Claims
- 1. A vacuum thin film deposition apparatus comprising a vacuum vessel or chamber divided into upper, intermediate and lower spaces which are substantially close to each other; said spaces being arrayed in a vertical column; each of said spaces being connected to independent evacuation systems; a mechanism for unwinding a flexible substrate, a mechanism for winding said flexible substrate and a plurality of discharge treatment devices which are disposed in the upper space; two pairs of a cylindrical rotary drum which are reversible in rotation and an evaporation source which are disposed in the intermediate space in opposed relationship; one pair of a cylindrical rotary can which is reversible in rotation and an evaporation source which are disposed in the lower space; and independent gas introduction systems which are connected to said upper, intermediate and lower spaces.
- 2. A vacuum thin film deposition apparatus according to claim 1 wherein the evacuation system is connected to the top of the upper space; the evacuation system is connected to both lateral sides of the intermediate space; and the evacuation system is connected to the bottom of said lower space.
Priority Claims (6)
Number |
Date |
Country |
Kind |
51-159591 |
Dec 1976 |
JPX |
|
52-2746 |
Jan 1977 |
JPX |
|
52-74702 |
Jun 1977 |
JPX |
|
52-83851 |
Jul 1977 |
JPX |
|
52-86371 |
Jul 1977 |
JPX |
|
52-120362 |
Oct 1977 |
JPX |
|
Parent Case Info
This is a division of application Ser. No. 860,960, filed Dec. 15, 1977, now abandoned.
US Referenced Citations (1)
Number |
Name |
Date |
Kind |
2925062 |
Schwindt |
Oct 1956 |
|
Divisions (1)
|
Number |
Date |
Country |
Parent |
860960 |
Dec 1977 |
|