This application claims priority to Japanese Patent Application No. 2022-087757 filed May 30, 2022, the disclosure of which is hereby incorporated by reference in its entirety.
The present invention relates to an article lifting/lowering apparatus including a holding unit holding an article, a lifting/lowering device lifting/lowering the holding unit, and a control unit controlling the lifting/lowering device.
An example of such an article lifting/lowering apparatus is disclosed in JP-A-2007-276962 (Patent Literature 1). In the following description of the background art, reference numerals in Patent Literature 1 are quoted in brackets. In Patent Literature 1, an article lifting/lowering apparatus is provided in a carrier (2) transporting an article (24). This article lifting/lowering apparatus includes a lifting/lowering stand (20) holding the article (24), a lifting/lowering device lifting/lowering the lifting/lowering stand (20), and a lifting/lowering motor control unit (36) controlling the lifting/lowering device. The lifting/lowering device includes a drum (14), a suspension material (18) wound around the drum (14), and a lifting/lowering motor (12) rotationally driving the drum (14), in which the lifting/lowering stand (20) is lowered by unwinding the suspension material (18) from the drum (14), and the lifting/lowering stand (20) is lifted by winding-up the suspension material (18) around the drum (14).
When a holding unit (lifting/lowering stand in Patent Literature 1) holding the article is lowered, it is conceivable to perform an accelerated lowering operation of gradually increasing the lowering velocity of the holding unit toward the target lowering velocity, a constant velocity lowering operation of maintaining the lowering velocity of the holding unit at the target lowering velocity, and then a decelerated lowering operation of gradually decreasing the lowering velocity of the holding unit from the target lowering velocity to stop the holding unit. The lifting/lowering velocity pattern illustrated in
In Paragraph 0011 of Patent Literature 1, a belt is described as an example of the suspension material. When the belt is used as the suspension material as described above, the winding-up diameter, which is the diameter of the outer surface of the belt wound-up around a pulley (drum in Patent Literature 1), gradually decreases by the unwinding of the belt from the pulley. Therefore, if the rotational velocity of the pulley is made constant in the constant velocity lowering operation, the lowering velocity of the holding unit during the constant velocity lowering operation decreases with the gradual decrease in the winding-up diameter. As a result, in switching from the accelerated lowering operation to the constant velocity lowering operation, the lowering velocity of the holding unit decreases immediately after the lowering velocity has increased (in other words, decelerating immediately after accelerating), and thus a large change in the acceleration occurs in the holding unit, so that the vibration acting on the holding unit and the article held by the holding unit is likely to increase. However, Patent Literature 1 does not mention this point.
Therefore, in view of the foregoing, it has been desired to realize a technology capable of, when the holding unit is lowered by sequentially performing the accelerated lowering operation, the constant velocity lowering operation, and the decelerated lowering operation, suppressing the vibration acting on the holding unit and the article held by the holding unit in switching from the accelerated lowering operation to the constant velocity lowering operation to a low degree.
An article lifting/lowering apparatus according to this disclosure includes: a holding unit configured to hold an article; a lifting/lowering device configured to lift and lower the holding unit; and a control unit configured to control the lifting/lowering device, in which the lifting/lowering device includes: a pulley, a belt wound around the pulley to be freely wound-up and unwound; and a drive unit configured to rotationally drive the pulley, and is configured to lower the holding unit by unwinding the belt from the pulley and lift the holding unit by winding-up the belt around the pulley in a state in which the holding unit is suspended by the belt, and the control unit is configured to, when the holding unit is lowered, control the drive unit to (i) gradually increase the lowering velocity of the holding unit toward the target lowering velocity, (ii) perform a constant velocity lowering operation of maintaining the lowering velocity of the holding unit at the target lowering velocity, and then (iii) gradually decrease the lowering velocity of the holding unit from the target lowering velocity to stop the holding unit, and the control unit is configured to, in the constant velocity lowering operation, control the drive unit to gradually increase the rotational velocity of the pulley in response to a gradual decrease in the diameter of the outer surface of the belt wound-up around the pulley by the unwinding.
According to this configuration, considering that the winding-up diameter, which is the diameter of the outer surface of the belt wound-up around the pulley, gradually decreases by the unwinding of the belt from the pulley, the rotational velocity of the pulley in the constant velocity lowering operation can be increased in response to the gradual decrease in the winding-up diameter. Therefore, as compared with the case where the rotational velocity of the pulley is made constant in the constant velocity lowering operation, the change in the lowering velocity of the holding unit during the constant velocity lowering operation can be suppressed to a low degree. As a result, a change in the acceleration of the holding unit in switching from the accelerated lowering operation to the constant velocity lowering operation can be suppressed to a low degree. Thus, the vibration acting on the holding unit and the article held by the holding unit in the switching is easily suppressed to a low degree.
Further features and advantages of the article lifting/lowering apparatus will become apparent from the following description of embodiments given with reference to the drawings.
Embodiments of an article lifting/lowering apparatus are described with reference to the drawings. As illustrated in
The article carrier 40 travels along a traveling route and transports the article 2. Herein, the longitudinal direction (direction in which the traveling route extends) of the traveling route is defined as a route longitudinal direction X, and the width direction of the traveling route is defined as a route width direction Y. The route width direction Y is a direction orthogonal to both the route longitudinal direction X and an up-down direction Z (vertical direction). In the examples illustrated in
The traveling route may be physically formed or virtually set. In this embodiment, as illustrated in
The article carrier 40 includes traveling units 41 traveling along the traveling route and a main body 44 connected to the traveling units 41. In this embodiment, the main body 44 is connected to the traveling units 41 in a state of being arranged on a lower side Z2 with respect to the traveling units 41. In the examples illustrated in
The traveling units 41 each include a wheel 43 rolling on the traveling surfaces (herein, surfaces facing an upper side Z1) of the rails 4, and traveling drive units 42 (e.g., an electric motor, such as a servomotor) rotationally driving the wheel 43. By the rotation of the wheels 43 by the traveling drive units 42, the traveling units 41 travel along the rails 4.
The main body 44 includes the holding unit 10 holding the article 2. In this embodiment, the holding unit 10 holds the article 2 from the upper side Z1. The type of the article 2 is not limited to the following type. In this embodiment, the article 2 is a container housing a substrate, such as a semiconductor wafer, and the holding unit 10 holds the article 2 by gripping a flange portion 2a formed on an upper part of the article 2 with gripping portions 11.
The main body 44 has a lifting/lowering device 20 lifting/lowering the holding unit 10. As illustrated in
As illustrated in
The lifting/lowering device 20 rotates the pulleys 21 in one rotation direction by the lifting/lowering drive unit 23 to unwound the belts 22 from the pulleys 21, and rotates the pulleys 21 in the other rotation direction by the lifting/lowering drive unit 23 to wind-up the belts 22 around the pulleys 21. The lifting/lowering device 20 lowers the holding unit 10 by unwinding the belts 22 from the pulleys 21 and lifts the holding unit 10 by winding the belts 22 around the pulleys 21 in the state in which the holding unit 10 is suspended by the belts 22. Thus, the lifting/lowering device 20 rotates the pulleys 21 by the lifting/lowering drive unit 23 to lift and lower the holding unit 10. As illustrated in
When the article carrier 40 performs a traveling operation of traveling along the traveling route, the holding unit 10 is arranged at the traveling height (see
When the article carrier 40 performs a transfer operation of the article 2 between the holding unit 10 and a transfer destination location 6, the holding unit 10 is arranged at the transferring height (see
As illustrated in
Various technical features of the control unit 30 described below are also applicable to methods for controlling the article carrier 40 (e.g., lifting/lowering device 20, which similarly applies hereinafter) and programs for controlling the article carrier 40, and such methods and programs, and further recording media (computer readable recording media, such as optical disks and flash memories) on which such programs are recorded, are also disclosed in this specification. The programs for controlling the article carrier 40 are provided, for example, by the recording media on which the programs are recorded or are provided via a communication network, and the provided programs are stored in a storage device to which the control unit 30 (computer) can refer.
The control unit 30 controls the lifting/lowering device 20. Specifically, the control unit 30 controls the lifting/lowering drive unit 23 to cause the lifting/lowering device 20 to perform a lifting/lowering operation of lifting/lowering the holding unit 10. In this embodiment, the control unit 30 further controls the traveling units 41 and the holding unit 10. Specifically, the control unit 30 controls the traveling drive units 42 to cause the traveling units 41 to perform the traveling operation of traveling along the traveling route. Further, the control unit 30 controls a holding drive unit (not illustrated) (e.g., solenoid or electric motor) to cause the holding unit 10 to perform a holding operation of holding the article 2 and a holding release operation of releasing the holding of the article 2.
The control unit 30 causes the traveling units 41 to perform the traveling operation, thereby causing the article carrier 40 to travel to the position corresponding to the transfer destination location 6 (herein, position on the upper side Z1 relative to the transfer destination location 6 and overlapping with the transfer target portion 6 in plan view (view in a direction along the up-down direction Z)). When the article 2 is transferred to the transfer destination location 6 from the holding unit 10, the control unit 30 causes the lifting/lowering device 20 to perform a lifting/lowering operation of lowering the holding unit 10 holding the article 2 from the traveling height to the transferring height, causes the holding unit 10 to perform the holding release operation of the article 2, and then causes the lifting/lowering device 20 to perform the lifting/lowering operation of lifting the holding unit 10 in a state of not holding the article 2 from the transferring height to the traveling height. When the article 2 is transferred from the transfer destination location 6 to the holding unit 10, the control unit 30 causes the lifting/lowering device 20 to perform the lifting/lowering operation of lowering the holding unit 10 in the state of not holding the article 2 from the traveling height to the transferring height, causes the holding unit 10 to perform the holding operation of holding the article 2, and then causes the lifting/lowering device to perform the lifting/lowering operation of lifting the holding unit 10 in a state of holding the article 2 from the transferring height to the traveling height.
Thus, the control unit 30 lifts/lowers the holding unit 10 when the article 2 is transferred between the holding unit 10 and the transfer destination location 6. Then, when the holding unit 10 is lowered, the control unit 30 controls the lifting/lowering drive unit 23 to gradually increase the lowering velocity of the holding unit 10 toward a target lowering velocity VD (see
In a graph of
When the holding unit 10 is lifted, the control unit 30 controls the lifting/lowering drive unit 23 to gradually increase the lifting velocity of the holding unit 10 toward a target lifting velocity VU (see
In a graph of
A winding-up diameter R (see
If the rotational velocity of the pulleys 21 is made constant in the constant velocity lifting operation, the lifting velocity of the holding unit 10 during the constant velocity lifting operation increases with the gradual increase in the winding-up diameter R. As a result, as illustrated in comparative example of
In
In
In comparative example illustrated in
As described above, when the rotational velocity of the pulleys 21 is made constant in the constant velocity lowering operation, a large change in the acceleration is likely to occur in the holding unit 10 in switching from the accelerated lowering operation to the constant velocity lowering operation, and, when the rotational velocity of the pulleys 21 is made constant in the constant velocity lifting operation, a large change in the acceleration is likely to occur in the holding unit 10 in switching from the constant velocity lifting operation to the decelerated lifting operation. In view of this point, as illustrated in
In this embodiment, the control unit 30 controls the lifting/lowering drive unit 23 to gradually decrease the rotational velocity (absolute value) of the pulleys 21 in response to the gradual increase in the winding-up diameter R by the winding-up in the constant velocity lifting operation as illustrated in
In
In
In this embodiment, the control unit 30 controls the lifting/lowering drive unit 23 to rotate the pulleys 21 according to the command subjected to the moving averaging processing described above. More specifically, in this embodiment, when the lowering velocity and the lifting velocity of the holding unit 10 are changed, the control unit 30 generates the reference velocity command according to the temporal velocity change pattern (pattern of the velocity change over time) (herein, rotational velocity of the pulleys 21) such that the acceleration (herein, rotational acceleration of the pulleys 21) changes stepwise. Herein, the acceleration also includes the deceleration (negative acceleration). Then, the control unit 30 generates the moving average command obtained by calculating the moving average of the reference velocity command in the set period, and controls the lifting/lowering drive unit 23 based on the moving average command. The moving average command is generated based on time series data of the reference velocity commands in the set period. The control unit 30 controls the lifting/lowering drive unit 23 by position control based on a position command (e.g., position command generated by integrating the moving average command) generated from the moving average command or controls the lifting/lowering drive unit 23 by velocity control based on the moving average command, for example.
In the constant velocity lowering operation, the rotational velocity of the pulleys 21 may be gradually increased such that the lowering velocity of the holding unit 10 in the constant velocity lowering operation becomes constant. In the examples illustrated in
When the holding unit 10 is lowered, the unwinding acceleration of the belts 22 from the pulleys 21 is prevented from exceeding the gravitational acceleration, so that the generation of the vibration of the holding unit 10 by loosening of the belts 22 can be avoided. Herein, the unwinding acceleration of the belts 22 from pulleys 21 is determined according to the rotational acceleration and the winding-up diameter R of the pulleys 21. In view of this point, a configuration is preferable in which, when the holding unit 10 is lowered, the control unit 30 controls the rotational acceleration of the pulleys 21 such that the unwinding acceleration of the belts 22 from the pulleys 21 does not exceed the gravitational acceleration according to the winding-up diameter R at the start of the lowering of the holding unit 10 (in other words, such that a state in which no tension is applied to the belts 22 is avoided), for example.
When the rotational acceleration of the pulleys 21 is controlled such that the unwinding acceleration of the belts 22 from the pulleys 21 does not exceed the gravitational acceleration as described above, a configuration is preferable in which the control unit 30, when the holding unit 10 is lowered, controls the lifting/lowering drive unit 23 to gradually increase the rotational acceleration of the pulleys 21 within a range in which the unwinding acceleration of the belts 22 from the pulleys 21 does not exceed the gravitational acceleration in a period in which the lowering velocity of the holding unit 10 is gradually increased toward the target lowering velocity VD (i.e., execution period of the accelerated lowering operation) in response to the gradual decrease in the winding-up diameter R by the unwinding, for example. By controlling the lifting/lowering drive unit 23 as described above, the holding unit 10 can be quickly lowered while avoiding the generation of the vibration of the holding unit 10 by the loosening of the belts 22.
When the holding unit 10 holds the article 2, the tension applied to the belts 22 changes according to the weight of the article 2. Considering this point, a configuration is preferable in which the control unit 30, when the holding unit 10 is lowered, controls the lifting/lowering drive unit 23 such that a driving force of rotating the pulleys 21 to the side where the lifting/lowering drive unit 23 lowers the holding unit 10 does not exceed a load acting on the belts 22 by the weight of the article 2, for example. By controlling the lifting/lowering drive unit 23 considering the weight of the article 2 as described above, the pulleys 21 can be rotated to avoid the state in which no tension is applied to the belts 22.
(1) The above-described embodiments give the description using the configuration in which, when the lowering velocity and the lifting velocity of the holding unit 10 are changed, the control unit 30 generates the reference velocity command according to the temporal velocity change pattern in which the acceleration changes stepwise, and generates the moving average command obtained by calculating the moving average of the reference velocity command in the set period, and controls the lifting/lowering drive unit 23 based on the moving average command as an example. However, this disclosure is not limited to such a configuration, and for example, a configuration may be acceptable in which the control unit 30 controls the lifting/lowering drive unit 23 based on the reference velocity command.
(2) In the above-described embodiments, the description is given using the configuration in which the article lifting/lowering apparatus 1 is movable in the horizontal direction as an example. However, this disclosure is not limited to such a configuration, and a configuration may be acceptable in which the article lifting/lowering apparatus 1 is immovable in the horizontal direction.
(3) The configuration disclosed in each embodiment described above can also be applied in combination with the configurations disclosed in the other embodiments (including a combination of the embodiments described as the other embodiments) insofar as no contradiction occurs. Also with respect to the other configurations, the embodiments disclosed in this specification are merely examples in all respects. Therefore, various modifications can be made as appropriate without departing from the gist of the present disclosure.
Hereinafter, the outline of the article lifting/lowering apparatus described above is described.
The article lifting/lowering apparatus includes: the holding unit configured to hold the article; the lifting/lowering device configured to lift and lower the holding unit; and the control unit configured to control the lifting/lowering device, in which the lifting/lowering device includes: the pulleys, the belts wound around the pulleys to be freely wound-up and unwound; and the drive unit configured to rotationally drive the pulleys, and is configured to lower the holding unit by unwinding the belts from the pulleys and lift the holding unit by winding-up the belts around the pulleys in a state in which the holding unit is suspended by the belts, and the control unit is configured to, when the holding unit is lowered, control the drive unit to (i) gradually increase the lowering velocity of the holding unit toward the target lowering velocity, (ii) perform the constant velocity lowering operation of maintaining the lowering velocity of the holding unit at the target lowering velocity, and then (iii) gradually decrease the lowering velocity of the holding unit from the target lowering velocity to stop the holding unit, and the control unit is configured to, in the constant velocity lowering operation, control the drive unit to gradually increase the rotational velocity of the pulleys in response to a gradual decrease in the diameter of the outer surfaces of the belts wound-up around the pulleys by the unwinding.
According to this configuration, considering that the winding-up diameter, which is the diameter of the outer surfaces of the belts wound around the pulleys, gradually decreases by the unwinding of the belts from the pulleys, the rotational velocity of the pulleys in the constant velocity lowering operation can be increased in response to the gradual decrease in the winding-up diameter. Therefore, as compared with the case where the rotational velocity of the pulleys is made constant in the constant velocity lowering operation, the change in the lowering velocity of the holding unit during the constant velocity lowering operation can be suppressed to a low degree. As a result, the change in the acceleration of the holding unit in switching from the accelerated lowering operation to the constant velocity lowering operation can be suppressed to a low degree. Thus, the vibration acting on the holding unit and the article held by the holding unit in the switching is easily suppressed to a low degree.
Herein, when the holding unit is lifted, the control unit preferably controls the drive unit to gradually increase the lifting velocity of the holding unit toward the target lifting velocity, perform the constant velocity lifting operation of maintaining the lifting velocity of the holding unit at the target lifting velocity, and then gradually decreases the lifting velocity of the holding unit from the target lifting velocity to stop the holding unit, and, in the constant velocity lifting operation, to gradually decrease the rotational velocity of the pulleys in response to the gradual increase in the diameter of the outer surfaces of the belts wound-up around the pulleys by the winding-up.
When the holding unit is lifted, it is conceivable to perform the accelerated lifting operation of gradually increasing the lifting velocity of the holding unit toward the target lifting velocity, perform the constant velocity lifting operation of maintaining the lifting velocity of the holding unit at the target lifting velocity, and then perform the decelerated lifting operation of gradually decreasing the lifting velocity of the holding unit from the target lifting velocity to stop the holding unit. When the holding unit is lifted as described above, the lifting velocity of the holding unit in the constant velocity lifting operation increases with an increase in the winding-up diameter if the rotational velocity of the pulleys is made constant in the constant velocity lifting operation. As a result, the lifting velocity of the holding unit decreases immediately after the lifting velocity has increased (in other words, decelerating immediately after accelerating) in switching from the constant velocity lifting operation to the decelerated lifting operation, and thus a large change in the acceleration occurs in the holding unit, so that the vibration acting on the holding unit and the article held by the holding unit is likely to increase.
In this point, according to this configuration, considering that the winding-up diameter gradually increases by the winding-up of the belts around the pulleys, the rotational velocity of the pulleys in the constant velocity lifting operation can be decreased in response to the gradual increase in the winding-up diameter. Therefore, as compared with the case where the rotational velocity of the pulley is made constant in the constant velocity lifting operation, the change in the lifting velocity of the holding unit during the constant velocity lifting operation can be suppressed to a low degree. As a result, the change in the acceleration of the holding unit in switching from the constant velocity lifting operation to the decelerated lifting operation can be suppressed to a low degree. Thus, the vibration acting on the holding unit and the article held by the holding unit in the switching is easily suppressed to a low degree.
When the holding unit is lowered, the control unit preferably controls the drive unit to gradually increase the rotational acceleration of the pulleys such that the unwinding acceleration of the belts from the pulleys does not exceed the gravitational acceleration in response to the gradual decrease in the diameter of the outer surfaces of the belts wound-up around the pulleys by the unwinding in the period of gradually increasing the lowering velocity of the holding unit toward the target lowering velocity.
According to this configuration, in the execution period of the accelerated lowering operation described above, the rotational acceleration of the pulleys can be increased in response to the gradual decrease in the winding-up diameter insofar as the state in which no tension is applied to the belts is avoided. Therefore, the holding unit can be quickly lowered while avoiding the generation of the vibration of the holding unit by the loosening of the belts.
When the holding unit is lowered, the control unit preferably controls the rotational acceleration of the pulleys such that the unwinding acceleration of the belts from the pulleys does not exceed the gravitational acceleration according to the diameter of the outer surfaces of the belts wound-up around the pulleys at the start of the lowering of the holding unit.
According to this configuration, the rotational acceleration of the pulleys when the holding unit is lowered can be controlled to avoid the state in which no tension is applied to the belts according to the winding-up diameter at the start of the lowering of the holding unit. Therefore, the holding unit can be appropriately lowered while avoiding the generation of the vibration of the holding unit by the loosening of the belts.
When the holding unit is lowered, the control unit preferably controls the drive unit such that the driving force of rotating the pulleys to the side where the drive unit lowers the holding unit does not exceed a load acting on the belts by the weight of the article.
According to this configuration, the rotational acceleration of the pulleys when the holding unit is lowered can be controlled to avoid the state in which no tension is applied to the belts considering the load acting on the belts by the weight of the article. Therefore, the holding unit can be appropriately lowered while avoiding the generation of the vibration of the holding unit by the loosening of the belts.
When the lowering velocity and the lifting velocity of the holding unit are changed, the control unit preferably generates the reference velocity command according to the temporal velocity change pattern in which the acceleration changes stepwise, and generates the moving average command obtained by calculating the moving average of the reference velocity command in the set period, and controls the drive unit based on the moving average command.
According to this configuration, when the holding unit is lowered, the change rate (jerk) of the acceleration of the holding unit in switching from the accelerated lowering operation to the constant velocity lowering operation or in switching from the constant velocity lowering operation to the decelerated lowering operation can be suppressed to a degree lower than that in the case of controlling the drive unit based on the reference velocity command. When the holding unit is lifted, the change rate of the acceleration of the holding unit in switching from the accelerated lifting operation to the constant velocity lifting operation or in switching from the constant velocity lifting operation to the decelerated lifting operation can be suppressed to a degree lower than that in the case of controlling the drive unit based on the reference velocity command. Therefore, the vibration acting on the holding unit and the article held by the holding unit in switching between the operations to a degree lower than that in the case of controlling the drive unit based on the reference velocity command.
The article lifting/lowering apparatus according to this disclosure may be able to exhibit at least one of the above-described effects.
Number | Date | Country | Kind |
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2022-087757 | May 2022 | JP | national |