Number | Name | Date | Kind |
---|---|---|---|
3997065 | Jaksch | Dec 1976 | |
4311427 | Coad et al. | Jan 1982 | |
4441853 | Kosugi | Apr 1984 | |
4662811 | Hayden | May 1987 | |
5183378 | Asano et al. | Feb 1993 | |
5551829 | Jerolimov et al. | Sep 1996 |
Entry |
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V.J. Delgado, "Semiconductor Wafer Alignment Fixture," IBM Technical Disclosure Bulletin, vol. 10, No. 6, Nov. 1967, pp. 828-829. |