Claims
- 1. An apparatus for enhanced purification of high-purity metals, which comprises an inner tube in which a vacuum atmosphere is to be formed, a first heating chamber provided in an upper interior of said inner tube, a second heating chamber provided in a lower interior of said inner tube, said first heating chamber accommodating a feed crucible with an open top into which a metal feed is charged and a desired metal in said metal feed is evaporated for recovery while impurity elements having a lower vapor pressure than said desired metal are separated by being allowed to stay within said feed crucible, said second heating chamber accommodating a tubular member having in a top thereof an inlet for receiving said desired metal as recovered and an outlet through which impurity elements that have a higher vapor pressure than said desired metal and which are evaporated in separate form upon heating are discharged, as well as a liquid reservoir for heating said desired metal which is formed in a lower part of said tubular member, and a diffuser for condensing said desired metal as evaporated, which is installed across an upper part of said tubular member.
- 2. The apparatus according to claim 1, which further comprises an outer tube, said inner tube is surrounded by the outer tube which has a larger diameter than the inner tube that permits said vacuum atmosphere to communicate with said inner tube and which is generally concentric therewith, said apparatus further including an upper heater and a lower heater provided in a space between an inner surface of said outer tube and an outer surface of said inner tube, said upper heater being positioned in an upper part of said space to heat said feed crucible, and said lower heater being positioned in a lower part of said space to heat said liquid reservoir.
- 3. The apparatus according to claim 1, wherein said diffuser consists of a plurality of generally parallel plates, each having a plurality of holes therethrough.
- 4. The apparatus according to claim 1, wherein at least an inner surface of a ceiling of said inner tube is domed or conical in shape.
- 5. The apparatus according to claim 3, wherein at least an inner surface of a ceiling of said inner tube is domed or conical in shape.
- 6. An apparatus for enhanced purification of high-purity metals, which comprises an inner tube in which a vacuum atmosphere is to be formed, a first heating chamber provided in an upper interior of said inner tube, a second heating chamber provided in a lower interior of said inner tube, said first heating chamber accommodating a feed crucible with an open top into which a metal feed is charged and a desired metal in said metal feed is evaporated for recovery while impurity elements having a lower vapor pressure than said desired metal are separated by being allowed to stay within said feed crucible, said second heating chamber accommodating a tubular member having in a top thereof an inlet for receiving said desired metal as recovered and an outlet through which impurity elements that have a higher vapor pressure than said desired metal and which are evaporated in separate form upon heating are discharged, as well as a liquid reservoir for heating said desired metal which is formed in a lower part of said tubular member, and a diffuser for condensing said desired metal as evaporated, which is installed across the upper part of said tubular member, wherein said desired metal is at least one metal selected from the group consisting of indium, antimony, zinc, tellurium, magnesium, cadmium, bismuth and silver.
- 7. An apparatus for enhanced purification of high-purity metals, which comprises an inner tube in which a vacuum atmosphere is to be formed, a first heating chamber provided in an upper interior of said inner tube, a second heating chamber provided in a lower interior of said inner tube, said first heating chamber accommodating a feed crucible with an open top into which a metal feed is charged and a desired metal in said metal feed is evaporated for recovery while impurity elements having a lower vapor pressure than said desired metal are separated by being allowed to stay within said feed crucible, said second heating chamber accommodating a tubular member having in a top thereof an inlet for receiving said desired metal as recovered and an outlet through which impurity elements that have a higher vapor pressure than said desired metal and which are evaporated in separate form upon heating are discharged, as well as a liquid reservoir for heating said desired metal which is formed in a lower part of said tubular member, and a diffuser for condensing said desired metal as evaporated, which is installed across an upper part of said tubular member, wherein said diffuser consists of a plurality of generally parallel plates, each having a plurality of holes therethrough, and wherein said desired metal is at least one metal selected from the group consisting of indium, antimony, zinc, tellurium, magnesium, cadmium, bismuth and silver.
- 8. An apparatus for enhanced purification of high-purity metals, which comprises an inner tube in which a vacuum atmosphere is to be formed, a first heating chamber provided in an upper interior of said inner tube, a second heating chamber provided in a lower interior of said inner tube, said first heating chamber accommodating a feed crucible with an open top into which a metal feed is charged and a desired metal in said metal feed is evaporated for recovery while impurity elements having a lower vapor pressure than said desired metal are separated by being allowed to stay within said feed crucible, said second heating chamber accommodating a tubular member having in a top thereof an inlet for receiving said desired metal as recovered and an outlet through which impurity elements that have a higher vapor pressure than said desired metal and which are evaporated in separate form upon heating are discharged, as well as a liquid reservoir for heating said desired metal which is formed in a lower part of said tubular member, and a diffuser for condensing said desired metal as evaporated, which is installed across an upper part of said tubular member, wherein at least an inner surface of a ceiling of said inner tube is domed or conical in shape, and wherein said desired metal is at least one metal selected from the group consisting of indium, antimony, zinc, tellurium, magnesium, cadmium, bismuth and silver.
- 9. The apparatus according to claim 2, wherein said diffuser consists of a plurality of generally parallel plates, each having a plurality of holes therethrough.
- 10. The apparatus according to claim 9, wherein at least an inner surface of a ceiling of said inner tube is domed or conical in shape.
- 11. The apparatus according to claim 2, wherein at least an inner surface of a ceiling of said inner tube is domed or conical in shape.
- 12. An apparatus for enhanced purification of high-purity metals, which comprises an inner tube in which a vacuum atmosphere is to be formed, a first heating chamber provided in an upper interior of said inner tube, a second heating chamber provided in a lower interior of said inner tube, said first heating chamber accommodating a feed crucible with an open top into which a metal feed is charged and a desired metal in said metal feed is evaporated for recovery while impurity elements having a lower vapor pressure than said desired metal are separated by being allowed to stay within said feed crucible, said second heating chamber accommodating a tubular member having in a top thereof an inlet for receiving said desired metal as recovered and an outlet through which impurity elements that have a higher vapor pressure than said desired metal and which are evaporated in separate form upon heating are discharged, as well as a liquid reservoir for heating said desired metal which is formed in a lower part of said tubular member, and a diffuser for condensing said desired metal as evaporated, which is installed across an upper part of said tubular member, wherein said inner tube is surrounded by an outer tube which has a larger diameter than the inner tube that permits said vacuum atmosphere to communicate with said inner tube and which is generally concentric therewith, an upper heater and a lower heater provided in a space between an inner surface of said outer tube and an outer surface of said inner tube, said upper heater being positioned in an upper part of said space to heat said feed crucible, and said lower heater being positioned in a lower part of said space to heat said liquid reservoir, wherein at least part of an inner surface of a ceiling of said inner tube is domed or conical in share, and wherein said desired metal is at least one metal selected from the group consisting of indium, antimony, zinc, tellurium, magnesium, cadmium, bismuth and silver.
- 13. An apparatus for enhanced purification of high-purity metals, which comprises an inner tube in which a vacuum atmosphere is to be formed, a first heating chamber provided in an upper interior of said inner tube, a second heating chamber provided in a lower interior of said inner tube, said first heating chamber accommodating a feed crucible with an open top into which a metal feed is charged and a desired metal in said metal feed is evaporated for recovery while impurity elements having a lower vapor pressure than said desired metal are separated by being allowed to stay within said feed crucible, said second heating chamber accommodating a tubular member having in a top thereof an inlet for receiving said desired metal as recovered and an outlet through which impurity elements that have a higher vapor pressure than said desired metal and which are evaporated in separate form upon heating are discharged, as well as a liquid reservoir for heating said desired metal which is formed in a lower part of said tubular member, and a diffuser for condensing said desired metal as evaporated, which is installed across an upper part of said tubular member, wherein said inner tube is surrounded by an outer tube which has a larger diameter than the inner tube that permits said vacuum atmosphere to communicate with said inner tube and which is generally concentric therewith, an upper heater and a lower heater provided in a space between an inner surface of said outer tube and an outer surface of said inner tube, said upper heater being positioned in an upper part of said space to heat said feed crucible and said lower heater being positioned in a lower part of said space to heat said liquid reservoir, and wherein said desired metal is at least one metal selected from the group consisting of indium, antimony, zinc, tellurium, magnesium, cadmium, bismuth and silver.
Parent Case Info
This application is a divisional application of Ser. No. 10/060,580, filed on Jan. 30, 2002, now abandoned.
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