Guyenot, V.; Eberhardt, R.; Tittelbach, G.; Risse, S., “Mounting, Cementing and Handling of Microoptical Elements,” SPIE vol. 2783 (3/96), pp. 105-116. |
J.P. Schmidt, A. Cordes, J. Muller, H. Burkhardt, “Laser-fiber-coupling by means of a silicon micro-optical bench and a self-aligned soldering process,” SPIE vol. 2449 (5/95), pp. 176-183. |
J. Sochtig, H. Schrift, B.D. Patterson, S. Westenhofer, “Replicated diffractive optical lens components for laser-diode to fiber coupling in optical bench arrangements,” SPIE vol. 3226 ('97), pp. 44-55. |
Henein, S.; Bottinelli, S.; Clavel,R., “Parallel spring stages with flexures of micrometric cross-sections,” SPIE vol. 3203 ('98), pp. 209-220. |
S.T. Smith and D.G. Chetwynd, Foundations of Ultraprecision Mechanism Design, Gordon and Breach Science Publishers, 1992, 22 pages. |
M.C. Wu, et al., “Micromachined free-space integrated micro-optics,” Reprinted from Sensors and Acutators A: Physical, vol. 50(1-2), pp. 127-134 (Aug. 1995), 8 pages. |
Comtois, J., and Bright, V., “Design techniques for surface-micromachining MEMS processes,” SPIE vol. 2639, ('95), pp. 211-222. |
Klaassen, et al., “Silicon Fusion Bonding And Deep Reactive Ion Etching: A New Technology For Microstructures,” Transducers '95—Eurosensors IX, Stockholm, Sweden (1995), pp. 556-559. |
RM Bostock, et al., “Silicon nitride microclips for the kinematic location of optic fibres in silicon V-shaped grooves,” J. Micromech. Microeng. 8(1998) pp. 343-360. Printed in the U.K. |
J. Robert Reid, et al., “Automated Assembly of Flip-Up Micromirrors,” Transducers '97, 1997 Int'l Conference on Solid-State Sensors and Actuators, Chicago, Jun. 16-19, 1997. |