Claims
- 1. An apparatus for measuring an electrical resistance of an electrically-conductive material, the apparatus comprising:
a housing; and first, second, third, and fourth conductive members projecting outwardly from the housing, the conductive members being engageable with the electrically-conductive material at a plurality of points distributed along a measurement axis.
- 2. The apparatus of claim 1, wherein at least some of the conductive members include a spring-loaded portion such that a contact portion of the conductive member projects outwardly from the housing by a variable distance.
- 3. The apparatus of claim 1, wherein at least some of the conductive members include a compliant portion adapted to engage the electrically-conductive material.
- 4. The apparatus of claim 1 wherein the second and third conductive members are positioned between the first and fourth conductive members, and wherein the apparatus further comprises:
a source operatively coupled to the first and fourth conductive members; and a meter operatively coupled to the second and third conductive members.
- 5. The apparatus of claim 4, wherein the source is operable to apply a current between the first and fourth conductive members.
- 6. The apparatus of claim 4, wherein the meter is operable to measure a voltage between the second and third conductive members.
- 7. The apparatus of claim 1, further comprising a calibration device that includes a substrate having a plurality of contact pads formed thereon and adapted to be engaged with the conductive members, a calibration article having a known resistance, and a plurality of conductive leads electrically coupling the contact pads with the calibration article.
- 8. The apparatus of claim 1, wherein each conductive member includes an elongated member extending along a longitudinal axis, and wherein the longitudinal axes of the elongated members are substantially parallel.
- 9. The apparatus of claim 1, wherein the housing includes a plurality of channels disposed therein, each conductive member being at least partially disposed within a corresponding one of the channels.
- 10. The apparatus of claim 1, wherein the housing includes
a body portion having plurality of channels disposed therein, each conductive member being at least partially disposed within a corresponding one of the channels; a base member coupled to the body portion and having a plurality of apertures disposed therethrough, each conductive member projecting through a corresponding one of the apertures; and a cap portion coupled to the body portion and having an opening disposed therethrough.
- 11. An apparatus for measuring a resistance of a conductive layer, the apparatus comprising:
a housing member; first and second pairs of conductive members projecting outwardly from the housing member, the first pair of conductive members being positioned between the second pair of conductive members, the first and second pairs of conductive members being engageable with the conductive layer; and a device operatively coupled to at least the first pair of conductive members and being operable to determine a voltage between the first pair of conductive members.
- 12. The apparatus of claim 11, wherein the device is further coupled to the second pair of conductive members and is operable to apply a current to the second pair of conductive members.
- 13. The apparatus of claim 11, further comprising a source operatively coupled to the second pair of conductive members, the source being operable to apply a current to the second pair of conductive members.
- 14. The apparatus of claim 11, wherein at least some of the conductive members include a spring-loaded portion such that a contact portion of the conductive member projects outwardly from the housing by a variable distance.
- 15. The apparatus of claim 11, wherein at least some of the conductive members include a compliant portion adapted to engage the conductive layer.
- 16. The apparatus of claim 11, wherein the first and second pairs of conductive members are simultaneously engageable with the conductive layer along an axis of contact.
- 17. The apparatus of claim 16, wherein the axis of contact is a curved axis of contact.
- 18. The apparatus of claim 11, wherein each conductive member includes an elongated member extending along a longitudinal axis, and wherein the longitudinal axes of the elongated members are substantially parallel.
- 19. The apparatus of claim 11, further comprising a calibration device that includes a substrate having a plurality of contact pads formed thereon and adapted to be engaged with the conductive members, a calibration article having a known resistance, and a plurality of conductive leads electrically coupling the contact pads with the calibration article.
- 20. The apparatus of claim 11, wherein the housing member includes a plurality of channels disposed therein, each conductive member being at least partially disposed within a corresponding one of the channels.
- 21. The apparatus of claim 11, wherein the housing member includes
a body portion having plurality of channels disposed therein, each conductive member being at least partially disposed within a corresponding one of the channels; a base member coupled to the body portion and having a plurality of apertures disposed therethrough, each conductive member projecting through a corresponding one of the apertures; and a cap portion coupled to the body portion and having a port disposed therethrough, the first pair of conductive members being operatively coupled to the device by conductive leads passing through the port.
- 22. An apparatus for measuring resistance, comprising:
a housing; first and second pairs of conductive members projecting outwardly from the housing, the first pair of conductive members being positioned between the second pair of conductive members, the first and second pairs of conductive members being engageable with a conductive layer; and a circuit operatively coupled to the first and second pairs of conductive members, the circuit being operable to apply an electrical current to the second pair of conductive members and to provide a measurement of a resulting voltage between the first pair of conductive members when the conductive members are engaged with the conductive layer.
- 23. The apparatus of claim 22, wherein the first and second pairs of conductive members are simultaneously engageable with the conductive layer along an axis of contact.
- 24. The apparatus of claim 22, wherein at least some of the conductive members include a spring-loaded portion such that a contact portion of the conductive member projects outwardly from the housing by a variable distance.
- 25. The apparatus of claim 22, wherein at least some of the conductive members include a compliant portion adapted to engage the conductive layer.
- 26. The apparatus of claim 22, further comprising a calibration device that includes a substrate having a plurality of contact pads formed thereon and adapted to be engaged with the conductive members, a calibration article having a known resistance, and a plurality of conductive leads electrically coupling the contact pads with the calibration article.
- 27. The apparatus of claim 22, wherein the circuit includes a Kelvin double bridge circuit.
- 28. A method of measuring a resistance of a conductive layer, the method comprising:
providing first and second pairs of conductive members, the first pair of conductive members being positioned between the second pair of conductive members; engaging the first and second pairs of conductive members with the conductive layer along a contact axis; applying an electrical current to the first pair of conductive members; and determining a resulting voltage between the second pair of conductive members.
- 29. The method of claim 28, wherein engaging the first and second pairs of conductive members with the conductive layer includes at least partially compressing a spring member disposed within at least one of the conductive members.
- 30. The method of claim 28, wherein engaging the first and second pairs of conductive members with the conductive layer includes engaging a compliant portion of at least one of the conductive members with the conductive layer.
- 31. The method of claim 28, wherein providing first and second pairs of conductive members includes providing a housing having a plurality of channels disposed therein, each conductive member being at least partially disposed within a corresponding one of the channels.
- 32. The method of claim 28, wherein engaging the first and second pairs of conductive members with the conductive layer along a contact axis includes engaging a tip portion of each conductive member with the conductive layer.
- 33. The method of claim 28, further comprising determining a resistance of the conductive layer based on the applied electrical current and the resultant voltage.
- 34. The method of claim 28, further comprising prior to engaging the first and second pairs of conductive members with the conductive layer, performing a calibration measurement by engaging the first and second pairs of conductive members with a calibration device.
- 35. The method of claim 34 wherein the calibration device includes a substrate having a plurality of contact pads formed thereon, a calibration article having a known resistance, and a plurality of conductive leads electrically coupling the contact pads with the calibration article, and wherein performing a calibration measurement includes engaging the first and second pairs of conductive members with the plurality of contact pads.
- 36. A method of calibrating a resistance-measuring device having first and second pairs of conductive members, the first pair of conductive members being positioned between the second pair of conductive members, the method comprising:
providing first and second pairs of contact pads, the first pair of contact pads being positioned between the second pair of contact pads; providing a calibration article having a known resistance value; engaging the first and second pairs of conductive members with the first and second pairs of contact pads, respectively; applying an electrical current to the first pair of conductive members; and determining a resulting voltage between the second pair of conductive members.
- 37. The method of claim 36, wherein engaging the first and second pairs of conductive members with the first and second pairs of contact pads includes at least partially compressing a spring member disposed within at least one of the conductive members.
- 38. The method of claim 36, wherein engaging the first and second pairs of conductive members with the first and second pairs of contact pads includes engaging a compliant portion of at least one of the conductive members with a corresponding one of the contact pads.
- 39. The method of claim 36, wherein providing first and second pairs of conductive members includes providing a housing having a plurality of channels disposed therein, each conductive member being at least partially disposed within a corresponding one of the channels.
- 40. The method of claim 36, further comprising determining a resistance of the conductive layer based on the applied electrical current and the resultant voltage.
- 41. The method of claim 36, further comprising determining a measured resistance of the conductive layer based on the applied electrical current and the resultant voltage, and comparing the measured resistance with the known resistance of the calibration article.
- 42. The method of claim 41, further comprising determining a correction factor to be applied to the measured resistance.
- 43. The method of claim 41, further comprising adjusting a measurement device to correct for a discrepancy between the measured resistance and the known resistance.
CROSS REFERENCE TO RELATED APPLICATIONS
[0001] This patent application is related to a concurrently-filed patent application entitled “Apparatus and Methods for Measuring Resistance of Conductive Layers” and bearing attorney docket number BOEI-1-1159, which application is hereby incorporated by reference.