Claims
- 1. An apparatus for generating ions, comprising:
- ion generation electrode means having a slit section for generating ions in the slit section;
- induction electrode means for inducing an electric field for generating ions in the slit sections of the ion generation electrode means;
- control electrode means including a pair of electrodes separated by an insulation layer inserted therebetween and having an ion passing hole for controlling a flow of ions generated by the ion generation electrode means and passing through the ion passing hole;
- driving means for applying a signal voltage indicating a timing for passing the flow of ions through the ion passing hole by being in an on state and a timing for not passing the flow of ions through the passing hole by being in an off state to the ion control electrode means; and
- bias voltage source means for applying a bias voltage between the ion generation electrode means and the induction electrode means, in order to cause a generation of ions at the slit section of the ion generation electrode means.
- 2. The apparatus of claim 1, wherein one of the pair of electrodes of the control electrode means which is closer to the ion generation electrode means is made of a metal which is not easily affected by nitric acid.
- 3. The apparatus of claim 1, wherein one of the pair of electrodes of the control electrode means which is closer to the ion generation electrode means is made of a metal which is not easily oxidizable.
- 4. The apparatus of claim 3, further comprising a dielectric substrate, on a first side of which the ion generation electrode means is provided and on a second side of which the induction electrode means is provide, having a surface resistance over 10.sup.9 .OMEGA..
- 5. The apparatus of claim 1, wherein the ions at the control electrode means have a first polarity, and the bias voltage has the first polarity when the signal voltage is in an on state and a second polarity opposite of the first polarity when the signal voltage is in an off state.
- 6. The apparatus of claim 1, further comprising:
- air inlet hole means for entering a flow of air at a positive pressure into a space between the ion generation electrode means and the control electrode means which flows out through the ion passing hole of the control electrode means.
- 7. The apparatus of claim 1, further comprising:
- a dielectric substrate having a first side and a second side, where the induction electrode means is provided on the second side above the slit section of the ion generation electrode means; and
- an insulation layer attached on the first side of the dielectric substrate, having a first side on which the ion generation electrode means is provided.
- 8. The apparatus of claim 7, wherein the insulation layer has a gap for defining an indented portion located directly below the induction electrode means and facing toward the slit section of the ion generation electrode means.
- 9. The apparatus of claim 7, wherein the insulation layer is made from one of polyimide, silicon dioxide, ditantalum pentoxide, trisilicon tetranitride, and a mixture of oxide and nitride.
- 10. The apparatus of claim 1, wherein the ion generation electrode means further comprises a plurality of unit ion generation electrode means having a plurality of unit slit sections for generating ions in the unit slit sections, where the plurality of unit ion generation electrode means are arranged at a constant interval to define one of the unit slit sections between each neighboring ones of the plurality of unit ion generation electrode means.
- 11. The apparatus of claim 10, wherein the induction electrode means has a width smaller than that of the plurality of unit ion generation electrode means as a whole.
- 12. The apparatus of claim 10, wherein the ion passing hole is located below the plurality of unit ion generation electrode means as a whole and has a central axis which is different from a central axis of the plurality of unit ion generation electrode means as a whole.
- 13. The apparatus of claim 12, wherein a width of each of the unit slit sections of the plurality of unit ion generation electrode means is smaller than a diameter of the ion passing hole in the control electrode means.
Priority Claims (2)
| Number |
Date |
Country |
Kind |
| 3-109910 |
Feb 1991 |
JPX |
|
| 3-138008 |
May 1991 |
JPX |
|
Parent Case Info
This is a division of application Ser. No. 07/753,233, filed on Aug. 30, 1991 U.S. Pat. Nol. 5,239,317.
US Referenced Citations (3)
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Date |
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|
4320408 |
Iwasa et al. |
Mar 1982 |
|
|
5014076 |
Caley, Jr. et al. |
May 1991 |
|
|
5202705 |
Asano et al. |
Apr 1993 |
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Divisions (1)
|
Number |
Date |
Country |
| Parent |
753233 |
Aug 1991 |
|