Automated polarization correction

Information

  • Patent Grant
  • 8135050
  • Patent Number
    8,135,050
  • Date Filed
    Wednesday, July 19, 2006
    18 years ago
  • Date Issued
    Tuesday, March 13, 2012
    12 years ago
Abstract
A chirped pulse amplification system includes one or more polarization compensator configured to compensate for polarization altering elements with the chirped pulse amplification system. The polarization compensator is responsive to a sensor configured to provide feedback to the polarization compensator. In some embodiments, the chirped pulse amplification system further includes a controller configured to automatically adjust the polarization compensator responsive to the sensor. The sensor is optionally a power sensor.
Description
BACKGROUND

1. Field of the Invention


The application is in the field of pulsed laser systems, and more specifically in the field of chirped pulse amplification systems.


2. Related Art


Chirped pulse amplification (CPA) is very useful for producing ultrashort-duration high-intensity pulses for use in high peak power ultrashort pulse laser systems. CPA increases the energy of an ultrashort laser pulse while avoiding optical amplifier damage. In this technique, the duration of the pulse is increased by first dispersing the ultrashort laser pulse temporally as a function of wavelength (a process called “chirping”) to produce a chirped pulse, amplifying the chirped pulse, and then recompressing the chirped pulse to significantly shorten its duration. Lengthening the pulse in time reduces the peak power of the pulse and, thus, allows energy to be added to the pulse without reaching a damage threshold of the pulse amplifier and other optical components.


Some elements in a CPA system are polarization sensitive. For example, the performance of a pulse compressor that uses gratings to compress a laser pulse is highly polarization sensitive. Some elements in a CPA system alter polarizing in ways that are not precisely predictable. For example, passage of a pulse through a non polarization-maintaining (PM) fiber optic may alter the polarization of the pulse somewhat. This alteration can include a transformation of the polarization state into linear, circular or elliptical polarization.


The degree to which polarization is altered may be temperature or pulse power dependent, and may, therefore, be time dependent. This is a problem when subsequent elements within the CPA system are polarization sensitive, because their performance may be dependent on, for example, the temperature of polarization altering elements.


There is, therefore, a need for improved methods of managing polarization in CPA systems.


SUMMARY

The invention includes systems and methods of managing polarization in CPA systems. In some embodiments, these systems and methods include automatic polarization compensation after a pulse has passed through a polarization altering optic, and in some embodiments, they include automatic polarization compensation prior to a polarization altering optic. These two approaches are referred to herein as post-compensation and pre-compensation, respectively.


Both approaches to polarization compensation optionally include a method of automatically adjusting a polarization compensation element in response to a signal from a sensor. This adjustment may continue while the CPA system is operated and, thus, be responsive to changes in polarization resulting from time dependent characteristics, such as temperature or pulse power.


Various embodiments of the invention include a system comprising a source of chirped laser pulses, a pulse amplifier configured to amplify the chirped laser pulses to produce amplified laser pulses, a sensor configured to measure a characteristic of the amplified laser pulses, a variable polarization compensator configured to modify a polarization of the chirped laser pulses, a controller configured to receive an output of the sensor responsive to the characteristic and to control the polarization compensator responsive to the output, and a pulse compressor configured to temporally compress the amplified laser pulses.


Various embodiments of the invention include a method of adjusting a polarization of a laser pulse, the method comprising a) performing a first broad scan using a first birefringent optic to determine a first preferred position, b) selecting a second birefringent optic, c) performing a second broad scan using the second birefringent optic to determine a second preferred position, d) selecting the first birefringent optic, e) performing a narrow scan using the first birefringent optic to determine a third preferred position, f) selecting the second birefringent optic, g) performing a narrow scan using the second birefringent optic to determine a fourth preferred position, and h) directing the laser pulse though the first birefringent optic and the second birefringent optic to adjust the polarization of the laser pulse.


Various embodiments of the invention include a method comprising generating a chirped laser pulse, amplifying the chirped laser pulse, measuring a characteristic of the chirped laser pulse, compressing the chirped laser pulse, and adjusting a polarization of the chirped laser pulse prior to compressing the chirped laser pulse, responsive to the characteristic of the chirped laser pulse.





BRIEF DESCRIPTION OF THE DRAWINGS


FIG. 1 is a block diagram illustrating a chirped pulse amplification system including post amplifier polarization correction, according to various embodiments of the invention.



FIG. 2 is a block diagram illustrating a chirped pulse amplification system including pre-amplifier polarization correction, according to various embodiments of the invention.



FIG. 3 is an illustration of a polarization compensator, according to various embodiments of the invention.



FIG. 4 is a flowchart illustrating a method of identifying preferred characteristics of a polarization compensator, according to various embodiments of the invention.



FIG. 5 is a flowchart illustrating a method of generating a laser pulse, according to various embodiments of the invention.





DETAILED DESCRIPTION

In various embodiments of the invention, a polarization compensator is included in a CPA laser system. The polarization compensator is typically disposed relative to one or more polarization altering elements and a polarization sensitive element of the CPA system. The polarization altering element may be any element, such as an amplifier, that causes an undesirable change in polarization of a light pulse. This change of polarization state may be dependent on factors such as temperature or pulse power. Therefore, the extent of undesirable change in polarization may change over time. The polarization sensitive element is an element whose efficiency is dependent on a proper polarization of input light pulses. For example, the performance of a grating based compressor or isolator is dependent on the polarization of input light. If the input light does not properly match the polarization requirements of a grating compressor, light energy is lost and/or the compression is not as efficient as it could be. This will result in a degradation of the power and quality of output pulses.


In some embodiments, the polarization compensator is disposed between the polarization altering element and the polarization sensitive element. In these embodiments, the polarization compensator is configured to modify polarization so as to compensate for the effects of the polarization altering element after a laser pulse has passed through the polarization altering element. In some embodiments, the polarization compensator is disposed before both the polarization altering element and the polarization sensitive element. In these embodiments, the polarization compensator is configured to pre-compensate the polarization of a laser pulse such that after the laser pulse passes through the polarization altering element the laser pulse has a polarization appropriate for the polarization sensitive element.


The polarization compensator is configured to modify polarization responsive to a controller, which in turn is responsive to a sensor configured to measure one or more characteristics of a laser pulse. The sensor and controller provide a feedback mechanism configured to optimize operation of the polarization compensator and the output of the CPA laser system.



FIG. 1 is a block diagram illustrating a Chirped Pulse Amplification System 100 including post amplifier polarization correction, according to various embodiments of the invention. Chirped Pulse Amplification System 100 includes a Seed Source 110 and an optional Stretcher 120. Together, Seed Source 110 and Stretcher 120 form a source of chirped laser pulses. In various embodiments, Seed Source 110 comprises, for example, a ring laser, a laser oscillator, a quasi-continuous wave laser, or the like. Stretcher 120 is configured to stretch a laser pulse in space and time to generate a chirped laser pulse. Stretcher 120 is optional in embodiments wherein Seed Source 110 produces chirped laser pulses directly. Various embodiments of Stretcher 120 include gratings, acousto-optic dispersive filters, tunable filters, a fiber Bragg grating, a Bragg fiber, or the like.


Chirped Pulse Amplification System 100 further includes an Amplifier 130 configured to amplify the chirped laser pulse. In various embodiments, Amplifier 130 includes a fiber-amplifier pumped by pump diodes, a semiconductor optical amplifier, a rod-type fiber, bulk solid state amplifier, or the like. For example, in some embodiments, Amplifier 130 includes a solid state optical amplifier, such as Nd:YAG or Yb:YAG. In some embodiments, Chirped Pulse Amplification System 100 comprises more than one amplifier. Amplifier 130 can be a polarization changing element in that it may alter the polarization state of a laser pulse during amplification. This change in polarization state may be dependent on power of the laser pulse, temperature of Amplifier 130, stress-induced or vibration-induced birefringence. For example, a change in polarization state may increase over time as the amplification process changes the temperature of Amplifier 130.


Chirped Pulse Amplification System 100 further includes a variable Polarization Compensator 140. Polarization compensator is configured to modify a laser pulse polarization. This modification is typically configured to compensate for any change in polarization state caused by Amplifier 130 and/or other elements within Chirped Pulse Amplification System 100. Polarization Compensator 140 can include, for example, a pair of birefringent wave plates, an electro-optic, a liquid crystal, a fiber-based polarization controller, or the like. Polarization Compensator 140 can be either active or passive, and is optionally configured to modify polarization to more than compensate for polarization changes caused by other elements. For example, Polarization Compensator 140 can be configured to compensate for a polarization change caused by another element and also rotate polarization by 90 degrees.


The polarization modification performed by Polarization Compensator 140 is variable. In some embodiments, the modification is varied by changing a position of part of Polarization Compensator 140. For example, a birefringent wave plate may be rotated in order to vary polarization. This rotation may be accomplished using a stepper motor. In some embodiments, the modification is varied by applying an electric or magnetic field to part of Polarization Compensator 140. For example, an electric field may be applied to an electro-optic to vary polarization.


The polarization modification performed by Polarization Compensator 140 is responsive to a Controller 160. Controller 160 is a logic device configured to receive a signal from a Sensor 150, to process the signal from Sensor 150, and to send control signals to Polarization Compensator 140 in response to the processed signal. In some embodiments, Controller 160 is further configured to scan Polarization Compensator 140 so as to identify a preferred state of Polarization Compensator 140. This preferred state may include a preferred position, a preferred electric field, and/or a preferred magnetic field. The preferred state is typically a state that results in a desired characteristic of the output of Chirped Pulse Amplification System 100. Controller 160 includes a microprocessor, electronic circuit, software, firmware, hardware, or the like.


Sensor 150 is configured to determine one or more characteristics of a laser pulse. These characteristics can include, for example, polarization, power, pulse width, beam width, dispersion, mode, or the like. For example, in one embodiment, Sensor 150 includes a power sensor configured to measure a power of a laser pulse and to provide a signal to Controller 160 representative of the measured power.


Typically, Sensor 150 and Polarization Compensator 140 are separated by one, two or more polarization sensitive elements of Chirped Pulse Amplification System 100. For example, in the embodiments illustrated by FIG. 1, Polarization Compensator 140 and Sensor 150 are separated by a Pulse Compressor 170. Pulse Compressor 170 may include, for example a grating pair, a Treacy compressor, a fiber Bragg grating, a Bragg fiber, a volume Bragg grating or the like. Sensor 150 is disposed to provide feedback to Polarization Compensator 140 responsive to the output of the polarization sensitive element. In some embodiments, this feedback is used to adjust Polarization Compensator 140 so as to optimize the output of the polarization sensitive element. Other polarization sensitive elements that may be disposed between Polarization Compensator 140 and Sensor 150 include polarizers, mirrors, faraday rotators, diffractive optical elements, or the like. Polarization Compensator 140 is optionally integrated with Amplifier 130. For example, both Polarization compensator 140 and Amplifier 130 may include optical fibers directly coupled to each other.



FIG. 2 is a block diagram illustrating alternative embodiments of Chirped Pulse Amplification System 100 including pre-amplifier polarization correction. In these embodiments, Polarization Compensator 140 is disposed before Amplifier 130 and is configured to pre-compensate a laser pulse such that the pulse has a preferred polarization after passing through Amplifier 130. If Polarization Compensator 140 is disposed prior to Amplifier 130 then Polarization Compensator 140 need not be configured to handle the energies of amplified pulses.



FIG. 3 is an illustration of Polarization Compensator 140, according to various embodiments of the invention. In these particular embodiments, Polarization Compensator 140 includes a pair of birefringent Wave Plates 310A and 310B disposed within a Path 320 of a laser pulse. Typically, one of Wave Plates 310A is a quarter-wave plate, while the other is a half-wave plate. Wave Plates 310A and 310 B are birefringent in that they have an angle dependent index of refraction. Thus, the index of refraction in a First Axis 330A is different from the index of refraction in a Second Axis 330B. Modification of the polarization of a laser pulse is dependent on the relative angles between the polarization of the laser pulse, First Axis 330A and Second Axis 330B. To vary the modification of the polarization of the laser pulse, Wave Plates 310A and 310B are each independently rotated in the plane defined by First Axis 330A and Second Axis 330B. While Wave Plates 310A and 310B are illustrated in FIG. 3 include a rectangular shape, alternative embodiments include square, circular or other shapes.


Wave Plates 310A and 310B are typically rotated using a stepper motor, a piezoelectric, an electric, magnetic or pneumatic actuator, or the like. For example, in some embodiments each of Wave Plates 310A and 310B are rotated using a stepper motor (not shown). Because each of Wave Plates 310A and 310B are optionally configured to be rotated a full 360 degrees, the stepper motor does not necessarily need a positioning encoder.


Wave Plates 310A and 310B are optionally disposed such that Path 320 strikes each at an angle slightly off normal to a Front Surface 340.



FIG. 4 is a flowchart illustrating a method of identifying preferred characteristics of Wave Plates 310A and 310B, according to various embodiments of the invention. This method includes an iterative process in which each of Wave Plates 310A and 310B are independently moved to identify a series of progressively better positions. In a Full Scan Step 410, Wave Plate 310A is rotated to identify a preferred position. This rotation may be as much as 180 or 360 degrees. During the rotation the output signal of Sensor 150 is monitored and a maximum (or minimum) in a pulse characteristic (e.g., power or polarization) is identified. The number of degrees by which Wave Plate 310A is rotated is typically sufficient to identify the maximum. In some embodiments, this includes a rotation of at least 45 degrees. The position of Wave Plate 310A at which this maximum (or minimum) occurs is considered a preferred position for Wave Plate 310A. This position is dependent on the position of Wave Plate 310B during Full Scan Step 410. In most embodiments, only one of Wave Plates 310A and 310B is moved at the same time. Typically, Full Scan Step 410 results in a significant variation in the output of Chirped Pulse Amplification System 100.


In a Switch Plate Step 420, the Wave Plate 310B is selected for movement. Because, only one of Wave Plate 310A and 310B are typically moved at the same time, Switch Plate Step 420 optionally includes switching a single stepper motor driver from a stepper motor associated with Wave Plate 310A to a stepper motor associated with Wave Plate 310B.


In a Full Scan Step 430, Wave Plate 310B is rotated to identify a preferred position of Wave Plate 310B. This rotation may be as much as 180 or 360 degrees, and in some embodiments, at least 45 degrees. As in Full Scan Step 410, the output signal of Sensor 150 is monitored and a maximum (or minimum) in a pulse characteristic is identified. This maximum (or minimum) is considered a preferred position for Wave Plate 310B.


In a Switch Plate Step 440, Wave Plate 310A is selected for movement.


In a Reduced Scan Step 450, Wave Plate 310A is again rotated in order to find a new preferred position. Reduced Scan Step 450 typically includes less rotation of Wave Plate 310A than Full Scan Step 410. For example, in various embodiments, Reduced Scan Step 450 includes rotations of less than 45, 30, 20 10 and 5 degrees. Because of the movement of Wave Plate 310B that took place in Full Scan Step 430, the preferred position of Wave Plate 310A that was found in Full Scan Step 410 is normally different from the new preferred position of Wave Plate 310A that is found in Reduced Scan Step 450.


In a Switch Plate Step 460, Wave Plate 310B is selected for movement.


In a Reduced Scan 470, Wave Plate 310B is again rotated in order to find a new preferred position. Reduced Scan Step 470 typically includes less rotation of Wave Plate 310B than Full Scan Step 430. For example, in various embodiments, Reduced Scan Step 450 includes rotations of less than 45, 30, 20 10 and 5 degrees.


In a Switch Plate Step 480, Wave Plate 310A is selected for movement. Steps 450-480 are then optionally repeated. In various embodiments, Steps 450-480 are repeated on a periodic basis, e.g., at least every 5 seconds, 15 seconds, 30 seconds, 60 seconds, 2 minutes, 5 minutes or 10 minutes. In some embodiments, steps 450-480 are repeated until a desired pulse power is achieved. The rotation in Reduced Scan Steps 450 and 470 typically result in less of an impact in the output of Chirped Pulse Amplification System 100 than the rotation in Full Scan Steps 410 and 430. As such, Steps 450-480 are optionally performed while the output of Chirped Pulse Amplification System 100 is being applied to an end use.



FIG. 5 is a flowchart illustrating a method of generating a laser pulse, according to various embodiments of the invention. This method includes generating one or more laser pulses, passing the one or more laser pulses through an element that causes a change in polarization state of the laser pulses, measuring the one or more laser pulses to identify a preferred modification of the polarization state, and modifying the polarization state to compensate for the change in polarization state. While the method illustrated by FIG. 5 is discussed in terms of a single pulse, the method is typically applied to a series of pulses such that steps performed in response to a first pulse effect subsequent pulses.


In a Generate Chirped Pulse Step 510, at least one chirped laser pulse is generated. This pulse may be generated using Seed Source 110 and Stretcher 120, or using an alternative source of chirped laser pulses.


In an Amplify Pulse Step 520, the chirped pulse generated in Generate Chirped Pulse Step 510 is amplified using Amplifier 130. This amplification process may result in a change in the state of polarization of the laser pulse.


In a Measure Pulse Step 530, the amplified pulse is measured using Sensor 150. This measurement may include a power measurement, a polarization measurement, a pulse width measurement, a mode measurement, and/or the like.


In an Adjust Polarization Step 540, Polarization Compensator 140 is adjusted, for example using Steps 450-480 of FIG. 4, responsive to the measurement made in Measure Pulse Step 530. This adjustment results in a change in the polarization of subsequent pulses.


In a Compress Step 550, the chirped pulse is compressed using Pulse Compressor 170.


The order of the steps illustrated in FIG. 5 can vary significantly in different embodiments of the invention. For example, Measure Pulse Step 530 may occur before or after Compress Pulse Step 550. Adjust Polarization Step 540 may occur before or after Amplify Pulse Step 520. Typically, Measure Pulse Step 530 is applied to a first pulse and the effect of Adjust Polarization Step 540 is experienced by a second subsequent pulse.


Several embodiments are specifically illustrated and/or described herein. However, it will be appreciated that modifications and variations are covered by the above teachings and within the scope of the appended claims without departing from the spirit and intended scope thereof. For example, Chirped Pulse Amplification System 100 may include a plurality of Polarization Compensator 140 and/or a plurality of Sensor 150. Chirped Pulse Amplification System 100 may include a delivery fiber and Sensor 150 may be configured to measure a characteristic of a pulse after the pulse passes through the delivery or compressor fiber.


The embodiments discussed herein are illustrative of the present invention. As these embodiments of the present invention are described with reference to illustrations, various modifications or adaptations of the methods and or specific structures described may become apparent to those skilled in the art. All such modifications, adaptations, or variations that rely upon the teachings of the present invention, and through which these teachings have advanced the art, are considered to be within the spirit and scope of the present invention. Hence, these descriptions and drawings should not be considered in a limiting sense, as it is understood that the present invention is in no way limited to only the embodiments illustrated.

Claims
  • 1. A system comprising: a source of chirped laser pulses;a variable polarization compensator configured to modify a polarization of the chirped laser pulses;a single-pass pulse amplifier configured to alter polarization of the entire chirped laser pulses without optical feedback and to amplify the chirped laser pulses modified by the variable polarization compensator to produce amplified laser pulses, the variable polarization compensator modification configured to compensate for a change in polarization state caused by the pulse amplifier;a polarization sensor configured to measure the polarization state of the amplified laser pulses;a controller configured to receive an output of the polarization sensor responsive to the measured polarization and to control the variable polarization compensator responsive to the output; anda pulse compressor configured to temporally compress the amplified laser pulses.
  • 2. The system of claim 1, wherein the variable polarization compensator is disposed to pre-compensate the chirped laser pulses before the chirped laser pulses are amplified by the pulse amplifier.
  • 3. The system of claim 1, wherein the variable polarization compensator is disposed to modify the polarization of the chirped laser pulses after the chirped laser pulses are amplified by the pulse amplifier and before the chirped laser pulses are compressed using the pulse compressor.
  • 4. The system of claim 1, wherein the variable polarization compensator is disposed to modify the polarization of the chirped laser pulses after the chirped laser pulses are amplified by the pulse amplifier and after the chirped laser pulses are compressed using the pulse compressor.
  • 5. The system of claim 1, wherein the source of chirped laser pulses includes a pulse stretcher.
  • 6. The system of claim 1, wherein the pulse amplifier includes a fiber amplifier.
  • 7. The system of claim 1, wherein the pulse compressor includes a Bragg fiber.
  • 8. The system of claim 1, wherein the variable polarization compensator includes a birefringent optic.
  • 9. The system of claim 1, wherein the variable polarization compensator includes two birefringent plates.
  • 10. The system of claim 1, wherein the variable polarization compensator includes two birefringent plates configured to be moved using a single controller.
  • 11. The system of claim 1, wherein the variable polarization compensator includes an electro-optic or a liquid crystal.
  • 12. The system of claim 1, wherein the controller is configured to adjust the variable polarization compensator on a periodic basis at least every 5 minutes.
  • 13. A method comprising: generating a chirped laser pulse;amplifying the chirped laser pulse with a single-pass amplifier that excludes optical feedback;measuring the polarization of the chirped laser pulse;compressing the chirped laser pulse; andadjusting a polarization of the entire chirped laser pulse prior to compressing the chirped laser pulse, responsive to the polarization characteristic of the chirped laser pulse.
  • 14. The method of claim 13, wherein generating the chirped laser pulse includes stretching a seed pulse.
  • 15. The method of claim 13, wherein the step of amplifying the chirped laser pulse includes using a fiber amplifier.
  • 16. The method of claim 13, wherein the step of amplifying the chirped laser pulse includes using a rod-type fiber.
  • 17. The method of claim 13, wherein the step of amplifying the chirped laser pulse includes using a bulk solid state amplifier.
  • 18. The method of claim 13, wherein the step of compressing the chirped laser pulse is performed using a polarization sensitive device.
  • 19. The method of claim 13, wherein the step of measuring a characteristic of the chirped laser pulse is performed before the step of compressing the chirped pulse.
  • 20. The method of claim 13, wherein the step of measuring a characteristic of the chirped laser pulse is performed after the step of compressing the chirped pulse.
  • 21. The method of claim 13, wherein the step of amplifying the chirped laser pulse is performed after the step of adjusting the polarization.
  • 22. The method of claim 13, wherein the step of adjusting the polarization is performed after the step of amplifying the chirped laser pulse.
CROSS-REFERENCE TO RELATED APPLICATIONS

This application claims benefit and priority from U.S. provisional patent application No. 60/700,429, filed Jul. 19, 2005 and entitled “Controlling Output Polarization of a High Power Amplifier.” The disclosure of the above provisional patent application is hereby incorporated herein by reference.

US Referenced Citations (506)
Number Name Date Kind
2436662 Norgaard Feb 1948 A
3459960 Aaland et al. Aug 1969 A
3549256 Brienza et al. Dec 1970 A
3599019 Nannichi et al. Aug 1971 A
3602836 Young Aug 1971 A
3622907 Tomlinson et al. Nov 1971 A
3626318 Young Dec 1971 A
3628179 Cuff Dec 1971 A
3631362 Almasi et al. Dec 1971 A
3646469 Buczek et al. Feb 1972 A
3654624 Becker et al. Apr 1972 A
3696308 Duffy et al. Oct 1972 A
3735282 Gans May 1973 A
3806829 Duston et al. Apr 1974 A
3808549 Maurer Apr 1974 A
3851267 Tanner Nov 1974 A
3942127 Fluhr et al. Mar 1976 A
3963953 Thornton, Jr. Jun 1976 A
4061427 Fletcher et al. Dec 1977 A
4194813 Benjamin et al. Mar 1980 A
4289378 Remy et al. Sep 1981 A
4389617 Kurnit Jun 1983 A
4394623 Kurnit Jul 1983 A
4590598 O'Harra, II May 1986 A
4622095 Grobman et al. Nov 1986 A
4655547 Heritage et al. Apr 1987 A
4673795 Ortiz, Jr. Jun 1987 A
4718418 L 'Esperance, Jr. Jan 1988 A
4722591 Haffner Feb 1988 A
4730113 Edwards et al. Mar 1988 A
4750809 Kafka et al. Jun 1988 A
4808000 Pasciak Feb 1989 A
4815079 Snitzer et al. Mar 1989 A
4824598 Stokowski Apr 1989 A
4827125 Goldstein May 1989 A
4829529 Kafka May 1989 A
4835670 Adams et al. May 1989 A
4847846 Sone et al. Jul 1989 A
4848340 Bille et al. Jul 1989 A
4849036 Powell et al. Jul 1989 A
4856011 Shimada et al. Aug 1989 A
4902127 Byer et al. Feb 1990 A
4907586 Bille et al. Mar 1990 A
4913520 Kafka Apr 1990 A
4915757 Rando Apr 1990 A
4928316 Heritage et al. May 1990 A
4947398 Yasuda et al. Aug 1990 A
4950268 Rink Aug 1990 A
4972423 Alfano et al. Nov 1990 A
4983034 Spillman, Jr. Jan 1991 A
4988348 Bille Jan 1991 A
4994059 Kosa et al. Feb 1991 A
5010555 Madey et al. Apr 1991 A
5014290 Moore et al. May 1991 A
5022042 Bradley Jun 1991 A
5031236 Hodgkinson et al. Jul 1991 A
5043991 Bradley Aug 1991 A
5053171 Portney et al. Oct 1991 A
5095487 Meyerhofer et al. Mar 1992 A
5098426 Sklar et al. Mar 1992 A
5122439 Miersch et al. Jun 1992 A
5132996 Moore et al. Jul 1992 A
5146088 Kingham et al. Sep 1992 A
5154707 Rink et al. Oct 1992 A
5159402 Ortiz, Jr. Oct 1992 A
5162643 Currie Nov 1992 A
5166818 Chase et al. Nov 1992 A
5187759 DiGiovanni et al. Feb 1993 A
5204867 Koschmann Apr 1993 A
5206455 Williams et al. Apr 1993 A
5217003 Wilk Jun 1993 A
5233182 Szabo et al. Aug 1993 A
5237576 DiGiovanni et al. Aug 1993 A
5255117 Cushman Oct 1993 A
5257273 Farries et al. Oct 1993 A
5265107 Delfyett, Jr. Nov 1993 A
5267077 Blonder Nov 1993 A
5278853 Shirai et al. Jan 1994 A
5291501 Hanna Mar 1994 A
5293186 Seden et al. Mar 1994 A
5301347 Kensky Apr 1994 A
5302835 Bendett et al. Apr 1994 A
5309453 Treacy May 1994 A
5313262 Leonard May 1994 A
5315431 Masuda et al. May 1994 A
5315436 Lowenhar et al. May 1994 A
5329398 Lai et al. Jul 1994 A
5331131 Opdyke Jul 1994 A
5355383 Lockard Oct 1994 A
5367143 White, Jr. Nov 1994 A
5400350 Galvanauskas Mar 1995 A
5409376 Murphy Apr 1995 A
5411918 Keible et al. May 1995 A
5414725 Fermann et al. May 1995 A
5418809 August, Jr. et al. May 1995 A
5428471 McDermott Jun 1995 A
5430572 DiGiovanni et al. Jul 1995 A
5440573 Fermann Aug 1995 A
5446813 Lee et al. Aug 1995 A
5450427 Fermann et al. Sep 1995 A
5479422 Fermann et al. Dec 1995 A
5489984 Hariharan et al. Feb 1996 A
5493579 Ressl et al. Feb 1996 A
5499134 Galvanauskas et al. Mar 1996 A
5517043 Ma et al. May 1996 A
5520679 Lin May 1996 A
5548098 Sugawara et al. Aug 1996 A
5572335 Stevens Nov 1996 A
5572358 Gabl et al. Nov 1996 A
5585642 Britton et al. Dec 1996 A
5585652 Kamasz et al. Dec 1996 A
5585913 Hariharan et al. Dec 1996 A
5590142 Shan Dec 1996 A
5592327 Gabl et al. Jan 1997 A
5596668 DiGiovanni et al. Jan 1997 A
5602673 Swan Feb 1997 A
5602677 Tournois Feb 1997 A
5615043 Plaessmann et al. Mar 1997 A
5617434 Tamura et al. Apr 1997 A
5624587 Otsuki et al. Apr 1997 A
5625544 Kowshik et al. Apr 1997 A
5627848 Fermann et al. May 1997 A
5631771 Swan May 1997 A
5633750 Nogiwa et al. May 1997 A
5633885 Galvanauskas et al. May 1997 A
5642447 Pan et al. Jun 1997 A
5644424 Backus et al. Jul 1997 A
5651018 Mehuys et al. Jul 1997 A
5656186 Mourou et al. Aug 1997 A
5657153 Endriz et al. Aug 1997 A
5661829 Zheng Aug 1997 A
5663731 Theodoras, II et al. Sep 1997 A
5665942 Williams et al. Sep 1997 A
5666722 Tamm et al. Sep 1997 A
5670067 Koide et al. Sep 1997 A
5677769 Bendett Oct 1997 A
5689361 Damen et al. Nov 1997 A
5689519 Fermann et al. Nov 1997 A
5694501 Alavie et al. Dec 1997 A
5696782 Harter et al. Dec 1997 A
5701319 Fermann Dec 1997 A
5703639 Farrier et al. Dec 1997 A
5708669 DiGiovanni et al. Jan 1998 A
5710424 Theodoras, II et al. Jan 1998 A
5720894 Neev et al. Feb 1998 A
5726855 Mourou et al. Mar 1998 A
5734762 Ho et al. Mar 1998 A
5736709 Neiheisel Apr 1998 A
5739933 Dembeck et al. Apr 1998 A
5770864 Dlugos Jun 1998 A
5771253 Chang-Hasnain et al. Jun 1998 A
5778016 Sucha et al. Jul 1998 A
5781289 Sabsabi et al. Jul 1998 A
5788688 Bauer et al. Aug 1998 A
5790574 Rieger et al. Aug 1998 A
5815519 Aoshima et al. Sep 1998 A
5818630 Fermann et al. Oct 1998 A
5822097 Tournois Oct 1998 A
5844149 Akiyoshi et al. Dec 1998 A
5847825 Alexander Dec 1998 A
5847863 Galvanauskas et al. Dec 1998 A
5862287 Stock et al. Jan 1999 A
5862845 Chin et al. Jan 1999 A
5867304 Galvanauskas et al. Feb 1999 A
5875408 Bendett et al. Feb 1999 A
5880823 Lu Mar 1999 A
5880877 Fermann et al. Mar 1999 A
5898485 Nati, Jr. Apr 1999 A
5907157 Yoshioka et al. May 1999 A
5920668 Uehara et al. Jul 1999 A
5923686 Fermann et al. Jul 1999 A
5929430 Yao et al. Jul 1999 A
5936716 Pinsukanjana et al. Aug 1999 A
5999847 Elstrom Dec 1999 A
6014249 Fermann et al. Jan 2000 A
6016452 Kasevich Jan 2000 A
6020591 Harter et al. Feb 2000 A
6034975 Harter et al. Mar 2000 A
6041020 Caron et al. Mar 2000 A
6061373 Brockman et al. May 2000 A
6071276 Abela Jun 2000 A
6072811 Fermann et al. Jun 2000 A
6075588 Pinsukanjana et al. Jun 2000 A
6081369 Waarts et al. Jun 2000 A
6088153 Anthon et al. Jul 2000 A
6099522 Knopp et al. Aug 2000 A
6120857 Balooch et al. Sep 2000 A
6122097 Weston et al. Sep 2000 A
6130780 Joannopoulos et al. Oct 2000 A
6134003 Tearney et al. Oct 2000 A
6141140 Kim Oct 2000 A
6151338 Grubb et al. Nov 2000 A
6154310 Galvanauskas et al. Nov 2000 A
6156030 Neev Dec 2000 A
6161543 Cox et al. Dec 2000 A
6168590 Neev Jan 2001 B1
6172611 Hussain et al. Jan 2001 B1
6175437 Diels et al. Jan 2001 B1
6179421 Pang Jan 2001 B1
6181463 Galvanauskas et al. Jan 2001 B1
6190380 Abela Feb 2001 B1
6198568 Galvanauskas et al. Mar 2001 B1
6198766 Schuppe et al. Mar 2001 B1
6201914 Duguay et al. Mar 2001 B1
6208458 Galvanauskas et al. Mar 2001 B1
6246816 Moore et al. Jun 2001 B1
6249630 Stock et al. Jun 2001 B1
6252892 Jiang et al. Jun 2001 B1
6256328 Delfyett et al. Jul 2001 B1
6269108 Tabirian et al. Jul 2001 B1
6271650 Massie et al. Aug 2001 B1
6275250 Sanders et al. Aug 2001 B1
6275512 Fermann Aug 2001 B1
6281471 Smart Aug 2001 B1
6290910 Chalk Sep 2001 B1
6303903 Liu Oct 2001 B1
6314115 Delfyett et al. Nov 2001 B1
6325792 Swinger et al. Dec 2001 B1
6327074 Bass et al. Dec 2001 B1
6327282 Hammons et al. Dec 2001 B2
6330383 Cai et al. Dec 2001 B1
6334011 Galvanauskas et al. Dec 2001 B1
6335821 Suzuki et al. Jan 2002 B1
6340806 Smart et al. Jan 2002 B1
RE037585 Mourou et al. Mar 2002 E
6355908 Tatah et al. Mar 2002 B1
6359681 Housand et al. Mar 2002 B1
6362454 Liu Mar 2002 B1
6365869 Swain et al. Apr 2002 B1
6366395 Drake et al. Apr 2002 B1
6370171 Horn et al. Apr 2002 B1
6370422 Richards-Kortum et al. Apr 2002 B1
6396317 Roller et al. May 2002 B1
6400871 Minden Jun 2002 B1
6404944 Wa et al. Jun 2002 B1
6407363 Dunsky et al. Jun 2002 B2
6418154 Kneip et al. Jul 2002 B1
6418256 Danziger et al. Jul 2002 B1
6421169 Bonnedal et al. Jul 2002 B1
6433303 Liu et al. Aug 2002 B1
6433305 Liu et al. Aug 2002 B1
6433760 Vaissie et al. Aug 2002 B1
6463314 Haruna Oct 2002 B1
6482199 Neev Nov 2002 B1
6485413 Boppart et al. Nov 2002 B1
6486435 Beyer et al. Nov 2002 B1
6496099 Wang et al. Dec 2002 B2
6501590 Bass et al. Dec 2002 B2
6522460 Bonnedal et al. Feb 2003 B2
6522674 Niwano et al. Feb 2003 B1
6525873 Gerrish et al. Feb 2003 B2
6526085 Vogler et al. Feb 2003 B2
6526327 Kar et al. Feb 2003 B2
6529319 Youn et al. Mar 2003 B2
6541731 Mead et al. Apr 2003 B2
6547453 Stummer et al. Apr 2003 B1
6549547 Galvanauskas et al. Apr 2003 B2
6552301 Herman et al. Apr 2003 B2
6555781 Ngoi et al. Apr 2003 B2
6556733 Dy et al. Apr 2003 B2
6567431 Tabirian et al. May 2003 B2
6570704 Palese May 2003 B2
6573813 Joannopoulos et al. Jun 2003 B1
6574024 Liu Jun 2003 B1
6574250 Sun et al. Jun 2003 B2
6576917 Silfvast Jun 2003 B1
6580553 Kim et al. Jun 2003 B2
6587488 Meissner et al. Jul 2003 B1
6597497 Wang et al. Jul 2003 B2
6603903 Tong et al. Aug 2003 B1
6603911 Fink et al. Aug 2003 B2
6621040 Perry et al. Sep 2003 B1
6621045 Liu et al. Sep 2003 B1
6627421 Unger et al. Sep 2003 B1
6627844 Liu et al. Sep 2003 B2
6642477 Patel et al. Nov 2003 B1
6647031 Delfyett et al. Nov 2003 B2
6654161 Bass et al. Nov 2003 B2
6661816 Delfyett et al. Dec 2003 B2
6661820 Camilleri et al. Dec 2003 B1
6671298 Delfyett et al. Dec 2003 B1
6677552 Tulloch et al. Jan 2004 B1
6681079 Maroney Jan 2004 B1
6690686 Delfyett et al. Feb 2004 B2
6695835 Furuno et al. Feb 2004 B2
6696008 Brandinger Feb 2004 B2
6697402 Crawford Feb 2004 B2
6697408 Kennedy et al. Feb 2004 B2
6700094 Kuntze Mar 2004 B1
6700698 Scott Mar 2004 B1
6706036 Lai Mar 2004 B2
6706998 Cutler Mar 2004 B2
6710288 Liu et al. Mar 2004 B2
6710293 Liu et al. Mar 2004 B2
6711334 Szkopek et al. Mar 2004 B2
6716475 Fink et al. Apr 2004 B1
6720519 Liu et al. Apr 2004 B2
6723991 Sucha et al. Apr 2004 B1
6727458 Smart Apr 2004 B2
6728273 Perry Apr 2004 B2
6728439 Weisberg et al. Apr 2004 B2
6735229 Delfyett et al. May 2004 B1
6735368 Parker et al. May 2004 B2
6738144 Dogariu May 2004 B1
6738408 Abedin May 2004 B2
6744555 Galvanauskas et al. Jun 2004 B2
6747795 Lin et al. Jun 2004 B2
6749285 Liu et al. Jun 2004 B2
6760356 Erbert et al. Jul 2004 B2
6774869 Biocca et al. Aug 2004 B2
6782207 Efimov Aug 2004 B1
6785303 Holzwarth et al. Aug 2004 B1
6785445 Kuroda et al. Aug 2004 B2
6787733 Lubatschowski et al. Sep 2004 B2
6787734 Liu Sep 2004 B2
6788864 Ahmad et al. Sep 2004 B2
6791060 Dunsky et al. Sep 2004 B2
6791071 Woo et al. Sep 2004 B2
6795461 Blair et al. Sep 2004 B1
6801550 Snell et al. Oct 2004 B1
6801551 Delfyett et al. Oct 2004 B1
6801557 Liu Oct 2004 B2
6803539 Liu et al. Oct 2004 B2
6804574 Cheng et al. Oct 2004 B2
6807353 Fleming et al. Oct 2004 B1
6807375 Dogariu Oct 2004 B2
6815638 Liu Nov 2004 B2
6819694 Jiang et al. Nov 2004 B2
6819702 Sverdlov et al. Nov 2004 B2
6819837 Li et al. Nov 2004 B2
6822251 Arenberg et al. Nov 2004 B1
6824540 Lin Nov 2004 B1
6829517 Cheng et al. Dec 2004 B2
6834134 Brennan, III et al. Dec 2004 B2
6836703 Wang et al. Dec 2004 B2
6878900 Corkum et al. Apr 2005 B2
6882772 Lowery et al. Apr 2005 B1
6885683 Fermann et al. Apr 2005 B1
6887804 Sun et al. May 2005 B2
6897405 Cheng et al. May 2005 B2
6902561 Kurtz et al. Jun 2005 B2
6917631 Richardson et al. Jul 2005 B2
6928490 Bucholz et al. Aug 2005 B1
6937629 Perry et al. Aug 2005 B2
6943359 Vardeny et al. Sep 2005 B2
6956680 Morbieu et al. Oct 2005 B2
6994703 Wang et al. Feb 2006 B2
7002733 Dagenais et al. Feb 2006 B2
7006730 Doerr Feb 2006 B2
7022119 Hohla Apr 2006 B2
7031571 Mihailov et al. Apr 2006 B2
7068408 Sakai Jun 2006 B2
7072101 Kapteyn et al. Jul 2006 B2
7088756 Fermann et al. Aug 2006 B2
7095772 Delfyett et al. Aug 2006 B1
7097640 Wang et al. Aug 2006 B2
7099549 Scheuer et al. Aug 2006 B2
7116688 Sauter et al. Oct 2006 B2
7132289 Kobayashi et al. Nov 2006 B2
7143769 Stoltz et al. Dec 2006 B2
7171074 DiGiovanni et al. Jan 2007 B2
7217266 Anderson et al. May 2007 B2
7220255 Lai May 2007 B2
7233607 Richardson et al. Jun 2007 B2
7257302 Fermann et al. Aug 2007 B2
7289707 Chavez-Pirson et al. Oct 2007 B1
7321605 Albert Jan 2008 B2
7321713 Akiyama et al. Jan 2008 B2
7332234 Levinson et al. Feb 2008 B2
7349452 Brennan, III et al. Mar 2008 B2
7361171 Stoltz et al. Apr 2008 B2
7367969 Stoltz et al. May 2008 B2
7413565 Wang et al. Aug 2008 B2
7444049 Kim et al. Oct 2008 B1
7505196 Nati et al. Mar 2009 B2
7518788 Fermann et al. Apr 2009 B2
7584756 Zadoyan et al. Sep 2009 B2
7728967 Ochiai et al. Jun 2010 B2
7773294 Brunet et al. Aug 2010 B2
7787175 Brennan, III et al. Aug 2010 B1
7822347 Brennan, III et al. Oct 2010 B1
7963958 Stoltz et al. Jun 2011 B2
20010009250 Herman et al. Jul 2001 A1
20010021294 Cai et al. Sep 2001 A1
20010046243 Schie Nov 2001 A1
20020003130 Sun et al. Jan 2002 A1
20020051606 Takushima et al. May 2002 A1
20020071454 Lin Jun 2002 A1
20020091325 Ostrovsky Jul 2002 A1
20020095142 Ming Jul 2002 A1
20020097468 Mecherle et al. Jul 2002 A1
20020097761 Sucha et al. Jul 2002 A1
20020118934 Danziger et al. Aug 2002 A1
20020153500 Fordahl et al. Oct 2002 A1
20020167581 Cordingley et al. Nov 2002 A1
20020167974 Kennedy et al. Nov 2002 A1
20020176676 Johnson et al. Nov 2002 A1
20020186915 Yu et al. Dec 2002 A1
20020191901 Jensen Dec 2002 A1
20030011782 Tanno Jan 2003 A1
20030031410 Schnitzer Feb 2003 A1
20030039442 Bond et al. Feb 2003 A1
20030053508 Dane et al. Mar 2003 A1
20030055413 Altshuler et al. Mar 2003 A1
20030060808 Wilk Mar 2003 A1
20030086647 Willner et al. May 2003 A1
20030095266 Detalle et al. May 2003 A1
20030123496 Broutin et al. Jul 2003 A1
20030142705 Hackel et al. Jul 2003 A1
20030156605 Richardson et al. Aug 2003 A1
20030161365 Perry et al. Aug 2003 A1
20030161378 Zhang et al. Aug 2003 A1
20030178396 Naumov et al. Sep 2003 A1
20030202547 Fermann et al. Oct 2003 A1
20030205561 Iso Nov 2003 A1
20030214714 Zheng Nov 2003 A1
20030223689 Koch et al. Dec 2003 A1
20030235381 Hunt Dec 2003 A1
20040000942 Kapteyn et al. Jan 2004 A1
20040037505 Morin Feb 2004 A1
20040042061 Islam et al. Mar 2004 A1
20040049552 Motoyama et al. Mar 2004 A1
20040101001 Bergmann et al. May 2004 A1
20040128081 Rabitz et al. Jul 2004 A1
20040134894 Gu et al. Jul 2004 A1
20040134896 Gu et al. Jul 2004 A1
20040160995 Sauter et al. Aug 2004 A1
20040226925 Gu et al. Nov 2004 A1
20040231682 Stoltz et al. Nov 2004 A1
20040233944 Dantus et al. Nov 2004 A1
20040263950 Fermann et al. Dec 2004 A1
20050008044 Fermann et al. Jan 2005 A1
20050018986 Argyros et al. Jan 2005 A1
20050035097 Stoltz Feb 2005 A1
20050036527 Khazaei et al. Feb 2005 A1
20050038487 Stoltz Feb 2005 A1
20050061779 Blumenfeld et al. Mar 2005 A1
20050065502 Stoltz Mar 2005 A1
20050067388 Sun et al. Mar 2005 A1
20050074974 Stoltz Apr 2005 A1
20050077275 Stoltz Apr 2005 A1
20050105865 Fermann et al. May 2005 A1
20050107773 Bergt et al. May 2005 A1
20050111073 Pan et al. May 2005 A1
20050111500 Harter et al. May 2005 A1
20050127049 Woeste et al. Jun 2005 A1
20050154380 DeBenedictis et al. Jul 2005 A1
20050163426 Fermann et al. Jul 2005 A1
20050167405 Stoltz et al. Aug 2005 A1
20050171516 Stoltz et al. Aug 2005 A1
20050171518 Stoltz et al. Aug 2005 A1
20050175280 Nicholson Aug 2005 A1
20050177143 Bullington et al. Aug 2005 A1
20050195726 Bullington et al. Sep 2005 A1
20050213630 Mielke et al. Sep 2005 A1
20050215985 Mielke et al. Sep 2005 A1
20050218122 Yamamoto et al. Oct 2005 A1
20050225846 Nati et al. Oct 2005 A1
20050226286 Liu et al. Oct 2005 A1
20050226287 Shah et al. Oct 2005 A1
20050232560 Knight et al. Oct 2005 A1
20050238070 Imeshev et al. Oct 2005 A1
20050253482 Kapps et al. Nov 2005 A1
20050259944 Anderson et al. Nov 2005 A1
20050265407 Braun et al. Dec 2005 A1
20050271094 Miller et al. Dec 2005 A1
20050271340 Weisberg et al. Dec 2005 A1
20060016891 Giebel et al. Jan 2006 A1
20060030951 Davlin et al. Feb 2006 A1
20060050750 Barty Mar 2006 A1
20060056480 Mielke et al. Mar 2006 A1
20060064079 Stoltz et al. Mar 2006 A1
20060067604 Bull et al. Mar 2006 A1
20060084957 Delfyett et al. Apr 2006 A1
20060093012 Singh et al. May 2006 A1
20060093265 Jia et al. May 2006 A1
20060120418 Harter et al. Jun 2006 A1
20060126679 Brennan et al. Jun 2006 A1
20060131288 Sun et al. Jun 2006 A1
20060187974 Dantus Aug 2006 A1
20060209908 Pedersen et al. Sep 2006 A1
20060210275 Vaissie et al. Sep 2006 A1
20060221449 Glebov et al. Oct 2006 A1
20060250025 Kitagawa et al. Nov 2006 A1
20060268949 Gohle et al. Nov 2006 A1
20070025728 Nakazawa et al. Feb 2007 A1
20070047965 Liu et al. Mar 2007 A1
20070064304 Brennan III Mar 2007 A1
20070098025 Hong et al. May 2007 A1
20070106416 Griffiths et al. May 2007 A1
20070121686 Vaissie et al. May 2007 A1
20070196048 Galvanauskas et al. Aug 2007 A1
20070229939 Brown et al. Oct 2007 A1
20070253455 Stadler et al. Nov 2007 A1
20070273960 Fermann et al. Nov 2007 A1
20080232407 Harter et al. Sep 2008 A1
20080240184 Cho et al. Oct 2008 A1
20090219610 Mourou et al. Sep 2009 A1
20090244695 Marcinkevicius et al. Oct 2009 A1
20090245302 Baird et al. Oct 2009 A1
20090257464 Dantus et al. Oct 2009 A1
20090273828 Waarts et al. Nov 2009 A1
20090297155 Weiner et al. Dec 2009 A1
20100040095 Mielke et al. Feb 2010 A1
20100118899 Peng et al. May 2010 A1
20100142034 Wise et al. Jun 2010 A1
Foreign Referenced Citations (16)
Number Date Country
214100 Mar 1987 EP
691563 Jan 1996 EP
1462831 Sep 2004 EP
8171103 Jul 1996 JP
11189472 Jul 1999 JP
2003181661 Jul 2003 JP
2003344883 Dec 2003 JP
2005174993 Jun 2005 JP
W09428972 Dec 1994 WO
WO2004105100 Dec 2004 WO
WO2004114473 Dec 2004 WO
WO2005018060 Feb 2005 WO
WO2005018061 Feb 2005 WO
WO2005018062 Feb 2005 WO
WO2005018063 Feb 2005 WO
WO2007034317 Mar 2007 WO
Provisional Applications (1)
Number Date Country
60700429 Jul 2005 US