Number | Date | Country | Kind |
---|---|---|---|
6-006680 | Jan 1994 | JPX |
Number | Name | Date | Kind |
---|---|---|---|
4610200 | Metso | Sep 1986 | |
4672557 | Tamura et al. | Jun 1987 | |
4945829 | Ericsson | Aug 1990 | |
4981076 | Cunill | Jan 1991 | |
5144899 | Allen | Sep 1992 | |
5168805 | Kasanami et al. | Dec 1992 | |
5176078 | Homma et al. | Jan 1993 | |
5226366 | Schlife et al. | Jul 1993 |
Number | Date | Country |
---|---|---|
0259776 | Mar 1988 | EPX |
0065557 | May 1980 | JPX |
0259446 | Dec 1985 | JPX |
0130155 | Jun 1991 | JPX |
4347637 | Dec 1992 | JPX |
Entry |
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IBM Technical Disclosure Bulletin, "Semiconductor Wafer Aligner", vol. 13 No. 10, Mar. 1971. |