Claims
- 1. A capacitance electrode assembly adapted for attachment to a mounting plate for measuring changes in thickness of a dielectric film comprising:
- a) a back plate;
- b) means for connecting the back plate to the mounting plate;
- c) a primary sensor assembly and a reference sensor assembly;
- d) means for connecting the primary and reference sensor assembly to the back plate;
- e) each sensor assembly having;
- 1) a lower housing connected to the back plate having an elongated upper portion projected away from the back plate;
- 2) an elongated first electrode extended along said upper portion of the lower housing;
- 3) an upper housing connected to the back plate having an elongated lower portion located in substantial vertical alignment with said elongated first electrode;
- 4) electrical insulator means mounted on the elongated lower portion of the upper housing; and
- 5) said primary sensor assembly having a second electrode mounted on the electrical insulator means, said reference sensor assembly having a third electrode mounted on the electrical insulator means, said second and third electrodes being axially spaced from each other and spaced from the first electrode;
- f) guide means for preventing the film from passing between the first electrode and third electrode and allowing the film to pass between the first electrode and second electrode;
- g) a bridge circuit electrically coupled to the second and third electrodes whereby the reference sensor assembly counterbalances the bridge circuit and cancels any imbalance in the primary sensor assembly caused by temperature, humidity or other fluctuations; and
- h) means for moving the film between the first and second electrodes.
- 2. The electrode assembly of claim 1 including: means for vertically adjusting the lower housing on said back plate.
- 3. The electrode assembly of claim 1 wherein: the second and third electrodes are linear members having substantially the same lengths.
- 4. The electrode assembly of claim 3 wherein: the linear members are cylindrical electrical conductors.
- 5. The electrode assembly of claim 3 wherein: the linear members are axially aligned and have adjacent spaced ends.
- 6. The electrode assembly of claim 1 wherein: the guide means comprise a pair of plates connected to the back plate adjacent opposite sides of the upper and lower housings.
- 7. The electrode assembly of claim 1 wherein: the means for moving the film between the first and second electrodes comprises a film transport assembly for serially examining the thickness of the film.
- 8. The electrode assembly of claim 7 wherein: the film transport assembly comprises rollers for moving the film, an amplifier and variable speed motor assembly to drive the rollers for advancing the film between the first and second electrodes, a position feed back device to monitor motor speed and position of the rollers, and a controller to monitor and maintain the speed of the motor and stop and start the motor to position the film relative to the first and second electrodes.
- 9. A capacitance electrode assembly for measuring changes in thickness of a dielectric film comprising:
- a) a primary sensor assembly;
- b) a reference sensor assembly;
- c) said primary and reference sensor assembly having;
- 1) a first housing having an elongated first portion;
- 2) an elongated first electrode located along said portion of the first housing;
- 3) a second housing having an elongated second portion located in substantial vertical alignment with said first electrode and extended substantially parallel to said first electrode;
- 4) electrical insulator means mounted on the elongated second portion of the second housing; and
- 5) said primary sensor assembly having a second electrode mounted on the electrical insulator means, said reference sensor having a third electrode mounted on the electrical insulator means, said second and third electrodes being laterally spaced from each other and spaced from the first electrode;
- d) guide means for preventing the film from passing between the first and third electrodes and allowing the film to pass between the first and second electrodes;
- e) means electrically coupled to the second and third electrodes whereby the reference sensor assembly cancels imbalances in the primary sensor assembly caused by temperature, humidity or other fluctuations; and
- f) means for moving the film between the first and second electrodes.
- 10. The electrodes assembly of claim 9 including: means for adjusting the location of the first and second housing relative to each other to adjust the space between the first electrode and the second and third electrodes.
- 11. The electrode assembly of claim 9 wherein: the second and third electrodes are linear electrode members having substantially the same lengths.
- 12. The electrode assembly of claim 11 wherein: the linear electrode members are cylindrical electrical conductors.
- 13. The electrode assembly of claim 11 wherein: the linear electrode members are axially aligned and have adjacent spaced ends.
- 14. The electrode assembly of claim 9 wherein: the guide means comprise at least one member for preventing the film from passing between the first electrode and the third electrode.
- 15. The electrode assembly of claim 9 wherein: the means for moving the film between the first and second electrodes comprises a film transport assembly for serially examining the thickness of the film.
- 16. The electrode assembly of claim 15 wherein: the film transport assembly comprises rollers for moving the film, an amplifier and variable speed motor assembly to drive the rollers for advancing the film between the first and second electrodes, a position feed back device to monitor motor speed and position of the rollers, and a controller to monitor and maintain the speed of the motor and stop and start the motor to position the film relative to the first and second electrodes.
- 17. The capacitance electrode assembly of claim 9 wherein: the means electrically coupled to the second and third electrodes includes a bridge circuit that is counterbalanced by the reference sensor assembly and cancels any imbalances in the primary sensor assembly caused by temperature, humidity or other fluctuations.
- 18. A capacitance electrode assembly for measuring changes in thickness of a dielectric film comprising:
- a) a first electrode;
- b) a second electrode;
- c) a third electrode;
- d) said second and third electrodes being linearly aligned with each other and laterally spaced from each other and aligned with and spaced from the first electrode;
- e) guide means for preventing the film from passing between the first and third electrodes and allowing the film to pass between the first and second electrodes;
- f) means electrically coupled to the second and third electrodes to cancel imbalances in the electrical signals sensed between the first and second electrodes with electrical signals sensed between the first and third electrodes caused by temperature, humidity or other fluctuations; and
- g) means for moving the film between the first and second electrodes.
- 19. The electrodes assembly of claim 18 including: means for adjusting the locations of the second and third electrodes relative to the first electrode to adjust the space between the first electrode and the second and third electrodes.
- 20. The electrode assembly of claim 18 wherein: the second and third electrodes are linear members having substantially the same lengths.
- 21. The electrode assembly of claim 20 wherein: the linear members are cylindrical electrical conductors.
- 22. The electrode assembly of claim 20 wherein: the linear members are axially aligned and have adjacent spaced ends.
- 23. The electrode assembly of claim 1 wherein: the guide means comprise a pair of plates for preventing the film from passing between the first electrode and third electrode.
- 24. The electrode assembly of claim 7 wherein: the means for moving the film between the first and second electrodes comprises a film transport assembly for serially examining the thickness of the film.
- 25. The electrode assembly of claim 24 wherein: the film transport assembly comprises rollers for moving the film, an amplifier and variable speed motor assembly to drive the rollers for advancing the film between the first and second electrodes, a position feed back device to monitor motor speed and position of the rollers, and a controller to monitor and maintain the speed of the motor and stop and start the motor to position the film relative to the first and second electrodes.
- 26. The electrode assembly of claim 18 wherein: the means electrically coupled to the second and third electrodes includes a bridge circuit that is counterbalanced by the electrical signals sensed between the first and second electrodes with electrical signals sensed between the first and third electrodes caused by temperature, humidity or other fluctuations.
Parent Case Info
This application claims benefit of provisional application 60/037,614, filed Feb. 12, 1997.
US Referenced Citations (5)