an alternative embodiment, the sputtering act may be implemented at 30 m Torr, with the Ar plasma etch at 150 W, for about 70 seconds.
6. Gold plate the traces to the desired thickness using a standard electroplating process.
7. Option regarding the PETg substrate—further Au etching to remove unwanted Au that appears between the desired traces.
Further details regarding some of the fabrication steps described above are set forth in connection with the fabrication of focal plane detector arrays. Please see X. Xu, et al., “Direct transfer patterning on three dimensionally deformed surfaces at micrometer resolutions and its application to hemispherical focal plane detector arrays,” Organic Electronics, vol. 9, no. 6, pp. 1122-1127 (December 2008), the entire disclosure of which is hereby incorporated by reference. Certain aspects of the exemplary fabrication process described above build upon the direct transfer patterning process reported in the above-referenced Xu paper, which allows patterns of 15 nm thick metallic traces to be printed onto curved substrates. That is, the printed metallic traces in the above-referenced Xu paper were only previously used for focal plane detector arrays, whereas the disclosed processes modify the technology for fabrication of 3D contoured antennas. Although 15 nm thick metallic traces are acceptable in the context of detector arrays, antenna designs use traces roughly 100-500 times thicker (multiple skin depths thickness) for efficient operation at microwave frequencies. Thus, one aspect of the disclosed antenna fabrication processes that differs from those described in the Xu paper involves the above-described plating (or electro-plating) in which the metallic lines are formed to the desired thickness. The resulting antenna traces may thus have a thickness on the order of microns of microns, e.g., a thickness greater than about 1 μm. In some cases, the thickness may exceed 10 μm. To allow for electroplating, the disclosed fabrication methods may use 50 nm SiO2 and 3 nm Cu adhesion layers, rather than the 2 nm Cr adhesion layer described in the above reference Xu paper. Further aspects of the disclosure that differ from the Xu paper involve techniques directed to allowing the gold (or other metal) traces to be plated to greater thicknesses. Further details regarding these techniques are set forth below.
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The disclosed processes generally address several challenges presented by the fabrication of 3D contoured antennas. One challenge involves the plating of gold on a curved surface. Printed metallic lines on a curved surface have not been gold plated because the metallic traces cannot be gold plated if their adhesion to the curved substrate is insufficient. Generally speaking, the traces may not properly adhere to the substrate, thereby falling off during the gold plating process. The disclosed processes address this challenge by sputtering Silicon dioxide and copper onto the PETg surface prior to depositing the Au strike layer. There is a stronger adhesion of Au to Silicon dioxide and copper than that of Au to PETg, which makes it possible to gold plate thicker traces. The use of pyrex glass as a substrate instead of PETg may allow even thicker traces to be plated. In addition, the technique of pulse plating may be useful for plating greater thicknesses. Copper plating may be used to allow even thicker traces to be plated. With an antenna fabricated by printing metallic traces on a curved substrate using direct transfer patterning, a significant benefit of the disclosed processes is the ability to fabricate complex antenna shapes. Without the ability to fabricate thick metallic traces on curved substrates, printed antenna designs are otherwise restricted to relatively simple 3D antenna shapes because such designs were fabricated manually rather than through photolithography.
The design and fabrication of an electrically small spherical helix antenna has been described above. The antenna may be fabricated using a direct transfer patterning process that avoids the drawbacks generally presented by past fabrication techniques. The process of printing metallic traces over a contoured substrate allows the fabrication of hemispherical antennas that address the challenges of electrically small antennas. Despite the advantages of spherical helix antennas, the disclosed process may nonetheless be applied and adopted to fabricate contoured antennas with other antenna topologies. Indeed, the disclosed processes may be used with a variety of different substrates and substrate contours. Moreover, the disclosed processes are also not limited to electrically small antennas, and may be used to fabricate, for example, wavelength-scale, multi-wavelength antennas, or antenna arrays.
While the present invention has been described with reference to specific examples, which are intended to be illustrative only and not to be limiting of the invention, it will be apparent to those of ordinary skill in the art that changes, additions and/or deletions may be made to the disclosed embodiments without departing from the spirit and scope of the invention.
The foregoing description is given for clearness of understanding only, and no unnecessary limitations should be understood therefrom, as modifications within the scope of the invention may be apparent to those having ordinary skill in the art.
This application claims the benefit of U.S. provisional application entitled “Antenna Fabrication with Three-Dimensional Contoured Substrates,” filed Jul. 5, 2010, and assigned Ser. No. 61/361,446, the entire disclosure of which is hereby expressly incorporated by reference.
This invention was made with government support under Contract No. ECCS-0747623 awarded by the National Science Foundation, and under Contract No. FA9550-06-01-0279 awarded by the Air Force Office of Scientific Research. The government has certain rights in the invention.
Number | Date | Country | |
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61361446 | Jul 2010 | US |