Claims
- 1. An apparatus for measuring changes in thickness of a dielectric film comprising:a) a contact sensor for engaging a dielectric film and providing a direct measurement of the thickness of the dielectric film and a thickness value output relating to the direct measured thickness, b) a non-contact electrode assembly for measuring changes in the thickness of the dielectric film without engaging the dielectric film, c) means for mounting the contact sensor adjacent to the non-contact electrode assembly, d) means for automatically calibrating the non-contact electrode assembly using the thickness value output of the contact sensor for a reference thickness used to provide data concerning changes in thickness of the dielectric film as measured by the non-contact assembly.
- 2. The apparatus of claim 1 wherein: the film transport assembly comprises rollers for moving the film, an amplifier and variable speed motor assembly to drive the rollers for advancing the film adjacent the contact sensor between the first and second electrodes, a position feedback device to monitor motor speed and position of the rollers, and a controller to monitor and main the speed of the motor and stop and start the motor to position the film relative to the first and second electrodes.
- 3. The apparatus of claim 1 wherein: the contact sensor includes a film sensing member, and means for moving the film sensing member into engagement with the film.
- 4. The apparatus of claim 3 wherein: the means mounting the contact sensor adjacent the non-contact electrode assembly includes a film support plate having a top surface for supporting the film, and an arm connected to the plate supporting the contact sensor adjacent said top surface of the plate, said film sensing member being movable into engagement with the film on the surface of the plate.
- 5. The apparatus of claim 1 wherein: the non-contact electrode assembly comprises:a) a first electrode, b) a second electrode, c) a third electrode, d) said second and third electrodes being linearly aligned with each other and laterally spaced from each other and aligned with and spaced from the first electrode, e) guide means for preventing the film from passing between the first and third electrodes and allowing the film to pass between the first and second electrodes, and f) means electrically coupled to the second and third electrodes to cancel imbalances in the electrical signals sensed between the first and second electrodes with electrical signals sensed between the first and third electrodes caused by temperature, humidity or other fluctuations.
- 6. The apparatus in claim 5 including: means for adjusting the locations of the second and third electrodes relative, to the first electrode to adjust the space between the first electrode and the second and third electrodes.
- 7. The apparatus in claim 5 wherein: the second and third electrodes are linear members having substantially the same lengths.
- 8. The apparatus of claim 5 wherein: the linear members are cylindrical electrical conductors.
- 9. The apparatus of claim 5 wherein: the linear members are anally aligned and have adjacent spaced ends.
- 10. The apparatus of claim 5 wherein: the guide means comprise a pair of plates for preventing the film from passing between the first electrode and third electrode.
- 11. An apparatus for measuring changes in thickness of a film comprising:a) a first sensor for providing a direct measurement of the thickness of a film by contacting the film and generating reference thickness information relating to said direct measurement, b) a second sensor for measuring changes in the thickness of the film without contacting the film, c) means for moving the film relative to the first and second sensors, and d) means for automatically calibrating the second sensor using the reference thickness information of the first sensor as a film thickness reference to provide data concerning changes in thickness of the film as measured by the second sensor.
- 12. The apparatus of claim 11 wherein: the first sensor includes a film sensing member, and means operable to move the sensing member into engagement with the film.
- 13. The apparatus of claim 11 wherein: the second sensor comprises a first electrode, a second electrode, a third electrode, said second and third electrodes being linearly aligned with each other and laterally spaced from each other and aligned with and spaced from the first electrode, and means electrically coupled to the second and third electrodes to cancel imbalances in electrical signals sensed between the first and second electrodes with electrical signals between the first and third electrodes.
- 14. The apparatus of claim 11 wherein: the means for moving the film comprises rollers for moving the film, an amplifier, and a motor to drive the rollers for moving the film relative to the first and second sensors.
Parent Case Info
This appln claims the benefit of U.S. Provisional No. 60/067,171 filed Dec. 1, 1997.
US Referenced Citations (15)
Provisional Applications (1)
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Number |
Date |
Country |
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60/067171 |
Dec 1997 |
US |