Claims
- 1. Apparatus for coating a polymeric material with an oxidation protecting film comprising
- an ion beam source for furnishing an ion beam for cleaning a surface of said polymeric material, and
- a sputter target mounted such that a beam of ions from an ion source can bombard said target for ion sputter coating said ion beam cleaned surface with a mixture of metal oxide and polymer to form said oxidation protecting film, said sputter target comprising
- a first portion of a metal oxide material, and
- a second portion of a polymer material having a low oxidation rate.
- 2. Apparatus for coating a polymeric material as claimed in claim 1 wherein the first portion of the sputter target is a metal oxide selected from the group consisting of SiO.sub.2 and Al.sub.2 O.sub.3.
- 3. Apparatus for coating a polymeric material as claimed in claim 1 wherein the second portion of said sputter target is a polymer material selected from the group consisting of polytetrafluorethylene and silicone rubber.
- 4. Apparatus for coating a polymer material as claimed in claim 1 wherein a single ion beam cleans said surface of said polymeric material and bombards said target.
- 5. Apparatus for coating a polymeric material as claimed in claim 1 including
- an ion beam for ion beam cleaning said surface of said polymeric material; and
- another ion beam for bombarding said sputter target.
- 6. Coating apparatus for protecting a polymeric material from oxidation comprising
- a vacuum chamber,
- means for mounting said material in said chamber,
- means for producing a beam of ions in said vacuum chamber for cleaning absorbed gases and contaminants from a surface of said material, and
- a sputter target having a metal oxide portion and a polymer portion positioned within said chamber for simultaneous co-sputtering by ions from said ion producing means thereby sputter coating said cleaned surface in said vacuum chamber immediately after cleaning with a continuous thin film comprising a metal oxide and a polymer in a predetermined ratio to form an oxidation barrier.
- 7. Coating apparatus as claimed in claim 6 wherein the polymer portion of the target comprises a material selected from the group consisting of polytetrafluoroethylene and silicon rubber.
- 8. Apparatus for coating a polymeric material as claimed in claim 6 wherein the metal oxide portion of said sputter target is a metal oxide selected from the group consisting of SiO.sub.2 and Al.sub.2 O.sub.3.
ORIGIN OF THE INVENTION
The invention described herein was made by employees of the U.S. Government and may be manufactured and used by or for the Government for governmental purposes without the payment of any royalties thereon or therefor.
US Referenced Citations (13)
Non-Patent Literature Citations (1)
Entry |
J. L. Vossen et al., Thin Film Processes, Academic Press, New York, 1978, pp. 189-198, 515. |
Divisions (1)
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Number |
Date |
Country |
Parent |
649330 |
Sep 1984 |
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