Apparatus for evaporating vapor-deposition material

Abstract

An apparatus for evaporating vapor-deposition material includes a vapor-deposition vessel with a depth greater than or equal to a predetermined value. The apparatus for evaporating vapor-deposition material further includes a heating means for heating the vapor-deposition material held in the vapor-deposition vessel so that the vapor-deposition material has a temperature gradient decreasing in the depth direction of the vapor-deposition vessel toward the bottom of the vessel.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a schematic diagram illustrating the structure of a vapor-deposition apparatus including an apparatus for evaporating vapor-deposition material according to the first embodiment of the present invention;

FIG. 2A is a perspective view illustrating a major part of the apparatus for evaporating vapor-deposition material according to the first embodiment of the present invention;

FIG. 2B is a cross-sectional view illustrating the major part of the apparatus for evaporating the vapor-deposition material according to the first embodiment of the present invention;

FIG. 3A is a perspective view illustrating a major part of an apparatus for evaporating vapor-deposition material according to a second embodiment of the present invention;

FIG. 3B is a cross-sectional view illustrating the major part of the apparatus for evaporating the vapor-deposition material according to the second embodiment of the present invention;

FIG. 4A is a perspective view illustrating a major part of an apparatus for evaporating vapor-deposition material according to a third embodiment of the present invention;

FIG. 4B is a cross-sectional view illustrating the major part of the apparatus for evaporating the vapor-deposition material according to the third embodiment of the present invention;

FIG. 5A is a perspective view illustrating a major part of an apparatus for evaporating vapor-deposition material according to a fourth embodiment of the present invention;

FIG. 5B is a cross-sectional view illustrating a major part of the apparatus for evaporating vapor-deposition material according to the fourth embodiment of the present invention;

FIG. 6 is a cross-sectional view of a major part of an apparatus for evaporating vapor-deposition material in a comparative example; and

FIG. 7 is a diagram illustrating the structure of a solid-state detector.

Claims

1. An apparatus for evaporating vapor-deposition material, the apparatus comprising: a vapor-deposition vessel for holding vapor-deposition material, the vessel having a depth greater than or equal to a predetermined value; anda heating means for heating the vapor-deposition material held in the vapor-deposition vessel, wherein the heating means heats the vapor-deposition material so that the vapor-deposition material has a temperature gradient decreasing in the depth direction of the vessel toward the bottom of the vessel.

2. An apparatus for evaporating vapor-deposition material, as defined in claim 1, wherein the heating means includes a plurality of heaters arranged on the outer circumference of the vapor-deposition vessel, and wherein the plurality of heaters is arranged at different positions from each other with respect to the depth direction of the vessel, and wherein when the vapor-deposition material is heated, the temperature of a heater arranged on the upper side of the vapor-deposition material is set at a higher temperature than that of a heater arranged on the bottom side of the vessel.

3. An apparatus for evaporating vapor-deposition material, as defined in claim 1, wherein the heating means includes a heater arranged above the vapor-deposition material, and wherein the heater heats the vapor-deposition material from a position above the vapor-deposition material.

4. An apparatus for evaporating vapor-deposition material, as defined in claim 1, wherein the heating means includes a resistance-heat-generation-type heater that is arranged on the outer circumference of the vapor-deposition vessel and that extends from a side corresponding to the highest portion of the vapor-deposition material toward the bottom side of the vessel, and wherein a lead wire for transmitting electric current to the heater is arranged in the vicinity of the position corresponding to the highest portion of the vapor-deposition material.

5. An apparatus for evaporating vapor-deposition material, as defined in claim 1, wherein the heating means includes a coil-shaped heater wound around the outer circumference of the vapor-deposition vessel, and wherein the heater is wound around the outer circumference of the vapor-deposition vessel so that the density of the numbers of turns of winding gradually decreases in the depth direction of the vapor-deposition vessel toward the bottom side of the vapor-deposition vessel.