Apparatus and method for coating polyimide layer

Abstract

An apparatus for coating polyimide layer includes a print table for affixing a substrate thereon, an inkjet head installed over the print table and having a jetting surface with a plurality of nozzles for jetting polyimide liquid onto the substrate, a polyimide liquid supply tank for receiving a polyimide liquid therein, a cleaning liquid supply tank for receiving cleaning liquid, a wiper cleaning bar adjacent to the cleaning liquid supply tank, and a wiper movable from one side of the jetting surface to an other side of the jetting surface while the wiper contacts the jetting surface of the inkjet head, and rotatable to dip the wiper into the cleaning liquid and then contact the wiper cleaning bar so as to remove cleaning liquid from the wiper.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a further understanding of embodiments of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of embodiments of the invention. In the drawings:

FIG. 1A and FIG. 1B are schematic views illustrating an accumulation problem in an apparatus for coating a polyimide layer according to the related art;

FIG. 2 is a schematic diagram illustrating an apparatus for coating a polyimide layer according to an embodiment of the invention;

FIG. 3A through FIG. 3C are schematic views for showing operational movement of a wiper with respect to a wiper cleaning bar;

FIG. 4 is a flow chart showing a method of coating a polyimide layer according to another embodiment of the invention;

FIG. 5 shows a process for wiping an inkjet head in accordance with the process step of FIG. 4; and

FIGS. 6A-6C shows a process for cleaning a wiper in accordance with the process steps of FIG. 4.

Claims

1. An apparatus for coating polyimide layer, comprising: a print table for affixing a substrate thereon;an inkjet head installed over the print table and having a jetting surface with a plurality of nozzles for jetting polyimide liquid onto the substrate;a polyimide liquid supply tank for receiving a polyimide liquid therein;a cleaning liquid supply tank for receiving cleaning liquid;a wiper cleaning bar adjacent to the cleaning liquid supply tank; anda wiper movable from one side of the jetting surface to an other side of the jetting surface while the wiper contacts the jetting surface of the inkjet head, and rotatable to dip the wiper into the cleaning liquid and then contact the wiper cleaning bar so as to remove cleaning liquid from the wiper.

2. The apparatus for coating polyimide layer according to claim 1, wherein the wiper is dipped into the cleaning liquid when rotated in a first direction from an initial position.

3. The apparatus for coating polyimide layer according to claim 2, wherein the wiper contacts the wiper cleaning bar when further rotated in the first direction.

4. The apparatus for coating polyimide layer according to claim 1, wherein the cleaning bar includes: a vertical support affixed to a support;a first cleaning structure attached to the vertical support and having a first contact surface facing the wiper; anda second cleaning structure attached to the first contact structure and having a second contact surface facing the wiper.

5. The apparatus for coating polyimide layer according to claim 4, wherein the first cleaning structure has an angle within a range from about 90 to about 140 degrees with respect to the second cleaning structure.

6. The apparatus for coating polyimide layer according to claim 1, wherein the wiper cleaning bar is made of one of stainless steel, aluminum, carbon graphite, carbon steel, cast iron, ethylene propylene dien rubber, polytrafluore ethylene, and flurocarbon.

7. The apparatus for coating polyimide layer according to claim 1, wherein the cleaning liquid includes N-methyl pyrrolidone.

8. The apparatus for coating polyimide layer according to claim 1, wherein the polyimide supply tank and the cleaning liquid supply tank share a single tank.

9. A method for coating polyimide layer, comprising: placing a substrate on a print table;loading polyimide liquid into a polyimide liquid supply tank;loading a cleaning liquid vessel filled with cleaning liquid into a cleaning liquid supply tank;jetting the polyimide liquid onto the substrate through a plurality of nozzles provided in the jetting surface of the inkjet head after the polyimide liquid is supplied to the inkjet head installed over the print table;wiping off the jetting surface with a wiper;dipping the wiper into the cleaning liquid; andremoving the cleaning liquid remaining on the wiper with a wiper cleaning bar.

10. The method for coating polyimide layer according to claim 9, wherein the dipping the wiper into the cleaning liquid includes rotating the wiper into a first direction so as to dip the wiper into the cleaning liquid.

11. The method for coating polyimide layer according to claim 9, wherein the removing the cleaning liquid remaining on the wiper includes rotating the wiper further in the first direction such that the wiper contacts the wiper cleaning bar.

12. The method for coating polyimide layer according to claim 9, wherein the wiper cleaning bar includes: a vertical support affixed to a support;a first cleaning structure attached to the vertical support and having a first contact surface facing the wiper; anda second cleaning structure attached to the first contact structure and having a second contact surface facing the wiper.

13. The method for coating polyimide layer according to claim 12, wherein the first cleaning structure has an angle θ in a range of about 90 to about 140 degrees with respect to the second cleaning structure to minimize a frictional force between the wiper and the wiper cleaning bar.

14. The method for coating polyimide layer according to claim 12, wherein the removing the cleaning liquid remaining on the wiper with a wiper cleaning bar includes the wiper contacting the first and second contact surfaces.

15. The method for coating polyimide layer according to claim 9, wherein the wiper cleaning bar is made of stainless steel, aluminum, carbon graphite, carbon steel, cast iron, ethylene propylene dien rubber, polytrafluore ethylene or flurocarbon.

16. The method for coating polyimide layer according to claim 9, wherein the cleaning liquid contains N-methyl pyrrolidone.

17. A method for coating polyimide layer, comprising: wiping off a jetting surface of an inkjet head after polyimide liquid is jetted from the inkjet head with a wiper;dipping the wiper into the cleaning liquid;rotating the wiper into a first direction so as to dip the wiper into the cleaning liquid; androtating the wiper further in the first direction such that the wiper contacts the wiper cleaning bar.

18. The method for coating polyimide layer according to claim 17, wherein the wiper cleaning bar includes: a vertical support affixed to a support;a first cleaning structure attached to the vertical support and having a first contact surface facing the wiper; anda second cleaning structure attached to the first contact structure and having a second contact surface facing the wiper.

19. The method for coating polyimide layer according to claim 18, wherein the first cleaning structure has an angle θ in a range of about 90 to about 140 degrees with respect to the second cleaning structure to minimize a frictional force between the wiper and the wiper cleaning bar.

20. The method for coating polyimide layer according to claim 18, wherein the rotating the wiper further in the first direction such that the wiper contacts the wiper cleaning bar includes the wiper contacting the first and second contact surfaces.