Claims
- 1. A spatial light modulator having an array of individually addressable elements, each said element comprising:an active component selectively operable to reflect light from a reflective surface to an imaging system when activated; addressing circuitry to activate said active component; an anti-reflective coating placed to prevent light not reaching said reflective surface from entering said imaging system.
- 2. The spatial light modulator of claim 1, wherein said anti-reflective coating is placed over said addressing circuitry.
- 3. The spatial light modulator of claim 1, said active component having an underside surface opposite said reflective surface, wherein said anti-reflective coating is placed on said underside surface of said active component.
- 4. The spatial light modulator of claim 1, wherein said element further comprises a middle layer of said element, and said middle layer has an anti-reflective coating.
- 5. The spatial light modulator of claim 1, wherein said anti-reflective coating comprises TiN.
- 6. The spatial light modulator of claim 5, wherein said anti-reflective coating further comprises SiO2.
- 7. The spatial light modulator of claim 1, wherein said anti-reflective coating is comprised of diamond-like carbon.
- 8. The spatial light modulator of claim 1, wherein said anti-reflective coating is comprised of dark resin.
- 9. A method of manufacturing a spatial light modulator having an array of individually addressable elements, said method including the steps of:forming addressing circuitry on a substrate; providing an array of active components on said addressing circuitry, said active components comprising a reflective surface, wherein said addressing circuitry activates said active components to cause said reflective surfaces to reflect light to an imaging system; and wherein at least one of said forming and providing steps includes the step of depositing an anti-reflective coating positioned to prevent light not reaching said reflective surface from entering said imaging system.
- 10. The method of claim 9, wherein said method further comprises the steps of: building an intermediate structure on said addressing circuitry, upon which said active components reside, wherein said intermediate structure has an anti-reflective coating.
- 11. The method of claim 9 wherein said anti-reflective coating is comprised of TiN.
- 12. The method of claim 11 wherein said anti-reflective coating further comprises a layer of SiO2.
- 13. The method of claim 9 wherein said anti-reflective coating is comprised of diamond-like carbon.
- 14. The method of claim 9 wherein said anti-reflective coating is comprised of dark resin.
Parent Case Info
This application claims priority under 35 USC § 119(e)(1) of provisional application No. 60/085,505 filed May 14, 1998.
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Provisional Applications (1)
|
Number |
Date |
Country |
|
60/085505 |
May 1998 |
US |