Apparatus for obtaining silicon from fluosilicic acid

Other copending U.S. patent applications relating to the general subject matter of this invention, assigned to the same assignee and incorporated herein by reference are as follows:
Process and Apparatus for Obtaining Silicon from Fluosilicic Acid, Ser. No. 337,136 filed Jan. 5, 1982 by Angel Sanjurjo;
Process and Apparatus for Casting Multiple Silicon Wafer Articles, Ser. No. P-1559 filed even date herewith by Leonard Nanis;
Process and Apparatus for Obtaining Silicon from Fluosilicic Acid, Ser. No. P-1563 filed even date herewith by Kenneth M. Sancier;
Process and Apparatus for Obtaining Silicon from Fluosilicic Acid, Ser. No. P-1564 filed even date herewith by Kenneth M. Sancier;
Process and Apparatus for Obtaining Silicon from Fluosilicic Acid, Ser. No. P-1572 filed even date herewith by Leonard Nanis and Angel Sanjurjo; and
Process and Apparatus for Obtaining Silicon from Fluosilicic Acid, Ser. No. P-1700 filed even date herewith by Angel Sanjurjo.
BACKGROUND OF THE INVENTION
Field of Invention
Silicon is, at present, the most important material in modern semiconductor technology and is finding increased use in solar cells for the photovoltaic generation of electricity. In view of the importance of the solar cell application, the stringent requirements for purity and low cost and further in view of the orientation of the work done, the process and apparatus is described primarily in the context of production of silicon for solar cell use. However, it is to be understood that both the process and apparatus used are generally useful in the production of silicon for whatever end use, as well as other transition metals such as Ti, Zr, Hf, V, Nb and Ta.
A major deterrent to the development of practical solar photovoltaic systems is the cost of high purity silicon. With todays technology, approximately twenty percent of the total cost of a silicon solar cell is ascribed to the silicon material alone. That is, the cost of the silicon material produced by the conventional hydrogen reduction of chlorosilanes constitutes at least twenty percent of the cost of producing the cell. It is estimated that the cost of the silicon must be reduced by almost an order of magnitude before silicon solar photovoltaic panels will prove to be economically feasible as a power source. The fact that the chlorosilane processes require multiple separations, which are so energy intensive and require such large capital investments, indicate that cost of the silicon can not be reduced sufficiently to make silicon solar cells economically feasible without a major process change. As a consequence, an approach to the production of solar grade silicon which is less complex, less energy intensive and which requires less capital equipment is required.
Technical Field of the Invention
It has been found that silicon of more than sufficient purity to meet the solar cell applications can be produced within the economic requirements from the metallic reduction of silicon fluoride. Preferably, the silicon fluoride is prepared from an aqueous solution of fluosilicic acid, a low cost waste by-product of the phosphate fertilizer industry by treatment with a metal fluoride which precipitates the corresponding fluosilicate. This salt is filtered, washed, dried and thermally decomposed to produce the corresponding silicon tetrafluoride and metal fluoride which can be recycled to the precipitation step. The silicon tetrafluoride is then reduced by a suitable reducing metal and the products of reactions are treated to extract the silicon. Each of the steps is described in detail using sodium as typical reducing agent, and sodium fluoride as typical precipitating fluoride but the concept applies as well to other reducing metals and metal fluorides that can reduce silicon fluoride and form fluosilicates. The process in one form is described in detail in an article entitled Silicon by Sodium Reduction of Silicon Tetrafluoride authored by A. Sanjurjo, L. Nanis, K. Sancier, R. Bartlett and V. J. Kapur in the Journal of the Electrochemical Society Vol. 128, No. 1, January 1981 and the subject matter of that article is specifically incorporated herein by reference.
Background
There are available systems for the production of silicon utilizing some of the reactions of the present system. For example, Joseph Eringer in U.S. Pat. No. 2,172,969 describes a process wherein sodium silico-fluoride is mixed with sodium in powder form and placed in a crucible which is heated and in the upper part of which two pieces of copper wire gauze are placed parallel to each other. The space between the pieces of gauze, which can also be heated, is filled with copper wool. When the crucible has been filled and closed, it is heated to about 500.degree. C. At this temperature, reaction takes place and silicon and sodium fluoride are formed whereby the silicon which is mechanically expelled by the sudden increase in pressure is collected in chambers or towers connected to the furnace. The equation of the reaction is as follows:
Na.sub.2 SiF.sub.6 +4Na=Si+6NaF
or this can be expressed:
Na.sub.2 SiF.sub.6 =SiF.sub.4 +2NaF
SiF.sub.4 +4Na=Si+4NaF
After the reaction product has been cooled at least to 200.degree. C. it is finely divided and is treated with water or heat treated with dilute 1:1 sulfuric acid. Hydrogen fluoride gas is liberated (which latter can then be made into hydrofluoric acid or a metallic fluoride) metallic sulphates are produced and the silicon separates out on the surface in amorphous form as shining metallic froth.
The reaction expressed in equation form is:
Si+6NaF+3H.sub.2 SO.sub.4 =Si+6HF+3Na.sub.2 SO.sub.4
After the silicon has been separated from the metallic sulphate solution, it is again washed and is dried at 80.degree. C. The silicon obtained in this way is in the form of a impalpable redish or grey-brown powder which discolors strongly and which, even if the raw products were impure, contains a minimum of 96-97% silicon. The yield amounts to about 87% of the theoretically possible yield.
Robert Aries reports in U.S. Pat. No. 3,041,145 that attempts made to reduce silicon halides by the use of sodium vapor have not led to a commercially successful process. He gives as an example the process discussed in the Eringer patent, supra, and points out 96%-97% purity is entirely outside the range of purity required for silicon to be used for photocells, semiconductor rectifiers, diodes, and various types of electronic equipment. As has already been discussed, the conventional hydrogen reduction of chlorosilanes especially with the electrolytic deposition techniques used, is too energy intensive to be economical.
Aries ascribes the purity problem to impurities in the sodium used in the reduction reaction and teaches that further elaborate and expensive purification of the purest available commercial grade sodium is required to produce silicon of solar or semiconductor grade. More recently, V. J. Kapur in U.S. Pat. No. 4,298,587 also supports the view that such purification is required. In fact, this patent teaches that both the sodium and the silicon tetrafluoride must be purified using an energy intensive technique comparable to the electrolytic deposition systems of the chlorosilane reduction processes.
It has been determined that silicon of the desired grade is obtained without the elaborate purifications of commercial grade sodium or silicon tetrafluoride obtained from the fluosilicic acid (from the reaction shown above) provided the reduction reaction is carried out in such a way that it goes to completion, the proper environment is maintained during the reduction reaction and the product is properly isolated from contaminating atmosphere and container walls until the reaction is complete and solid silicon which is below reaction temperature is formed and separated. In copending patent application entitled Process and Apparatus for Obtaining Silicon from Fluosilicic Acid, Ser. No. 337,136 filed Jan. 5, 1982 by Angel Sanjurjo and assigned to the present assignee, the isolation from the container is carried out using a powdered substance so that the reaction product does not adhere and can be removed by a simple dumping process. The system is successful but generally is not needed in connection with the melt separation of the present process.
The present invention is directed to the part of the process which deals with the manner of carrying out the reaction between SiF.sub.4 and an alkaline earth metal (eg. Na) to produce Si. In carrying out the reaction, finely divided reactants are jetted into the reaction chamber. Both U.S. Pat. No. 4,188,368 to Wolf et al and U.S. Pat. No. 4,102,765 to Fey et al deal with reactions where Si is produced usingly finely divided injected feed stocks. Keeton U.S. Pat. No. 4,169,129 discloses an apparatus and process for pulse feeding a fine spray of liquid Na into a Si production reactor. Bagley U.S. Pat. No. 2,995,440 and Baker U.S. Pat. No. 3,069,255 disclose procedures for introducing molten Na into a reaction vessel with chlorides of titanium, while Hill U.S. Pat. No. 2,890,953 discloses a procedure for adding atomized liquid Na in a reactor (also with chlorides of titanium). Maurer (U.S. Pat. No. 2,941,867) separately charges a reducing metal reactant and a halide of a high melting metallic element from group II, III, IV, V and VI of the periodic table both in the fluid state into an externally cooled reaction zone. However, none of these patents deal successfully with the important problem of feed nozzle plugging.
In order to appreciate the problem, consider (as noted above) that when liquid Na at 150.degree. C. contacts SiF.sub.4, a rapid exothermic reaction takes place. The Na burns in the SiF.sub.4 atmosphere to produce Si and NaF. Since Na melts at 98.degree. C., in principle, liquid Na at temperatures below 140.degree. C. can safely be drop-fed into a reactor kept under a constant SiF.sub.4 pressure. The reaction takes place at the bottom of the reactor which is kept at temperatures above 200.degree. C. Experimentally, it is observed that due to the heat generated by the reaction, the Na injection nozzle overheats and the reaction takes place at the nozzle causing a build up of reaction products which plug the nozzle, and thus, the Na feeding system. Further, the reaction products produced by the systems disclosed in the patents are in a form that is difficult to separate. In view of the stringent purity requirements for solar grade silicon, separation techniques that tend to introduce impurities are distinctly disadvantageous.
The present invention is specifically concerned with performing the Na/SiF.sub.4 reaction in such a manner that it takes place far enough away from the entry region of the reactants that they are freely introduced. In a preferred embodiment, the reaction is performed in such a manner that the reaction products (Si and NaF) are easily separated by melt separation and the Si continuously cast.
Summary and Objects of Invention
In carrying out the present invention sodium fluosilicate Na.sub.2 SiF.sub.6 is precipitated from fluosilicic acid followed by thermal decomposition of the fluosilicate to silicon tetrafluoride SiF.sub.4. The SiF.sub.4 is then reduced by an alkali metal, preferably Na, to obtain silicon which is separated from the mix, preferably by melt separation. The reduction reaction is carried out by jetting finely divided reactants into a reaction chamber at a rate and temperature which causes the reaction to take place far enough away from the injection or entry region so that there is no plugging at the entry area and thus, the reactants are freely introduced. Preferably the reaction is carried out in such a manner that the resulting reaction products (Si and NaF) are easily removed and separated directly and continuously from the melt and the Si may be directly cast.
The invention has for its principal object the provision of a process for obtaining silicon of sufficient purity to produce solar photovoltaic cells inexpensively enough to make their use practical.
A further object of this invention is to provide a process by means of which silicon can be obtained which is substantially free of impurities starting with relatively inexpensive and impure fluosilicic acid.
A still further object of this invention is to provide a process for producing Si wherein SiF.sub.4 and a reductant, preferably Na, are introduced into a reactor in finely divided form and at a rate and temperature that causes the reduction to take place at a location removed from the entry area so that the reaction products do not prevent introduction of either of the reactants into the reactor.
Another object of the invention is to provide a process for producing solar grade Si by reaction of SiF.sub.4 and a reductant in such a manner that Si is separated from the reaction products continuously and directly.
Yet another object of the invention is to provide a reactor vessel for separating Si from the molten reaction products of a Si producing reaction.
Still a further object of the invention is to provide a process and an apparatus for continuously separating Si in molten form from the molten reaction products and casting the Si into a continuous sheet as it is separated.
The novel features which are believed to be characteristic of the invention are set forth with particularity in the appended claims. The invention itself, however, both as to its organization and method of operation, together with further objects and advantages thereof may best be understood by reference to the following description taken in connection with the accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS
FIG. 1 is a flow diagram illustrating a preferred embodiment of the process for producing high purity silicon by the melt process;
FIG. 2 is a graph illustrating the time, temperature and pressure characteristics of the silicon fluoride and sodium reaction showing time in minutes plotted along the axis of abscissae and temperature in degrees C. and pressure (torr) plotted along the axis of ordinates;
FIG. 3 is a somewhat diagrammatic central vertical section through a reactor unit and the Si continuous casting arrangement showing reaction product separation means and details of one embodiment of the Na and SiF.sub.4 feed mechanism according to the present invention;
FIG. 4 is a diagrammatic central vertical section through another reaction unit similar to the one of FIG. 3 showing another form of reaction product separating reactor and Na/SiF.sub.4 feed mechanism according to the present invention; and
FIG. 5 is a perspective view showing details of the reaction chamber of the embodiment of FIG. 4 and particularly showing how the slits (152) which drain the NaF and separate it from the Si are arranged to form an electrical resistance heater from the reaction chamber wall (151).

DESCRIPTION OF PREFERRED EMBODIMENTS
A preferred embodiment of the process for production of pure silicon starting with inexpensive commercial grade fluosilicic acid is illustrated in the flow diagram of FIG. 1. The overall process consists of three major operations which encompass a series of steps. The first major operation (shown in brackets 10 in the drawing) includes the step of precipitation of sodium fluosilicate from fluosilicic acid followed by generation of silicon tetrafluoride gas. The second major operation (brackets 12 on the drawing) comprises the reduction of silicon tetrafluoride to silicon (30), preferably by sodium, and the third operation (brackets 14) involves the separation of silicon from the mixture of silicon and sodium fluoride.
Consider first the steps for generation of silicon tetrafluoride (operation 10). The preferred starting source of silicon is an aqueous solution of fluosilicic acid (H.sub.2 SiF.sub.6), a waste product of the phosphate fertilizer industry, that is inexpensive and available in large quantities. Fluosilicic acid of commercial grade [23 weight percent (w%)] has also been used directly as received without purification or special treatment and is shown as the silicon source 16 in FIG. 1. As another alternative, fluosilicic acid is obtained by treating silica, or silicates (natural or artificially made) with hydrogen fluoride. The SiF.sub.6.sup.-2 is then precipitated in sodium fluosilicate Na.sub.2 SiF.sub.6, by adding a sodium salt to the solution (step 18). Other salts such as NaF, NaOH, NaCl, or similar salts of the elements in groups IA and IIa of the periodic table are all candidates. The major selection criteria are, low solubility of the corresponding fluosilicate, high solubility of impurities in the supernatant solution, high solubility of the precipitating fluoride salt, and non-hygroscopic character of the fluosilicate.
Based on these criteria, the preferred fluosilicates in order of preference are Na.sub.2 SiF.sub.6, K.sub.2 SiF.sub.6 and BaSiF.sub.6. Using the preferred NaF as the precipitating salt, the hydrogen of the fluosilicic acid is displaced by the sodium to form sodium fluosilicate, a highly stable, nonhygroscopic, white powder, and sodium fluoride which is recycled. In equation form the reaction is
H.sub.2 SiF.sub.6 +2NaF=Na.sub.2 SiF.sub.6 +2HF
As an example, Sodium fluosilicate was precipitated by adding solid sodium fluoride directly to the as received commercial grade fluosilicic acid 18. The yield was a supernatant liquid containing mostly HF and some NaF and H.sub.2 SiF.sub.6 along with the sodium fluosilicate. HF is also given off (20). The supernatant fluid was removed and the sodium fluosilicate washed with cold distilled water to remove any remaining HF and H.sub.2 SiF.sub.6. After filtering and drying in an oven at 200 degrees C., a minimum yield of 92% of pure sodium fluosilicate 22 (determined by x-ray diffraction) was obtained. The product sodium fluosilicate is a nonhygroscopic white powder that is very stable at room temperature and thus provides an excellent means for storing the silicon source before it is decomposed to silicon tetrafluoride.
Precipitation under the just described conditions acts as a purification step, with most impurities in the original fluosilicic acid staying in solution. This effect is increased by adding suitable complexing agents to the fluosilicic acid solution previous to the precipitation. Both inorganic complexing agents such as ammonia and organic agents such as EDTA (ethylenediaminetetraacetic acid) help to keep transition metal ions in solution during precipitation of the fluosilicate.
The fluosilicate is thermally decomposed 24, thus,
Na.sub.2 SiF.sub.6 =SiF.sub.4 +2NaF
to give the solid sodium fluoride, which is recycled 26, and to generate the SiF.sub.4 gas 28. The decomposition does not take place appreciably at temperatures below 400.degree. C. Therefore, impurities which are volatile at this temperature can easily be removed by a vacuum treatment below this temperature. The decomposition of Na takes place at temperatures between 500.degree. and 700.degree. C. Impurities left in the solid phase are typically transition metal fluorides such as Fe, Ni, Cu, etc., whose volatility at temperatures below 700.degree. C. is very low and therefore do not contaminate the SiF.sub.4 gas. The gas thus produced can be fed directly to the reduction reactor or it can be stored for future use.
In separate experiments, it was determined that SiF.sub.4 gas at a pressure of 0.4 atm is in equilibrium at 650.degree. C. with solid Na.sub.2 SiF.sub.6 and NaF. Therefore, as SiF.sub.4 is needed, the Na.sub.2 SiF.sub.6 is thermally decomposed (FIG. 1) at 650.degree. C. in a graphite-lined, gas-tight stainless steel retort. Gaseous SiF.sub.4 evolved at 650.degree. C. was condensed as a white solid in a storage cylinder (cooled by liquid nitrogen) attached to the retort. The SiF.sub.4 gas was allowed to expand by warming of the storage cylinder to room temperature and was fed into the reactor as needed. SiF.sub.4 gas prepared in this manner was determined by mass spectrometric analysis to be more pure than commercial grade SiF.sub.4, as shown in Table I. Ions formed from the sample gas were identified from the observed mass numbers, isotopic distribution and threshold appearance potentials. The detection limit was better than 0.005%. Positively identified gaseous impurities are listed in Table I; no metallic impurities were detected. Peaks corresponding to B compounds, such as BF.sub.3, were specially checked, but none were found.
TABLE I______________________________________Mass spectrometric analysis of SiF.sub.4 SiF.sub.4 preparedIon from H.sub.2 SiF.sub.6 (%) SiF.sub.4 commercial (%)______________________________________SiF.sub.3.sup.+ 96.9 93.6Si.sub.2 OF.sub.6.sup.+ 3.04 4.24SiOF.sub.2.sup.+ (--) 1.79CCl.sub.3.sup.+ (--) 0.159SiO.sub.2 F.sub.2.sup.+ 0.076 0.098Si.sub.2 O.sub.2 F.sub.4.sup.+ (--) 0.081SiO.sub.2.sup.+ (--) 0.035______________________________________
Although the SiF.sub.4 produced from H.sub.2 SiF.sub.6 has less impurity, the commercial grade SiF.sub.4 was also used for experimental convenience. The possible presence of metallic impurities in commercial SiF.sub.4 was determined by bubbling the gas through high purity water and treating the resulting slurry with an excess of HF to drive off Si as SiF.sub.4. The final clear solution was then analyzed by plasma emission spectroscopy (PES). The results are listed in Table II, together with PES analysis of the waste by product H.sub.2 SiF.sub.6 and the NaF used to precipitate Na.sub.2 SiF.sub.6 (18 and 22 FIG. 1). Comparison of the first two columns of Table II with column three shows that the concentration of some elements, e.g., Li, B.V. Mn, Co, K, and Cu, were unchanged by precipitation of Na.sub.2 SiF.sub.6 whereas the elements Mg, Ca, Al, P, As, and Mo were diminished by a factor of 5-10. Some elements were concentrated into the Na.sub.2 SiF.sub.6, namely Cr, Fe, and Ni. The fourth column in Table II is representative of the impurity content to be found in SiF.sub.4 gas prepared on a commercial scale. The low content of P is of special significance for both semiconductor and solar cell applications. Elements known to reduce solar cell efficiency (V, Cr, Fe, Mo) are uniformly low in commercial grade SiF.sub.4. Only Mn, As, and Al are of comparable concentration in both Na.sub.2 SiF.sub.6 and SiF.sub.4 at the 1 parts per million (ppm) by weight or less level.
TABLE II______________________________________Plasma emission spectroscopy analysis, ppm (wt)Element H.sub.2 SiF.sub.6 NaF Na.sub.2 SiF.sub.6 SiF.sub.4______________________________________Li 0.1 (--) 0.2 0.01Na 460 (--) (--) 1.8K 9.0 (--) 8.0 0.3Mg 55 (--) 6.4 2.3Ca 110 10 18 1.6B 1.0 (--) 0.8 <0.01Al 8.0 <2.5 1.3 1.2P 33 (--) 5 0.08As 8.8 (--) 0.2 0.28V 0.3 <5 0.3 <0.01Cr 0.8 <3.5 8.8 <0.01Mn 0.2 <4 0.4 0.16Fe 13 <7 38 0.04Co 0.54 (--) 0.7 <0.01Ni 1.17 <8 4.2 <0.01Cu 0.12 <4 0.6 <0.01Zn 1.4 (--) 1 <0.01Pb 14.5 (--) 5 0.03Mo 11 (--) 1.0 <0.01______________________________________
SiF.sub.4 /Na reaction, the central operation of the pure Si process, (FIG. 1) is the reduction of SiF.sub.4 by Na according to the reaction
SiF.sub.4 (g)+4Na(l)=Si(s)+4NaF(s)
This reaction is thermodynamically favored at room temperature, however, it has been found experimentally that Na has to be heated to about 150.degree. C. before any appreciable reaction can be observed. Once the reaction has been initiated the released heat raises the temperature of the reactant (Na) which in turn increases the reaction rate. Under adiabatic conditions, a temperature of 2200 K. is predicted for the reaction with the stoichiometric quantities of SiF.sub.4 and Na. In practical reactors, rapid consumption of gaseous SiF.sub.4 produces a pressure decrease. The kinetic behavior of the Na-SiF.sub.4 reaction is complex because of the interplay of several factors, e.g., pressure of SiF.sub.4, vaporization of Na, local temperature, porosity of two solid products, and transport of SiF.sub.4 and Na vapor through the product crust that forms on the liquid Na.
Although only preliminary studies have been made of the kinetics, the general features of this reaction have been surveyed. In a series of experiments to estimate reaction temperature 5 grams of Na were loaded in a Ni crucible (3 cm ID, 4 ccm high) and heated in SiF.sub.4 initially at 1 atm pressure. The Na surface tarnished at around 130.degree. C., with the formation of a thin brown film. As the temperature increased, the color of the surface film gradually changed from light brown to brown and finally to almost black. The SiF.sub.4 /Na reaction became rapid at 160.degree.+/-10.degree. C. and liberated a large amount of heat, as indicated by a sudden rise in reaction temperature. The pressure in the reactor typically decreased slightly until the temperature increased sharply, with an associated rapid decrease in SiF.sub.4 pressure. The reaction lasts for several seconds only (until the Na is consumed). For SiF.sub.4 pressures below 0.3 atm the reaction mass was observed to glow at a dull red heat. For higher pressure, a characteristic flame was observed. The shortest reaction time (20 sec) and the highest temperatures (about 1400.degree. C.) were obtained when the initial pressure of SiF.sub.4 was around 1 atm. In addition, complete consumption of Na was obtained for 1 atm SiF.sub.4. When scale-up of this reaction was attempted by loading larger amounts of Na, it was found that as the depth of the Na pool increased, the amount of Na remaining unreacted also increased. The product formed a crust on top of the Na surface, building a diffusion barrier for the reactants. As the barrier thickness increased, the reaction slowed and eventually stopped.
For separation (operation 14 FIG. 1) of the silicon from the products of reduction, in the preferred melt separation process embodiment of this invention, the products are heated until a melt is formed and the NaF is drained off (36) leaving the Si (34) which can if necessary be further purified. The melting and separation process is described in detail below in connection with the scaled up system. Leach separation is described in the copending application Ser. No. 337,136, previously referenced. In the leach process, the silicon and sodium are removed and combined with water and a selected acid. The resultant silicon and water soluble sodium fluoride are then separated.
On the basis of studies of the parameters that affect the reaction, a system was developed that is shown with various reactant feed arrangements and reaction product separation configurations in the central vertical sections through the reactors of FIGS. 3 and 4. It is noted that all of the reactant feed arrangements are specifically designed to cause the reduction reaction to take place far enough away from the feed system (into the reactor) positively to prevent build up of reaction products at the entry and, thus, avoid any possibility of plugging of the entering reactants.
The upper section 40 of the reactor system, shown somewhat schematically in FIG. 3, constitutes a reactant (Na and SiF.sub.4) dispenser and the lower section 42 is the reactor section where the reaction takes place. In this illustrated embodiment, the reactant dispenser section 40 includes a stainless steel liquid sodium injection tube 44 vertically and centrally located in the top flange 46 of the reactor. The Na injection tube 44 is provided with a conventional stainless steel belows valve 48 for controlling Na flow into the reactor section 42. The inner diameter of the Na injection tube 44 is selected to provide the desired Na jetting action and to assure an appropriate Na stream ejection velocity and Na stream size.
In order to bring the reactants together in the reaction zone and to provide some cooling of the entering liquid Na, a SiF.sub.4 feed head 50 is positioned concentrically around the entry portion of the Na ejection tube 44 with its ejection aperture 52 positioned to feed SiF.sub.4 into the reactor concentrically around the Na stream 54. The SiF.sub.4 is fed into the reactor at room temperature and its entry is controlled by a constant pressure valve 56 in order to keep pressure constant in the reactor at from about 0.5 to about 5 atmospheres. That is, as SiF.sub.4 is fed concentrically with the Na into the hot zone of the reactor, the SiF.sub.4 -Na reaction takes place depleting SiF.sub.4. The depletion in turn activates the constant pressure valve 56, thus, feeding more SiF.sub.4 into the reactor. The resultant gas flow keeps a relatively constant temperature at the injection region by its cooling action and by producing a jet that keeps hot particles of reaction products from reaching the nozzle end of Na feed tube 44. Keeping the reaction products away from the reactant entry area in this manner eliminates plugging of the injection apertures.
This mode of operation increases the rate of Si production. Using a Na nozzle exit aperture of 0.005 inch and jetting Na above its reacting temperature of 150.degree. C., the reaction took place far enough away from the entry area to prevent plugging for injection temperatures up to 250.degree. C. No plugging occurs for reaction temperatures up to 900.degree. C.
The reduction reaction (FIG. 1 operation 12) takes place in the lower reactor section 42 of the reactor system. As previously noted, the reduction reaction is highly exothermic and therefore, temperature control is desirable to help prevent reaction products from moving up near the reactant injection area. Such control prevents reactants from plugging the injection nozzle and preventing reactant injection. With temperature control in mind, the top reactant injection nozzle supporting flange 46 for the reactor 42 is cupped (58) or recessed (upwardly in the drawing) to thermally isolate the injection area from the hotter regions of the reactor 42. Further isolation from the hot reaction region is provided by inserting a disk like toroidal heat insulating baffle 60 between the reaction zone and the nozzle thus, effectively forming a semi-isolated nozzle entry chamber 62. The centrally located aperture 64 in the baffle 60 is of a size to let reactants from the nozzle enter the reaction zone, prevent the injected products from spraying the outer reactor walls and minimize heat transmission between the reaction area in the reactor 42 and the nozzle entry chamber 62.
Additional temperature control is provided by water cooled tubing 66 which extends around the cupped portion 58 of the nozzle supporting flange 46. In this connection, note again that it has been found experimentally that Na reacts with SiF.sub.4 only above 150.degree. C. Therefore, as long as the cooling coils 66 in cooperation with the reactant input temperatures, jet velocities and heat shielding baffle 60 maintain the reactant feed area below this temperature, premature reaction at the feed port and nozzle plugging is prevented. Further to the point of preventing premature reaction, the SiF.sub.4 is preferably injected at a temperature of between -86.degree. C. and 120.degree. C. and the liquid Na is jetted at a temperature of between 98.degree. and 130.degree. C.
It is contemplated that the reaction products (NaF and Si) will be separated by a melt process at temperatures above the melting point of Si (1412.degree. C.) and preferably in the range between 1450.degree. and 1500.degree. C. It is also contemplated that the separation and removal of the reaction products will take place on a continuous basis. The physical structure and configuration of the reactor portion 42 of the system is designed to produce such results.
As illustrated, the reactor section 42 includes a double container arrangement with an outer generally cylindrical container 70, designed to capture and dispense the liquid NaF reaction product, surrounding an inner cylindrical reaction product receiving and separating container 72. In order to withstand the high temperatures involved and to avoid contaminating the reaction products, the inner container 72 is composed of high purity graphite and in order to perform the separation of reaction products, the container walls are made with small continuous perforations. For simplicity, the perforations are not shown in the drawing. The bottom 74 of the container 72 is generally conical in shape with a solid non-porous cylindrical molten Si removing drain pipe 76 in the center and thus, has the appearance of a common funnel. The drain pipe 76 is shown closed by a movable drain plug 78. The condition illustrated is for a normal run in process with reaction products built up and some melt separation products in place.
The Na and SiF.sub.4 are jetted into the inner container 72 through the aperture 64 in the heat insulating baffle 60 and reaction starts to take place in the hot upper reaction zone 80. As the reaction proceeds, a pool 82 of reacted and partially reacted Na and SiF.sub.4 form where the reaction goes to completion (pool described above). Immediately below the pool of reaction products 82, a hotter melt separation zone 84 is formed. The melt separation zone 84 is maintained at a much higher temperature (means of heating explained below) than the reaction products zone 82 above it and the reaction products effectively melt out. At these temperatures, ie temperatures above 1412 degrees C., the reaction products (Si and NaF) are liquids which are separable because the NaF will normally float on top of the Si. That is, the liquid Si, which is more dense than NaF, agglomerates and settles to the bottom of the reactor vessel 72. Liquid NaF, which melts at 993.degree. C., is immiscible with Si and usually wets graphite in the presence of liquid Si. The more or less spherical globules 88 of Si dispersed in the NaF 88 and the large Si ingot or pool 90 at the bottom, as illustrated in FIG. 3, look much like those actually found in a sectioned graphite container after the reaction products, heated to the temperatures contemplated here, have been allowed to cool (solidify). It is apparent that, while molten, the NaF both coats the Si and wets the graphite, thus, providing a barrier which prevents the Si from reacting with the graphite and avoids any impurity transfer or migration through and from reactor walls.
Due to its relatively high surface tension (relative to NaF), Si remains in a porous or perforated container while the low surface tension NaF flows out the pores or perforations provided the pores are of the proper size for the temperatures of the reaction products. It has been determined experimentally that for the melt zone temperatures contemplated, perforations in the walls of the inner reaction product receiving and separating container 72 of between 2 and 3.5 millimeters (mm), the NaF flows through the perforations while the molten Si remains in the contaner 72. The average dimension of the perforations 79 may be from less than 0.5 mm to about 3 mm or greater, preferably between about 0.2 mm to about 3.5 mm, more preferably between about 1 mm to about 3.5 mm, and most preferably between about 2 mm to about 3.5 mm. If the perforations are appreciably smaller than 2 mm, the NaF does not discharge well unless pressure is applied and for apertures appreciably greater than 3.5 mm Si has a tendency to enter and interfere with NaF discharge. The Si is removed by extracting the movable closure plug 78 to allow the Si to flow out of the reaction container drain pipe 76. The flow is adjusted so that the process is continuous. That is, the flow of Si out the pipe 76 is adjusted so that the reduction reaction is continuously taking place in the reaction zone 80 and reaction products continuously settle through the reaction product zone 82 and into the melt separation zone 84 with NaF continuously flowing out the perforated inner reaction container 72 and Si agglomerating at the bottom and being continuously withdrawn from the drain pipe 76.
The generally cylindrical outer container 70 of the reactor section 42 performs the functions of collecting and dispensing the NaF (separated reaction product), physically supporting the inner graphite reaction product receiving and separating container 72 and supporting both induction heating elements which heat the inner container 72 and the insulation which minimizes radiation heat loss. The functions performed by the outer container 70 in large measure prescribe the characteristics of the material and its structure. For example, the fact that the container 70 collects and dispenses the NaF reaction product which seeps through the perforations in the inner reaction chamber 72 makes is desirable to make the the container of a material which will not slough off, react with the hot NaF, or in any way introduce contaminates which would prevent the NaF from being recycled without being purified. It is also desirable that the outer container 70 be spaced far enough from the inner container 72 to provide free flow for the NaF. The walls of the two containers 70 and 72 are held in their spaced relationship at the top by means of an annular graphite ring 96 which snuggly surrounds the inner container 72 near its top and fits tightly inside the outer container 70 and at the bottom by means of the reaction container drain pipe 76 which is sealed in the exit aperture 98 in the bottom 100 of the outer container 70. The NaF is discharged through a drain pipe 104 at the bottom (right side in drawing) of the outer container 70.
The outer container 70 must also have sufficient physical strength to perform its support functions and be nonconductive to allow the internal reaction chamber 72 to be inductively heated by heating coils 92 which surround the lower melt separation zone 84. Silicon carbide (SiC) is a material which meets the criteria for the container 70. However, it must be made in such a way that it has a high enough resistivity to allow the induction heating coils 92 to heat the internal reaction chamber. If SiC is used, it should be lined with graphite, Si or another noncontaminating powder as taught in the copending Sanjurjo patent application Ser. No. 337,136, supra., to assure that no contaminants are added to the reaction products from the container walls. Beryllia (BeO) is also a high strength ceramic which meets all of the above criteria for the outer container 70.
For heating efficiency and to reduce heat radiation from the reactor, the heating coils 92 are covered with a silica felt insulating 94 (1.3 cm thick). The top flange 46 of the reactor 42, the flange which supports the reactant injection nozzles (Na injection tube 44 and SiF.sub.4 feed head 50), mates and is sealed to an outwardly extending lip or flange 102 around the top of the outer reaction chamber or vessel 70.
The Si discharged via the exit pipe 76 may be treated in any number of ways. For example, it may be cast into ingots (see copending patent application P-1559 Ser. No. 435,718) but, as illustrated, it is continuously cast into sheet by a preferred technique. In order to form the Si cast sheet 106, the Si exit pipe 76 (below the blocking plug 78) discharges the molten Si into a graphite silicon forming and casting section 108 where the central aperture necks down in one dimension to form a Si discharge channel 110 that is rectangular in cross section. Since the Si in the inner reaction product receiving and separating container 72 is in the presence of NaF salt and the salt wets the Si but not the graphite (as explained above) formation of SiC is prevented. As the Si is discharged through the rectangular channel 110 in the Si forming and casting section 108 the salt (NaF) coats and isolates (coating designated 112) it from the container wall throughout its length.
In order to assure solidification of the Si 106, a longitudinal temperature gradient (hot to cold from top to bottom) is imposed along the length of the casting section 108. For this purpose, electrical heating coils 114 are provided around the casting section 108 and in order to conserve heat, the silica felt insulation 94 also extends down around both the coils 114 and casting section 108. The temperature gradient is such that the Si 106 gradually cools and solidifies (freezes to a solid sheet) as it travels down the channel but the salt (NaF) coating 114 remains molten. In the embodiment illustrated, the temperature gradually decreases along the length of the casting section 108 from above the melting point of Si (1412.degree. C.) to just above the melting point of the salt (993.degree. C. for NaF).
As the NaF coated Si passes out of the exit pipe 76 into the rectangular Si discharge and casting channel 110 the temperature is allowed to drop to about 1412.degree. C. (the melting point of Si) and gradually decreases along the length of the channel to about 1200.degree. C. (well above the melting point of NaF and well below the melting point of Si). As the salt coated Si travels down the channel 110 it freezes into a solid sheet 106 surrounded by molten salt 112. The Si 106 expands upon solidification and is cushioned by the surrounding molten salt layer 112. The cushion thus provided prevents breaking either the solid sheet Si or the graphite forming and casting section 108. The length of the rectangular Si discharge channel 110 and the temperature gradient along it can be optimized for the desired crystalline structure of the sheet Si.
The salt coating 112 on the discharged sheet Si 106 is easily removed by a conventional aqueous leaching process. For example, the salt coating 112 is readily removed in 1.0N acid solution.
For a discussion of aqueous leaching of Si, see copending Sanjurjo patent application Ser. No. 337,136 entitled Process and Apparatus for Obtaining Silicon from Fluosilicic Acid filed Jan. 5, 1982 and assigned to the assignee of the present invention. The sheet casting system has the added advantage that the molten coating salt acts as a purifying agent. This effect adds to the versatility of the casting technique. That is, the fact that the additional purification is obtained allows the casting technique to be used with relatively inexpensive feed grades of Si that would not normally be considered for a solar grade end product. Where the casting process is used apart from the melt separation process which, as illustrated, already uses the NaF salt, other salts which wet Si but not the container walls may be used. It has been found that either Na.sub.2 SiO.sub.3 or NaF or a combination of the two perform both the wetting and the purification functions.
Another feed head or nozzle 116 for introducing the reactants into a reaction chamber in a way that avoids plugging by preventing reaction too near the entry region is illustrated in FIG. 4. As in the previous figure, the upper section 40 of the reactor system, shown somewhat schematically in FIG. 4, constitutes a reactant (Na and SiF.sub.4) dispenser and the lower section 42 is the section where the reaction takes place. The "shower head" nozzle design shown allows excellent use of the reactor volume.
The nozzle design in this embodiment is called a "shower head" design because of the similarity of the central Na feed portion 118 of its nozzle to a conventional bathroom shower head. That is, the Na feed portion 118 includes a conventional stainless steel belows valve 122 controlled Na inlet piper 120 that feeds directly into an enlarged outlet head portion 124 closed at its lower end with a Na feed disc 126 having many small Na outlet apertures 128. Additional entry Na temperature control is provided by surrounding the upper part of the Na feed tube 120 and enlarged outlet head portion 124 with a sealed oil or argon confining chamber 130 which is provided with a valved (entry valve 132) entry tube 134 and valved (exit valve 136) oil or argon exit tube 138. The argon temperature controlling gas is recycled through a temperature regulating cooler (not shown).
The shower head Na feed nozzle 116 is centrally located, supported and sealed in a disk-like top 140 for the reactor section 42. As illustrated, the SiF.sub.4 for the reaction is brought in and directed inwardly into the jetted streams of Na from the apertures 128 of the Na feed nozzle 116. In order to accomplish this, SiF.sub.4 is brought in by way of stainless steel tubing 142 through a conventional constant pressure valve 144 into a double walled cone shaped ejection nozzle 146 which surrounds the shower head Na injection nozzle 116. The double walled cone-shaped ejection nozzle 146 looks much like the cone shaped walls of two slightly spaced but nested funnels. In this way, the SiF.sub.4 is injected at room temperature and uniformly from all angles around the jetting streams of Na.
Entry of SiF.sub.4 is controlled by the constant pressure valve 144 in order to keep pressure constant in the reactor at from about 0.5 to about 5 atmospheres. That is, as SiF.sub.4 is fed concentrically with the Na into the hot zone of the reactor, the SiF.sub.4 -Na reaction takes place depleting SiF.sub.4. The depletion in turn activates the constant pressure valve 144, thus, feeding more SiF.sub.4 into the reactor. The resultant gas flow keeps a relatively constant temperature at the injection region by its cooling action and by producing a jet that keeps hot particles of reaction products from reaching the nozzle end (the apertures 128 of Na outlet disk 126). Keeping the reaction products away from the reactant entry area in this manner eliminates plugging of the injection apertures 128.
This mode of operation increases the rate of Si production and allows continuous Si production. In the embodiment illustrated, the inlet Na feed tube 120 is 3/8 inch SS, the enlarged section or head portion 124 is 1 inch in diameter and the Na feed apertures 128 in the Na feed disk 126 are between 2 and 5 one-hundredths of an inch in diameter. In this embodiment the liquid Na feed is maintained at a pressure between 1.5 and 2 atmospheres and a temperature between 98.degree. C. and 130.degree. C. so that it jets out the Na feed apertures 128 at a velocity sufficient to prevent any plugging reaction product build-up at the nozzle 116. Using these parameters and jetting Na below its reacting temperature of 150.degree. C., the reaction will take place far enough away from the entry area to prevent plugging for injection temperatures up to 250.degree. C. No plugging occurs for reaction temperatures up to 900.degree. C.
The reduction reaction (FIG. 1 operation 12) takes place in the lower reactor section 42 of the reactor system. Again, as in the embodiment of FIG. 3, it is contemplated that the reaction products (NaF and Si) will be separated by a melt process at temperatures above the melting point of Si (1412.degree. C.) and preferably in the range between 1450.degree. and 1500.degree. C. It is also contemplated that the separation and removal of the reaction products will take place on a continuous basis. The physical structure and configuration of the reactor portion 42 of the system is designed to produce such results.
As illustrated, the reactor section 42 includes a double container arrangement with an outer generally cylindrical container 148, designed to capture and dispense the liquid NaF reaction product, surrounding an inner cylindrical reaction product receiving, melting and separating container 150. In order to withstand the high temperatures involved and to avoid contaminating the reaction products, the inner container 150 is composed of high purity graphite and in order to perform the separation of reaction products, the cylindrical container wall 151 is made with narrow slits 152. As illustrated in the perspective view of FIG. 5, the narrow slits 152 are arranged so that the container wall also forms a continuous serpentine conductor which acts as a resistive heater for purposes of raising the temperature of the reaction products. For the liquid NaF freely to flow out of the slits 152 in the wall 151 while the Si globules remain in the container 150, the slits 152 are made between 2 and 3.5 millimeters in width and for the purpose of forming this continuous serpentine conductor, the slits 152 are made alternately from the top and bottom of the wall 151. A separation of the container wall 151 is made by one cut 154 that extends completely from top to bottom of the wall and is filled with an insulator 156 which can be a ceramic such as berylia or a high temperature graphite felt. In this way a voltage (source not shown) can be applied between ends of the serpentine wall conductor to cause inner reaction product receiving container 150 to heat the reaction products (resistively) to the desired temperature.
The bottom 158 of the container 150 has the general appearance of a common funnel in that it is conical in shape with a solid non-porous cylindrical molten Si removing drain pipe 160 in the center. The drain pipe 160 is shown closed by a movable drain plug (not shown). Note that in order to prevent the funnel like bottom 158 of the container 150 from shorting across the slits 152 of the container wall, the bottom 158 is either made of a non conducting material or, as illustrated, is insulated by a ring of insulating material 162, such as graphite felt, between the bottom 158 and the wall 151. The condition illustrated is for a normal run in process with reaction products built up and some melt separation products in place.
The Na and SiF.sub.4 are jetted into the inner reaction product receiving container 150 and reaction starts to take place in the hot upper reaction zone 80. Note that the reaction takes place in exactly the manner as described with respect to the embodiment of FIG. 3 and the melt separation proceeds in the same way. Therefore, the reaction products are given identical reference numerals in both Figures and are not again described in detail here. As the reaction proceeds, a pool 82 of reacted and partially reacted Na and SiF.sub.4 form where the reaction goes to completion (pool described above). Immediately below the pool of reaction products 82, a hotter melt separation zone 84 is formed. The melt separation zone 84 is maintained at a much higher temperature (means of heating explained above) than the reaction products zone 82 above it and the reaction products effectively melt out.
At these temperatures, i.e., temperatures above 1412 degrees C, the reaction products (Si and NaF) are liquids which are separable because the NaF will normally float on top of the Si. That is, the liquid Si, which is more dense than NaF, agglomerates and settles to the bottom of the reactor vessel 150. Liquid NaF, which melts at 993.degree. C., is immiscible with Si and usually wets graphite in the presence of liquid Si. More or less spherical globules 86 of Si dispersed in NaF 88 and a large Si ingot or pool 90 at the bottom, as illustrated, are formed.
It is apparent that, while molten, the NaF both coats the Si and wets the graphite, thus, providing a barrier which prevents the Si from reacting with the graphite and avoids any impurity transfer or migration through and from reactor walls. Due to its relatively high surface tension (relative to NaF), Si remains in the container 150 while the low surface tension NaF flows out the slits 152 provided the slits 152 are of the proper size. Hydraulic pressure dictates the proper slit size and the volume and temperature of the reaction products determines the hydraulic pressure. It has been determined experimentally that for the melt zone temperatures contemplated, and slits 152 in the wall 151 of the inner reaction product receiving and separating container 150 of between 2 and 3.5 millimeters (mm), the NaF flows out while the molten Si remains in the inner container 150. If the slits 152 are appreciably smaller than 2 mm, the NaF does not discharge well and for slits appreciably greater than 3.5 mm Si has a tendency to enter and interfere with NaF discharge.
The Si is removed by means of the reaction container drain pipe 160. The flow is adjusted so that the process is continuous. That is, the flow of Si out the pipe 160 is adjusted so that the reduction reaction is continuously taking place in the reaction zone 80 and reaction products continuously settle through the reaction product zone 82 and into the melt separation zone 84 with NaF continuously flowing through the slits 152 in the wall 151 of inner reaction container 150 and Si agglomerating at the bottom and being continuously withdrawn from the drain pipe 160. Although it is feasible to use a number of different kinds of receptacles to receive the Si, the sheet casting arrangement shown and described in connection with FIG. 3 is a preferred embodiment. Both for simplicity and brevity the apparatus is not illustrated or described again here.
Like the outer container 70 of FIG. 3, the generally cylindrical outer container 148 of the reactor section 42 performs the functions of collecting and dispensing the NaF (separated reaction product), physically supporting the inner graphite reaction product receiving and separating container 150 and supporting insulation 164 which minimizes radiation heat loss. Unlike the outer container 70 of FIG. 3, outer container 148 may be conductive since the internal reaction chamber 152 is a heater. Graphite is an excellent choice of material.
Again, the outer container 148 must be spaced far enough from the inner container 150 to provide free flow for the NaF. The walls of the two containers 148 and 150 are held in their spaced relationship at the top by means of an annular ring 166 which snuggly surrounds the inner container 150 near its top and fits tightly inside the outer container 148 and at the bottom by means of the reaction container drain pipe 160 which is sealed in the exit aperture 168 in the bottom 170 of the outer container 148. The NaF is discharged through a drain pipe 172 at the bottom of the outer container 148.
For heating efficiency and to reduce heat radiation from the reactor, the outer container 148 is covered with a silica felt insulation 174 (not shown here). The top flange 140 of the reactor 42, which supports the shower head reactant injection nozzle 116 mates and is sealed to an outwardly extending lip or flange 176 around the top of the outer reaction chamber or vessel 148.
The process sequence shown in FIG. 1 was selected because of the inherent simplicity of the steps and their independent and combined suitability for scale-up. Some purification occurs during precipitation (operation 1, FIG. 1) for Mg, Ca, Al, P, and As due to the high solubility of their fluosilicates and fluosalts. Some concentration takes place for Cr, Fe, and Ni, and this effect may be due to coprecipitation of these elements as fluorides since their fluosilicates are very soluble. From Table II, it is clear that most of the purification is accomplished as a result of the thermal decomposition in step 24 (FIG. 1). Most transition metal fluorides are in very stable condensed phases at the decomposition temperature (650.degree. C.) in step 24 (FIG. 1) and, therefore, will stay in the solid. In addition, volatile fluorides formed during the decomposition of fluosalts such as Na.sub.2 TiF.sub.6 and Na.sub.2 ZrF.sub.6 will condense upon cooling of the SiF.sub.4 gas stream from step 24. The condensed material is then removed from the gas mainstream by in-line fume particle filtration. The presence of any metallic or dopant impurities was not detected using mass spectrometry (Table I) in either the gas produced in the above reaction or in the commercial SiF.sub.4 gas. The analysis done on the SiF.sub.4 by passing the gas through high purity water was based on the hypothesis that impurities should be hydrolyzed and/or trapped in the SiO.sub.2 formed.
The results listed in Table II show that the level of metal impurities in the resulting SiO.sub.2 is so low that, for practical purposes, the SiF.sub.4 can be considered free of metallic impurities. The Na feed, reactor materials, and possible contamination of the product during handling remain as possible sources of impurities in the Si.
The impurities in Na can be divided roughly into three types according to their tendency to react with SiF.sub.4, as classified by the free energy of reaction. The first type of impurity includes aluminum and elements from the groups Ia, IIa and IIIB. The free energy of reaction of SiF.sub.4 with these impurities ranges from -100 to -200 kcal/mole SiF.sub.4 at room temperature and from -50 to -100 kcal/mole SiF.sub.4 at 1500K. It is expected, therefore, that even when these impurities are present at the ppm level, they will react with the SiF.sub.4 to form corresponding fluorides. Subsequently, the fluorides will be dissolved preferentially in the NaF phase.
The second type impurity includes transition metals such as Mo, W, Fe, Co, Ni, and Cu, and the elements P, As, and Sb. These elements exhibit positive free energies of reaction in excess of 100 kcal/mole SiF.sub.4 and are not expected to react with SiF.sub.4. However, it is an experimental fact that the silicon resulting from the SiF.sub.4 -Na reaction contains amounts of Fe, Ni, and Cr in proportion to the concentration of these elements in the Na feed. The mechanism by which these metals are transferred to the silicon has not yet been studied. In any case, the concentration of Fe, Cr, Ni, and also Ti can be decreased by a factor of about 10.sup.4 to 10.sup.6 for single-pass directional solidification or the Czochralski crystal-pulling procedures used presently for solar cell manufacture. At the resulting levels, these elements would not be detrimental to solar cell performance.
Boron represents a third type of impurity. The free energy of reaction of this element with SiF.sub.4 is positive but small (5-20 kcal/mole SiF.sub.4 for temperatures up to 1500K); therefore, some partial reaction can be expected and B will be distributed between the NaF and Si phases. It is noted that the levels of the dopant elements B, P, and As in the reaction Si are the same as in the semiconductor grade silicon used as reference or control. Since it is convenient to have dopant levels as low as possible to permit flexibility in subsequent doping procedures for semiconductor and solar cell applications, the low B and P content of Si produced in this process is of advantage. It is noted that the purity of the silicon produced by the SiF.sub.4 -Na reaction is, at a minimum, nominally appropriate for solar cell manufacture.
From the foregoing discussion, it will be understood that the objects of the invention have been carried in that high purity Si can be prepared and cast using the inexpensive starting materials H.sub.2 SiF.sub.6 and Na. Favorable thermodynamics of the reduction step, easily controlled kinetics, and abundant availability of inexpensive starting materials make this method attractive. Of special interest for semiconductor applications are the low concentrations of B and P impurities in the product Si. The Si produced by the SiF.sub.4 -Na reaction, particularly when purified further by directional solidification (the casting), should be a low cost material suitable for the manufacture of solar cells and other semiconductor products.
While particular embodiments of the invention have been shown, it will, of course be understood that the invention is not limited thereto since many modifications in both process and apparatus employed may be made. It is contemplated that the appended claims will cover any such modifications as fall within the true spirit and scope of the invention.

Number	Name	Date
663140	Walker et al.	Dec 1900
2753254	Rick	Jul 1956
2818843	Savage et al.	Dec 1957
3076241	Simonson et al.	Feb 1963
3297808	Pflueger	Jan 1967
3460609	Olsson	Aug 1969
3667534	Kanorogi et al.	Jun 1972
3792951	Meyers	Feb 1974
3801249	Milani	Apr 1974
3809148	Pulsifer	May 1974
4064925	Fastner et al.	Dec 1977
4145175	Groff et al.	Mar 1979
4233338	Ricard et al.	Nov 1980
4265859	Jewett	May 1981
4353408	Pryor	Oct 1982
4356152	Berkman et al.	Oct 1982
4450893	Winter et al.	May 1984
4529576	Sancier	Jul 1985
4737348	Levin	Apr 1988

Number	Date	Country
1090019	Mar 1955	FRX
0014124	Jan 1980	JPX
0133852	Oct 1980	JPX
039583	Oct 1980	JPX
0189044	Oct 1984	JPX
58-62974	Oct 1984	JPX
0054247	Mar 1985	JPX

Apparatus for obtaining silicon from fluosilicic acid

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CPC

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