Claims
- 1. Apparatus for irradiating a substrate comprising:
- (i) a vacuum chamber including a transmission window which is located at a first end of said vacuum chamber;
- (ii) a particle beam generator within said vacuum chamber; and
- (iii) a particle beam accelerator, within said vacuum chamber, which accelerates and directs particles from said generator towards and through said transmission window, said apparatus comprising a high voltage AC power transfer apparatus having at least one of:
- (i) a transformer having a first coil, which forms part of a first resonant circuit having a high frequency selectivity, and a second coil, which forms part of a second resonant circuit having a high frequency selectivity and having a predetermined resonant frequency,
- the coupling between said first and second coils being close to or at the critical coupling value; or
- (ii) a phase locked loop generator, for generating a square wave electrical signal at a predetermined value of frequency and voltage, and at least one voltage gain solid state power driver connected to said generator for receiving and converting said square wave signal from said phase locked loop generator into a power signal having a square wave voltage profile, said driver being configured for connection to and for driving a first coil of a transformer.
- 2. Apparatus comprising the power transfer apparatus set forth in claim 1 further comprising electrical feedback connection, between the resonant circuit and the phase locked loop generator, for regulating and controlling the voltage level delivered to the electrical power load and for maintaining the frequency of the square wave electrical signal substantially at the predetermined value.
- 3. Apparatus comprising the high voltage AC power transfer apparatus set forth in claim 1 further comprising electrical feedback connection comprising a latching circuit connected between the phase locked loop generator and each one of the power generator and the solid state power driver for rapidly shutting down the electrical apparatus in the event of an out of specification load condition.
- 4. The apparatus for irradiating a substrate set forth in claim 1, wherein the high voltage AC power transfer apparatus comprises:
- a transformer having a first coil, which forms part of a first resonant circuit having a high frequency selectivity, and a second coil, which forms part of a second resonant circuit having a high frequency selectivity and having a predetermined resonant frequency,
- the coupling between said first and second coils being close to or at the critical coupling value,
- said first resonant circuit also comprising a phase locked loop generator, for generating a square wave electrical signal at a predetermined value of frequency and voltage, and at least one voltage gain solid state power driver connected to said generator for receiving and converting said square wave signal from said phase locked loop generator into a power signal having a square wave voltage profile, said driver being connected to and driving said first coil of said transformer, and
- said second resonant circuit transforming said square wave voltage profile power signal from said first coil into continuous substantially sinusoidal high voltage electrical power in said second resonant circuit, and also comprising an electrical power load.
- 5. Electrical apparatus comprising; a high voltage AC power transfer apparatus having:
- a transformer having a first coil, which forms part of a first resonant circuit having a high frequency selectivity, and a second coil, which forms part of a second resonant circuit having a high frequency selectivity and having a predetermined resonant frequency,
- the coupling between said first and second coils being close to or at the critical coupling value,
- said first resonant circuit also comprising a phase locked loop generator for generating a square wave electrical signal at a predetermined value of frequency and voltage, and at least one voltage gain solid state power driver connected to said generator for receiving and converting said square wave signal from said phase locked loop generator into a power signal having a square wave voltage profile, said driver being connected to and driving said first coil of said transformer, and
- said second resonant circuit transforming said square wave voltage profile power signal from said first coil into continuous substantially sinusoidal high voltage electrical power in said second resonant circuit, and also comprising an electrical power load.
- 6. Apparatus comprising the high voltage AC power transfer apparatus set forth in claim 5, further comprising electrical feedback connection, between the resonant circuit and the phase locked loop generator, for regulating and controlling the voltage level delivered to the electrical power load and for maintaining the frequency of the square wave electrical signal substantially at the predetermined value.
- 7. Apparatus comprising the high voltage AC power transfer apparatus set forth in claim 5, further comprising electrical feedback connection comprising a shut down latching circuit connected between the phase locked loop generator and each one of the power generator and the solid state power driver for rapidly shutting down the electrical apparatus in the event of an out of specification load condition.
- 8. Method in an electrical apparatus for providing high voltage substantially sinusoidal electrical power for an electrical load, comprising the steps of:
- generating a square wave electrical voltage signal pulse in a first resonant circuit, which comprises a primary coil of a transformer, and which has a high frequency selectivity at a predetermined resonant frequency;
- amplifying the square wave voltage signal pulse to drive the primary coil of the transformer;
- transforming the square wave voltage signal pulse into high voltage high substantially sinusoidal electrical power in a second resonant circuit, which has a high frequency selectivity and which comprises a secondary coil of the transformer,
- the coupling between the primary coil and the secondary coil of the transformer being close to or at the critical coupling value, and performing at least one of the following steps:
- (i) using a portion of the substantially sinusoidal high voltage electrical power to regulate and maintain at a predetermined voltage the electrical power delivered to the electrical load, or
- (ii) using a portion of the substantially sinusoidal high voltage electrical power to maintain the predetermined frequency substantially at the resonant frequency of the second resonant circuit.
REFERENCE TO RELATED APPLICATION
This application is a division of application Ser. No. 08/428,615 filed Apr. 25, 1995 now U.S. Pat. No. 5,604,352, the disclosure of which is incorporated by reference.
The present application is related to copending U.S. patent application Ser. No. 07/950,530, filed on Sep. 23, 1992, which is a continuation-in-part of U.S. patent application Ser. No. 07/748,987, filed on Aug. 16, 1991, entitled "Transmission Window for Particle Accelerator", now abandoned, which is a continuation-in-part of U.S. patent application Ser. No. 07/569,092 filed on Aug. 17, 1990, entitled "Transmission Window for Particle Accelerator", now abandoned, and to copending U.S. patent application Ser. No. 08/198,163, filed on Feb. 17, 1994, entitled "Apparatus and Methods for Electron Beam Irradiation", which is a continuation-in-part of copending Patent Cooperation Treaty Application No. U.S. 93/08895 filed designating the U.S. on Sep. 22, 1993 and claiming priority from U.S. patent application Ser. No. 07/950,530, filed on Sep. 23, 1992, and also a continuation-in-part of copending U.S. patent application Ser. No. 07/950,530, filed on Sep. 23, 1992, which is a continuation-in-part of U.S. patent application Ser. No. 07/748,987, filed on Aug. 16, 1991, entitled "Transmission Window for Particle Accelerator", now abandoned, which is a continuation-in-part of U.S. patent application Ser. No. 07/569,092 filed on Aug. 17, 1990, entitled "Transmission Window for Particle Accelerator", now abandoned. The disclosures of all these applications are incorporated herein by reference for all purposes.
Divisions (1)
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Number |
Date |
Country |
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428615 |
Apr 1995 |
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