The instant application claims the filing date priority benefit of German Utility Model Application 20 2004 009 856.3 filed on Jun. 23, 2004 , the entirety of which is hereby incorporated herein by reference.
The present invention relates to an apparatus for controlling the power of a laser beam, especially the power of a laser beam emitted by a CO2 laser.
The inherent instability of the power output is one of the biggest problems with the use of CO2 lasers. This instability is caused by a variety of factors, among them variation of the cooling water temperature, propagation and contraction of the resonant cavity, and changing of the operating point by variations in modulation. The latter occurs when applications require different levels of power, e.g. in bitmap grey scale marking or cutting, applications needing different speeds, and the like.
Most manufacturers of CW (continuous wave) CO2 lasers specify their products as having a stability within ±7% after a “warm-up phase”. During this warm-up phase, numerous leaps may occur in the output phases of the laser, depending on the type and structure of the resonant cavity.
Certain process applications require a much higher degree of power stability in continuous operation, too, when materials are subjected to high precision processing, such as applying grey scale images by scanning onto glass or plastics.
It is already known to use optical filters and modulators to stabilize the laser power output subsequent to the warm-up phase.
For example, acousto-optical modulators by such manufacturers as Isomet Corporation of Springfield, Va., U.S.A. and Neos Technology, of Melbourne, Fla., U.S.A. are used for this purpose. However, even with the use of acousto-optical modulators, for many applications the stability of the power output of a CO2 laser so far could not be improved to full satisfaction.
European patent EP 1 246 712 by the same applicant discloses a method and an apparatus for controlling the power of a laser beam in dependence upon the movement of the laser beam across a target. The apparatus comprises a deflector unit to move the laser beam across the target and at least one rotatable Brewster plate which is arranged in the propagation path of the laser beam. It further comprises a drive means to rotate the Brewster plate. The Brewster plate is controlled in response to the movement of the deflector unit and thus of the laser beam on the target to make sure that the laser beam will always emit constant power to the target, conform with the movement of the laser beam on the target. The cited document does not provide for control of the laser power, particularly not for fine control of the power output of a CO2 laser, nor for compensation of the inherent instabilities.
European patent application EP 1 308 235 by the same applicant specifies a method of controlling the laser beam energy of a laser beam by means of two Brewster elements aligned along an axis in parallel with the direction of the laser beam. The Brewster elements are rotated about this axis, the first one in one direction and the other one in the opposite direction. More specifically, the two Brewster elements are rotated at the same time by the same angular amount so as to adjust the laser power output to a value between 0% and 100% of the maximum power of the CO2 laser. It is not provided that the laser power be controlled, nor is it provided that the inherent instabilities of a CO2 laser be compensated.
The applicant's above mentioned protective rights are based on the concept of making use of a member to control the laser power which member is known for controlling the polarization of a light beam, namely a Brewster element or Brewster plate, in the following as referred to as Brewster element. Starting from a light beam, especially a laser beam which has only one direction of polarization, a Brewster element adjusted to the right Brewster angle, in theory, may be employed to transmit between 0% and 100% of the polarized radiation, while being rotated through an angle of between 0° and 90°. Different materials and coatings are selected for Brewster elements, depending on the type of laser. For instance, ZnSe plates are the preferred. Brewster elements for control of the energy of a carbon dioxide (CO2) laser. Different coatings may be applied to the surfaces of Brewster elements so that maximum and minimum transmissions, output polarization, and the necessary rotation of the Brewster elements for controlling the transmission may be varied. In practice, the maximum transmission of a Brewster element of the kind described is approximately 99.98% . Moreover, in practice, the attenuation of a single Brewster element often is not sufficient to adjust zero percent transmission.
For a better understanding of the background of the present invention the function of Brewster elements will be discussed in greater detail below with reference to FIGS. 1 to 4.
Moreover, the laser beam is offset by a factor which results from the incident angle, as determined by the Brewster angle, and from the thickness of the Brewster element.
Turning to
It is important to note that the laser beam polarization leaving the first Brewster element 450 is rotated when the first Brewster element 450 rotates, in response to the coating thereof. Thus it may be gathered from
Therefore, power control is not substantially influenced in addition by the second Brewster element 452. However, the latter is essential for correcting the beam offset of the laser beam caused by the first Brewster element.
When making use of the method illustrated in
It is an object of the invention, starting from the prior art discussed above, to provide an apparatus for controlling the power of a laser beam, suited in particular for power stabilization of CO2 lasers. This object is met by an apparatus which comprises the features recited in claim 1.
The apparatus according to the invention comprises a rotatable Brewster element aligned along an axis parallel to the direction of the laser beam and disposed in the propagation path of the laser beam. A drive means, such as a galvanometer scanner is connected to the Brewster element to rotate the same. A measuring means is provided to determine the power of the laser beam downstream of the rotatable Brewster element and to generate an actual power value. At its input, the control means receives the actual power value from the measuring means, compares it with the desired power value, and provides a control (adjustment) value for the drive means at its output. The drive means rotates the rotatable Brewster element in response to the control value in order to minimize the difference between the actual power value and the desired power value. According to the invention, the rotatable Brewster element thus is used as an adjuster in a control loop for controlling the power of a laser beam. Variations in intensity of the power output of, for instance, a CO2 laser can be eliminated quickly with this kind of control particularly when using high speed galvanometric motors. It could be demonstrated by testing in practice that, after the warm-up phase, the intensity of a CO2 laser was kept stable within a range of ±0.3%. Even during the warm-up phase the laser power could be controlled to a rated value with a deviation of no more than ±1.3%.
The apparatus according to the invention permits both control of the power output of a laser to a constant value, thereby balancing variations in intensity, and going through a given power profile by presetting a corresponding profile of desired values.
In an especially preferred embodiment of the invention the rotatable Brewster element is used together with a stationary Brewster element arranged directly behind the rotatable Brewster element in the propagation path of the laser beam. It is likewise conceivable to arrange a stationary Brewster element each in front of and behind the rotatable Brewster element. In that case both the rotatable and fixed Brewster elements should be positioned upstream of the measuring means.
Using a stationary Brewster element in combination with a rotatable Brewster element has a number of advantages. As explained above, rotation of the Brewster element causes also the polarization of the laser beam passing through this Brewster element to rotate. The transmitted part of the laser beam which subsequently impinges on the stationary Brewster element is rotated by this Brewster element back into its original polarization plane. In view of the fact that the effect of a Brewster element depends on the polarization of the incident light beam, also the stationary Brewster element contributes to reducing the power of the laser beam (with rotated polarization). Consequently an arrangement which comprises a rotating Brewster element and a stationary Brewster element offers a higher degree of efficiency than a system with but one rotatable Brewster element. Compared with the known apparatus discussed above which includes two rotatable Brewster elements, the apparatus according to the present invention has the advantage of being simpler and less expensive to manufacture. Moreover, the system is faster because the inertia is lower since there is only one rotating Brewster plate.
True, the beam offset described above cannot be fully compensated by a system composed of rotable and stationary Brewster elements. However, adequate positioning of the laser source and optical components within the laser housing still can provide a laser output beam which lies in a desired plane.
It could be shown in practice that one rotatable Brewster element is sufficient to stabilize the power in a power range of from 15 to 100% of the power output. On the other hand, a combination of rotatable and stationary Brewster elements should be provided for power stabilization and control in a wider range. The stationary Brewster element, furthermore, is needed to turn back the polarization direction to the original polarization plane of the laser source. That may be necessary to fulfill certain requirements of a laser output signal, and it may be recommendable regarding downstream optical elements, such as beam splitters, modulators and the like which often operate in dependence upon polarization.
In another preferred embodiment, a second rotatable Brewster element is associated with the rotatable Brewster element. It may be arranged directly downstream or upstream of the rotatable Brewster element first mentioned and along the same axis in the propagation path of the laser beam. The first and second rotatable Brewster elements, preferably, are rotatable in opposite directions. More specifically, they are rotated in synchronism by the same angular amount, in opposite directions. In an especially preferred embodiment of this variant, the first and second rotatable Brewster elements each are designed to be rotatable synchronously by about 0 to +45° and 0 to −45°, respectively, so as to control the transmission of the laser beam from maximum to minimum and vice versa. Providing a second rotatable Brewster element has the advantage of enlarging the dynamic range for power reduction or transmission of the laser beam, extending at least from 0 to 98% transmission. Moreover, two rotatable Brewster elements connected in series allow a shorter reaction time and, furthermore, smaller angles of rotation (0 to 45°) can be achieved than with only one rotatable Brewster element (0 to 90°).
In a preferred embodiment, the measuring means comprises an active power meter and a beam splitter which is disposed in the propagation path of the laser beam and directs a defined portion of the laser beam onto the active power meter. The part of the laser beam which is deviated by the beam splitter should be as small as possible in order not to reduce the power output too much.
The control means preferably comprises a PID controller which includes a proportional controller portion, an integral controller portion, and a differential controller portion. In a preferred embodiment this is implemented by software in an electronic control unit. In that case it is convenient to locate an A/D converter and a D/A converter at the input and output, respectively, of the control unit. But control can be accomplished also on a purely electronic base.
The drive means for the rotatable Brewster element preferably comprises a galvanometric motor and especially a galvanometer scanner permitting quick acceleration and deceleration of the Brewster element and, as a result, quick adjustment of the desired angle.
It is also preferred to provide an input device for entering either a constant desired power value or a desired power value profile into the control means. In the preferred embodiment in which the control means is embodied by a processor, either a universal type computer or a dedicated computer may serve as the input device.
In another especially preferred embodiment of the invention and optical modulation system is arranged downstream of the measuring means in the propagation path of the laser beam. Most preferably, this system comprises an acousto-optical modulator. The modulation system supports the control means in returning the laser output power to a desired value when faster variations in laser intensity or leaps in the desired value are occurring. In such an event the modulation system changes its own operating cycle so as to lead the laser output power in the direction of the desired value. When the actual power value reaches the desired value the modulation system is set back to a predetermined operating cycle. The input signal received by the modulation system is the control differential between the desired power value and the actual power value so that the system will be able to react quickly to leaps in the desired power value or deviations from control. Provision of the modulation system makes it possible to adjust the power output of the laser beam still more quickly to a desired value than when using only Brewster elements. Moreover, the modulation system is employed whenever variable pulsed operation of the laser beam is desired.
The use of galvanometer scanners for rotating the rotable Brewster elements permits control times in the range of a few milliseconds to be achieved. These times can be reduced to half of the value mentioned or even less when the downstream modulation system is provided.
The rotatable Brewster element and the stationary Brewster element each preferably consist of a ZnSe plate which may be coated, for example, with a suitable antireflection film.
The invention will be described further, by way of example, with reference to the accompanying drawings, in which:
Reference is made to
A CO2 laser source or another laser source is coupled to the control apparatus shown and emits the laser beam 14, as may be seen in
The proposed control apparatus makes it possible to achieve short control times in the range of a few milliseconds for adjusting the actual power value in case there are leaps in the desired power values or variations in the power output of the CO2 laser. Laser-bound power variations can be limited in practice to <0.3% of the laser power output. The stationary Brewster window 18 serves the purpose of bringing back the polarization direction of the laser beam 14 to the original polarization direction and of causing further attenuation of the laser beam. The latter, in turn, depends on the angle of rotation of the rotatable Brewster window.
In a modification of the embodiment of the invention illu-strated in
Moreover, a safety shutter, of the water cooled type, for instance, may be provided at the output of the control means in other words downstream of the partly reflecting mirror 20, to thereby limit the control means in the direction of the target. Furthermore, the control apparatus may comprise beam dumps to catch those shares of the laser beam which were reflected by the Brewster window.
In another preferred embodiment of the invention, a modulation system, and particularly an acousto-optical modulator, is connected downstream of the control means, as indicated diagrammatically at 30 in
The features disclosed in the specification above, in the claims and drawings may be significant for implementing the invention in its various embodiments, both individually and in any combination.
List of reference numerals used in FIGS. 1 to 4
Number | Date | Country | Kind |
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20 2004 009 856.3 | Jun 2004 | DE | national |