Asymmetric input intensity hexagonal homogenizer

Information

  • Patent Grant
  • 12253685
  • Patent Number
    12,253,685
  • Date Filed
    Wednesday, September 16, 2020
    4 years ago
  • Date Issued
    Tuesday, March 18, 2025
    a month ago
  • Inventors
  • Original Assignees
    • LEONARDO ELECTRONICS US INC. (Tucson, AZ, US)
  • Examiners
    • Beatty; Collin X
    Agents
    • HAYES SOLOWAY P.C.
Abstract
An optical beam homogenizer includes a first hexagonal microlens array having a plurality of hexagonal lenslets. Each lenslet has a hexagonal clear aperture. A second hexagonal microlens array is spaced away from the first hexagonal microlens array at a focal length of the first hexagonal microlens array and has a plurality of hexagonal lenslets. Each lenslet in the second hexagonal microlens array has a non-hexagonal clear aperture.
Description
FIELD OF THE DISCLOSURE

The present disclosure relates generally to optical beam homogenizers and more particularly to asymmetric beam homogenizers.


BACKGROUND OF THE DISCLOSURE

Optical systems often produce beams having heterogeneous intensity distributions. The intensity distributions of the beams may be heterogeneous in several ways. For example, the intensity distribution for a circular beam may be asymmetric along different axes of the beam, with greater divergence along one axis than along the other. As another example, the intensity distribution may be uneven along the radial footprint of the beam—for instance, in a Gaussian beam—with greater intensity closer to the center of the beam and reduced intensity going radially outward. Additionally, some beams develop an asymmetric intensity distribution after collimation. For instance, for high power laser diode arrays, the intensity distribution is characteristically asymmetric after fast axis collimation.


Beam homogenizers are often used to correct heterogeneous beams to a suitable degree of homogeneity. After a beam is generated, it may be conditioned by expanding or focusing the beam in order to distribute the intensity more evenly. However, beam conditioning systems can add complexity, cost, and size to an optical system. Moreover, the angular acceptance of typical homogenizers is limited by the output shape. Thus, an input beam having an asymmetric intensity distribution may exit the homogenizer having an output outside of the desired output shape.


Thus, a heretofore unaddressed need exists in the industry to address the aforementioned deficiencies and inadequacies.


SUMMARY OF THE DISCLOSURE

Embodiments of the present disclosure provide an apparatus for homogenizing an optical beam. Briefly described, in architecture, one embodiment of the apparatus, among others, can be implemented as follows. An optical beam homogenizer includes a first hexagonal microlens array having a plurality of hexagonal lenslets. Each lenslet has a hexagonal clear aperture. A second hexagonal microlens array is spaced away from the first hexagonal microlens array at a focal length of the first hexagonal microlens array and has a plurality of hexagonal lenslets. Each lenslet in the second hexagonal microlens array has a non-hexagonal clear aperture.


In one aspect of the apparatus, each lenslet in the second hexagonal microlens array has a rectangular clear aperture.


In another aspect of the apparatus, each lenslet in the second hexagonal microlens array has an elliptical clear aperture.


In another aspect of the apparatus, for each lenslet in the second hexagonal microlens array, a ratio of an output width to an output height of the clear apertures is determined by an angle of the first hexagonal microlens array relative to the second hexagonal microlens array. In a particular aspect, the ratio is about 3.464 to 1. In another particular aspect, the ratio is about 8.083 to 1. In another particular aspect, the ratio is about 15.011 to 1.


In another aspect of the apparatus, the lenslets in the first hexagonal microlens array are concentric with the lenslets in the second hexagonal microlens array.


In another aspect of the apparatus, the lenslets in the first hexagonal microlens array are nonconcentric with the lenslets in the second hexagonal microlens array.


In another aspect of the apparatus, light refracted through a lenslet in the first hexagonal microlens array propagates through a plurality of lenslets in the second hexagonal microlens array.


The present disclosure also can be viewed as providing methods of homogenizing an intensity distribution of an optical beam. In this regard, one embodiment of such a method, among others, can be broadly summarized by the following steps: providing a first hexagonal microlens array having a plurality of hexagonal lenslets, wherein each lenslet has a hexagonal clear aperture; providing a second hexagonal microlens array spaced away from the first hexagonal microlens array at a focal length of the first hexagonal microlens array and having a plurality of hexagonal lenslets, wherein each lenslet in the second hexagonal microlens array has a non-hexagonal clear aperture; and directing the optical beam into the first hexagonal microlens array from within an acceptance angle and through the second hexagonal microlens array to form a hexagonal output distribution of the optical beam, whereby the intensity distribution of the beam is homogenized.


In one aspect of the method, each lenslet in the second hexagonal microlens array has a rectangular clear aperture.


In another aspect of the method, each lenslet in the second hexagonal microlens array has an elliptical clear aperture.


In another aspect of the method, for each lenslet in the second hexagonal microlens array, a ratio of an output width to an output height of the clear apertures is determined by an angle of the first hexagonal microlens array relative to the second hexagonal microlens array. In a particular aspect, the ratio is about 3.464 to 1. In another particular aspect, the ratio is about 8.083 to 1. In another particular aspect, the ratio is about 15.011 to 1.


In another aspect of the method, the lenslets in the first hexagonal microlens array are concentric with the lenslets in the second hexagonal microlens array.


In another aspect of the method, the lenslets in the first hexagonal microlens array are nonconcentric with the lenslets in the second hexagonal microlens array.


In another aspect of the method, light refracted through a lenslet in the first hexagonal microlens array propagates through a plurality of lenslets in the second hexagonal microlens array.


Other systems, methods, features, and advantages of the present disclosure will be or become apparent to one with skill in the art upon examination of the following drawings and detailed description. It is intended that all such additional systems, methods, features, and advantages be included within this description, be within the scope of the present disclosure, and be protected by the accompanying claims.





BRIEF DESCRIPTION OF THE DRAWINGS

Many aspects of the disclosure can be better understood with reference to the following drawings. The components in the drawings are not necessarily to scale, emphasis instead being placed upon clearly illustrating the principles of the present disclosure. Moreover, in the drawings, like reference numerals designate corresponding parts throughout the several views.



FIG. 1 is an isometric view of the optical beam homogenizer, in accordance with a first exemplary embodiment of the present disclosure.



FIG. 2 is a cross-sectional side view illustration of the optical beam homogenizer of FIG. 1, in accordance with the first exemplary embodiment of the present disclosure.



FIG. 3A is a graph of the irradiance of an exemplary beam directed into the optical beam homogenizer, in accordance with the first exemplary embodiment of the present disclosure.



FIG. 3B is a graph of the output exitance of the beam of FIG. 3A, in accordance with the first exemplary embodiment of the present disclosure.



FIG. 3C is a graph of the input intensity of the beam of FIG. 3A, in accordance with the first exemplary embodiment of the present disclosure.



FIG. 3D is a graph of the output intensity of the beam of FIG. 3A, in accordance with the first exemplary embodiment of the present disclosure.



FIG. 4 is a plot showing the output intensity of a typical prior art homogenizer.



FIG. 5A-5C are diagrammatic illustrations showing the clear apertures of the first hexagonal microlens array in relation to the clear apertures of the second hexagonal microlens array.



FIG. 6 is a flowchart illustrating a method of homogenizing an intensity distribution of an optical beam, in accordance with the first exemplary embodiment of the present disclosure.





DETAILED DESCRIPTION


FIG. 1 is an isometric view of the optical beam homogenizer 1, in accordance with a first exemplary embodiment of the present disclosure. The optical beam homogenizer 1 (hereinafter “homogenizer”) 1 includes a first hexagonal microlens array 10 having a plurality of hexagonal lenslets. Each lenslet has a hexagonal clear aperture. A second hexagonal microlens array 20 is spaced away from the first hexagonal microlens array 10 at a focal length of the first hexagonal microlens array 10 and has a plurality of hexagonal lenslets. Each lenslet in the second hexagonal microlens array has a non-hexagonal clear aperture.


The first hexagonal microlens array (hereinafter “first array”) 10 may be a microlens array with each lenslet having a hexagonal clear aperture. The first array 10 may be made from any suitable material, including fused silica, polymer, glass, or any combination thereof. The first array 10 may be any suitable size and may contain any suitable number of lenslets for homogenizing the input beam 30 from an optical system. The lenslets may be arranged in a hexagonal array. In one example, the lenslets may be diffraction limited. In another example, the lenslets may have any suitable pitch, focal lengths, or ratios for the desired application. In one particular example, the pitch of the lenslets may be between 0.3 mm and 2 mm. In another particular example, the focal length may be between 1 mm and 50 mm. The divergence angle of each lenslet may be a function of the pitch and focal length of each lenslet.


The second hexagonal microlens array 20 (hereinafter “second array”) may be spaced away from the first array 10 at a distance corresponding to the focal length of the first array 10. In one example, the second array 20 may be a microlens array with each lenslet having a non-hexagonal clear aperture. For instance, the clear apertures of each lenslet in the second array 20 may be rectangular or elliptical. This may allow a ratio of the output width to the output height of the clear apertures to be controllable according to the angular relation of the first and second arrays 10, 20. This is discussed in greater detail in FIGS. 5A-5C, below. The second array 20 may be made from any suitable material, including fused silica, polymer, glass, or any combination thereof. The second array 20 may be any suitable size and may contain any suitable number of lenslets for operation with the first array 10 and the input beam 30 from the optical system. In a preferred embodiment, the lenslets may be arranged in a hexagonal array, although in other embodiments, the lenslets can be rectangular or elliptical, and they are centered on the same grid as the first array, or concentric to the first array. In one example, the lenslets in the second array 20 may be diffraction limited and may have any suitable pitch, focal length, or ratio for the desired application. In one particular example, the pitch of the lenslets may be between 0.3 mm and 2 mm. In another particular example, the focal length may be between 1 mm and 50 mm. The divergence angle of each lenslet may be a function of the pitch and focal length of each lenslet.


An input beam 30 may be a beam propagating from an optical system (not shown) operating with the homogenizer 1. The input beam 30 may be directed into the first array 10 and through the homogenizer 1. The first array may project the input intensity distribution to each lenslet of the second array 20. This may divide the input beam 30 into a number of beamlets 32 corresponding to each of the lenslet in the first array 10. The second array 20 may project the irradiance distribution of each lenslet in the first array to the far field, creating a homogenous distribution in the far field.


The homogenizer 1 may be used with any suitable optical system requiring homogenization. For instance, high power laser diode arrays generally create beams having asymmetric intensity distributions. In another example, line-narrowed excimer lasers in the ultraviolet range may also benefit from homogenization. Particular applications may include projector illumination and industrial applications such as heat treatment. In another example, the homogenizer 1 may be used in applications requiring homogenized illumination, such as automotive headlight lighting.


In one example, the homogenizer 1 may include more than two microlens arrays. In another example, the homogenizer 1 may include the first and second microlens arrays 10, 20 in addition to other optical surfaces. For instance, the homogenizer 1 may include optical surfaces for beam conditioning before or after the microlens arrays 10, 20.



FIG. 2 is a cross-sectional side view illustration of the optical beam homogenizer 1 of FIG. 1, in accordance with the first exemplary embodiment of the present disclosure. The first array 10 may be in optical alignment with the second array 20. The second array 20 may be spaced away from the first array 10 at a focal length 200 of the first array 10. This may allow the light from the input beam 30 to be refracted through the first array 10 and into the second array 20. The first array 10 may include a plurality of lenslets 12 configured and oriented as described in FIG. 1. The second array 20 may include a plurality of lenslets 22 oriented and configured as described in FIG. 1. Light from the input beam 30 may be refracted by the lenslets 12 in the first array 10, creating a plurality of beamlets 32 corresponding to the lenslets 12. The beamlets 32 propagate to the lenslets 22 in the second array 20, where they are refracted to the far field as an improved homogenized beam.


The lenslets 12 in the first array 10 may project the input intensity distribution of the input beam 30 to the lenslets 22 in the second array 20. All of the power that passes through the clear aperture of each lenslet 22 in the second array 20 may be transferred to the hexagonal output intensity distribution. Moreover, the physical dimensions of the lenslets 22 in the second array 20 may determine the input intensity acceptance.



FIGS. 3A-3D show exemplary graphs of the radiant flux through the homogenizer 1. The graphs may refer to aspects of the homogenizer 1 as discussed relative to FIGS. 1-2, above.



FIG. 3A is a graph of the irradiance 310 of an exemplary beam directed into the optical beam homogenizer, in accordance with the first exemplary embodiment of the present disclosure. Many optical systems emit beams having Gaussian intensity distributions, where the intensity of the beam is significantly higher near the center of the beam. Additionally, the illuminated field may include zero-order hotspots or other areas on uneven, asymmetrical, or heterogeneous intensity distribution.



FIG. 3B is a graph of the output exitance 320 of the beam of FIG. 3A, in accordance with the first exemplary embodiment of the present disclosure. The second array 20 may project the irradiance distribution 310 from each lenslet 212 of the first array 10. The resultant shape of the output exitance 320 beam may be hexagonal in accordance with the shape and structure of the first array 10.



FIG. 3C is a graph of the input intensity 330 of the beam of FIG. 3A, in accordance with the first exemplary embodiment of the present disclosure. The input intensity 330 may be asymmetric with respect to the X and Y-axes, as is common in certain emitters and arrays. FIG. 3C shows an input beam 30 having a greater intensity distribution along the X-axis than along the Y-axis.



FIG. 3D is a graph of the output intensity 340 of the beam of FIG. 3A, in accordance with the first exemplary embodiment of the present disclosure. After propagating through the homogenizer 1, the input beam 30 has been reshaped and evenly distributed. The output intensity 340 is shown as a hexagon having a symmetric distribution relative to both the X and Y-axes.



FIG. 4 is a plot showing the output intensity 410 of a typical prior art homogenizer. The output shape of a typical prior art homogenizer using microlens arrays is the same as the angular acceptance of the first microlens array element in the homogenizer. When the intensity of the input beam is asymmetric with respect to the X and Y-axes, as shown in FIG. 3C, this may lead to an undesired intensity distribution at the far field. For instance, in FIG. 4, a portion of the output intensity 330 is shown in a hexagonal distribution that is symmetric about both axes. However, due to the asymmetric nature of the input intensity and the greater angular distribution of the beam along the X-axis, there is also a portion of the output intensity 410 lying outside of the desired hexagonal distribution. As shown in FIG. 4, this portion of the output intensity 410 results in uneven hexagonal distributions at greater angular displacement in the far field. Power outside the acceptance angle ends up outside of the desired output hexagonal intensity distribution 330.


As shown in FIG. 3D, the homogenizer 1 described herein overcomes this issue. The first and second arrays 10, 20 may have an asymmetric angular acceptance which may be different than the output intensity shape. Thus, asymmetric sources may be distributed evenly and symmetrically at the output.



FIG. 5A-5C are diagrammatic illustrations showing the clear apertures of the first hexagonal microlens array in relation to the clear apertures of the second hexagonal microlens array. FIGS. 5A-5C may refer to the various aspects of the homogenizer 1 discussed relative to FIGS. 1-4, above. The homogenizer 1 may use lenslets 12 arranged in a first hexagonal microlens array 10. The lenslets 12 may have hexagonal clear apertures 510. The hexagonally packed lenslets with hexagonal clear apertures 510 may receive light from an input source. Lenslets 22 arranged in a second hexagonal microlens array 20 may be hexagonally packed with non-hexagonal clear apertures. FIGS. 5A-5C show the lenslets 22 in the second hexagonal microlens array 20 having rectangular clear apertures 520.


A ratio of an output width to an output height of the clear apertures of the second hexagonal microlens array 20 is determined by an angle of the first hexagonal microlens array 10 relative to the second hexagonal microlens array 20. In FIG. 5A, the angle of the first hexagonal microlens array 10 relative to the second hexagonal microlens array 20 is 0°. The ratio of the width to the height may be determined by the following equations:






ratio
=

2


3



(



n
2

3

+
n
+
1

)








θ
=


tan

-
1





2

n



3

+

(

2
+
n

)








where n is the number of configurations and θ is the angular difference between the first and second hexagonal microlens arrays 10, 20.


Solving for n based on the angular difference of 0° in FIG. 5A gives a ratio of about 3.464:1. FIG. 5B is a diagram showing the first hexagonal microlens array 10 rotated at an angle of about 22.91° relative to the second hexagonal microlens array 20. The ratio based on this angular difference is about 8.083:1. FIG. 5C is a diagram showing the first hexagonal microlens array 10 rotated at an angle of about 34.9° relative to the second hexagonal microlens array 20. The ratio based on this angular difference is about 15.011:1.


The more asymmetric the input intensity is, the higher the ratio needed to homogenize the beam. For example, if the targeted homogenized output was a 3° hexagon and the input beam was 1°×8°, a 3.464:1 homogenizer may produce 42% of the power in the output homogenized beam. If a homogenizer having a ratio of 8.083:1 were used, the homogenizer may produce 100% of the power in the output homogenized beam.


The lenslets of the first hexagonal microlens array 10 may be concentric with the lenslets of the second hexagonal microlens array 20. In one example, the lenslets of the first hexagonal microlens array 10 may not be concentric with the lenslets of the second hexagonal microlens array 20. In one example, light refracted through one lenslet of the first hexagonal microlens array 10 may propagate through a plurality of lenslets of the second hexagonal microlens array 20.



FIG. 6 is a flowchart 600 illustrating a method of homogenizing an intensity distribution of an optical beam, in accordance with the first exemplary embodiment of the present disclosure. The method may be understood in reference to the homogenizer 1 and components described relative to FIGS. 1-5C, above. It should be noted that any process descriptions or blocks in flow charts should be understood as representing modules, segments, or steps that include one or more instructions for implementing specific logical functions in the process, and alternate implementations are included within the scope of the present disclosure in which functions may be executed out of order from that shown or discussed, including substantially concurrently or in reverse order, depending on the functionality involved, as would be understood by those reasonably skilled in the art of the present disclosure.


Step 610 includes providing a first hexagonal microlens array having a plurality of hexagonal lenslets, wherein each microlens has a hexagonal clear aperture. The first hexagonal microlens array may be the first array described relative to FIGS. 1-2, and may comprise hexagonal lenslets arranged in a hexagonal orientation.


Step 620 includes providing a second hexagonal microlens array spaced away from the first hexagonal microlens array at a focal length of the first hexagonal microlens array and having a plurality of hexagonal lenslets, wherein each lenslet in the second hexagonal microlens array has a non-hexagonal clear aperture. The second hexagonal microlens array may be the second array described relative to FIGS. 1-2, and may comprise hexagonally-packaged lenslets arranged in a hexagonal orientation. The clear aperture of each lenslet may be non-hexagonal, for instance, rectangular or elliptical. The second hexagonal microlens array may be spaced apart from the first hexagonal microlens array at a distance corresponding to the focal length of the first hexagonal microlens array.


Step 630 includes directing the optical beam into the first hexagonal microlens array from within an acceptance angle and through the second hexagonal microlens array to form a hexagonal output distribution of the optical beam, whereby the intensity distribution of the beam is homogenized. The acceptance angle may be asymmetric with respect to the X and Y-axes. For example, the acceptance in the X-axis direction may be greater than in the Y-axis direction. An input beam having any intensity distribution, whether symmetrical or asymmetrical, may be directed into the first hexagonal microlens array and may be refracted by the lenslets to form a plurality of beamlets. The beamlets may be directed by the first hexagonal microlens array into the second hexagonal microlens array. The lenslets in the second hexagonal microlens array may refract the beamlets out of the homogenizer to produce a homogenous far field beam with a hexagonal shape and improved intensity distribution compared to the input beam.


The method may further include any other features, components, or functions disclosed relative to any other figure of this disclosure.


It should be emphasized that the above-described embodiments of the present disclosure, particularly, any “preferred” embodiments, are merely possible examples of implementations, merely set forth for a clear understanding of the principles of the disclosure. Many variations and modifications may be made to the above-described embodiment(s) of the disclosure without departing substantially from the spirit and principles of the disclosure. All such modifications and variations are intended to be included herein within the scope of this disclosure and the present disclosure and protected by the following claims.

Claims
  • 1. An optical beam homogenizer, comprising: a first hexagonal microlens array having a plurality of hexagonal lenslets, wherein each lenslet has a hexagonal clear aperture; anda second hexagonal microlens array spaced away from the first hexagonal microlens array at a focal length of the first hexagonal microlens array and having a plurality of hexagonal lenslets, wherein each lenslet in the second hexagonal microlens array has a non-hexagonal clear aperture of a different shape than the first hexagonal clear aperture,wherein the hexagonal lenslets of the first hexagonal microlens array are rotatable relative to the hexagonal lenslets in the second hexagonal microlens array to adjust a ratio of an output width to an output height of a clear aperture of the lenslets of the second hexagonal microlens array, wherein an angle between the first hexagonal microlens array and the second hexagonal microlens array defines the output width and the output height of the clear apertures, and wherein the angle between the first hexagonal microlens array and the second hexagonal microlens array corresponds to an asymmetry of an input beam.
  • 2. The optical beam homogenizer of claim 1, wherein each lenslet in the second hexagonal microlens array has a rectangular clear aperture.
  • 3. The optical beam homogenizer of claim 1, wherein each lenslet in the second hexagonal microlens array has an elliptical clear aperture.
  • 4. The optical beam homogenizer of claim 1, wherein the ratio has a value selected from the group consisting of 3.464 to 1, 8.083 to 1, and 15.011 to 1.
  • 5. The optical beam homogenizer of claim 1, wherein the lenslets in the first hexagonal microlens array are nonconcentric with the lenslets in the second hexagonal microlens array.
  • 6. The optical beam homogenizer of claim 1, wherein the lenslets in the first array and/or in the second array have a pitch of between 0.3 mm and 2 mm.
  • 7. The optical beam homogenizer of claim 1, wherein the lenslets in the first array and/or in the second array have a focal length of between 1 mm and 50 mm.
  • 8. The optical beam homogenizer of claim 1, wherein the first hexagonal microlens array is rotatable between a range of 0° and 34.9°.
  • 9. The optical beam homogenizer of claim 1, wherein the angle of the first hexagonal microlens array is selected from the group consisting of 0°, 22.91°, and 34.9°.
  • 10. A method of homogenizing an intensity distribution of an optical beam, comprising the following steps: providing a first hexagonal microlens array having a plurality of hexagonal lenslets, wherein each lenslet has a hexagonal clear aperture;providing a second hexagonal microlens array spaced away from the first hexagonal microlens array at a focal length of the first hexagonal microlens array and having a plurality of hexagonal lenslets, wherein each lenslet in the second hexagonal microlens array has a non-hexagonal clear aperture of a different shape than the first hexagonal clear aperture;rotating the hexagonal lenslets of the first hexagonal microlens array relative to the second hexagonal microlens array to adjust a ratio of an output width to an output height of the clear aperture of the lenslets of the second hexagonal microlens array, whereby an angle between the first hexagonal microlens array and the second hexagonal microlens array defines the output width and the output height of the clear apertures, and wherein the angle between the first hexagonal microlens array and the second hexagonal microlens array corresponds to an asymmetry of an input beam; anddirecting the optical beam into the first hexagonal microlens array from within an acceptance angle and through the second hexagonal microlens array to form a hexagonal output distribution of the optical beam, whereby the intensity distribution of the beam is homogenized.
  • 11. The method of claim 10, wherein each lenslet in the second hexagonal microlens array has a rectangular clear aperture.
  • 12. The method of claim 10, wherein each lenslet in the second hexagonal microlens array has an elliptical clear aperture.
  • 13. The method of claim 10, wherein the ratio has a value selected from the group consisting of 3.464 to 1, 8.083 to 1, and 15.011 to 1.
  • 14. The method of claim 10, wherein the lenslets in the first hexagonal microlens array are nonconcentric with the lenslets in the second hexagonal microlens array.
  • 15. The method of claim 10, wherein the lenslets in the first array and/or in the second array have a pitch of between 0.3 mm and 2 mm.
  • 16. The method of claim 10, wherein the lenslets in the first array and/or in the second array have a focal length of between 1 mm and 50 mm.
CROSS REFERENCE TO RELATED APPLICATION

This application claims benefit to U.S. Provisional Patent Application Ser. No. 62/901,078, filed Sep. 16, 2019, the contents of which are incorporated herein by reference.

US Referenced Citations (175)
Number Name Date Kind
3711939 Stoll Jan 1973 A
3805375 LaCombe et al. Apr 1974 A
3936322 Blum et al. Feb 1976 A
4092614 Sakuma et al. May 1978 A
4156879 Lee May 1979 A
4306278 Fulton et al. Dec 1981 A
4653056 Baer et al. Mar 1987 A
4767674 Shirai Aug 1988 A
4803691 Scifres et al. Feb 1989 A
4813762 Leger Mar 1989 A
4881237 Donnelly Nov 1989 A
4903274 Taneya et al. Feb 1990 A
4947401 Hinata et al. Aug 1990 A
4980893 Thornton et al. Dec 1990 A
4993148 Adachi Feb 1991 A
5008737 Burnham et al. Apr 1991 A
5027359 Leger Jun 1991 A
5031187 Orenstein et al. Jul 1991 A
5033060 Leger Jul 1991 A
5040187 Karpinski Aug 1991 A
5045972 Supan Sep 1991 A
5060237 Peterson Oct 1991 A
5061974 Onodera et al. Oct 1991 A
5099488 Ahrabi et al. Mar 1992 A
5102825 Brennan et al. Apr 1992 A
5105429 Mundinger et al. Apr 1992 A
5105430 Mundinger et al. Apr 1992 A
5128951 Karpinski Jul 1992 A
5139609 Fields Aug 1992 A
5202706 Hasegawa Apr 1993 A
5212706 Jain May 1993 A
5212707 Heidel et al. May 1993 A
5253260 Palombo Oct 1993 A
5284790 Karpinski Feb 1994 A
5298762 Ou Mar 1994 A
5305344 Patel Apr 1994 A
5311530 Wagner et al. May 1994 A
5311535 Karpinski May 1994 A
5325384 Herb et al. Jun 1994 A
5394426 Joslin Feb 1995 A
5418799 Tada May 1995 A
5440577 Tucker Aug 1995 A
5450430 Chang Sep 1995 A
5455738 Montesano et al. Oct 1995 A
5497391 Paoli Mar 1996 A
5504767 Jamison et al. Apr 1996 A
5521931 Biegelsen et al. May 1996 A
5526373 Karpinski Jun 1996 A
5568498 Nilsson Oct 1996 A
5592333 Lweis Jan 1997 A
5593815 Ahn Jan 1997 A
5627850 Irwin et al. May 1997 A
5644586 Kawano et al. Jul 1997 A
5661747 Hiiro Aug 1997 A
5679963 Klem et al. Oct 1997 A
5764675 Juhala Jun 1998 A
5778020 Gokay Jul 1998 A
5783316 Colella et al. Jul 1998 A
5793784 Wagshul Aug 1998 A
5802092 Endriz Sep 1998 A
5812573 Shiomi et al. Sep 1998 A
5835515 Huang Nov 1998 A
5835518 Mundinger et al. Nov 1998 A
5848083 Haden et al. Dec 1998 A
5856990 Nilsson Jan 1999 A
5887096 Du Mar 1999 A
5909458 Freitas et al. Jun 1999 A
5913108 Stephens et al. Jun 1999 A
5923692 Staskus et al. Jul 1999 A
5930279 Apollonov et al. Jul 1999 A
5987045 Albares Nov 1999 A
6031285 Nishibayashi Feb 2000 A
6101208 Gokay Aug 2000 A
6208677 Moyer Mar 2001 B1
6252179 Lauffer Jun 2001 B1
6281471 Smart Aug 2001 B1
6295307 Hoden et al. Sep 2001 B1
6352873 Hoden Mar 2002 B1
6396857 Labranche May 2002 B1
6400513 Southwell Jun 2002 B1
6424667 Endriz et al. Jul 2002 B1
6480514 Lorenzen et al. Nov 2002 B1
6493148 Anikitchev Dec 2002 B1
6493373 Boucart Dec 2002 B1
6535533 Lorenzen et al. Mar 2003 B2
6535541 Boucart et al. Mar 2003 B1
6542531 Sirbu Apr 2003 B2
6727117 McCoy Apr 2004 B1
6865200 Takigawa et al. Mar 2005 B2
7016383 Rice Mar 2006 B2
7286359 Khbeis et al. Oct 2007 B2
7359413 Tzuk et al. Apr 2008 B2
7529286 Gokay et al. May 2009 B2
7539232 Corcoran May 2009 B1
7580189 Urey Aug 2009 B2
7660335 Thiagarajan et al. Feb 2010 B2
7864825 Thiagarajan et al. Jan 2011 B2
7944955 Thiagarajan et al. May 2011 B2
8017935 Staszewski et al. Sep 2011 B2
8653550 Mastro Feb 2014 B2
8664524 Gamett Mar 2014 B2
8848753 Koenning Sep 2014 B2
9256073 Chann Feb 2016 B2
10120149 Mathai Nov 2018 B1
11108214 Kobayashi Aug 2021 B2
11327325 Li et al. May 2022 B2
20010017870 Hayakawa Aug 2001 A1
20020001864 Ishikawa et al. Jan 2002 A1
20020009106 Miyokawa et al. Jan 2002 A1
20020014631 Iwata Feb 2002 A1
20020025096 Wang et al. Feb 2002 A1
20020086483 Kim Jul 2002 A1
20020086486 Tanaka Jul 2002 A1
20030116767 Kneissl et al. Jun 2003 A1
20040037340 Yanagisawa Feb 2004 A1
20040052280 Rice Mar 2004 A1
20040082112 Stephens Apr 2004 A1
20040125459 Tanitsu et al. Jul 2004 A1
20040264521 Ness et al. Dec 2004 A1
20050087849 Morita Apr 2005 A1
20050095755 Nakata et al. May 2005 A1
20050232628 Von Freyhold et al. Oct 2005 A1
20050254539 Klimek Nov 2005 A1
20060011938 Debray Jan 2006 A1
20060045144 Karsen Mar 2006 A1
20060197100 Shen Sep 2006 A1
20070116079 Giniunas et al. May 2007 A1
20070273957 Zalevsky Nov 2007 A1
20080089380 Konig et al. Apr 2008 A1
20080123710 Brick May 2008 A1
20080130223 Nakamura Jun 2008 A1
20080170598 Kireev Jul 2008 A1
20080213710 Schultz Sep 2008 A1
20080259983 Trococoli Oct 2008 A1
20090015185 Yoshida Jan 2009 A1
20090090932 Bour et al. Apr 2009 A1
20100012188 Garnett Jan 2010 A1
20110051759 Telford Mar 2011 A1
20110063701 Yankov Mar 2011 A1
20110103409 Sipes May 2011 A1
20110241549 Wootton Oct 2011 A1
20110280269 Ghang-Hasnain Nov 2011 A1
20120043875 Seo Feb 2012 A1
20120114001 Fang et al. May 2012 A1
20120153254 Mastro Jun 2012 A1
20120252144 Schroeder et al. Oct 2012 A1
20120287958 Lell Nov 2012 A1
20130016752 Lell Jan 2013 A1
20130112667 Holmgren May 2013 A1
20130259074 Newman Oct 2013 A1
20130271959 Woodgate Oct 2013 A1
20140064305 Sipes Mar 2014 A1
20140084452 Nagamatsu Mar 2014 A1
20140293554 Shashkov Oct 2014 A1
20150063387 Joseph et al. Mar 2015 A1
20150162478 Fafard Jun 2015 A1
20150207011 Gamett Jul 2015 A1
20150207294 Brick et al. Jul 2015 A1
20150255960 Kanskar Sep 2015 A1
20160014878 Kilhenny Jan 2016 A1
20160147025 Sakamoto May 2016 A1
20160192473 Kasashima Jun 2016 A1
20160366757 Kobayashi Dec 2016 A1
20170051884 Raring Feb 2017 A1
20170288367 Taniguchi Oct 2017 A1
20170338194 Gittemeier Nov 2017 A1
20180152000 Crawford et al. May 2018 A1
20180254606 McElhinney et al. Sep 2018 A1
20180261975 Pavlov Sep 2018 A1
20180335582 Ishige Nov 2018 A1
20180337513 Crawford et al. Nov 2018 A1
20200027839 Hino Jan 2020 A1
20200028332 Kobayashi Jan 2020 A1
20200075529 Otsuka Mar 2020 A1
20210080736 Magness Mar 2021 A1
Foreign Referenced Citations (17)
Number Date Country
2 208 370 Jul 2005 CA
207352292 May 2018 CN
968430 Feb 1958 DE
19518177 Nov 1996 DE
10062579 Jun 2001 DE
102008040374 Jan 2010 DE
1439618 Jul 2004 EP
1452614 Sep 2004 EP
1811617 Jul 2007 EP
1887666 Feb 2008 EP
2110903 Oct 2009 EP
2305400 Apr 2011 EP
2902532 Dec 2007 FR
2002111058 Apr 2002 JP
WO2008006505 Jan 2008 WO
WO-2013175549 Nov 2013 WO
WO-2019063733 Apr 2019 WO
Non-Patent Literature Citations (90)
Entry
Computer Translation of WO2019063733 (Year: 2019).
Machine translation of FP2902532 (Year: 2007).
Machine Translation of WO2013175549 (Year: 2013).
Official Action issued in corresponding U.S. Appl. No. 16/539,889, dated May 11, 2021, 21 pages.
International Preliminary Report on Patentability issued in International Application Serial No. PCT/US2019/046410, dated Feb. 16, 2021, 6 pages.
European Search Report issued in corresponding European Patent Application Serial No. EP 20 19 646.6, dated Feb. 16, 2021, 7 pages.
Chinese Official Action issued in related Chinese Patent Application Serial No. 201780073945.8, dated Sep. 21, 2020 (16 pages) with translation.
Official Action issued in Applicants' corresponding EPO Application Serial No. 07117048.7-2222, dated Aug. 6, 2009, 4 pages.
Official Action issued in Applicants' corresponding EPO Application Serial No. 07117048.7-2222, dated Nov. 20, 2008, 9 pages.
Intention to Grant issued in Applicants' corresponding EPO Application Serial No. 09157643.9, dated Apr. 7, 2017, 6 pages.
Official Action issued in Applicants' corresponding EPO Application Serial No. 09157643.9, dated Aug. 22, 2016, 5 pages.
Official Action issued in Applicants' corresponding EPO Application Serial No. 09157643.9, dated Apr. 16, 2014, 2 pages.
European Search Report issued in application No. 09157643.9, dated Aug. 9, 2013 (7 pgs).
European Search Report issued in application No. 20150730.8, dated Jul. 3, 2020 (8 pgs).
Intention to Grant issued in Applicants' corresponding EPO Application Serial No. 16172620.3, dated Jul. 19, 2019, 3 pages.
European Search Report issued in application No. 18173282.7-1211, dated Oct. 8, 2018 (8 pgs).
Intention to Grant issued in Applicants' corresponding EPO Application Serial No. 06845311.7, dated Nov. 9, 2010, 5 pages.
European Search Report issued in application No. 06845311.7, dated Mar. 31, 2010 (9 pgs).
Official Action issued in European application No. 18173282.7-1211, dated Jan. 23, 2020 (6 pgs).
European Search Report issued in application No. 16172620.3, dated Oct. 25, 2016 (9 pgs).
European Search Report issued in application No. 20150730.8, dated Jul. 3, 2020 (9 pages).
European Supplemental Search Report issued in related European Patent Application 17875888.4, dated Jul. 9, 2020 (11 pages).
Feng, et al., “High efficient GaN-based laser diodes with tunnel junction”, Applied Physics Letters 103, AIP Publishing, LLC, 2013.
Rieprich, et al., “Proceedings of SPIE—Assessment of factors regulating the thermal lens profile and lateral brightness in high power diode lasers”, SPIEL ASE, 2017.
Office Action issued in U.S. Appl. No. 15/363,874, dated Jul. 18, 2019 (24 pgs).
Office Action issued in U.S. Appl. No. 15/363,874, dated Apr. 24, 2018 (10 pgs).
Office Action issued in U.S. Appl. No. 15/363,874, dated Feb. 14, 2019 (13 pgs).
Office Action issued in U.S. Appl. No. 15/363,874, dated Mar. 6, 2020 (12 pgs).
Office Action issued in U.S. Appl. No. 15/363,874, dated Jun. 15, 2020 (12 pgs).
Office Action issued in U.S. Appl. No. 15/363,874, dated Oct. 14, 2020 (11 pgs).
Office Action issued in U.S. Appl. No. 15/363,874, dated Oct. 4, 2018 (14 pgs).
Notice of Allowance issued in U.S. Appl. No. 15/363,874, dated Feb. 2, 2021 (7 pgs).
Office Action issued in U.S. Appl. No. 14/728,923, dated Aug. 9, 2018 (17 pgs).
Office Action issued in U.S. Appl. No. 14/728,923, dated Apr. 19, 2018 (16 pgs).
Office Action issued in U.S. Appl. No. 14/728,923, dated Oct. 2, 2017 (11 pgs).
Office Action issued in U.S. Appl. No. 12/105,126, dated Jul. 23, 2009 (7 pgs).
Office Action issued in U.S. Appl. No. 12/105,126, dated Apr. 24, 2009 (8 pgs).
Notice of Allowance issued in U.S. Appl. No. 12/105,126, dated Sep. 22, 2009 (7 pgs).
Notice of Allowance issued in U.S. Appl. No. 12/648,141, dated Jan. 11, 2011 (11 pgs).
Office Action issued in U.S. Appl. No. 16/539,889, dated Feb. 1, 2021 (18 pgs).
Office Action issued in U.S. Appl. No. 16/539,889, dated Oct. 21, 2020 (16 pgs).
Office Action issued in U.S. Appl. No. 16/539,889, dated Jul. 1, 2020 (19 pgs).
Office Action issued in U.S. Appl. No. 11/299,029, dated Aug. 22, 2008 (8 pgs).
Office Action issued in U.S. Appl. No. 16/540,961, dated Nov. 17, 2020 (13 pgs).
Office Action issued in U.S. Appl. No. 16/540,961, dated Aug. 5, 2020 (9 pgs).
Office Action issued in U.S. Appl. No. 11/829,030, dated Nov. 30, 2009 (16 pgs).
Office Action issued in U.S. Appl. No. 11/829,030, dated Jun. 24, 2009 (13 pgs).
Office Action issued in U.S. Appl. No. 11/829,030, dated Apr. 3, 2009 (13 pgs).
Office Action issued in U.S. Appl. No. 11/829,030, dated Nov. 12, 2008 (12 pgs).
Notice of Allowance issued in U.S. Appl. No. 11/829,030, dated Aug. 30, 2010 (7 pgs).
Giri et al, “Influence of Hot Electron Scattering and Electron-Phonon Interactions on Thermal Boundary Conductance at Metal/Nonmetal Interfaces” Journal of Heat Transfer, vol. 136, dated Sep. 2014 (6 pgs).
Martin et al., “Thermal Behavior of Visible AlGaInP-GaInP Ridge Laser Diodes” IEEE Journal of Quantum Electronics, vol. 28, No. 11, dated Nov. 1992 (7 pgs).
Monachon , C., “Thermal Boundary Conductance Between Metals and Dielectrics” thesis for the graduation of Doctor of Science, Federal Institute of Technology in Lausanne, 2013 (251 pgs).
Nekorkin et al., “Nonlinear mode mixing in dual-wavelength semiconductor lasers with tunnel junctions”, Applied Physics Letters 90, 171106 (2007) (3 pgs).
Notice of Allowance issued in U.S. Appl. No. 15/601,820, dated Jun. 11, 2019 (8 pgs).
Rieprich et al., “Assessment of Factors Regulating the Thermal Lens Profile and Lateral Brightness in High Power Diode Lasers” Proc of SPIE, vol. 10085, No. 1008502-1, dated 2017 (10 pgs).
Zhang et al., “Thermal Transport Across Metal-Insulator Interface via Electron-Phonon Interaction,” Journal of Physics Condensed Matter, dated Oct. 2013 (15 pgs).
International Preliminary Report on Patentability issued in application No. PCT/US2017/057209, dated Jun. 4, 2019 (8 pgs).
International Search Report and Written Opinion issued in corresponding PCT Patent Appln. Serial No. PCT/US17/57209 dated Jan. 16, 2018, 10 pgs.
International Search Report and Written Opinion issued in corresponding PCT Patent Appln. Serial No. PCT/US19/46410 dated Nov. 8, 2019, 7 pgs.
Office Action issued in U.S. Appl. No. 15/601,820, dated Feb. 27, 2019 (26 pages).
Office Action issued in U.S. Appl. No. 15/601,820, dated Aug. 27, 2018 (28 pages).
Yonkee, B.P., et al., “Demonstration of a III-nitride edge-emitting laser diode utilizing a GaN tunnel junction contact”, Optics Express, vol. 24, No. 7, pp. 7816-7822, Apr. 2016.
Young, Lee W., Authorized officer, International Searching Authority, Written Opinion of the International Searching Authority, International Patent Application Serial No. PCT/US06/47448, completion date: Oct. 30, 2008.
Young, Lee W., Authorized officer, International Searching Authority, International Search Report, International Patent Application Serial No. PCT/US06/47448, search date: Nov. 1, 2008.
Polyimide properties data sheet, www.mit.edu, Oct. 27, 2004 (Year 2004).
Sunstone, FR-4 PCB Material, Mar. 14, 2017 (Year 2017).
European Search Report issued in application No. 18173282.7-1211, dated May 20, 2021 (6 pgs).
Office Action issued in U.S. Appl. No. 16/895,961, dated Dec. 10, 2021 (39 pgs).
Notice of Allowance issued in U.S. Appl. No. 16/734,133, dated Dec. 3, 2021 (9 pgs).
Official Action issued in corresponding U.S. Appl. No. 16/539,889, dated Aug. 25, 2021, 25 pages.
Official Action issued in corresponding U.S. Appl. No. 16/539,889, dated Dec. 8, 2021, 19 pages.
Watson, Edward, Walter Whitaker, Christopher Brewer, and Scott Harris “Implementing Optical Phased Array Beam Steering with Cascaded Microlens Arrays” IEEE Proceedings, IEEE Aerospace Conference; Mar. 9-16, 2002 (Year: 2002).
RO30000 Series Laminates, Rogers Corporation Data sheet (year 2020).
Chen et al., High-T Polymer Dec. 25, 2017 (Year 2017).
Robin K. Huang, Bien Chann, James Burgess, Michael Kaiman, Robert Overman, John D. Glenn, and Parviz Tayebati “Direct diode lasers with comparable beam quality to fiber, CO2, and solid state lasers”, Proc. SPIE 8241, High-Power Diode Laser Technology and Applications X, 824102 (Feb. 8, 2012); https://doi.org/10.1117/12.907161 (abstract only).
U.S. Appl. No. 11/829,030, filed Jul. 26, 2007.
U.S. Appl. No. 09/556,767, filed Apr. 24, 2020.
U.S. Appl. No. 09/170,491, filed Oct. 13, 1998.
U.S. Appl. No. 12/105,126, filed Apr. 17, 2008.
U.S. Appl. No. 12/648,141, filed Dec. 28, 2009.
U.S. Appl. No. 14/728,923, filed Jun. 2, 2015.
U.S. Appl. No. 15/167,748, filed May 27, 2016.
U.S. Appl. No. 15/363,874, filed Nov. 29, 2016.
U.S. Appl. No. 15/601,820, filed May 22, 2017.
U.S. Appl. No. 11/299,029, filed Dec. 9, 2005.
U.S. Appl. No. 16/539,889, filed Aug. 13, 2019.
U.S. Appl. No. 16/540,961, filed Aug. 14, 2019.
U.S. Appl. No. 16/734,133, filed Jan. 3, 2020.
U.S. Appl. No. 16/895,931, filed Jun. 8, 2020.
Related Publications (1)
Number Date Country
20210080736 A1 Mar 2021 US
Provisional Applications (1)
Number Date Country
62901078 Sep 2019 US