Claims
- 1. A system for coupling ultrasound to a liquid, comprising:two or more transducers adapted for coupling to a liquid, the transducers constructed and arranged so as to be capable of producing ultrasound in the liquid at frequencies within at least two frequency bands, and, one or more ultrasound generators adapted for producing driver signals for driving the transducers at frequencies in one or more frequency ranges within each of the at least two frequency bands; wherein at least one frequency range is within the microsonic range of frequencies; and, wherein the driver signals in the microsonic range of frequencies are synchronized with a common FM signal; and, wherein the driver signals of the one or more ultrasound generators drive the transducers to produce ultrasound in the liquid characterized by a frequency that sweeps at random, chaotic or pseudo random sweep rates within at least one of the frequency ranges in one of the at least two frequency bands; and, wherein the sweep is monotonic from high frequency to low frequency with a recovery time from low frequency to high frequency that is a shorter time than the monotonic sweep; and, wherein the driver signals are amplitude modulated at a modulation frequency that changes randomly, chaotically or pseudo randomly; and, wherein the one or more ultrasound generators each have an output stage, which comprises a) modification circuitry which modifies the output stage; b) an AC switch, operatively connected to the modification circuitry, which switches the modification circuitry into and out of the output stage of the ultrasound generator; and c) control circuitry, associated with the AC switch and with the one or more ultrasound generators, which is adapted to turn off and turn on the AC switch, wherein the control circuitry, AC switch and modification circuitry changes the one or more ultrasound generator driver signals to further drive the transducers to change frequency to a different frequency range in a different frequency band, so as to generate ultrasound characterized by a frequency that sweeps at random, pseudo random or chaotic sweep rates within at least one additional frequency range in at least one additional frequency band of the at least two frequency bands.
- 2. A system according to claim 1 wherein the amplitude modulated driver signals have off times that vary randomly, chaotically or pseudo randomly while maintaining a specified duty cycle for power control.
- 3. A system according to claim 1 wherein the transducers are harmonic transducers of the reverse bolt construction.
- 4. A system for coupling ultrasound to a liquid, comprising:one or more transducers adapted for coupling to a liquid, the transducers constructed and arranged so as to be capable of producing ultrasound in the liquid at frequencies within at least two frequency bands, and, an ultrasound generator adapted for producing a driver signal for driving the transducers at frequencies in one or more frequency ranges within each of the at least two frequency bands; wherein the driver signal of the ultrasound generator drives the transducers to produce ultrasound in the liquid characterized by successive frequencies within at least one of the frequency ranges in one of the at least two frequency bands; and, wherein the ultrasound generator has an output stage, which comprises a) modification circuitry which modifies the output stage; b) an AC switch, operatively connected to the modification circuitry, which switches the modification circuitry into and out of the output stage of the ultrasound generator; and c) control circuitry, associated with the AC switch and with the ultrasound generator, which is adapted to turn off and turn on the AC switch, wherein the control circuitry, AC switch and modification circuitry changes the ultrasound generator driver signal to further drive the transducers to change frequency to a different frequency range in a different frequency band, so as to generate ultrasound characterized by successive frequencies within at least one additional frequency range in at least one additional frequency band of the at least two frequency bands.
- 5. A system according to claim 4 wherein the driver signal is amplitude modulated.
- 6. A system according to claim 4 wherein the successive frequencies sweep at different sweep rates.
- 7. A system according to claim 6 wherein the sweep rates are random, chaotic or pseudo random.
- 8. A system according to claim 5 wherein the amplitude modulated driver signal has a frequency that varies randomly, chaotically or pseudo randomly.
- 9. A system according to claim 4 wherein at least one of the at least two frequency bands is in the range of microsonic frequencies.
- 10. A system according to claim 4 wherein the ultrasound generator is PLC or computer controlled.
- 11. A system according to claim 4 wherein the ultrasound generator determines its output based on information from a probe within the liquid.
- 12. A system according to claim 4 wherein the tank is a quick dump rinse tank connected to a vacuum chamber.
- 13. A system according to claim 4 wherein the center frequency for at least one set of successive frequencies is controlled by a phase lock loop.
- 14. A system according to claim 4 wherein the transducers are harmonic transducers of the reverse bolt construction.
- 15. A system according to claim 4 wherein the transducers are harmonic transducers of the acid transducer type construction.
- 16. A system according to claim 4 wherein the transducers are harmonic transducers of the welded stud type construction.
- 17. A system according to claim 4 wherein the transducers are harmonic transducers of the double compression type transducer construction.
- 18. A system according to claim 4 wherein the transducers are harmonic transducers with overlapping bandwidths.
- 19. A system according to claim 7 wherein the driver signal is continuous wave.
- 20. A system according to claim 5 wherein the amplitude modulated driver signal has a frequency that sweeps linearly.
- 21. A system according to claim 5 wherein the amplitude modulated driver signal has an amplitude that changes to control power.
- 22. A system according to claim 5 wherein the amplitude modulated driver signal has an amplitude modulation pattern that is full wave modulated.
- 23. A system according to claim 5 wherein the amplitude modulated driver signal has an amplitude modulation pattern that is quarter wave modulated.
- 24. A system according to claim 5 wherein the amplitude modulated driver signal has an amplitude modulation pattern that is quarter wave modulated and where the amplitude and power output of the generator is controlled by the angle of the modulation.
- 25. A system according to claim 6 wherein the sweep rates are swept linearly.
- 26. A system according to claim 6 wherein the sweep rates are approximated by a staircase function based on digital control.
- 27. A system according to claim 7 wherein the sweep rates are approximated by a staircase function based on digital control.
- 28. A system according to claim 4 wherein the ultrasound generator operates from a universal power line voltage based on a power factor correction circuit input.
- 29. A system according to claim 4 wherein the ultrasound generator and transducers are built on a unified printed circuit board assembly.
- 30. A system according to claim 4 wherein the ultrasound generator circuit topology is a zero current switching inverter circuit.
- 31. A system according to claim 4 wherein the ultrasound generator has amplitude control based on bursts of ultrasound separated by quiet times and degas times.
- 32. A system according to claim 4 wherein the ultrasound generator driver signal changes frequency monotonically from high frequency to low frequency.
- 33. A system according to claim 9 wherein additional power is available to the transducers by the addition of a power module that is synchronized with the generator 's microsonic frequency.
- 34. A system according to claim 8 wherein the amplitude modulated driver signal has off times that vary randomly, chaotically or pseudo randomly while maintaining a specified duty cycle for power control.
- 35. A system for coupling ultrasound to a liquid, comprising:two or more transducers adapted for coupling to a liquid, the transducers constructed and arranged so as to be capable of producing ultrasound in the liquid at frequencies within at least two frequency bands, and, one or more ultrasound generators adapted for producing driver signals for driving the transducers at frequencies in one or more frequency ranges within each of the at least two frequency bands; wherein at least one frequency range is within the microsonic range of frequencies; and, wherein the driver signals of the one or more ultrasound generators drive the transducers to produce ultrasound in the liquid characterized by a frequency that sweeps at random, chaotic or pseudo random sweep rates within at least one of the frequency ranges in one of the at least two frequency bands; and, wherein the driver signals are amplitude modulated at a modulation frequency that changes randomly, chaotically or pseudo randomly; and, wherein the one or more ultrasound generators each have an output stage, which comprises a) modification circuitry which modifies the output stage; b) an AC switch, operatively connected to the modification circuitry, which switches the modification circuitry into and out of the output stage of the ultrasound generator; and c) control circuitry, associated with the AC switch and with the one or more ultrasound generators, which is adapted to turn off and turn on the AC switch, wherein the control circuitry, AC switch and modification circuitry changes the one or more ultrasound generator driver signals to further drive the transducers to change frequency to a different frequency range in a different frequency band, so as to generate ultrasound characterized by a frequency that sweeps at random, pseudo random or chaotic sweep rates within at least one additional frequency range in at least one additional frequency band of the at least two frequency bands.
- 36. A system for coupling ultrasound to a liquid, comprising:at least two transducers adapted for coupling to a liquid, the transducers constructed and arranged so as to be capable of producing ultrasound in the liquid at frequencies within at least two frequency bands; an ultrasound generator adapted for producing a driver signal for driving the transducers at frequencies in one or more frequency ranges within each of the at least two frequency bands; wherein at least one of the frequency ranges is in the microsonic range of frequencies; and, wherein the driver signal of the ultrasound generator drives the transducers to produce ultrasound in the liquid characterized by successive frequencies within at least one of the frequency ranges in one of the at least two frequency bands; the ultrasound generator changes the driver signal to further drive the transducers to change frequency to a different frequency range in a different frequency band, so as to generate ultrasound characterized by successive frequencies within at least one additional frequency range in at least one additional frequency band of the at least two frequency bands.
- 37. A system according to claim 36 wherein the driver signal is amplitude modulated.
- 38. A system according to claim 36 wherein the successive frequencies sweep at different sweep rates.
- 39. A system according to claim 38 wherein the sweep rates are random, chaotic or pseudo random.
- 40. A system according to claim 37 wherein the amplitude modulated driver signal has a frequency that varies randomly, chaotically or pseudo randomly.
- 41. A system according to claim 36 wherein all of the at least two frequency bands are in the range of microsonic frequencies.
- 42. A system according to claim 36 wherein the ultrasound generator is PLC or computer controlled.
- 43. A system according to claim 36 wherein the ultrasound generator determines its output based on information from a probe within the liquid.
- 44. A system according to claim 36 wherein the tank is a quick dump rinse tank connected to a vacuum chamber.
- 45. A system according to claim 36 wherein the center frequency for at least one set of successive frequencies is controlled by a phase lock loop.
- 46. A system according to claim 36 wherein the transducers are harmonic transducers of the reverse bolt construction.
- 47. A system according to claim 36 wherein the transducers are harmonic transducers of the acid transducer type construction.
- 48. A system according to claim 36 wherein the transducers are harmonic transducers of the welded stud type construction.
- 49. A system according to claim 36 wherein the transducers are harmonic transducers of the double compression type transducer construction.
- 50. A system according to claim 36 wherein the transducers are harmonic transducers with overlapping bandwidths.
- 51. A system according to claim 39 wherein the driver signal is continuous wave.
- 52. A system according to claim 37 wherein the amplitude modulated driver signal has a frequency that sweeps linearly.
- 53. A system according to claim 37 wherein the amplitude modulated driver signal has an amplitude that changes to control power.
- 54. A system according to claim 37 wherein the amplitude modulated driver signal has an amplitude modulation pattern that is full wave modulated.
- 55. A system according to claim 37 wherein the amplitude modulated driver signal has an amplitude modulation pattern that is quarter wave modulated.
- 56. A system according to claim 37 wherein the amplitude modulated driver signal has an amplitude modulation pattern that is quarter wave modulated and where the amplitude and power output of the generator is controlled by the angle of the modulation.
- 57. A system according to claim 38 wherein the sweep rates are swept linearly.
- 58. A system according to claim 38 wherein the sweep rates are approximated by a staircase function based on digital control.
- 59. A system according to claim 39 wherein the sweep rates are approximated by a staircase function based on digital control.
- 60. A system according to claim 36 wherein the ultrasound generator operates from a universal power line voltage based on a power factor correction circuit input.
- 61. A system according to claim 36 wherein the ultrasound generator and transducers are built on a unified printed circuit board assembly.
- 62. A system according to claim 36 wherein the ultrasound generator circuit topology is a zero current switching inverter circuit.
- 63. A system according to claim 36 wherein the ultrasound generator has amplitude control based on bursts of ultrasound separated by quiet times and degas times.
- 64. A system according to claim 36 wherein the ultrasound generator driver signal changes frequency monotonically from high frequency to low frequency.
- 65. A system according to claim 41 wherein additional power is available to the transducers by the addition of a power module that is synchronized with the generator 's microsonic frequencies.
- 66. A system according to claim 40 wherein the amplitude modulated driver signal has off times that vary randomly, chaotically or pseudo randomly while maintaining a specified duty cycle for power control.
- 67. A system for coupling ultrasound to a liquid, comprising:two or more transducers adapted for coupling to a liquid, the transducers constructed and arranged so as to be capable of producing ultrasound in the liquid at frequencies within at least two frequency bands, and, one or more ultrasound generators adapted for producing driver signals for driving the transducers at frequencies in one or more frequency ranges within each of the at least two frequency bands, wherein the driver signals of the one or more ultrasound generators drive the transducers to produce ultrasound in the liquid characterized by a frequency that sweeps at random, chaotic or pseudo random sweep rates within at least one of the frequency ranges in one of the at least two frequency bands; and, wherein the driver signals are continuous wave; and, wherein the one or more ultrasound generators each have an output stage, which comprises a) modification circuitry which modifies the output stage; b) an AC switch, operatively connected to the modification circuitry, which switches the modification circuitry into and out of the output stage of the ultrasound generator; and c) control circuitry, associated with the AC switch and with the one or more ultrasound generators, which is adapted to turn off and turn on the AC switch, wherein the control circuitry, AC switch and modification circuitry changes the one or more ultrasound generator driver signals to further drive the transducers to change frequency to a different frequency range in a different frequency band, so as to generate ultrasound characterized by a frequency that sweeps at random, pseudo random or chaotic sweep rates within at least one additional frequency range in at least one additional frequency band of the at least two frequency bands.
- 68. An ultrasound generator having an output signal that is frequency modulated with a sweeping frequency waveform and amplitude modulated with a changing frequency;wherein the sweep rate of the sweeping frequency waveform changes randomly, chaotically or pseudo randomly; and, wherein the amplitude modulation frequency changes randomly, chaotically or pseudo randomly.
- 69. An ultrasound generator having an output signal that is frequency modulated with a sweeping frequency waveform and has continuous wave for its amplitude modulation;wherein the sweep rate of the sweeping frequency waveform changes randomly, chaotically or pseudo randomly.
RELATED APPLICATIONS
This application is a continuation in part of U.S. application Ser. No. 09/370,302, filed Aug. 9, 1999, entitled “Probe System for Ultrasonic Processing Tank”, still pending.
This application is also a continuation in part of U.S. application Ser. No. 09/609,036, filed Jun. 30, 2000, entitled “Circuitry to Modify the Operation of Ultrasonic Generators”, now U.S. Pat. No. 6,462,461.
This application is also a continuation in part of U.S. application Ser. No. 09/678,576, filed Oct. 3, 2000, entitled “Apparatus and Methods for Cleaning and/or Processing Delicate Parts”, now U.S. Pat. No. 6,433,460.
This application is also a continuation in part of U.S. application Ser. No. 10/029,751, filed Oct. 29, 2001, entitled “Multiple Frequency Cleaning System”, now U.S. Pat. No. 6,538,360.
The following U.S. Patents are related to the present application, and hereby incorporated by reference:
U.S. application Ser. No. 08/718,945 filed Sep. 24, 1996, entitled “Apparatus and Methods for Cleaning and/or Processing Delicate Parts”, which claims priority of U.S. Provisional Application Ser. No. 60/023,150, filed Aug. 5, 1996, entitled “Apparatus and Methods for Processing and Cleaning Semiconductor Wafers and Other Delicate Parts”. U.S. application Ser. No. 08/718,945 issued in Nov. 10, 1998 as U.S. Pat. No. 5,834,871.
U.S. application Ser. No. 09/066,171 filed Apr. 24, 1998, entitled “Apparatus and Methods for Cleaning and/or Processing Delicate Parts”, which is a continuation of U.S. Pat. No. 5,834,871 and is issued in Dec. 14, 1999 as U.S. Pat. No. 6,002,195.
U.S. application Ser. No. 09/097,374, filed on Jun. 15, 1998, entitled “Systems and Methods for Ultrasonically Processing Delicate Parts” issued on Jan. 25, 2000 as U.S. Pat. No. 6,016,821, claiming priority to U.S. Provisional Patent Application 60/049,717 filed on Jun. 16, 1997, and entitled “Systems and Methods for Ultrasonically Processing Delicate Parts”. U.S. application Ser. No. 09/097,374 is also a continuation-in-part of U.S. application Ser. No. 08/718,945, filed on Sep. 24, 1996, entitled “Apparatus and Methods for Cleaning and/or Processing Delicate Parts” which issued on Nov. 10, 1998 as U.S. Pat. No. 5,834,871.
U.S. application Ser. No. 09/066,158 filed Apr. 24, 1998, entitled “Apparatus and Methods for Cleaning and/or Processing Delicate Parts”, which is a continuation-in-part of U.S. Pat. No. 5,834,871 and is issued in Jan. 30, 2001 as U.S. Pat. No. 6,181,051 B1. U.S. application Ser. No. 09/066,158 also claims priority to U.S. Provisional Application 60/023,150.
U.S. application Ser. No. 09/371,704, filed Aug. 9, 1999, entitled “Ultrasonic Generating Unit having a Plurality of Ultrasonic Transducers”, now issued Jan. 30, 2001 as U.S. Pat. No. 6,181,052 B1.
U.S. application Ser. No. 09/370,751, filed Aug. 9, 1999, entitled “Power System for Impressing AC voltage Across a Capacitive Element”, and is now issued Jan. 9, 2001 as U.S. Pat. No. 6,172,444B1.
U.S. application Ser. No. 09/370,324, filed Aug. 9, 1999, entitled “Ultrasonic Transducer with Bias Bolt Compression Bolt”, issued on Sep. 11, 2001 as U.S. Pat. No. 6,288,476 B1.
U.S. application Ser. No. 09/370,301, filed Aug. 9, 1999, entitled “Ultrasonic Transducer with Epoxy Compression Elements”, now issued Jun. 5, 2001 as U.S. Pat. No. 6,242,847 B1.
U.S. application Ser. No. 09/504,567, filed Feb. 15, 2000, entitled “Multiple Frequency Cleaning System”, issued on Nov. 6, 2001 as U.S. Pat. No. 6,313,565 B1.
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Continuation in Parts (4)
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Number |
Date |
Country |
Parent |
10/029751 |
Oct 2001 |
US |
Child |
10/178751 |
|
US |
Parent |
09/678576 |
Oct 2000 |
US |
Child |
10/029751 |
|
US |
Parent |
09/609036 |
Jun 2000 |
US |
Child |
09/678576 |
|
US |
Parent |
09/370302 |
Aug 1999 |
US |
Child |
09/609036 |
|
US |