Claims
- 1. A method for producing microcrystalline particles by irradiating a pulsed laser beam on raw material gas to generate dielectric breakdown comprising the steps of:
- introducing the material gas in a reactor;
- generating dielectric gas breakdown of the raw material gas by irradiating and focusing the pulsed laser beam in the reactor through a condenser lens; and
- controlling a pulse spacing between adjacent pulses in the pulsed laser beam to be longer than a duration defined as an activation period of dissociated atoms of the raw material so as to allow activated raw material gas which is generated by the dielectric gas breakdown occurring due to an irradiation of one pulse thereof, to complete cohesion and to turn into the microcrystalline particles before a next pulse adjacent to the one pulse.
- 2. A method as defined in claim 1 wherein said particles are of relatively uniform size not exceeding 20 nm in diameter.
- 3. A method as defined in claim 1, wherein said raw material gas is silane gas (SiH.sub.4).
Priority Claims (3)
Number |
Date |
Country |
Kind |
3-113812 |
Dec 1991 |
JPX |
|
3-360514 |
Dec 1991 |
JPX |
|
3-360517 |
Dec 1991 |
JPX |
|
Parent Case Info
This is a division of application Ser. No. 07/997,288 filed Dec. 23, 1992 now U.S. Pat. No. 5,425,922.
US Referenced Citations (4)
Number |
Name |
Date |
Kind |
4560634 |
Matsuo et al. |
Dec 1985 |
|
4940505 |
Schachmeyer et al. |
Jul 1990 |
|
5277786 |
Kawakami |
Jan 1994 |
|
5386798 |
Lowndes et al. |
Feb 1995 |
|
Foreign Referenced Citations (1)
Number |
Date |
Country |
62330131 |
Oct 1989 |
JPX |
Divisions (1)
|
Number |
Date |
Country |
Parent |
997288 |
Dec 1992 |
|