This application claims the benefit of priority of Chinese Patent Application No. 202310520608.6, filed on May 9, 2023, the disclosure of which is incorporated herein by reference in its entirety.
The present disclosure relates to a field of display technologies, and in particular, to an array substrate and a display panel.
In a display device, a signal line in a gate layer is connected to connecting lines of source and drain layers, and then is connected to a driver chip through the connecting lines of the source and drain layers, so as to realize the scanning function of the display device. During a manufacturing process of existing display devices, in order to reduce mask plates for reducing the cost and improving the manufacturing efficiency, electrodes in a pixel electrode layer will be used to bridge the signal line in the gate layer and the connecting lines in the source and drain layers. Specifically, existing methods for overlapping the signal line and connecting lines by the electrodes in the pixel electrode layer include a half-overlapping hole method and double-hole connection method. However, the half-overlapping hole method is prone to electrostatic damage to the electrodes in the pixel electrode layer, thereby resulting in the problem of lower yield of the display device, and the double-hole connection method has the problem of occupying a larger space, thereby leading to larger border of the display device.
Therefore, there is a technical problem that the existing display devices cannot give consideration to higher yield and narrower border by connecting the signal line and the connecting lines through the electrodes in the pixel electrode layer.
Embodiments of the present disclosure provide an array substrate and a display panel, which can alleviate the technical problem that the existing display devices cannot give consideration to higher yield and narrower border by connecting the signal line and the connecting lines through the electrodes in the pixel electrode layer.
An embodiment of the present disclosure provides an array substrate, including:
In an embodiment, the array substrate includes an active layer, the active layer is disposed between the gate insulating layer and the second metal layer, the active layer includes an active pattern and the cushioning structure, and the cushioning structure is electrically insulated from the active pattern.
In an embodiment, the active pattern includes a doped portion and a channel portion, and a dopant ion concentration of the cushioning structure is greater than or equal to a dopant ion concentration of the channel portion.
In an embodiment, the doped portion includes a first doping portion and a second doping portion, and the second doping portion is disposed between the first doping portion and the channel portion; a dopant ion concentration of the second doping portion is greater than a dopant ion concentration of the channel portion, and the dopant ion concentration of the second doping portion is less than the dopant ion concentration of the first doping portion; and the dopant ion concentration of the cushioning structure is equal to the dopant ion concentration of the second doping portion, or the dopant ion concentration of the cushioning structure is equal to the dopant ion concentration of the channel portion.
In an embodiment, the doped portion includes multiple parts, and the second metal layer further includes a source electrode and a drain electrode; and the source electrode and the drain electrode are respectively connected to the multiple parts of the doped portion, and the doped portion is in contact with the channel portion, and the dopant ion concentration of the cushioning structure is equal to the dopant ion concentration of the channel portion.
In an embodiment, the array substrate includes a cushioning layer and an active layer, the cushioning layer is disposed between the gate insulating layer and the second metal layer, and the cushioning layer includes the cushioning structure.
In an embodiment, an orthographic projection of the cushioning structure projected on the substrate is in contact with an orthographic projection of the via hole projected on the substrate.
In an embodiment, a spacing between a side surface of the side of the cushioning structure close to the via hole and a side surface of a side of the second connecting line close to the via hole is greater than or equal to 1 micrometer.
In an embodiment, a material of the cushioning structure includes one selected from a group consisting of indium gallium zinc oxide, zinc oxide, tin oxide, indium zinc oxide, gallium zinc oxide, zinc tin oxide, and indium tin oxide.
Further, an embodiment of the present disclosure provides a display panel, and the display panel includes the array substrate described in any one of the above embodiments.
Beneficial effects: the embodiments of the application provide an array substrate and a display panel; the array substrate include a substrate, a first metal layer, a gate insulate layer, a second metal layer and a pixel electrode layer. The first metal lay is arranged on a side of the substrate, and the first metal layer includes a first connecting line. The gate insulating layer is arranged on a side of the first metal layer facing away from the substrate, and the gate insulating layer includes a via hole. The second metal layer is arranged on a side of the gate insulating layer facing away from the first metal layer, and the second metal layer includes a second connecting line. The pixel electrode layer is arranged on a side of the second metal layer facing away from the gate insulating layer, and the pixel electrode layer includes a third connecting line. The array substrate further includes a cushioning structure, which is disposed between the second connecting line and the gate insulating layer. A side of the cushioning structure close to the via hole is disposed to extend beyond the second connecting line, the third connecting line is overlapped on the second connecting line and a part of the cushioning structure extended beyond the second connecting line, the third connecting line passes through the via hole and is connected to the first connecting line, and the cushioning structure is in insulated contact with the second connecting line. According to the present disclosure, by arranging the cushioning structure below the second connecting line, the side of the cushioning structure close to the via hole is disposed to extend beyond the second connecting line, the third connecting line is overlapped on the second connecting line and a part of the cushioning structure extended beyond the second connecting line, and the third connecting line passes through the via hole to connect the first connecting line, so that the third connecting line can connect the first connecting line and the second connecting line to realize the line turning of the first connecting line, and a border of the array substrate is reduced compared with the double-hole connection method. Further, the cushioning structure can increase a spacing between the first connecting line and the second connecting line, thereby reducing the probability of static electricity generation, improving the yield of the array substrate, and giving consideration to the higher yield and narrower border of the array substrate when the first connecting line and the second connecting line are connected through the third connecting line.
The technical solutions and other beneficial effects of the present disclosure will be apparent by describing specific embodiments of the present disclosure in detail combined with the attached drawings herein after.
Technical solutions in embodiments of the present disclosure will be described hereinafter clearly and completely in conjunction with accompanying drawings of the embodiments of the present disclosure. It is apparent that, the described embodiments are merely parts of embodiments of the present disclosure, not the whole embodiment. Based on the described embodiments in the present disclosure, all other embodiments obtained by those skilled in the art without creative work belong to the scope of protection of the present disclosure.
As shown in
In view of the above technical problem, an embodiment of the present disclosure provides an array substrate and a display panel for alleviating the above technical problem.
As shown in
a substrate 21;
a first metal layer 22, first metal layer 22 is disposed on a side of the substrate 21, and the first metal layer 22 includes a first connecting line 221;
a gate insulating layer 23, the gate insulating layer 23 is disposed on a side of the first metal layer 22 facing away from the substrate 21, and the gate insulating layer 23 includes a via hole 231;
a second metal layer 25, the second metal layer 25 is disposed on a side of the gate insulating layer 23 facing away from the first metal layer 22, and the second metal layer 25 includes a second connecting line 251; and a pixel electrode layer 31, disposed on a side of the second metal layer 25 facing away from the gate insulating layer 23, and the pixel electrode layer 31 includes a third connecting line 311;
the array substrate 2 further includes a cushioning structure 32, the cushioning structure 32 is disposed between the second connecting line 251 and the gate insulating layer 23, a side of the cushioning structure 32 close to the via hole 231 is disposed to extend beyond the second connecting line 251, the third connecting line 311 is overlapped on the second connecting line 251 and a part of the cushioning structure 32 extended beyond the second connecting line 251, and the third connecting line 311 passes through the via hole 231 and is connected to the first connecting line 221, and the cushioning structure 32 is disposed to be insulated from the second connecting line 251.
For the array substrate provided by the embodiment of the present disclosure, the array substrate is provided with the cushioning structure below the second connecting line, the side of the cushioning structure close to the via hole is disposed to extend beyond the second connecting line, the third connecting line is overlapped on the second connecting line and a part of the cushioning structure extended beyond the second connecting line, and the third connecting line passes through the via hole to connect the first connecting line, so that the third connecting line can connect the first connecting line and the second connecting line to realize the line turning of the first connecting line, and a border of the array substrate is reduced compared with the double-hole connection method. Further, the cushioning structure can increase a spacing between the first connecting line and the second connecting line, thereby reducing the probability of static electricity generation, improving the yield of the array substrate, and giving consideration to the higher yield and narrower border of the array substrate when the first connecting line and the second connecting line are connected through the third connecting line.
Specifically, as shown in
Specifically, since the side surface 321 of the cushioning structure 32 close to the via hole 231 and the side surface 251a of the second connecting line 251 close to the via hole 231 may be inclined surfaces, when the spacing between the side surface 321 of the cushioning structure 32 close to the via hole 231 and the side surface 251a of the second connecting line 251 close to the via hole 231 is determined, the spacing may be determined based on both an endpoint on the rightmost side of the side surface 321 of the cushioning structure 32 close to the via hole 231 and an endpoint on the rightmost side of the side surface 251a of the second connecting line 251 close to the via hole 231, but the embodiments of the present disclosure is not limited thereto.
For example, the spacing may be determined based on a middle point of the side surface 321 of the cushioning structure 32 close to the via hole 231 and a middle point of the side surface 251a of the second connecting line 251 close to the via hole 231, and the spacing may also be determined based on an endpoint on the leftmost side of the side surface 321 of the cushioning structure 32 close to the via hole 231 and an endpoint on the leftmost side of the side surface 251a of the second connecting line 251 close to the via hole 231.
Specifically, in the array substrate, because wirings are arranged in different metal layers, and some wirings need to cross other wirings to connect to binding terminals, therefore, crossing-line of the wiring of the first metal layer can be achieved through connecting the second connecting line of the second metal layer to the first connecting line. For example, if a scan line needs to cross over to the second metal layer to connect to a binding terminal, the first connecting line can be the scan line or a wiring connecting the scan line. When another signal line needs to cross over to the second metal layer to connect to a binding terminal, the first connecting line can also be the another signal lines or a wiring connecting the anther signal line.
Specifically, when the second connecting line is connected to a wiring of another film layer, the second connecting line can transmit signals of the wiring of the another film layer, so the second connecting line can be insulated from other wirings and electrodes in the second metal layer. For example, if the second metal layer includes a data line, a source electrode, and a drain electrode, the second connecting line needs to be insulated from the data line, the source electrode and, the drain electrode.
Specifically, when the third connecting line is connected to the first connecting line and the second connecting line, and a signal on the first connecting line will be transmitted on the third connecting line, so the third connecting line can be insulated from other signal lines and/or electrodes in the same layer. For example, if the pixel electrode layer also includes a pixel electrode, the pixel electrode is insulated from the third connecting line.
Specifically, the cushioning structure is disposed to be insulated from the second connecting line means that the cushioning structure is not conductive and cannot be conductive to the second connecting line.
Aiming at the problem that arranging the cushioning structure may increase process steps of the array substrate and reduce the preparation efficiency of the array substrate, in an embodiment, as shown in
Specifically, as shown in
In an embodiment, as shown in
Specifically, since the dopant ion concentration of the cushioning structure is greater than or equal to that of the channel portion, the cushioning structure may not be ion-doped or partially ion-doped, which cannot increase the process steps of the array substrate, and can keep the cushioning structure be insulated from the second connecting line.
In an embodiment, as shown in
Specifically, since the dopant ion concentration of the second doping portion is larger than that of the channel portion, and the dopant ion concentration of the second doping portion is smaller than that of the first doping portion, the problem that a potential barrier between the channel portion and the first doping portion is too large, resulting in excessive power consumption of the thin film transistor, can be avoided, and the channel portion will not in direct contact with the first doping portion, which avoids the leakage of the thin film transistor caused by the direct conduction of the channel portion.
Specifically, when forming the cushioning structure, the cushioning structure and the channel portion can be shielded, so that the dopant ion concentration of the cushioning structure is equal to the dopant ion concentration of the channel portion, and the cushioning structure and the second doping portion can be doped simultaneously, so that the dopant ion concentration of the cushioning structure is the same as the dopant ion concentration of the second doping portion.
In an embodiment, as shown in
In an embodiment, a material of the active layer includes one selected from the group consisting of indium gallium zinc oxide, zinc oxide, tin oxide, indium zinc oxide, gallium zinc oxide, tin zinc oxide, and indium tin oxide. Since the active layer is formed by using metal oxide, after the cushioning structure is formed, the cushioning structure will not be etched when the gate insulating layer is dry-etched, so that the cushioning structure can increase the spacing between the first connecting line and the second connecting line, and the cushioning structure can be used as a mask plate for dry etching of the gate insulating layer to avoid static electricity generation and improve the yield of the array substrate.
Specifically, if the cushioning structure is formed by nonmetallic oxide, the non-metallic oxide will be etched away due to the subsequent requirement of dry-etching the gate insulating layer, which will lead to non-metallic oxide below the cushioning structure being etched away, and the spacing between the first connecting line and the second connecting line cannot be increased. According to the embodiment of the present disclosure, the active layer is made of metal oxide, so that when the gate insulating layer is dry etched, the cushioning structure can protect the gate insulating layer below the cushioning structure, thereby increasing the spacing between the first connecting line and the second connecting line, avoiding static electricity generation between the first connecting line and the second connecting line, and improving the yield of the array substrate. In addition, when the gate insulating layer is dry etched to form the via hole, the cushioning structure can be used as a mask plate, so that the number of mask plate plates is reduced, and alignment is not required, so that the preparation efficiency of the array substrate is improved. In addition, the cushioning structure is used as a mask plate, so that static electricity during dry etching of the gate insulating layer can be reduced, and the yield of the array substrate can be improved.
In an embodiment, the array substrate further includes a cushioning layer and an active layer, the cushioning layer is arranged disposed between the gate insulating layer and the second metal layer, and the cushioning layer includes the cushioning structure. When the cushioning structure is disposed, the cushioning layer can also be disposed, so that the cushioning structure is formed in the cushioning layer, the spacing between the first connecting line and the second connecting line is increased, static electricity generation is avoided between the first connecting line and the second connecting line, and the yield of the array substrate is improved.
In an embodiment, the material of the cushioning layer includes one selected from the group consisting of indium gallium zinc oxide, zinc oxide, tin oxide, indium zinc oxide, gallium zinc oxide, zinc tin oxide, and indium tin oxide. By using metal oxide to form the cushioning layer, after the cushioning structure is formed, the cushioning structure will not be etched when the gate insulating layer is dry-etched, so that the cushioning structure can increase the spacing between the first connecting line and the second connecting line, and the cushioning structure can be used as a mask plate for dry etching of the gate insulating layer to avoid static electricity generation and improve the yield of the array substrate.
The above embodiments have been described in detail by taking the active layer including the cushioning structure and the cushioning layer including the cushioning structure as examples, but the embodiment of the present disclosure is not limited thereto. For example, the cushioning structure can include multiple layers, and the active layer and the cushioning layer are respectively used to form the multiple layers of the cushioning structure.
In an embodiment, as shown in
Specifically, after all of the film layers in the array substrate is formed, the gate insulating layer is etched to form the via hole, so that the third connecting line can pass through the via hole and be connected to the first connecting line. By using the cushioning structure as the mask plate for etching the gate insulating layer, a side of the cushioning structure close to the via hole and aside of the via hole close to the cushioning structure are in the same line, and the cushioning structure can protect the gate insulating layer below the cushioning structure, so that a spacing between an edge of the second connecting line close the via hole and a part of the first connecting line corresponding to the via hole position is increased, thereby avoiding static electricity generation and improving the yield of the array substrate.
In an embodiment, as shown in
In an embodiment, a material of the cushioning structure includes one selected from the group consisting of indium gallium zinc oxide, zinc oxide, tin oxide, indium zinc oxide, gallium zinc oxide, zinc tin oxide, and indium tin oxide. By using metal oxide to form the cushioning structure, after the cushioning structure is formed the cushioning structure will not be etched when the gate insulating layer is dry-etched, so that the cushioning structure can increase the spacing between the first connecting line and the second connecting line, and the cushioning structure can be used as a mask plate for dry etching of the gate insulating layer to avoid static electricity generation and improve the yield of the array substrate.
In an embodiment, as shown in
In an embodiment, as shown in
Specifically, in
In one embodiment, as shown in
Further, an embodiment of the present disclosure provides a preparation method of an array substrate, which prepares the array substrate as described in any one of the above embodiments, and the preparation method of the array substrate includes the following steps:
providing a substrate, and sequentially forming a first metal layer, a gate insulating layer, an active layer and a second metal layer on the substrate; and a structure of the array substrate corresponding to this step is shown in (a) of
sequentially forming a first passivation layer, an organic layer, a common electrode layer and a second passivation layer on the second metal layer; and a structure of the array substrate corresponding to this step is shown in (b) of
etching the gate insulating layer, the first passivation layer and the second passivation layer to form a via hole; and a structure of the array substrate corresponding to this step is shown in (c) of
Moreover, an embodiment of the present disclosure provides a display panel, which includes an array substrate as described in any one of the above embodiments.
In an embodiment, the display panel includes a liquid crystal display panel, which including the array substrate as described in any one of the above embodiments, a color film substrate, and a liquid crystal cell arranged between the array substrate and the color film substrate.
In an embodiment, the display panel includes an organic light emitting diode display panel, which includes the array substrate as described in any one of the above embodiments, and a light emitting layer and a common electrode layer disposed on the array substrate.
According to the above embodiments, the embodiments of the application provide an array substrate and a display panel; the array substrate include a substrate, a first metal layer, a gate insulate layer, a second metal layer and a pixel electrode layer. The first metal lay is arranged on a side of the substrate, and the first metal layer includes a first connecting line. The gate insulating layer is arranged on a side of the first metal layer facing away from the substrate, and the gate insulating layer includes a via hole. The second metal layer is arranged on a side of the gate insulating layer facing away from the first metal layer, and the second metal layer includes a second connecting line. The pixel electrode layer is arranged on a side of the second metal layer facing away from the gate insulating layer, and the pixel electrode layer includes a third connecting line. The array substrate further includes a cushioning structure, which is disposed between the second connecting line and the gate insulating layer. A side of the cushioning structure close to the via hole is disposed to extend beyond the second connecting line, the third connecting line is overlapped on the second connecting line and a part of the cushioning structure extended beyond the second connecting line, the third connecting line passes through the via hole and is connected to the first connecting line, and the cushioning structure is in insulated contact with the second connecting line. According to the present disclosure, by arranging the cushioning structure below the second connecting line, the side of the cushioning structure close to the via hole is disposed to extend beyond the second connecting line, the third connecting line is overlapped on the second connecting line and a part of the cushioning structure extended beyond the second connecting line, and the third connecting line passes through the via hole to connect the first connecting line, so that the third connecting line can connect the first connecting line and the second connecting line to realize the line turning of the first connecting line, and a border of the array substrate is reduced compared with the double-hole connection method. Further, the cushioning structure can increase a spacing between the first connecting line and the second connecting line, thereby reducing the probability of static electricity generation, improving the yield of the array substrate, and giving consideration to the higher yield and narrower border of the array substrate when the first connecting line and the second connecting line are connected through the third connecting line.
In the above-mentioned embodiments, the description of each embodiment has its own emphasis. For the parts not detailed in one embodiment, the related descriptions of other embodiments can be referred to.
The array substrate and the display panel provided by the embodiments of the present disclosure are described in detail above, and the principle and implementations of the present disclosure are explained by using specific examples. However, the description of the above embodiments is merely intended to facilitate understanding of the technical solutions and core ideas of the present disclosure. Those skilled in the art should understand that they could still modify the technical solutions recorded in the above-mentioned embodiments, or replace some technical features with equivalents. Further, these modifications or substitutions do not make the essence of the corresponding technical solutions deviate from the scope of the technical solution of each embodiment of the present disclosure.
Number | Date | Country | Kind |
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202310520608.6 | May 2023 | CN | national |