Patent Application
20210146496
This application claims under 35 U.S.C. § 119 to Korean Patent Application No. 10-2019-0078943 filed Jul. 1, 2019, which is hereby incorporated by reference in its entirety
The embodiment relates to an apparatus for forming a hairline finish on a target material.
A vacuum chamber has a door area, and the door area has an open area and a circumferential area.
Various components are assembled on the circumferential area of the door area and strong sealing is required for the assembly surface wherein various components are assembled on the circumferential area of the door area of the vacuum chamber.
According to the internal technology, a sealing surface, which is the surface of the sealing part, is located around the open area of the target material, and the sealing surface needs to be formed with a hairline for stronger sealing.
In this application, “hairline” may mean forming accurate scratches such as a hairline in beauty on the sealing surface, but is not limited thereto.
In the related art, a worker used a polishing member such as sandpaper to directly rub the sealing surface of the door area of the target material to form a hairline. Accordingly, in the related art, there is a technical problem in that a hairline is formed in a region other than the sealing surface where the sealing component contacts.
In addition, there is a technical problem that it is difficult to secure uniform roughness since a hairline is formed by rubbing with a worker's hand using an abrasive member such as sandpaper.
In addition, it takes a considerable amount of time to form a hairline having a certain level of roughness by an abrasive member such as sandpaper, and thus there is a problem that the processing time is increased.
One of the technical problems to be solved of the embodiment is to provide an apparatus for forming a hairline of a target material capable of accurately forming a hairline on a sealing surface.
In addition, one of the technical problems to be solved of the embodiment is to provide an apparatus for forming a hairline of a target material that can secure a uniform roughness.
In addition, one of the technical problems to be solved of the embodiment is to
the embodiment is one of the technical problems to provide an apparatus for forming a hairline of a target material that can quickly and accurately secure a hairline of uniform roughness.
The technical problem of the embodiment is not limited to this item and includes what can be recognized through the specification.
An apparatus for forming a hairline of a target material according to an embodiment includes: a body including a rotation shaft; an abrasive member; a first bracket for fixing the abrasive member to the rotating shaft; and a guide unit disposed between the body and the rotation shaft along a longitudinal direction of the rotation shaft.
According to another aspect of the embodiment, an apparatus for forming a hairline of a target material includes: a body including a first rotation shaft; a second rotation shaft fastened to the first rotation shaft; an abrasive member; a guide unit disposed between the second rotation shaft and the abrasive member; and a fastening part for fixing the abrasive member and the guide unit to the second rotation shaft. The guide unit and the abrasive member may be in surface contact.
According to the apparatus for forming the hairline of the target material according to an embodiment, there is a technical effect of accurately forming a hairline on a sealing surface.
In addition, according to the embodiment, there is a technical effect of securing a uniform roughness.
Further, according to the embodiment, there is a technical effect of securing a hairline of uniform roughness quickly and accurately.
For example, according to at least one of the embodiments, polishing is performed by accurately positioning the abrasive member on the sealing surface of the target material using a guide unit located near the abrasive member, thereby accurately forming a hairline on the sealing surface of the target material. have. Accordingly, not only the process time for forming the hairline can be drastically shortened, but also the easy and accurate hairline can be formed, thereby remarkably improving the sealing quality of the target material.
Further scope of applicability of the embodiments will become apparent from the detailed description below. However, various changes and modifications within the spirit and scope of the embodiments may be clearly understood by those skilled in the art, and thus specific embodiments such as detailed description and preferred embodiments should be understood as being given by way of example only.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, the technical idea of the present invention is not limited to the embodiments to be described, but may be implemented in various different forms, and it can be combined with and substituted for use within the scope of the technical idea of the present invention, one or more of the constituent elements may be selectively selected between the embodiments.
In addition, terms (including technical and scientific terms) used in the embodiments of the present invention are generally understood by those of ordinary skill in the art, unless explicitly defined and described. It can be interpreted as a meaning, and terms generally used, such as terms defined in a dictionary, may be interpreted in consideration of the meaning in the context of the related technology.
In addition, terms used in the embodiments of the present invention are for describing the embodiments and are not intended to limit the present invention. In the present specification, the singular form may also include the plural form unless specifically stated in the phrase, and when described as “at least one (or more than one) of A, B and C”, it may be combined into A, B, and C and one or more of all combinations may be included.
In addition, terms such as first, second, A, B, (a), and (b) may be used in describing the constituent elements of the embodiment of the present invention. These terms are only for distinguishing the component from other components, and are not limited to the nature, order, or order of the component by the term. And when a component is described as being ‘connected’, ‘coupled’ to another component, the component is not only directly connected or coupled to the other component, but also the component and the case of being ‘connected’ or ‘coupled’ by another element between the other elements may also be included.
In addition, when it is described as being formed or disposed in the “top or bottom ” of each component, the top or bottom is one as well as when the two components are in direct contact with each other. It also includes a case in which the above other component is formed or disposed between the two components. In addition, when expressed as “upper or lower”, the meaning of not only an upward direction but also a downward direction based on one component may be included.
Referring to
The apparatus for forming the hairline 100 according to the first embodiment may rotate the abrasive member 110 by driving by a power source. The power source may be supplied from a battery or may be supplied from an external power supply.
The body 120 may support the abrasive member 110, the first bracket 130 and the guide unit 140. Referring to
Referring to
One side of the rotation shaft 131 may include at least one separation region 134 separated and spaced apart along the rotation radius. When the rotation shaft 131 is inserted into the pressing member 132, each separation region 134 is pressed, so that a space between the separation regions 134 may be reduced. Accordingly, the diameter of the insertion groove 133 of the rotation shaft 131 may be reduced by the pressing of the pressing member 132. For example, after the rotation shaft 131 of the abrasive member 110 is inserted into the insertion groove 133 of the rotation shaft 131 through the hole 132a of the pressing member 132 of the first bracket 130, the pressing member 132 pressed by each separation region 134 of the rotation shaft 131 is also pressed so that the rotation shaft 131 of the abrasive member 110 may be firmly fixed by each separation region 134.
Referring to
The target material 11 may be a chamber for a semiconductor manufacturing process or a display manufacturing process. In addition, the target material 11 may be an industrial tank or industrial piping. In addition, all members used in various fields and requiring a polishing may be included in the technical idea of the present invention.
The target material 11 may include a plurality of open areas 13. The open area 13 can be sealed by a sealing element. The sealing component is, for example, a window made of a transparent material, and the internal state of the target material 11 can be checked during the process. The sealing component is, for example, a detection device, and may measure or detect a temperature, a vacuum, or a process state inside the target material 11 during processing. In addition to this, various sealing components may be installed in the open area 13.
The sealing surface 15 may be positioned around the open area 13 of the target material 11. In addition, the non-sealing surface 16 may be positioned between the open area 13 and the sealing surface 15 of the target material 11. That is, the non-sealing surface 16 may be in contact with the open area 13 and the sealing surface 15 may be positioned along the circumference of the non-sealing surface 16. The sealing surface 15 is a region where the sealing component is in contact, and the non-sealing surface 16 may be a region where the sealing component is not in contact. The non-sealing surface 16 may not be present depending on the target material 11. In this case, the sealing surface 15 may directly contact the open area 13.
Due to the hairline formed by the abrasive member 110, the sealing surface 15 is strongly sealed by the sealing component, so that the sealing force can be strengthened. The abrasive member 110 may be rotated in one direction, for example, in a clockwise direction with respect to the rotation shaft 121.
Referring to
The abrasive member 110 may include a grinding paper 111 having a polishing surface 114 formed along the outer periphery and a rotation shaft 112 extending in one direction from the grinding paper 111. The rotation shaft 112 of the abrasive member 110 may be inserted and fixed to the rotation shaft 131 of the first bracket. A polishing surface 114 may be formed along the outer periphery of the grinding paper 111. The grinding paper 111 and the rotating shaft may be collectively referred to as polishing paper.
On the other hand, when the non-sealing surface 16 of the target material 11 is positioned between the open area 13 and the sealing surface 15, it is difficult in the prior art to form a hairline accurately only on the sealing surface 15 of the target material 11.
In the first embodiment, by using the guide unit 140 positioned near the abrasive member 110 to accurately position the abrasive member 110 on the sealing surface 15 of the target material 11 and polishing is performed, it is possible to accurately form a hairline on the sealing surface 15 of the target material 11.
Accordingly, according to the embodiment, not only the process time for forming the hairline can be drastically shortened, but also it is possible to easily and accurately form the hairline, thereby minimizing the sealing defect of the target material 11.
Referring to
The guide unit 140 may be inserted into the insertion part 152 and may include a guide bar 141 extending in one direction. The guide unit 140 may include a bent part 142 that is bent at one side of the guide bar 141. The guide bar 141 and the bent portion 142 may be integrally formed, but are not limited thereto. The guide bar 141 may be disposed between the body 120 and the abrasive member 110. For example, the guide bar 141 may be disposed between the mounting portion 122 of the body 120 and the abrasive member 110.
The guide bar 141 may be disposed along a length direction of the rotation shaft 121. The guide bar 141 may be disposed parallel to the rotation shaft 121, but is not limited thereto. The length of the bent portion 142 may be equal to or smaller than the length of the guide bar 141. One side of the guide bar 141 may be fixed to the body 120 through the second bracket 150, and the other side of the guide bar 141 may be located near the abrasive member 110.
The bent part 142 may be bent from the other side of the guide bar 141. For example, the bent part 142 may be bent vertically from the other side of the guide bar 141. For example, the bent portion 142 may be bent from the other side of the guide bar 141 to be disposed parallel to the inner surface 14 of the open area 13 of the target material 11.
For example, the other side of the guide bar 141 may be spaced apart from the abrasive member 110. The separation distance d between the other side of the guide bar 141 and the abrasive member 110 may be greater than zero. For example, when the target material 11 does not have the non-sealing surface 16, that is, when the sealing area contacts the open area 13 of the target material 11, the separation distance d between the other side of the guide bar 141 and the abrasive member may be 0. That is, the other side of the guide bar 141 may be located on the same line as the abrasive member 110. The same line may be a line in a direction perpendicular to the rotation axis 121.
Referring to
For example, the bent portion 142 may be spaced apart from the abrasive member 110. A separation distance d between the bent portion 142 and the abrasive member 110 may be greater than zero. For example, when the target material 11 does not have the non-sealing surface 16, that is, when the sealing area contacts the open area 13 of the target material 11, the separation distance d between the bent portion 142 and the abrasive member 110 may be 0. That is, the bent portion 142 may be positioned on the same line as the abrasive member 110. For example, the distance d between the bent portion 142 and the abrasive member 110 may be the same as the width W12 of the non-sealing surface 16 of the target material 11.
For example, the bent portion 142 may be disposed on the same line as the abrasive member 110, but does not overlap with the abrasive member 110. For example, a distance between the mounting portion 122 of the body 120 and the bent portion 142 may be shorter than the distance between the mounting portion 122 of the body 120 and the abrasive member 110. Therefore, even if the bent portion 142 is disposed near the abrasive member 110, the rotation of the abrasive member 110 is not hindered by the bent portion 142.
Referring back to
The second bracket 150 may include a fixing part 151 fixed around the outer periphery of the mounting part 122. The fixing part 151 may include an inserting hole 151a penetrating through the center. The mounting portion 122 of the body 120 may be inserted through the inserting hole 151a of the fixing portion 151. Although not shown, the body 120 has a stopper disposed in contact with the mounting portion 122, so that the fixing portion 151 is not separated past the mounting portion 122 of the body 120 by this stopper. By this stopper, one side of the fixing part 151 may coincide with one side of the mounting part 122, and the other side of the fixing part 151 may be in surface contact with the stopper.
The second bracket 150 may include an insertion part 152 through which the guide unit 140 is inserted into one side of the fixing part 151. The insertion part 152 may include, for example, an inserting hole 152a through which the center passes. Accordingly, the guide unit 140 may be inserted through the inserting hole 152a of the insertion part 152.
The second bracket 150 may include a first pressing member 153 for pressing the guide unit 140 to fix the insertion part 152. If the guide unit 140 is not fixed after being inserted into the insertion part 152, the guide unit 140 may be separated from the insertion part 152, so that the function of the guide unit 140 cannot be implemented. Accordingly, after the guide unit 140 is inserted into the insertion part 152, the first pressing member 153 may be pressed so that the guide unit 140 is strongly fixed to the inside of the insertion part 152. Although not shown, the guide unit 140 may be formed in a plurality of fixing grooves on the surface of the guide bar 141 along the length direction of the guide bar 141. In this case, the first pressing member 153 passing through the insertion part 152 is inserted into the fixing groove of the guide bar 141, so that the guide bar 141 may be fixed by the first pressing member 153, in addition, the guide unit 140 may be firmly fixed to the inserting hole 152a of the inserting portion 152 by pressing the first pressing member 153.
For example, the first pressing member 153 may be a fastening part such as a bolt. The first pressing member 153 may press the guide unit 140 through the insertion part 152 in a direction perpendicular to the longitudinal direction of the rotation shaft 121 or the guide bar 141. The insertion part 152 may include a through hole (not shown) to penetrate the first pressing member 153. A thread may be formed inside the through hole, and a thread may be formed around the outer circumference of the first pressing member 153 facing the through hole. Therefore, after the first pressing member 153 is inserted, for example, rotated clockwise in the through hole of the insertion part 152, the guide unit 140 positioned in the inserting hole 152a of the insertion part 152 By pressing, the guide unit 140 may be firmly fixed to the inserting hole 152a of the insertion part 152. As the first pressing member 153 is rotated counterclockwise so that the first pressing member 153 is separated from the insertion part 152, the fixing of the guide unit 140 is released, and the guide unit 140 is inserted into the insertion part 152.
The second bracket 150 may include a second pressing member 154 that presses the fixing part 151 to the mounting part 122. If the mounting portion 122 of the body 120 is not fixed after being inserted into the inserting hole 151a of the fixing portion 151, the mounting portion 122 of the body 120 may be separated from the fixing portion 151, since the second bracket 150 is not fixed to the body 120, the guide unit 140 may not be fixed either. Therefore, after the mounting portion 122 of the body 120 is inserted into the inserting hole 151a of the fixing portion 151, the second pressure so that the fixing portion 151 can be strongly fixed to the mounting portion 122 of the body 120 The member 154 may be pressed.
For example, the second pressing member 154 may be a fastening part such as a bolt. The second pressing member 154 may be fixed to the mounting portion 122 of the body 120 through the fixing portion 151 in a direction perpendicular to the longitudinal direction of the rotation shaft 121 or the guide bar 141. A plurality of fixing grooves 122a may be formed along the periphery of the mounting portion 122 of the body 120. The second pressing member 154 passing through the fixing part 151 is inserted into one of the fixing grooves 122a, so that the fixing part 151 is formed by the second pressing member 154 to the body 120 and it can be firmly fixed to the mounting portion 122 thereof.
The fixing part 151 may include a through hole (not shown) so that the second pressing member 154 passes. A thread may be formed inside the through hole, and a thread may be formed around the outer circumference of the second pressing member 154 facing the through hole. Therefore, after the second pressing member 154 is inserted, for example, rotated clockwise in the through hole of the fixing part 151, the body 120 positioned in the inserting hole 151a of the fixing part 151 inserted into the fixing groove 122a formed around the mounting portion 122, the fixing portion 151 may be firmly fixed to the mounting portion 122 of the body 120. As the second pressing member 154 is rotated counterclockwise and the second pressing member 154 is separated from the fixing part 151, the fixing of the fixing part 151 is released, and the fixing part 151 can be detached from the mounting portion 122 of the body 120.
According to the first embodiment, the guide unit 140 is disposed near the abrasive member 110 to seal the target material 11 regardless of whether the sealing surface 15 contacts or is spaced apart from the open area 13. The hairline can be accurately formed on the sealing surface 15. Accordingly, the process time for forming the hairline on the sealing surface 15 of the target material 11 can be drastically shortened, and it is possible to easily and accurately form the hairline, so that it can minimize the sealing defect of the target material 11.
As shown in
As shown in
As shown in
Accordingly, when the rotation shaft 121 of the body 120 is rotated, the rotation shaft 131 of the first bracket 130 and the abrasive member 110 connected to the rotation shaft 131 may be rotated.
As shown in
As shown in
The second embodiment is similar to the first embodiment. In the second embodiment, detailed descriptions of components having the same function, structure and/or shape as in the first embodiment are omitted.
The body 220 of the second embodiment is slightly different from the body 120 of the first embodiment in terms of shape, but the practical functions are the same.
A rotation shaft 221 is provided on one side of the front end of the body 220 so that it can be rotated during polishing. The handle 224 is provided at the rear end of the body 220, so that the operator can perform the work while holding the handle 224 when polishing.
For example, after the rotation shaft rotation shaft 230, the abrasive member 210 and the fastening part 250 are pre-assembled, the rotation shaft 230 may be fastened to the rotation shaft 221 of the body 220.
As shown in
As shown in
As shown in
As shown in
Meanwhile, the abrasive member 210 may have a circular shape. The guide unit 240 may be disposed between the rotating part 230 and the abrasive member 210. The guide unit 240 may be in surface contact with the abrasive member 210. The guide unit 240 may have a circular shape. After arranging the polishing surface 214 of the abrasive member 210 in contact with the sealing surface 15 of the target material 11, while the abrasive member 210 can be rotated and the body 220 is pressed toward the target material 11, the sealing surface 15 of the target material 11 is polished by the polishing surface 214 of the abrasive member 210, so that a hairline can be accurately formed only on the sealing surface 15 of the target material 11.
For example, the diameter of the polishing surface 214 of the abrasive member 210 (D1 in
Meanwhile, the apparatus for forming a hairline 200 according to the second embodiment may include a support part 260. The support 260 may serve to support the abrasive member 210. The support 260 may be in surface contact with the abrasive member 210. The support part 260 may have a circular shape. The diameter of the support part 260 may be smaller than the diameter of the abrasive member 210. The support part 260 may be formed of the same material as the guide unit 240, but is not limited thereto.
The guide unit 240 and the support part 260 may be formed of a material having excellent support strength and durability. For example, the guide unit 240 and the support part 260 may be formed of a plastic material, a metal material, or an insulating material. After the fastening bar 251 of the fastening part 250 passes through the support part 260, the abrasive member 210, and the guide unit 240 in sequence, it is fastened to the insertion groove 231 of the rotation shaft 230, and the abrasive member 210 may be supported by the support part 260. The guide unit 240 may also serve as a support. That is, one surface of the abrasive member 210 may be supported by the support part 260, and the other surface of the abrasive member 210 may be supported by the guide unit 240.
The above detailed description should not be construed as limited in all respects and should be considered as illustrative. The scope of the embodiments should be determined by reasonable interpretation of the appended claims, and all changes within the equivalent scope of the embodiments are included in the scope of the embodiments.
11: target material 13: open area 14: inner surface 15: sealing surface 16: non-sealing surface
100, 200: apparatus for forming the hairline 110, 210: abrasive member 111: grinding paper
112, 121, 131, 221, 230: rotating shaft 114, 214: polished surface 120, 220: body
122: mounting portion 122a: fixing groove 124, 224: handle 130: first bracket
132, 153, 154: pressing member 133, 231: insertion groove 134: separation area 140,
240: guide unit 141: guide bar 142: bent portion 150: second bracket 151: fixing portion
151
a,
152
a: inserting hole 152: inserting portion 232: plate region 233: rotation region 241: guide surface 250: fastening portion 251: fastening bar 260: support
| Number | Date | Country | Kind |
|---|---|---|---|
| 10-2019-0078943 | Jul 2019 | KR | national |
