Apparatus and method for coating polyimide layer

Abstract

An apparatus for coating polyimide layer includes a print table, an inkjet head, and a polyimide liquid supply tank, wherein the inkjet head is configured to jet the polyimide liquid in a scan-coating and be shifted by a predetermined shift pitch in a direction until 2N times of scan-coating occurs in which N≧2 and N is a natural number. A method for coating polyimide layer includes placing a substrate, loading a polyimide liquid vessel into a polyimide liquid supply tank, jetting the polyimide liquid onto the substrate in a scan-coating, repeating the jetting the polyimide liquid onto the substrate in a scan-coating and the shifting the inkjet head by a predetermined shift pitch until 2N times of scan-coating occurs in which N≧2 and N is a natural number.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of embodiments of the invention. In the drawings:

FIG. 1 is a view for explaining a method of scanning using a polyimide layer coating apparatus according to the related art;

FIG. 2 and FIG. 3 are views for illustrating technical problems of the apparatus and method shown in FIG. 1;

FIG. 4 is a schematic view illustrating an apparatus for coating a polyimide layer according to an embodiment of the invention;

FIG. 5 is a view for explaining a method of scanning using the apparatus shown in FIG. 4;

FIG. 6 and FIG. 7 are views for explaining advantageous effects of the scanning method shown in FIG. 5; and

FIG. 8 is a flowchart showing a method of coating a polyimide layer according to another embodiment of the invention.

Claims

1. An apparatus for coating a polyimide layer, comprising: a print table to receive a substrate thereon;an inkjet head having a plurality of nozzles for jetting polyimide liquid onto the substrate; anda polyimide liquid supply tank with polyimide liquid therein;wherein the inkjet head is configured to jet the polyimide liquid in a scan-coating and be shifted by a predetermined shift pitch in a direction until 2N times of scan-coating occurs in which N≧2 and N is a natural number.

2. The apparatus for coating polyimide layer according to claim 1, the shift pitch is inversely proportional to the number of times of scan-coating.

3. The apparatus for coating polyimide layer according to claim 1, wherein the shift pitch is set to a value that is the sum of a nozzle pitch between nozzles provided to the inkjet head and an offset pitch.

4. The apparatus for coating polyimide layer according to claim 3, wherein the offset pitch value is ½N of the nozzle pitch.

5. The apparatus for coating polyimide layer according to claim 1, wherein the N is two (2) such that the number of times of scan-coating is four (4).

6. The apparatus for coating polyimide layer according to claim 1, wherein the N is four (4) such that the number of times of scan-coating is eight (8).

7. A method for coating a polyimide layer, comprising: placing a substrate on a print table;loading a polyimide liquid into a polyimide liquid supply tank;jetting the polyimide liquid onto the substrate in a scan-coating through a plurality of nozzles provided to the inkjet head after the polyimide liquid is supplied to the inkjet head installed over the print table; andshifting the inkjet head by a predetermined shift pitch;repeating the jetting the polyimide liquid onto the substrate in a scan-coating and the shifting the inkjet head by a predetermined shift pitch until 2N times of scan-coating occurs in which N≧2 and N is a natural number.

8. The method for coating a polyimide layer according to claim 7, wherein the shift pitch is set to be inversely proportional to the number of times of scanning.

9. The method for coating a polyimide layer according to claim 7, wherein the shift pitch is set to a value corresponding to the sum of a nozzle pitch between nozzles and an offset pitch.

10. The method for coating a polyimide layer according to claim 9, wherein the N is two (2) such that the number of times of scan-coating is four (4).

11. The method for coating a polyimide layer according to claim 7, wherein the N is two (2) such that the number of times of scan-coating is four (4).

12. The method for coating a polyimide layer according to claim 7, wherein the N is four (4) such that the number of times of scan-coating is eight (8).